CN208621031U - The more material multimembrane thickness calibrated bolcks of monomer - Google Patents
The more material multimembrane thickness calibrated bolcks of monomer Download PDFInfo
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- CN208621031U CN208621031U CN201820740561.9U CN201820740561U CN208621031U CN 208621031 U CN208621031 U CN 208621031U CN 201820740561 U CN201820740561 U CN 201820740561U CN 208621031 U CN208621031 U CN 208621031U
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Abstract
The more material multimembrane thickness calibrated bolcks of monomer, including planar substrates and film layer.It is few and can not trace to the source to solve more coating Film thickness standard types, manufacture and measurement difficulty are big, with the increase of the plating number of plies, the technical issues of measurement error from outer layer to inner layer will significantly increase, it proposes on comparatively ideal planar substrates surface, subregion is coated with the film layer of covering different materials and different-thickness, matrix surface has monofilm layer independent working region, by single vertical Dan Heng or orderly orthogonal arrangement in length and breadth, more plating tunics of single plating tunic of a variety of materials different-thickness, the different-thickness of different materials combination are formd on single matrix.Source tracing method common instrument is mainly contact pin type step instrument and optical film thickness meter, and step instrument is contact type measurement, and precision reaches 0.5% or so, and optical film thickness meter is non-contact measurement, and precision is up to 1%.
Description
Technical field
The utility model belongs to the metering of Modern Surface Engineering field more particularly to surface coating technique.
Background technique
Surface coating technique is that its functional characteristic weight in component of machine, electronic component is realized in Modern Surface Engineering field
Link is wanted, is that surface is modified and strengthened, equipment failure components repair a kind of common method of aspect.The thickness of overlay coating
It is the key index of coat quality, if coating is too thin, the requirement of component surface performance may be can not meet, table is not achieved
The purpose of surface treatment；If coating is too thick, the waste of material is not only caused, increased costs, it is excessive also to will cause coating internal stress,
The bond strength between coating and matrix is reduced, the especially surface treatment to components mating surface will more guarantee component surface
Size that treated and the design size of new product components are consistent, to meet fit tolerance requirement when product design.If plating
Thickness is uneven, also can generate adverse effect to a variety of mechanical and physical characters of coating.Therefore, in semiconductor, microelectronics, logical
It is particularly important to the measurement control of overlay coating thickness in the surface treatment of the components and electronic component in news field.
Coating is divided into single coating and more coating by structure, thickness of coating range generally from tens nanometers to tens micron not
Deng.The measurement method of single thickness of coating is more, and there are commonly weight method, coulometry, surface step consistency profiles, micro- metallographic methods, X
Fluorescent x ray spectroscopy x method etc.；More common measurement methods of coating film thickness have coulometry and X-ray fluorescence spectra analytic approach.Library
Logical sequence method is disruptive method, and practicability is restricted, and X-ray fluorescence spectra analytic approach is a kind of non-contact non-destructive side
Method, because of its fast and easy, precision is higher is widely used.
The measurement accuracy of X-ray fluorescence spectra analytic approach, the calibration depending on thickness of coating calibrated bolck to its error curve
Precision, at high cost currently, thickness of coating calibrated bolck (piece) almost relies on import, more coating Film thickness standard types are few and nothing
Method is traced to the source.
Summary of the invention
(1) it purpose of utility model: for the blank for solving existing more more coating Film thickness standards of material both at home and abroad, is plated for more
Tunic thickness magnitude disunity, without means of effectively tracing to the source, manufacture and measurement difficulty are big the problems such as, propose a kind of collection multiple material with it is more
Kind film thickness is in the standard structure design of one, operational characteristic and the thick high-precision tracing technology method of each tunic.
(2) technical solution:
The more material multimembrane thickness calibrated bolcks of monomer, matrix, film layer including plane certain material composition.The planar substrates are
More satisfactory planar substrates, on planar substrates surface, subregion is coated with the film layer of covering different materials and different-thickness, passes through Dan Zong
Dan Heng or orderly orthogonal arrangement in length and breadth, perhaps according to the radial arrangement of rice wordline or peace particular requirement layout arrangement, single
More plating tunics of single plating tunic of a variety of materials different-thickness, the different-thickness of different materials combination are formd on matrix.
Monofilm layer, the multiple film layer thickness of not same material, the film of different materials and different-thickness can be reappeared on same matrix
Layer, has monofilm layer independent working region in matrix surface, the region that the monofilm layer of different materials is overlapped can answer
Now more coating film thickness magnitudes.Precisely part coating technique application, makes film layer be covered on matrix surface, forms the film layer platform of rule
Rank, film layer step height are the geometric thickness of film layer, and the measurement of film thickness and tracing to the source is achieved by measuring step height.
(3) beneficial effect
The more material multimembrane thickness calibration blocks of monomer realize the standard for reappearing a variety of film thickness of multiple material on a standard
Magnitude, multivalue standard avoid conventional criteria device can only reappear homogenous material and single magnitude, it is at high cost, inconvenient to carry, make
With the deficiency of low efficiency, and the blank of domestic multimembrane standard is compensated for, is the more thickness Film thickness standard devices of the more materials of monomer
Batch production domesticization provides important technical basis, is the multiple materials multilayer film thickness measuring instruments such as x-ray fluorescence layer thickness meter
High-precision, which is traced to the source, reduces cost, improves measurement efficiency and measurement accuracy, meanwhile, it is also the calibration of other film thickness class error of measurement instrument
Technical Reference is provided with tracing to the source, there is important application value.
Detailed description of the invention
Fig. 1 is three film thickness structure of monomer；Fig. 2 is that monomer three plates material membrane structure；Fig. 3 is the more material multimembrane knots of monomer monomer
Structure；Fig. 4 is the double material two film constructions of monomer；Fig. 5 is film layer step structure；Fig. 6 is monomer monofilm multimembrane film thickness magnitude tracing
Figure；Fig. 7 is film thickness step profile scanning survey method.
Specific embodiment
The utility model is described in further details below with reference to preferred embodiment.
The utility model provides a kind of more material multimembrane thickness calibrated bolcks of monomer, including planar substrates and film layer.Relatively managing
On the planar substrates surface thought, subregion is coated with the film layer of covering different materials and different-thickness, passes through single vertical Dan Heng or orderly vertical
Horizontal orthogonal arrangement is laid out such as Fig. 1 and Fig. 2 example or by the radial arrangement of rice wordline such as Fig. 3 example or by particular requirement
Arrangement, formd on single matrix single plating tunic of a variety of materials different-thickness, the different-thickness of different materials combination it is more
Plate tunic.
Using a monomer multimembrane calibrated bolck, single coating film thickness can either be reappeared, and the more of double coating or more can be reappeared
Coating film thickness, meanwhile, design the film layer of different materials as needed, different materials and different-thickness can be combined into multiple material and
The more coating Film thickness standard devices of the monomer of multi-thickness.It is illustrated in figure 4 the monomer (copper/CU) by " well " character form structure development and design
Bi-material layers (chromium Cr, nickel) double coating Film thickness standard blocks, top layer are Cr layers, and Ni layers of middle layer, nominal thickness is 1 μm and 3 μm；
Workspace is divided into 1-8 square area, wherein 4, No. 5 square areas are Ni/Cu mono- coating film thickness workspace, difference is thickness
Degree is different, and 2, No. 7 square areas are Cr/Cu mono- coating film thickness workspace, and difference is thickness difference, 1,3,6, No. 8 square
Region is Cr/Ni/Cu bis- coating film thickness workspace, and difference is that the thickness difference collocation of two kinds of coating is different, can answer in total
Existing 8 kinds of different coating Film thickness standards.
Fig. 1 structure design focal point is that the more thickness of single material, Fig. 2 and Fig. 4 structure design focal point are more materials, Fig. 4
" well " shape structure is that more materials and more thickness are laid equal stress on.As material category increases, combination is more diversified, and structure also complicates,
In view of the technology difficulty of practical plating multilayer film production thickness and the demand of practical application, the thickness specification of monomer multimembrane is usually no more than
3 layers, material category is no more than 3 kinds and is advisable.
Monofilm layer, the multiple film layer thickness of not same material, the film of different materials and different-thickness can be reappeared on same matrix
Layer, has monofilm layer independent working region in matrix surface, the region that the monofilm layer of different materials is overlapped can answer
Now more coating film thickness magnitudes.Precisely part coating technique application, makes film layer be covered on matrix surface, forms the film layer platform of rule
The height T1 and T2 of rank, such as Fig. 5, left side material and the right material is different, and the film layer step height is that the geometry of film layer is thick
Degree, the measurement of film thickness and trace to the source by measure step height be achieved, the transitive relation such as Fig. 6 that traces to the source of film thickness magnitude.
Since the film strips of coating film thickness are wider, thickness change is different, it is desirable that measuring instrument should have a wide range of, high resolution
With high-precision feature, common instrument is mainly contact pin type step instrument and optical film thickness meter.The step instrument is contact type measurement
Method, micron order stylus radius, milligram grade measuring force, to mesostructure high sensitivity, by scanning survey step profile,
As shown in fig. 7, analysis processing two-dimensional silhouette curve calculates step height, high sensor, resolving power is up to Subnano-class
Not, measurement accuracy is up to 0.5% or so；The optical film thickness meter is non-contact optical method, and nanoscale resolving power measures hot spot
Diameter is in 10 microns, and the light probe of no dynamometry measures scanning to film layer step 3 d surface topography, at analysis
Reason and reconstruction 3 d surface topography, analytical calculation film layer height, measurement accuracy is up to 1%.
The more material multimembrane thickness calibration blocks of monomer are a kind of multivalue standards, are that different materials have been coated on single matrix surface
The film thickness for expecting multi-thickness realizes the typical magnitude for reappearing a variety of film thickness of multiple material on a standard, multivalue standard
Device, which avoids conventional criteria device, can only reappear that homogenous material and single magnitude, at high cost, inconvenient to carry, service efficiency is low not
Foot.By improvement matrix surface processing quality, the reproducibility of tracing to the source of the more thickness Film thickness standard magnitudes of the more materials of monomer will be promoted,
The accurate unification for ensuring film thickness magnitude, more preferably meet electronics, communication, solar energy manufacture, nuclear physics test film thickness trace to the source demand.
The design and applications well prospect of the more thickness film thickness of the more materials of monomer, compensate for the blank of domestic multimembrane standard, are that monomer is more
The batch production domesticization of the more thickness Film thickness standard devices of material provides important technical basis, is that x-ray fluorescence layer thickness meter etc. is a variety of
The high-precision of material multilayer film thickness measuring instrument, which is traced to the source, reduces cost, improves measurement efficiency and measurement accuracy, meanwhile, it is also other
Film thickness class error of measurement instrument, which is calibrated and traced to the source, provides Technical Reference, has important application value.
The above content is the explanations for the preferred embodiment created to the utility model, can help those skilled in the art
It is more fully understood by the technical solution of the utility model creation.But these embodiments are merely illustrative, and it cannot be said that originally
The specific embodiment that utility model is created is only limitted to the explanation of these embodiments.Technical field is created to the utility model
Those of ordinary skill for, without departing from the concept of the present invention, several simple deductions can also be made
And transformation, it all shall be regarded as belonging to the protection scope of the utility model creation.
Claims (3)
1. the more material multimembrane thickness calibrated bolcks of monomer, it is characterised in that: including planar substrates, film layer；The planar substrates are ideal
Planar substrates；There are many different materials and thickness for the film layer；
The film layer arrangement mode has single vertical single horizontally-arranged column, orderly orthogonal arrangement in length and breadth, according to the radial arrangement of rice wordline or peace
The various arrangement mode of provisioning request layout arrangement；
The thicknesses of layers specification is usually no more than three layers.
2. the more material multimembrane thickness calibrated bolcks of monomer according to claim 1, which is characterized in that the film layer by different materials and
The coating of different-thickness forms, and according to different materials, multiple subregions are arranged in the coating collocation of different thickness.
3. the more material multimembrane thickness calibrated bolcks of monomer according to claim 1, which is characterized in that the measurement of the film thickness and trace to the source
It is realized by measurement film layer step height.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810160110 | 2018-02-26 | ||
| CN2018101601102 | 2018-02-26 |
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| Publication Number | Publication Date |
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| CN208621031U true CN208621031U (en) | 2019-03-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820740561.9U Expired - Fee Related CN208621031U (en) | 2018-02-26 | 2018-05-18 | The more material multimembrane thickness calibrated bolcks of monomer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020215820A1 (en) * | 2019-04-23 | 2020-10-29 | 东莞市安达自动化设备有限公司 | Multifunctional automatic detection device for coating quality of pcb |
| CN113091662A (en) * | 2021-04-02 | 2021-07-09 | 中国计量科学研究院 | Self-supporting multi-material coating thickness standard suite and preparation method thereof |
-
2018
- 2018-05-18 CN CN201820740561.9U patent/CN208621031U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020215820A1 (en) * | 2019-04-23 | 2020-10-29 | 东莞市安达自动化设备有限公司 | Multifunctional automatic detection device for coating quality of pcb |
| CN113091662A (en) * | 2021-04-02 | 2021-07-09 | 中国计量科学研究院 | Self-supporting multi-material coating thickness standard suite and preparation method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190319 Termination date: 20200518 |