CN208607429U - A kind of processing procedure chamber and its visualization device - Google Patents
A kind of processing procedure chamber and its visualization device Download PDFInfo
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- CN208607429U CN208607429U CN201820823678.3U CN201820823678U CN208607429U CN 208607429 U CN208607429 U CN 208607429U CN 201820823678 U CN201820823678 U CN 201820823678U CN 208607429 U CN208607429 U CN 208607429U
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- processing procedure
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- chamber
- lens barrel
- procedure chamber
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Abstract
The utility model discloses a kind of visualization devices for processing procedure chamber, it include: optical frames, optical frames includes at least: lens barrel, and lens barrel has one can be sealedly connected on the outer wall of processing procedure chamber, and enables lens barrel relative to the shaft of the outer wall progress multi-angle rotary of processing procedure chamber；First lens；Second lens, in which: outer wall of the lens barrel by shaft relative to processing procedure chamber carries out multi-angle rotary, passes through the situation of the reflection of the light of the first lens and the second lens and the light transmission amplification observation intracavitary portion's different location of processing procedure；First lens and positioned at processing procedure chamber interior side end lens barrel resistant to plasma bombardment heat treatment and high temperature resistant.The invention also discloses a kind of processing procedure chambers.The processing procedure chamber and its visualization device for implementing the utility model can amplify the situation of the observation intracavitary portion's different location of processing procedure, can carry out angle adjustment, increase observation visual angle；Structure is simplified, and convenient for operation, reduces cost.
Description
Technical field
The utility model relates to panel production field more particularly to a kind of processing procedure chambers and its visualization device.
Background technique
In prior art LTPS industry, dry etching equipment is reserved on processing procedure chamber (Process Chamber:PC) side wall
One piece of observation window, the convenient situation observed in the case where keeping mum in PC.Observation window on existing board is one piece fixed
Plane sapphire glass, specifically when observation, personnel hold flashlight and carry out situation in observation confirmation PC by observation window.Such sight
The mode of examining is:
1, the region that can not observe special angle, there are certain sight blind areas；
2, human eyesight is limited, can not high-resolution the actual state observed in PC；
3, flashlight tool auxiliary observation is needed.
Utility model content
Technical problem to be solved by the utility model is to provide a kind of processing procedure chamber and its visualization device, Neng Goufang
The situation of the big observation intracavitary portion's different location of processing procedure, can carry out angle adjustment, increase observation visual angle；Structure is simplified, convenient for operating,
Reduce cost.
In order to solve the above-mentioned technical problem, the utility model provides a kind of visualization device of processing procedure chamber, to not
The intracavitary situation of processing procedure is observed in the case where opening processing procedure chamber, comprising: making on processing procedure cavity outer wall to observe can be installed in
The optical frames of the intracavitary different location situation of journey, optical frames include at least: lens barrel, and lens barrel has one can be sealedly connected on processing procedure chamber
Outer wall on, and enable lens barrel relative to processing procedure chamber outer wall carry out multi-angle rotary shaft；It is installed in lens barrel and is located at system
First lens at journey chamber interior side end；And it is installed in the second lens that lens barrel is located at a side outside processing procedure chamber, in which: mirror
Outer wall of the cylinder by shaft relative to processing procedure chamber carries out multi-angle rotary, passes through the first lens and the second lens amplification observation processing procedure
The situation of the different location in intracavitary portion.
Wherein, the lens barrel positioned at processing procedure chamber interior side end uses material system identical with the intracavitary anode workpiece of processing procedure
At.
Wherein, the outside of the first lens reinforces sapphire glass.
Wherein, further includes: be installed in the lighting device that lens barrel is located at processing procedure chamber interior side end.
Wherein, the externally reinforced sapphire glass of lighting device.
Wherein, further includes: can be installed on processing procedure cavity outer wall to be located at processing procedure chamber outside a side lens barrel
The shield protected with the second lens.
Wherein, shield is body structure, and what the side of shield was set as to be docked on processing procedure cavity outer wall first opens
Mouthful, the other side of cabinet is the second opening, and the protection cover-cap of activity open or close is capable of in the second opening connection one.
Wherein, further includes: at least one observation window of optical frames neighbour side on processing procedure cavity outer wall is set.
Wherein, lens barrel is double-layer structure, and the circuit trace of lighting device is arranged in double-layer structure, the switch of lighting device
It is located at the side that lens barrel is located at outside processing procedure chamber.
In order to solve the above technical problems, the invention also discloses a kind of systems with above-mentioned processing procedure chamber visualization device
Journey chamber.
Implement processing procedure chamber and its visualization device provided by the utility model, has the following beneficial effects: visual makeup
The lens barrel set can carry out multi-angle rotary relative to the outer wall of processing procedure chamber by shaft, pass through the first lens and the second lens
Light reflection and light transmission can amplify the situation of the observation intracavitary portion's different location of processing procedure, and it is different can to amplify the intracavitary portion of observation processing procedure
The situation of position can carry out angle adjustment, increase observation visual angle；Structure is simplified, and convenient for operation, reduces cost.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model embodiment processing procedure chamber.
Fig. 2 is structural schematic diagram of the utility model embodiment for the optical frames of processing procedure chamber visualization device.
Fig. 3 is image-forming principle structural representation of the utility model embodiment for the optical frames of processing procedure chamber visualization device
Figure.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
Every other embodiment obtained, fall within the protection scope of the utility model.
It as shown in Figure 1-Figure 3, is the embodiment one of the utility model processing procedure chamber.
Processing procedure chamber in the present embodiment, comprising: processing procedure chamber ontology 1 and be arranged on processing procedure chamber ontology 1 for processing procedure chamber
Visualization device.Processing procedure chamber ontology 1 is formed by 11 enclosing of muti-piece processing procedure cavity outer wall.Processing procedure chamber ontology 1 in the present embodiment is
It is cubic, processing procedure cavity outer wall 11 be equipped at least one piece of observation window 11a, the effect of observation window 11a is: for processing procedure chamber can
Depending on makeup set break down when, such as: when lighting device failure, lens failure, can still observe the intracavitary reality of processing procedure
Situation, it can also be used to observe the working condition of visualization device.
The visualization device of processing procedure chamber passes through to observe the intracavitary situation of processing procedure in the case where not opening processing procedure chamber
Visualization device is set, the quantity of setting observation window 11a can be reduced, specific to the present embodiment, by the way that visualization device is arranged,
The observation window 11a that setting 3-4 block can be reduced, since observation window 11a is made using plane sapphire glass, sapphire glass list
Valence is calculated by 6K/ block, reduces the quantity of observation window 11a, it is meant that the reduction of cost.
Further, the visualization device of processing procedure chamber includes: that can be installed in making on processing procedure cavity outer wall 11 to observe
The optical frames 2 of the intracavitary different location situation of journey, optical frames 2 include at least: lens barrel 21, and lens barrel 21 has one can be tightly connected
On the outer wall 11 of processing procedure chamber, and enable lens barrel 21 relative to the shaft O of the progress multi-angle rotary of outer wall 11 of processing procedure chamber；Dress
It is located at the first lens 22 that lens barrel 21 is located on processing procedure chamber interior side end 21a；And it is installed in lens barrel 21 and is located at outside processing procedure chamber
The second lens of one side 21b of portion, in which: lens barrel 21 carries out multi-angle rotary relative to the outer wall 11 of processing procedure chamber by shaft O,
Pass through the reflection of the light of the first lens 22 and the second lens 23 and the light transmission amplification observation intracavitary portion of processing procedure (22 side of the first lens)
The situation of different location；First lens 22 and positioned at processing procedure chamber interior side end 21 resistant to plasma of lens barrel bombardment heat treatment and it is resistance to
High temperature.
When it is implemented, optical frames 2 passes through reasonable design associated lens, and such as: different lens numbers and position are set
It sets, realizes that amplification distant objects enable observer to see the smaller details of angular distance clearly, be collected into the light more much bigger than pupil diameter
Beam is sent into human eye and makes one to see the function for the dark weak object that can't see originally.21 section of lens barrel in the present embodiment is circle, if
Set the opposite end that two pieces of lens are located at lens barrel 21.Wherein: lens barrel 21 has rotation function, and observer is enable preferably to see
The case where examining processing procedure intracavitary different location.Wherein: the rotation function is realized by such as flowering structure, and lens barrel 21 has being capable of phase
The shaft O of multi-angle rotary is carried out for the outer wall 11 of processing procedure chamber, shaft O and the junction of the outer wall 11 of processing procedure chamber have height
Airtightness, lens barrel 21 carry out free angle rotation relative to the outer wall 11 of processing procedure chamber by shaft O, make the first lens 22 and second
The direction of lens 23 adjusts accordingly, and passes through the first lens 22 and the corresponding optical amplifier Performance Observation system of the second lens 23
Situation inside journey chamber.
First lens 22 are installed in lens barrel 21 and are located on processing procedure chamber interior side end 21a, can be in the specific implementation
One object lens, the second lens 23 are installed in lens barrel 21 and are located at outside processing procedure chamber on a side 21b, in the specific implementation can be one
Eyepiece.Certainly, in other embodiment, the lens of more polymorphic type sum number amount can also be arranged in lens barrel 21, make to meet related
Observation need.
The intracavitary workpiece contact atmosphere of processing procedure is used for the service life and impacts in order to prevent, is mounted on processing procedure cavity outer wall
Optical frames 2 cannot often dismantle, i.e., being in the lens barrel 21 in the intracavitary portion of processing procedure and the first lens 22 during processing procedure will receive
The bombardment of ion, another part DRY processing procedure are high temperature process, and lens barrel 21 and the first lens 22 is also required to have high temperature resistance.?
That is the optical frames 2 in the present embodiment also has resistant to plasma bombardment heat treatment and performance resistant to high temperature accordingly, have simultaneously
There is certain corrosion resistance.Wherein: above-mentioned performance can be by that will be located at 21 use of lens barrel and system at processing procedure chamber interior side end
The identical material of the intracavitary anode workpiece of journey is made, and the outside of the first lens 22 reinforces sapphire glass, reinforces the modes such as protection
It realizes.
Further, in the present embodiment around the first lens 22, that is, in lens barrel 21 it is located at processing procedure chamber interior side
End is installed with a lighting device 24.The effect of installing lighting device 24 is: since processing procedure is intracavitary without lighting, in traditional design
Middle personnel observe processing procedure chamber internal state Shi Douxu every time and hold flashlight by observation window to observe.In the present embodiment, in mirror
Cylinder 21 is located at processing procedure chamber interior side end dress installation headlamp, and same sapphire glass of reinforcing protects outside headlamp.Because
Headlamp and the first lens 22 are close, so headlamp also turns to this when the first lens 22 turn to the position to be observed
Position illuminates required observation position.
Preferably, lens barrel 21 is double-layer structure, and the circuit trace of lighting device 24 is arranged in double-layer structure, lighting device
Switch 241 be located at the side that lens barrel 21 is located at outside processing procedure chamber.In addition, the replacement of headlamp battery is also disposed at lens barrel 21
A side outside processing procedure chamber, so facilitates staff to replace it.
Further, in the present embodiment further include: can be installed on processing procedure cavity outer wall 11 to be located at processing procedure chamber
The shield 3 that the lens barrel 21 and the second lens 23 of an external side are protected.The effect of shield 3 is: due to optical frames 2
Second lens 23 and the exposed outside in processing procedure chamber of part lens barrel 21 are located in an atmosphere, the part lens barrel 21 and the second lens 23
Not in the same plane with the outer wall 11 of processing procedure chamber.Observer is possible to touch second thoroughly when passing through from processing procedure cavity outer wall 11
Mirror 23 and lens barrel 21 to cause movement of the lens barrel 21 at shaft O, the airtightness at shaft O may with access times by
To influence.In order to reduce non-normal use to the damage at shaft O airtight connection, to the lens barrel for being located at a side outside processing procedure chamber
21 and second shield 3 that is protected of lens 23.
Preferably, shield 3 is body structure, and the side of shield 3 is set as to be docked on processing procedure cavity outer wall 11
First opening 31, the other side of cabinet are the second opening 32, and the protection of activity open or close is capable of in 32 connection one of the second opening
The cover 33.In this way, can be observed by the second lens 23 when opening protection cover-cap 33.
Processing procedure chamber and its visualization device provided by the utility model in the specific implementation, due to the lens barrel of optical frames 2
21 seal and are rotatably connected on the outer wall 11 of processing procedure chamber, so that lens barrel 21 is carried out relative to the outer wall 11 of processing procedure chamber more
The rotation of angle, the first lens 22 are installed in lens barrel 21 and are located on processing procedure chamber interior side end 21a, and the second lens 23 are installed in mirror
Cylinder 21 is located at outside processing procedure chamber on a side 21b, and observer can use the optical frames 2 of this special designing to observe processing procedure chamber
Interior situation, thus the more carefully intracavitary actual state of observation processing procedure chamber, and the lens barrel 21 of rotary optical mirror 2 can be passed through
Come the case where observing processing procedure chamber intracavitary different location.
Implement processing procedure chamber and its visualization device provided by the utility model, has the following beneficial effects:
The first, the lens barrel of visualization device can carry out multi-angle rotary relative to the outer wall of processing procedure chamber by shaft, pass through
The reflection of the light of first lens and the second lens and light transmission can amplify the situation of the observation intracavitary portion's different location of processing procedure, Neng Gou
The intracavitary actual state everywhere of processing procedure is more clearly observed in the case where keeping mum, and is reduced because judging by accident caused by human eyesight, is kept away
Exempt from beginning to speak for unnecessary processing procedure chamber, reduces the influence begun to speak to cost and production capacity；It can be avoided simultaneously and frequently begin to speak to influence work
The service life of part.
The second, the lens barrel at processing procedure chamber interior side end is made using material identical with the intracavitary anode workpiece of processing procedure, the
The outside of one lens, which reinforces sapphire glass, to be made to bombard heat treatment and performance resistant to high temperature with resistant to plasma.
Third, lens barrel are located at processing procedure chamber interior side end and are installed with lighting device, same reinforcing sapphire outside headlamp
Glass protects；Lens barrel is double-layer structure, and the circuit trace of lighting device is arranged in double-layer structure, and the switch of lighting device is set
It is located at the side outside processing procedure chamber in lens barrel, makes to be more convenient to operate, increases practicability.
4th, shield protects the lens barrel and the second lens that are located at a side outside processing procedure chamber, extends processing procedure chamber
And its service life of visualization device, it can reduce cost consumption.
Claims (10)
1. a kind of visualization device of processing procedure chamber, to observe the intracavitary situation of processing procedure in the case where not opening processing procedure chamber,
It is characterized in that, comprising: the optical frames to observe the intracavitary different location situation of processing procedure that can be installed on processing procedure cavity outer wall, institute
Optical frames is stated to include at least:
Lens barrel, the lens barrel has one can be sealedly connected on the outer wall of the processing procedure chamber, and keeps the lens barrel opposite
The shaft of multi-angle rotary is carried out in the outer wall of the processing procedure chamber；
It is installed in the first lens that the lens barrel is located at processing procedure chamber interior side end；And
It is installed in the second lens that the lens barrel is located at a side outside processing procedure chamber, in which:
Outer wall of the lens barrel by the shaft relative to the processing procedure chamber carries out multi-angle rotary, passes through first lens
Amplify the situation of the different location in the observation intracavitary portion of processing procedure with second lens.
2. the visualization device of processing procedure chamber as described in claim 1, which is characterized in that be located at the processing procedure chamber interior side end
The lens barrel be made using material identical with the intracavitary anode workpiece of the processing procedure.
3. the visualization device of processing procedure chamber as described in claim 1, which is characterized in that the outside of first lens reinforces blue
Cameo glass.
4. the visualization device of processing procedure chamber as described in any one of claims 1-3, which is characterized in that further include: it is installed in institute
State the lighting device that lens barrel is located at the processing procedure chamber interior side end.
5. the visualization device of processing procedure chamber as claimed in claim 4, which is characterized in that the externally reinforced indigo plant of the lighting device
Cameo glass.
6. the visualization device of processing procedure chamber as described in any one of claims 1-3, which is characterized in that further include: it can install
On processing procedure cavity outer wall to be protected the lens barrel and second lens that are located at a side outside processing procedure chamber
Shield.
7. the visualization device of processing procedure chamber as claimed in claim 6, which is characterized in that the shield is body structure, institute
The side for stating shield is set as the can be docked on the processing procedure cavity outer wall first opening, and the other side of the cabinet is second
The protection cover-cap of activity open or close is capable of in opening, the second opening connection one.
8. the visualization device of processing procedure chamber as described in any one of claims 1-3, which is characterized in that further include: it is arranged in institute
State at least one observation window of optical frames neighbour side on processing procedure cavity outer wall.
9. the visualization device of processing procedure chamber as claimed in claim 4, which is characterized in that the lens barrel is double-layer structure, described
The circuit trace of lighting device is arranged in the double-layer structure, and the switch of the lighting device is located at the lens barrel and is located at processing procedure
A side outside chamber.
10. a kind of processing procedure chamber, which is characterized in that the processing procedure chamber includes such as the described in any item processing procedure chambers of claim 1-9
Visualization device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820823678.3U CN208607429U (en) | 2018-05-30 | 2018-05-30 | A kind of processing procedure chamber and its visualization device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820823678.3U CN208607429U (en) | 2018-05-30 | 2018-05-30 | A kind of processing procedure chamber and its visualization device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208607429U true CN208607429U (en) | 2019-03-15 |
Family
ID=65661815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820823678.3U Active CN208607429U (en) | 2018-05-30 | 2018-05-30 | A kind of processing procedure chamber and its visualization device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208607429U (en) |
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2018
- 2018-05-30 CN CN201820823678.3U patent/CN208607429U/en active Active
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