CN208604241U

CN208604241U - A kind of polycrystalline silicon ingot or purifying furnace

Info

Publication number: CN208604241U
Application number: CN201820585041.5U
Authority: CN
Inventors: 赵永雷; 周磊; 朱俊杰
Original assignee: HUNAN JINSHI NEW MATERIAL Co Ltd
Current assignee: HUNAN JINSHI NEW MATERIAL Co Ltd
Priority date: 2018-04-24
Filing date: 2018-04-24
Publication date: 2019-03-15
Anticipated expiration: 2028-04-24

Abstract

The utility model discloses a kind of polycrystalline silicon ingot or purifying furnaces, including furnace body and gas cleaning plant, it further include the air accumulator for storing inert gas, it is provided with the escape pipe of connection furnace interior on furnace body and is connected by the inlet end of escape pipe and gas cleaning plant, gas cleaning plant includes the first molecular sieve drum and the second molecular sieve drum and the first molecular sieve drum and the second molecular sieve drum structure are identical, the gas outlet of air accumulator connects the inside of cylinder furnace body by air inlet pipe, the air inlet of air accumulator is connected with return header, and the outlet side of gas cleaning plant is connected by return header.This kind of polycrystalline silicon ingot or purifying furnace is dried the mixed gas of furnace interior by the first molecular sieve drum of setting and the second molecular sieve drum alternate cycles, it is simple and convenient, the energy that regenerating molecular sieve needs derives from the high-temperature gas of furnace interior, energy consumption and material cost are saved, the gas of furnace interior helps to improve the quality of polysilicon product after purification.

Description

A kind of polycrystalline silicon ingot or purifying furnace

Technical field

The utility model relates to production of polysilicon apparatus field, specially a kind of polycrystalline silicon ingot or purifying furnace.

Background technique

Polycrystalline silicon ingot or purifying furnace is mainly used for the mass production of solar-grade polysilicon ingot, it is solidifying using advanced polysilicon orientation Gu technology will orient condensation-crystallization by special process after silicon material high-temperature fusion, to reach manufacture of solar cells polycrystalline The requirement of silicon quality is a kind of suitable for long time continuous working, the intelligence of high-precision, high reliability, high degree of automation Mass production equipment.

When carrying out production of polysilicon, need to utilize to being vacuumized in furnace and being passed through inert gas as protection gas Graphite heater heats furnace body, be first graphite member (including heater, crucible plate, heat exchange platform etc.), thermal insulation layer, Then the moisture evaporation on the surfaces such as silicon raw material is slowly heated to silicon raw material thawing again, though due to the moisture after evaporation during being somebody's turn to do So departing from body surface but it is still in furnace interior, therefore easily influences the quality of production of polysilicon.

To solve the above problems, therefore it is proposed that a kind of polycrystalline silicon ingot or purifying furnace.

Utility model content

The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of polycrystalline silicon ingot or purifying furnace, In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:

A kind of polycrystalline silicon ingot or purifying furnace of the utility model, including furnace body and gas cleaning plant are provided with connection on furnace body The escape pipe of furnace interior is simultaneously connected by the inlet end of escape pipe and gas cleaning plant, and gas cleaning plant includes first point Sub- screen drum and the second molecular sieve drum and the first molecular sieve drum and the second molecular sieve drum structure are identical.

First molecular sieve drum is internally provided with the first back-shaped pipe, and one end of the first back-shaped pipe connects air intake branch one and air inlet It is provided with valve one on branch pipe one, the other end is connected to the inside of the second molecular sieve drum by connecting tube one, and the two of the first molecular sieve drum It is respectively arranged with the reflux branch pipe one and exhaust pipe one being connected to inside the first molecular sieve drum on the outside of end, is arranged on the branch pipe one that flows back There is valve two, valve three is provided on exhaust pipe one.

Similarly the second molecular sieve drum is internally provided with the second back-shaped pipe, one end connection air intake branch two of the second back-shaped pipe and Valve four is provided on air intake branch two, the other end is connected to the inside of the first molecular sieve drum, the second molecular sieve drum by connecting tube two Both ends on the outside of be respectively arranged with connection the second molecular sieve drum inside reflux branch pipe two and exhaust pipe two, flow back branch pipe two on It is provided with valve five, valve six is provided on exhaust pipe two.

As a kind of preferred embodiment of the utility model, polycrystalline silicon ingot or purifying furnace further include for storing inert gas Air accumulator, the gas outlet of air accumulator connects the inside of cylinder furnace body by air inlet pipe, and air pump is provided in air inlet pipe.

As a kind of preferred embodiment of the utility model, the air inlet of air accumulator is connected with return header, reflux branch Pipe one and reflux branch pipe two are connect with return header.

As a kind of preferred embodiment of the utility model, air intake branch one and air intake branch two connect with escape pipe It connects.

Compared with prior art, the utility model beneficial effect achieved is: passing through the first molecular sieve drum of setting and the The mixed gas of furnace interior is dried in two molecular sieve drum alternate cycles, and each valve need to be only controlled when being used alternatingly Opening and closing, it is simple and convenient, when one of molecular sieve drum works the regeneration of another molecular sieve drum, regenerate the energy of needs Amount derives from the high-temperature gas of furnace interior, without the input of outside heat, saves energy consumption, and purified gas recycling follows Ring saves cost using material resource loss is reduced, and the gas of furnace interior helps to improve polysilicon product after purification Quality.

Detailed description of the invention

Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:

Fig. 1 is a kind of general assembly structural schematic diagram of polycrystalline silicon ingot or purifying furnace of the utility model.

In figure: 1- furnace body；2- air accumulator；The first molecular sieve drum of 3-；31- air intake branch one；32- valve one；33- first is returned Shape pipe；34- connecting tube one；35- reflux branch pipe one；36- valve two；37- exhaust pipe one；38- valve three；The second molecular sieve drum of 4-； 41- air intake branch two；42- valve four；The second back-shaped pipe of 43-；44- connecting tube two；45- reflux branch pipe two；46- valve five；47- exhaust Pipe two；48- valve six；5- escape pipe；6- return header；7- air inlet pipe；8- air pump.

Specific embodiment

It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.

Embodiment

As shown in Figure 1, a kind of polycrystalline silicon ingot or purifying furnace, including furnace body 1 and gas cleaning plant, it further include lazy for storing Property gas air accumulator 2, gas cleaning plant includes the first molecular sieve drum 3 and the second molecular sieve drum 4 and 3 He of the first molecular sieve drum Second molecular sieve drum, 4 structure is identical.

First molecular sieve drum 3 is internally provided with the first back-shaped pipe 33, and one end of the first back-shaped pipe 33 connects air intake branch one 31 and air intake branch 1 on be provided with valve 1, the other end is connected to the inside of the second molecular sieve drum 4 by connecting tube 1, The reflux branch pipe 1 and exhaust pipe being respectively arranged on the outside of the both ends of first molecular sieve 3 inside the first molecular sieve drum 3 of connection 1, flow back branch pipe 1 on be provided with valve 2 36, valve 3 38 is provided on exhaust pipe 1.Similarly in the second molecular sieve drum 4 Portion is provided with the second back-shaped pipe 43, is provided on one end connection air intake branch 2 41 and air intake branch 2 41 of the second back-shaped pipe 43 Valve 4 42, the other end are connected to the inside of the first molecular sieve drum 3, the both ends outside of the second molecular sieve drum 4 by connecting tube 2 44 It is respectively arranged with the reflux branch pipe 2 45 and exhaust pipe 2 47 being connected to inside the second molecular sieve drum 4, is arranged on the branch pipe 2 45 that flows back There is valve 5 46, valve 6 48 is provided on exhaust pipe 2 47.

In the present embodiment, the inert gas in air accumulator 2 is delivered to inside furnace body 1 by air pump 8 by air inlet pipe 7, is passed through The moisture evaporation inside heating element heats rear furnace body 1 inside furnace body 1, when the first molecular sieve drum 3 is in work dress state, Valve 4 42, valve 2 36 and valve 6 48 are in opening state at this time, and valve 1, valve 3 38 and valve 5 46 are in closed state, furnace body 1 Internal high-temperature mixed gas enters air intake branch 2 41 by escape pipe 5, subsequently into the second back-shaped pipe 43, high-temperature gas mixture Body carries out high temperature regeneration to the molecular sieve in the second molecular sieve drum 4 in the second back-shaped pipe 43, and molecular sieve is heated its internal absorption Moisture evaporation be discharged from exhaust pipe 2 47, high-temperature mixed gas is after the cooling of the second back-shaped pipe 43, by connecting tube two 44 enter the inside of the first molecular sieve drum 3, and the moisture inside mixed gas is absorbed by the molecular sieve inside the first molecular sieve drum 3, The inert gas of dry decontamination enters return header 6 by reflux branch pipe 1, subsequently into air accumulator 2, is recycled；

When the first molecular sieve drum 3 saturation, the second molecular sieve drum 4 is lived again completions, with should the second molecular sieve drum 4 work When, valve 1, valve 3 38 and valve 5 46 are in opening state at this time, and valve 4 42, valve 2 36 and valve 6 48 are in closed state, furnace High-temperature mixed gas inside body 1 enters air intake branch 1 by escape pipe 5, and subsequently into the first back-shaped pipe 33, high temperature is mixed It closes gas and high temperature regeneration is carried out to the molecular sieve in the first molecular sieve drum 3 in the first back-shaped pipe 33, molecular sieve is heated inside it The moisture evaporation of absorption is discharged from exhaust pipe 1, and high-temperature mixed gas is after the cooling of the first back-shaped pipe 33, by connecting Pipe 1 enters the inside of the second molecular sieve drum 4, and the moisture inside mixed gas is inhaled by the molecular sieve inside the second molecular sieve drum 4 It receives, the inert gas of dry decontamination enters return header 6 by reflux branch pipe 2 45, and subsequently into air accumulator 2, circulation makes With.

The advantages of the utility model: this kind of polycrystalline silicon ingot or purifying furnace passes through the first molecular sieve drum 3 of setting and the second molecular sieve drum The mixed gas of furnace interior is dried in 4 alternate cycles, and the opening and closing of each valve need to be only controlled when being used alternatingly, Simple and convenient, when one of molecular sieve drum works the regeneration of another molecular sieve drum, the energy for regenerating needs is derived from High-temperature gas inside furnace body 1 saves energy consumption without the input of outside heat, and purified gas recycles Material resource loss is reduced, cost is saved, the gas inside furnace body 1 helps to improve the quality of polysilicon product after purification.

Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on, It should be included within the scope of protection of this utility model.

Claims

1. a kind of polycrystalline silicon ingot or purifying furnace, including furnace body (1) and gas cleaning plant, it is characterised in that: set on the furnace body (1) It is equipped with the internal escape pipe (5) of connection furnace body (1) and is connect by escape pipe (5) with the inlet end of gas cleaning plant, it is described Gas cleaning plant includes the first molecular sieve drum (3) and the second molecular sieve drum (4) and the first molecular sieve drum (3) and the second molecular sieve Cylinder (4) structure is identical；

First molecular sieve drum (3) is internally provided with the first back-shaped pipe (33), one end connection of first back-shaped pipe (33) Valve one (32) is provided on air intake branch one (31) and air intake branch one (31), the other end passes through connecting tube one (34) connection second The both ends outside of the inside of molecular sieve drum (4), first molecular sieve drum (3) is respectively arranged with the first molecular sieve drum of connection (3) internal reflux branch pipe one (35) and exhaust pipe one (37) are provided with valve two (36) on the reflux branch pipe one (35), described Valve three (38) is provided on exhaust pipe one (37)；

Similarly the second molecular sieve drum (4) is internally provided with the second back-shaped pipe (43), one end connection of second back-shaped pipe (43) Valve four (42) is provided on air intake branch two (41) and air intake branch two (41), the other end passes through connecting tube two (44) connection first The both ends outside of the inside of molecular sieve drum (3), second molecular sieve drum (4) is respectively arranged with the second molecular sieve drum of connection (4) internal reflux branch pipe two (45) and exhaust pipe two (47) are provided with valve five (46) on the reflux branch pipe two (45), described Valve six (48) is provided on exhaust pipe two (47).

2. polycrystalline silicon ingot or purifying furnace as described in claim 1, which is characterized in that the polycrystalline silicon ingot or purifying furnace further includes for storing up The air accumulator (2) of inert gas is deposited, the gas outlet of the air accumulator (2) connects the inside of cylinder furnace body (1) by air inlet pipe (7), and Air pump (8) are provided in air inlet pipe (7).

3. polycrystalline silicon ingot or purifying furnace as claimed in claim 2, which is characterized in that the air inlet of the air accumulator (2) is connected with back It flows general pipeline (6), the reflux branch pipe one (35) and reflux branch pipe two (45) are connect with return header (6).

4. polycrystalline silicon ingot or purifying furnace as claimed in claim 3, which is characterized in that the air intake branch one (31) and air intake branch two (41) it is connect with escape pipe (5).