CN208596276U - HMDS spray equipment and system - Google Patents
HMDS spray equipment and system Download PDFInfo
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- CN208596276U CN208596276U CN201821405891.9U CN201821405891U CN208596276U CN 208596276 U CN208596276 U CN 208596276U CN 201821405891 U CN201821405891 U CN 201821405891U CN 208596276 U CN208596276 U CN 208596276U
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Abstract
The embodiment of the present application provides a kind of HMDS spray equipment and system.Described device includes disk cover component, disc components and the seal assembly being arranged between disk cover component and disc components, disk cover component includes disk cover ontology and the intake and exhaust portion including air inlet and exhaust outlet, disk cover ontology includes upper disk cover, lower disk cover and disk cover outer ring, disk cover outer ring is arranged along the edge of upper disk cover, and side of the disk cover ontology far from disc components is arranged in intake and exhaust portion.Disk cover component is arranged when on seal assembly, lower that sealing technology chamber is formed between disk cover and disc components；Exhaust passage is formed between lower disk cover and upper disk cover, the size of lower disk cover is less than the size of upper disk cover, it is connected to through exhaust passage with exhaust outlet with air inlet communication seals process cavity, so that HMDS gas enters after sealing technology chamber sprays the coating device to be painted of placement through air inlet, it is discharged by exhaust passage by exhaust outlet.Steam spraying, and the good airproof performance of the sealing technology chamber are carried out using above-mentioned apparatus.
Description
Technical field
This application involves technical field of semiconductors, in particular to a kind of HMDS spray equipment and system.
Background technique
To cohere photoresist preferably with the wafer etc. as coating device to be painted, coating device to be painted must keep one to detest
Aqueous surface.It, can also be by spraying chemical primer in coating device to be painted to guarantee its energy and photoresist in addition to dehydration is baked and banked up with earth
It coheres well.Wherein, HMDS (Hexamethyl Disilazane, hmds) is the use being widely used at present
In the chemicals for applying primer.Gluing is that immersion type applies primer, rotatably applies primer respectively generally there are two types of mode at present.It is above-mentioned
Although mode may be implemented to spray, but there is the easily contaminated deficiency of coating device to be painted, and rotatably applying primer can wave
Take the HMDS of a large amount of valuableness.
Apply for content
In order to overcome above-mentioned deficiency in the prior art, the embodiment of the present application is designed to provide a kind of HMDS spraying dress
It sets and system, spray equipment can be treated in such a way that steam type applies primer and be sprayed, and pass through disk cover component, disk body
Cooperation between component and seal assembly can ensure the leakproofness of sealing technology chamber, to meet the requirement of high leakproofness.
In a first aspect, the embodiment of the present application provides a kind of HMDS spray equipment, described device includes disk cover component, disk body group
Part and seal assembly,
The disk cover component includes disk cover ontology and intake and exhaust portion, and the disk cover ontology includes upper disk cover, lower disk cover and disk
Lid outer ring, the disk cover outer ring are arranged along the edge of the upper disk cover, and the intake and exhaust portion setting is separate in the disk cover ontology
The side of the disc components, wherein the intake and exhaust portion includes air inlet and exhaust outlet；
The seal assembly is arranged between the disk cover component and the disc components, and the disk cover component is arranged in institute
The sealing technology for placing coating device to be painted is formed when stating on seal assembly, between the lower disk cover and the disc components
Chamber；
Exhaust passage is formed between the lower disk cover and the upper disk cover, the size of the lower disk cover is less than the upper disk cover
Size, the sealing technology chamber is connected to the air inlet, and is connected to through the exhaust passage with the exhaust outlet so that
HMDS gas is after the air inlet sprays the coating device to be painted of placement into the sealing technology chamber, by the row
Gas channel is discharged by the exhaust outlet.
Optionally, in the embodiment of the present application, the disc components include disk body ontology and disk body sealing frame, the disk body
Sealing frame setting is provided with the installation for installing the seal assembly on disk body ontology edge, the disk body sealing frame
Slot.
Optionally, in the embodiment of the present application, the mounting groove includes the first mounting groove and the second mounting groove, the sealing
Component includes first seal and second seal, and first mounting groove is for installing the first seal, and described second
Mounting groove is for installing the second seal.
Optionally, in the embodiment of the present application, the bore of first mounting groove is less than the bore of second mounting groove,
The first seal is O-ring, and the second seal is V type circle.
Optionally, in the embodiment of the present application, it is provided with inlet channel in the disk body sealing frame, the inlet channel
Gas outlet is arranged between first mounting groove and second mounting groove；
The disk cover outer ring includes the upper disk cover interconnecting piece connecting with the upper disk cover and remote from the upper disk cover interconnecting piece
Toward the extension of the sealing technology chamber internal stretch, the extension and the upper disk cover are flat for one end from the upper disk cover
It goes, is provided with an endless groove on the extension, the gas outlet is connected to the endless groove, wherein the upper disk cover connection
Portion is ring-type, and the depth of the endless groove is less than the thickness of the extension.
Optionally, in the embodiment of the present application, intercommunicating pore is additionally provided on the extension, the endless groove is through the company
Through-hole is connected to the exhaust passage.
Optionally, in the embodiment of the present application, the disk body ontology includes upper plate and lower plate, the upper plate and institute
It states and having heaters is set between lower plate, wherein the upper plate is arranged between the lower disk cover and the lower plate.
Optionally, in the embodiment of the present application, described device further includes vacuum generator, the vacuum generator with it is described
Exhaust outlet connection, for being vacuum-treated to the sealing technology chamber.
Optionally, in the embodiment of the present application, described device further includes cylinder assembly, the cylinder assembly and the disk cover
Component connection, for driving the relatively described disc components movement of the disk cover component.
Second aspect, the embodiment of the present application provide a kind of HMDS paint finishing, and the system comprises gases to provide device, the
One pressure reducing valve, first flowmeter, triple valve, first filter, the second pressure reducing valve, second flowmeter, the second filter, on-off
Valve, HMDS tank and the HMDS spray equipment,
The gas provides device and is connected to through first gas branch with the HMDS spray equipment, to provide to the HMDS
The gas that spray equipment is cleaned, wherein the first gas branch includes passing sequentially through pipeline concatenated described first to subtract
Pressure valve, first flowmeter, triple valve and first filter；
The gas provides device and is also connected to through second gas branch with the HMDS tank, to provide in the HMDS tank
The gas that is purged of the surface HMDS, wherein the second gas branch includes successively concatenated by the road described second subtracting
Pressure valve, second flowmeter, the second filter and on-off valve；
The HMDS tank is connected to through third gas branch with the HMDS spray equipment, so that described in the entrance of HMDS gas
HMDS spray equipment, wherein the third gas branch includes the triple valve and first filter by piping connection, institute
Triple valve is stated for being connected to the first gas branch or third gas branch with the HMDS spray equipment.
In terms of existing technologies, the application has the advantages that
The embodiment of the present application provides a kind of HMDS spray equipment and HMDS paint finishing, passes through disk cover component, disc components
Sealing technology chamber has been cooperatively formed with seal assembly, and HMDS gas can enter the sealing technology chamber to placement through air inlet
Coating device to be painted is sprayed, and is then discharged by exhaust passage by exhaust outlet.The sealing of sealing technology chamber in above-mentioned apparatus
Property it is high, can satisfy requirements, applying primer mode by steam type using above-mentioned apparatus treats spray equipment spraying HMDS, thus
The contaminated risk of coating device to be painted is reduced, while being avoided due to causing to waste a large amount of HMDS using the rotary primer mode that applies.
For enable application above objects, features, and advantages be clearer and more comprehensible, the application preferred embodiment is cited below particularly, and
Cooperate appended attached drawing, is described in detail below.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the overall structure diagram of HMDS spray equipment provided by the embodiments of the present application.
Fig. 2 is the decomposition texture schematic diagram of HMDS spray equipment provided by the embodiments of the present application.
Fig. 3 is the schematic diagram of the section structure of HMDS spray equipment provided by the embodiments of the present application.
Fig. 4 is the structural schematic diagram of disk cover component provided by the embodiments of the present application.
Fig. 5 is the structural schematic diagram of disc components provided by the embodiments of the present application.
Fig. 6 is I in Fig. 5 enlarged diagram.
Fig. 7 is the schematic diagram of HMDS paint finishing provided by the embodiments of the present application.
Icon: 10-HMDS paint finishing；100-HMDS spray equipment；110- disk cover component；111- disk cover ontology；112-
Upper disk cover；Disk cover under 113-；114- disk cover outer ring；The upper disk cover interconnecting piece of 1141-；1143- extension；11431- endless groove；
11433- support portion；11435- intercommunicating pore；116- intake and exhaust portion；1161- air inlet；1163- exhaust outlet；117- exhaust passage；
118- sealing technology chamber；150- disc components；151- upper plate；152- disk body ontology；153- lower plate；The sealing of 155- disk body
Frame；The first mounting groove of 1551-；The second mounting groove of 1553-；1555- inlet channel；The gas outlet 1557-；157- heater；170-
Seal assembly；171- first seal；172- second seal；180- vacuum generator；201- gas provides device；211-
One pressure reducing valve；213- first flowmeter；215- triple valve；217- first filter；The second pressure reducing valve of 221-；223- second flow
Meter；The second filter of 225-；227- on-off valve；230-HMDS tank.
Specific embodiment
Below in conjunction with attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Ground description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.Usually exist
The component of the embodiment of the present application described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.
Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below claimed
Scope of the present application, but be merely representative of the selected embodiment of the application.Based on embodiments herein, those skilled in the art
Member's every other embodiment obtained without making creative work, shall fall in the protection scope of this application.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Application product using when the orientation or positional relationship usually put, be merely for convenience of description the application and simplify description, without
It is that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore not
It can be interpreted as the limitation to the application.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage
Solution is indication or suggestion relative importance.
In addition, the terms such as term "horizontal", "vertical", " pendency " are not offered as requiring component abswolute level or pendency, and
It is that can be slightly tilted.It is not to indicate the structure if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It has to fully horizontally, but can be slightly tilted.
In the description of the present application, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirect by intermediary
It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in this application.
With reference to the accompanying drawing, it elaborates to some embodiments of the application.In the absence of conflict, following
Feature in embodiment and embodiment can be combined with each other.
FIG. 1 to FIG. 3 is please referred to, Fig. 1 is the overall structure signal of HMDS spray equipment 100 provided by the embodiments of the present application
Figure, Fig. 2 is the decomposition texture schematic diagram of HMDS spray equipment 100 provided by the embodiments of the present application, and Fig. 3 is that the embodiment of the present application mentions
The schematic diagram of the section structure of the HMDS spray equipment 100 of confession.The HMDS spray equipment 100 may include disk cover component 110, disk
Body component 150 and seal assembly 170.Based on matching between the disk cover component 110, disc components 150 and seal assembly 170
It closes, the high sealing technology chamber 118 of a leakproofness can be formed, and then jet is carried out to the coating device to be painted in sealing technology chamber 118
Formula applies primer, thus can reduce the contaminated risk of coating device to be painted, while avoiding wasting a large amount of HMDS (Hexamethyl
Disilazane, hmds).
In the present embodiment, further combined with shown in Fig. 3 and Fig. 4, Fig. 4 is disk cover component provided by the embodiments of the present application
110 structural schematic diagram, the disk cover component 110 may include disk cover ontology 111 and intake and exhaust portion 116.Wherein, described into row
Side of the disk cover ontology 111 far from the disc components 150 is arranged in gas portion 116, and the intake and exhaust portion 116 may include
Air inlet 1161 and exhaust outlet 1163.The disk cover ontology 111 may include upper disk cover 112, lower disk cover 113 and disk cover outer ring
114.The disk cover outer ring 114 is ring-type, which is arranged along the edge of the upper disk cover 112 in the upper disk cover
112 towards the side of the lower disk cover 113.It is logical that gap between the upper disk cover 112 and the lower disk cover 113 forms exhaust
Road 117.
Optionally, the air inlet 1161 includes the first end connecting with exterior line and connect with the lower disk cover 113
Second end, the bore that the bore of the second end is greater than the first end forms horn-like.
It please recombine referring to Fig. 2 and Fig. 3, the setting of seal assembly 170 is in the disk cover component 110 and the disk body
Between component 150.When the disk cover component 110 is in close state, i.e., when being contacted with the disc components 150, described
Under the cooperation of seal assembly 170, the lower disk cover 113 forms the tool for placing coating device to be painted with the disc components 150
There is the sealing technology chamber 118 of the high feature of leakproofness.
It please recombine referring to Fig. 3 and Fig. 4, the size of the lower disk cover 113 is less than the size of the upper disk cover 112, by
This, there are gaps between the lower disk cover 113 and the disk cover outer ring 114, so that the sealing technology chamber 118 and the row
Gas channel 117 is connected to.Wherein, the sealing technology chamber 118 is connected to the air inlet 1161, the exhaust passage 117 and institute
State the connection of exhaust outlet 1163.As a result, when being sprayed, HMDS gas enters the sealing work through the air inlet 1161
The coating device to be painted of 118 pairs of skill chamber placements sprays, and is then discharged through the exhaust passage 117 by the exhaust outlet 1163.
Incorporated by reference to referring to Fig. 5, Fig. 5 is the structural schematic diagram of disc components 150 provided by the embodiments of the present application.The disk body
Component 150 includes disk body ontology 152 and disk body sealing frame 155.It is provided in the disk body sealing frame 155 described close for installing
The mounting groove of sealing assembly 170.As a result, by mounting groove fixing seal component 170, to be guaranteed based on the seal assembly 170 close
Seal the leakproofness of process cavity 118.
Incorporated by reference to referring to Fig. 6, Fig. 6 is I in Fig. 5 enlarged diagram.The mounting groove includes the first mounting groove 1551
And second mounting groove 1553, the seal assembly 170 include first seal 171 and second seal 172.First installation
Slot 1551 is for installing the first seal 171, and second mounting groove 1553 is for installing the second seal 172.
By the way that inside and outside two layers of sealing element is arranged in disk body sealing frame 155, it is ensured that sealing effect.
Optionally, in the embodiment of the present embodiment, the bore of first mounting groove 1551 is less than second peace
The bore of tankage 1553.The first seal 171 is O-ring, and the second seal 172 is V-type circle.It will be understood
, more than two sealing elements also can be set and realize sealing, and using other devices as sealing element, it specifically can be according to reality
Border situation is configured.
In the present embodiment, incorporated by reference to referring to Fig. 3 and Fig. 6, at least one air inlet is provided in the disk body sealing frame 155
Channel 1555.Described 1555 one end of inlet channel is connected to exterior line, and the gas outlet 1557 of the other end is arranged described first
Between mounting groove 1551 and second mounting groove 1553.Incorporated by reference to referring to Fig. 3 and Fig. 4, the disk cover outer ring 114 includes upper disk
Lid interconnecting piece 1141 and extension 1143, described upper 1141 one end of disk cover interconnecting piece are connect with the edge of the upper disk cover 112, far
The other end from the upper disk cover 112 is connect with the extension 1143.Wherein, upper disk cover interconnecting piece 1141 is ring-type.This prolongs
Extending portion 1143 is toward 118 internal stretch of sealing technology chamber.The extension 1143 is towards the side of the disc components 150
Edge be provided with an endless groove 11431, the bore of the endless groove 11431 is matched with the bore of the disk body sealing frame 155, should
The depth of endless groove 11431 is less than the thickness of extension 1143.When the disk cover component 110 is in close state, it is described go out
Port 1557 is connected to towards the endless groove 11431 with the endless groove 11431.Gas is being passed through through the inlet channel 1555
When body, gas shield ring can be formed based on the endless groove 11431.
In the present embodiment, referring once again to Fig. 3 and Fig. 4, at least one connection is additionally provided on the extension 1143
Hole 11435.The endless groove 11431 is connected to through the intercommunicating pore 11435 with the exhaust passage 117.As a result, by it is described into
The gas that gas channel 1555 is passed through can be discharged through the exhaust passage 117, exhaust outlet 1163.
Further, as shown in figure 4, the disk cover component 110 can also include at least one support portion 11433.It is described
The extension 1143 is arranged in towards the side of the upper disk cover 112 in support portion 11433, and the support portion 11433 is for branch
The lower disk cover 113 is supportted, to further fix the lower disk cover 113.
Optionally, if the position of the intercommunicating pore 11435 is overlapped with the position of the support portion 11433, the support portion
It may be provided with the through-hole with the intercommunicating pore 11435 cooperation on 11433, to guarantee that the endless groove 11431 can be through the connection
Hole 11435 is connected to the exhaust passage 117.
In the present embodiment, as shown in figure 5, the disk body ontology 152 includes upper plate 151 and lower plate 153.It is described
Having heaters 157 is set between upper plate 151 and the lower plate 153, to carry out when that need to spray to the upper plate 151
Heating.Wherein, the upper plate 151 is arranged between the lower disk cover 113 and the lower plate 153.
Incorporated by reference to referring to Fig. 7, Fig. 7 is the schematic diagram of HMDS paint finishing 10 provided by the embodiments of the present application.In this implementation
In example, the HMDS spray equipment 100 can also include vacuum generator 180.The vacuum generator 180 and the exhaust outlet
1163 connections, for being vacuum-treated to the sealing technology chamber 118.Sealing technology chamber 118 is in technical process as a result,
HMDS in negative pressure state, sealing technology chamber 118 is not leaked.
In the present embodiment, the HMDS spray equipment 100 can also include cylinder assembly, the cylinder assembly with it is described
Disk cover component 110 connects, for driving the relatively described disc components 150 of the disk cover component 110 to carry out elevating movement, thus
Control whether the disk cover component 110 is in close state.
Referring once again to Fig. 7, the embodiment of the present application also provides a kind of HMDS paint finishing 10.The HMDS paint finishing 10
Device 201, the first pressure reducing valve 211, first flowmeter 213, triple valve 215, first filter 217, second are provided including gas
Pressure reducing valve 221, second flowmeter 223, the second filter 225, on-off valve 227, HMDS tank 230 and the HMDS spray equipment
100.Wherein, the gas that the gas provides that device 201 provides is divided into two-way, is provided to HMDS tank 230, another way all the way
It is provided to HMDS spray equipment 100.
The gas provides device 201 and is connected to through first gas branch with the HMDS spray equipment 100, with offer pair
The gas that the HMDS spray equipment 100 is cleaned.Wherein, the first gas branch is concatenated including passing sequentially through pipeline
First pressure reducing valve 211, first flowmeter 213, triple valve 215 and first filter 217.Wherein, the gas provides dress
Setting 201 can be used for providing nitrogen.As a result, after HMDS is sprayed, it can be replaced by the first gas branch using nitrogen
Remaining HMDS gas in sealing technology chamber 118 in the HMDS spray equipment 100.
The gas provides device 201 and is also connected to through second gas branch with the HMDS tank 230, to provide to described
The gas that the surface HMDS in HMDS tank 230 is purged.Wherein, the second gas branch includes successively concatenated by the road
Second pressure reducing valve 221, second flowmeter 223, the second filter 225 and on-off valve 227.The HMDS tank 230 is through
Three gas branches are connected to the HMDS spray equipment 100, so that HMDS gas enters the HMDS spray equipment 100.Its
In, the third gas branch includes the triple valve 215 and the first filter 217 by piping connection.Institute as a result,
The surface HMDS can be purged by stating the nitrogen that gas offer device 201 provides, so that the mixed gas of nitrogen and HMDS gas enters institute
It states in the sealing technology chamber 118 in HMDS spray equipment 100.The triple valve 215 is for selectively making the first gas
Branch or third gas branch are connected to the HMDS spray equipment 100.
In the embodiment of the present embodiment, the first gas branch, the second gas branch and third gas branch
The quantity on road is corresponding with the quantity of HMDS spray equipment 100, to guarantee that each HMDS spray equipment 100 can carry out HMDS gas spray
It applies.
Optionally, as shown in fig. 7, multiple first gas branches can when the HMDS spray equipment 100 is multiple
First pressure reducing valve 211 is shared, multiple second gas branches can share second pressure reducing valve 221.Its
In, a first gas branch, a second gas branch, a third gas branch and a HMDS spray equipment 100 can
To form a spray unit.It is the piping diagram of two spray units shown in Fig. 7.
It may include at least one accommodating cavity in the HMDS tank 230, be equipped with HMDS liquid in each accommodating cavity.Each appearance
Setting chamber can be connected to a second gas branch and a third gas branch.In the HMDS paint finishing 10
Quantity of the quantity of HMDS spray equipment 100 no more than accommodating cavity in the HMDS tank 230.
The use process of the HMDS paint finishing 10 is illustrated below.
When technique starts, the upper plate 151 is heated to by assigned temperature by the heater 157 first.Pass through gas
Cylinder component control panel cap assemblies 110 are closed, so that disk cover component 110 and disc components 150 form sealing technology chamber 118.Its
In, in this case, vacuum generator 180 is opened to guarantee that sealing technology chamber 118 is constantly in negative pressure in technical process
State.Also, inlet channel 1555 of the device 201 into the HMDS spray equipment 100 can also be provided using gas to provide
Nitrogen forms gas shield ring based on endless groove 11431.Then the HMDS branch controlled in on-off valve 227 and triple valve 215 is beaten
It opens, thus provides device 201 using gas and the surface HMDS is purged by the nitrogen that the second gas branch provides, so that HDMS
It is gasificated as HMDS gas.Then, the hybridization gas of nitrogen and HMDS gas is through the third gas branch, the air inlet
Mouth 1161 enters the sealing technology chamber 118.After 30s~40s, the HMDS branch in on-off valve 227 and triple valve 215 is controlled
It closes, the hybridization gas of nitrogen and HMDS gas stops entering the sealing technology chamber 118, HMDS gas spraying knot as a result,
Beam.Then, control 215 nitrogen branch of triple valve is opened, and gas provides the nitrogen of the offer of device 201 through the first gas branch
Into the sealing technology chamber 118, remaining HMDS gas is replaced.Since in whole process, vacuum generator 180 is constantly in
Open state, it is ensured that sealing technology chamber 118 is constantly in negative pressure state, HMDS No leakage in technical process.
In conclusion the embodiment of the present application provides a kind of HMDS spray equipment and HMDS paint finishing, by disk cover component,
Disc components and seal assembly have cooperatively formed sealing technology chamber, and HMDS gas can enter the sealing technology chamber pair through air inlet
The coating device to be painted placed is sprayed, and is then discharged by exhaust passage by exhaust outlet.Sealing technology chamber in above-mentioned apparatus
Leakproofness it is high, can satisfy requirements, primer mode applied by steam type using above-mentioned apparatus treat spray equipment and spray
HMDS to reduce the contaminated risk of coating device to be painted, while being avoided due to causing to waste using the rotary primer mode that applies
A large amount of HMDS.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (10)
1. a kind of HMDS spray equipment, which is characterized in that described device includes disk cover component, disc components and seal assembly,
The disk cover component includes disk cover ontology and intake and exhaust portion, and the disk cover ontology includes outside upper disk cover, lower disk cover and disk cover
Ring, the disk cover outer ring are arranged along the edge of the upper disk cover, and the intake and exhaust portion setting is in the disk cover ontology far from described
The side of disc components, wherein the intake and exhaust portion includes air inlet and exhaust outlet；
The seal assembly is arranged between the disk cover component and the disc components, and the disk cover component is arranged described close
The sealing technology chamber for placing coating device to be painted is formed when on sealing assembly, between the lower disk cover and the disc components；
Exhaust passage is formed between the lower disk cover and the upper disk cover, the size of the lower disk cover is less than the ruler of the upper disk cover
Very little, the sealing technology chamber is connected to the air inlet, and is connected to through the exhaust passage with the exhaust outlet, so that HMDS gas
Body is after the air inlet sprays the coating device to be painted of placement into the sealing technology chamber, by the exhaust passage
It is discharged by the exhaust outlet.
2. the apparatus according to claim 1, which is characterized in that the disc components include disk body ontology and disk body sealing
Frame, the disk body sealing frame setting are provided with described close for installing on disk body ontology edge, the disk body sealing frame
The mounting groove of sealing assembly.
3. the apparatus of claim 2, which is characterized in that the mounting groove includes the first mounting groove and the second installation
Slot, the seal assembly include first seal and second seal, and first mounting groove is for installing first sealing
Part, second mounting groove is for installing the second seal.
4. device according to claim 3, which is characterized in that the bore of first mounting groove is less than second installation
The bore of slot, the first seal are O-ring, and the second seal is V-type circle.
5. device according to claim 4, which is characterized in that
Be provided with inlet channel in the disk body sealing frame, the gas outlet setting of the inlet channel first mounting groove with
Between second mounting groove；
The disk cover outer ring include the upper disk cover interconnecting piece being connect with the upper disk cover and from the upper disk cover interconnecting piece far from institute
One end of disk cover is stated toward the extension of the sealing technology chamber internal stretch, the extension is parallel with the upper disk cover, institute
It states and is provided with an endless groove on extension, the gas outlet is connected to the endless groove, wherein the upper disk cover interconnecting piece is ring
Shape, the depth of the endless groove are less than the thickness of the extension.
6. device according to claim 5, which is characterized in that be additionally provided with intercommunicating pore, the ring-type on the extension
Slot is connected to through the intercommunicating pore with the exhaust passage.
7. the apparatus of claim 2, which is characterized in that the disk body ontology includes upper plate and lower plate, described
Having heaters is set between upper plate and the lower plate, wherein the upper plate is arranged in the lower disk cover and the lower wall
Between body.
8. the apparatus according to claim 1, which is characterized in that described device further includes vacuum generator, the vacuum hair
Raw device is connect with the exhaust outlet, for being vacuum-treated to the sealing technology chamber.
9. the apparatus according to claim 1, which is characterized in that described device further includes cylinder assembly, the cylinder assembly
It is connect with the disk cover component, for driving the relatively described disc components movement of the disk cover component.
10. a kind of HMDS paint finishing, which is characterized in that the system comprises gases to provide device, the first pressure reducing valve, first-class
Meter, triple valve, first filter, the second pressure reducing valve, second flowmeter, the second filter, on-off valve, HMDS tank and right are wanted
HMDS spray equipment described in any one of 1-9 is sought,
The gas provides device and is connected to through first gas branch with the HMDS spray equipment, is sprayed with providing to the HMDS
The gas that device is cleaned, wherein the first gas branch include pass sequentially through concatenated first pressure reducing valve of pipeline,
First flowmeter, triple valve and first filter；
The gas provides device and is also connected to through second gas branch with the HMDS tank, to provide in the HMDS tank
The gas that the surface HMDS is purged, wherein the second gas branch includes successively second decompression concatenated by the road
Valve, second flowmeter, the second filter and on-off valve；
The HMDS tank is connected to through third gas branch with the HMDS spray equipment, so that HMDS gas is sprayed into the HMDS
Coating device, wherein the third gas branch includes the triple valve and first filter by piping connection, the threeway
Valve is for being connected to the first gas branch or third gas branch with the HMDS spray equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821405891.9U CN208596276U (en) | 2018-08-29 | 2018-08-29 | HMDS spray equipment and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821405891.9U CN208596276U (en) | 2018-08-29 | 2018-08-29 | HMDS spray equipment and system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208596276U true CN208596276U (en) | 2019-03-12 |
Family
ID=65605323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821405891.9U Active CN208596276U (en) | 2018-08-29 | 2018-08-29 | HMDS spray equipment and system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111708259A (en) * | 2020-07-23 | 2020-09-25 | 叶建蓉 | Tackifying unit of spin coating developing machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111708259A (en) * | 2020-07-23 | 2020-09-25 | 叶建蓉 | Tackifying unit of spin coating developing machine |
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Address after: 110 000 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110 000 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |