CN208592862U - A kind of contactless substrate grasp handling device - Google Patents
A kind of contactless substrate grasp handling device Download PDFInfo
- Publication number
- CN208592862U CN208592862U CN201821197197.2U CN201821197197U CN208592862U CN 208592862 U CN208592862 U CN 208592862U CN 201821197197 U CN201821197197 U CN 201821197197U CN 208592862 U CN208592862 U CN 208592862U
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- China
- Prior art keywords
- eddy flow
- handling device
- cavity
- flow part
- notch
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Abstract
The utility model discloses a kind of contactless substrate grasp handling devices, it is related to carrying technical field, it solves during handling device handling substrate, need cycle flabellum that there is biggish revolving speed, it can just make handling device that there is the suction for attracting substrate enough, cause handling device energy consumption high and the lesser problem of suction, its key points of the technical solution are that: including barrow and the crawl plate being fixedly connected with barrow；The crawl plate lower surface is equipped with multiple eddy flow parts, and line is enclosed polygonal region between adjacent eddy flow part；The eddy flow part includes main body and is placed in main intracorporal cavity；The body upper surface is equipped with air supply opening, and air supply opening one end is connected to cavity, and the other end is connect with feeder；The body lower surface is equipped with cyclonic chamber, and the whirlwind chamber inner sidewall is equipped with multiple eddy flow notch being connected to cavity, has the energy consumption for reducing handling device, improves the effect of handling device suction.
Description
Technical field
The utility model relates to carry technical field, more specifically, it relates to a kind of contactless substrate grasp handling dress
It sets.
Background technique
In modern industrial production, when workpiece being picked up and carried using handler, can exist and largely connect
The case where touching.Contact handling device would generally make workpiece surface scratch or generate electrostatic.Since contact handling device is being carried
During can generate adverse effect to product is carried, non-contact carrying technology be able to quickly be used in the carrying of high-end silicon wafer
In.
Now retrieving notification number is CN102101296B, and the day for announcing is the Chinese patent in May 13 in 2015, and the program discloses
A kind of handling device, including with cylindric inner hole cover, be located at and cover intracorporal cycle flabellum and drive cycle flabellum
The power input shaft of rotation；The top dead center position of the cover is provided with power input shaft mounting hole and to be distributed in power defeated
Enter the air entry of shaft mounting hole surrounding；Cycle flabellum is made of axle sleeve and the blade being evenly distributed on axle sleeve, the blade
The curved direction of lower vertical, upper bend, and blade is consistent with the direction that cycle flabellum rotates；The power input shaft
One end passes through power input shaft mounting hole and connect with the axle sleeve for covering intracorporal cycle flabellum is located at, the other end and outside cover
Rotation drive device connection.
Handling device in above-mentioned reference document needs cycle flabellum to have during handling device handling substrate
Biggish revolving speed can just make handling device have the suction for attracting substrate enough, cause handling device energy consumption high and suction compared with
It is small.
Utility model content
The purpose of the utility model is to provide a kind of contactless substrate grasp handling devices, have the energy for reducing handling device
Consumption improves the effect of handling device suction.
The above-mentioned technical purpose of the utility model has the technical scheme that a kind of contactless substrate is grabbed
Handling device is taken, including barrow and the crawl plate being fixedly connected with barrow；The crawl plate lower surface is equipped with multiple eddy flows
Part, line is enclosed polygonal region between adjacent eddy flow part；The eddy flow part includes main body and is placed in main intracorporal cavity；
The body upper surface is equipped with air supply opening, and air supply opening one end is connected to cavity, and the other end is connect with feeder；Under the main body
Surface is equipped with cyclonic chamber, and the whirlwind chamber inner sidewall is equipped with multiple eddy flow notch being connected to cavity.
By using above-mentioned technical proposal, feeder provides air-flow to cavity, after air-flow shunts in cavity, through eddy flow
Notch precession cyclonic chamber, air-flow is under the action of the centrifugal force in high speed rotation in cavity, so that between cyclonic chamber and handling substrate
Dead level generates negative pressuren zone, convenient for reducing the energy consumption of handling device for the non-contact crawl of handling substrate, improves handling device suction
Power；Using multiple eddy flow parts, so that handling device grasp handling substrate stable operation；Using multiple eddy flow notch, so that eddy flow
The suction that part generates more is uniformly distributed, and improves the stability of eddy flow part grasp handling substrate.
The utility model is further arranged to: the main body is set there are four eddy flow notch, the back-out side of adjacent eddy flow notch
To being mutually perpendicular to.
By using above-mentioned technical proposal, the stability of eddy flow part grasp handling substrate is further improved.
The utility model is further arranged to: the cyclonic chamber roof is equipped with boss, and multiple eddy flow notch are along boss surrounding
It is uniformly distributed.
By using above-mentioned technical proposal, using boss, convenient for improving single eddy flow in high-speed rotating air flow collection
The suction of part.
The utility model is further arranged to: the eddy flow part be cyclone clockwise or cyclone counterclockwise, it is described suitable
Hour hands cyclone is contrary with the back-out of eddy flow notch of cyclone counterclockwise.
By using above-mentioned technical proposal, during eddy flow part grasp handling substrate, it is horizontal partially to reduce handling substrate
The case where shifting, occurs, and improves the accuracy of handling device carrying.
The utility model is further arranged to: the crawl plate is set there are four eddy flow part, and four eddy flow parts include two suitable
Hour hands cyclone and two cyclones counterclockwise；Two cyclones clockwise and two cyclones counterclockwise it is adjacent between staggeredly set
It sets.
By using above-mentioned technical proposal, convenient for weakening the tangential friction force of handling substrate, so that handling substrate is grabbing
It keeps relative stability with during carrying.
The utility model is further arranged to: telescopic adjustment part, the telescopic adjustment are equipped between the adjacent eddy flow part
Part both ends are fixedly connected with adjacent eddy flow part respectively.
By using above-mentioned technical proposal, using telescopic adjustment part, convenient for adjusting the spacing between adjacent eddy flow part, with suitable
Answer the handling substrate of different surfaces product.
The utility model is further arranged to: the telescopic adjustment part includes the retracting cylinder and two being fixedly connected with crawl plate
A telescopic rod with the grafting of retracting cylinder both ends respectively, end of the telescopic rod far from retracting cylinder and corresponding eddy flow part are fixed to be connected
It connects；The retracting cylinder is equipped with multiple card holes, and the telescopic rod is equipped with the elastic lock ball of at least one and card hole clamping.
By using above-mentioned technical proposal, using telescopic rod and retracting cylinder grafting, so that spacing is grasped between adjacent eddy flow part
Make simple；Using elastic lock ball, convenient for telescopic rod and retracting cylinder are fixed.
In conclusion air-flow is in cavity the utility model has the following beneficial effects: feeder provides air-flow to cavity
After interior shunting, through eddy flow notch precession cyclonic chamber, air-flow under the action of the centrifugal force in high speed rotation in cavity so that cyclonic chamber with
Dead level between handling substrate generates negative pressuren zone, convenient for reducing the non-contact crawl of handling substrate the energy consumption of handling device, mentioning
High handling device suction；Using multiple eddy flow parts, so that handling device grasp handling substrate stable operation；Utilize multiple eddy flows
Notch improves the stability of eddy flow part grasp handling substrate so that the suction that eddy flow part generates more is uniformly distributed；Convenient for cutting
The tangential friction force of weak handling substrate, so that handling substrate keeps relative stability in crawl with during carrying.
Detailed description of the invention
Fig. 1 is the overall structure diagram in the present embodiment；
Fig. 2 is the attachment structure schematic diagram of eddy flow part and telescopic adjustment part in the present embodiment；
Fig. 3 is the structural schematic diagram of eddy flow part in the present embodiment；
Fig. 4 is that the eddy flow notch air-flow of cyclone clockwise in the present embodiment screws out schematic diagram；
Fig. 5 is that the eddy flow notch air-flow of cyclone counterclockwise in the present embodiment screws out schematic diagram.
In figure: 1, barrow；11, plate is grabbed；12, handling substrate；13, dead level；2, eddy flow part；21, cyclone clockwise；
211, cyclone counterclockwise；22, air supply opening；23, cavity；24, eddy flow notch；25, boss；26, main body；27, cyclonic chamber；3, it stretches
Contracting regulating part；31, retracting cylinder；32, telescopic rod；33, card hole；34, elastic lock ball.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing 1-5.
Embodiment: a kind of contactless substrate grasp handling device, as shown in Figures 1 and 2, including barrow 1 and crawl plate
11,11 upper surface of plate is vertical fixes with crawl for barrow 1.It grabs 11 lower surface of plate and is equipped with multiple eddy flow parts 2, adjacent eddy flow part 2
Between line be enclosed polygonal region.In grasp handling substrate 12, crawl plate 11 is moved to 12 top of handling substrate,
Make to form dead level 13 between eddy flow part 2 and handling substrate 12.Handling substrate 12 includes but is not limited to silicon wafer and glass plate.
As shown in figure 3, eddy flow part 2 includes main body 26 and the cavity 23 being placed in main body 26.26 upper surface of main body, which is equipped with, to be supplied
Port 22,22 one end of air supply opening are connected to cavity 23, and the other end is connect with feeder (not shown).Feeder can be adopted
Use air blower.26 lower surface of main body is equipped with cylindrical cyclonic chamber 27, and 27 inner sidewall of cyclonic chamber is connected to equipped with multiple with cavity 23
Eddy flow notch 24.Feeder provides air-flow to cavity 23, after air-flow shunts in cavity 23, revolves through 24 precession of eddy flow notch
Wind chamber 27, air-flow is under the action of the centrifugal force in high speed rotation in cavity 23, so that the sky between cyclonic chamber 27 and handling substrate 12
Layer 13 generates negative pressuren zone, convenient for reducing the non-contact crawl of handling substrate 12 energy consumption of handling device, improving handling device
The suction of generation.Using multiple eddy flow parts 2, so that 12 stable operation of handling device grasp handling substrate.It is cut using multiple eddy flows
Mouth 24 improves the stability of 2 grasp handling substrate 12 of eddy flow part so that the suction that eddy flow part 2 generates more is uniformly distributed.
As shown in figs. 4 and 5, main body 26 is set there are four eddy flow notch 24, and the back-out direction of adjacent eddy flow notch 24 is mutual
Vertically.Further improve the stability of 2 grasp handling substrate 12 of eddy flow part.
As shown in figure 3,27 roof of cyclonic chamber is equipped with boss 25, the vertical height of 25 lower surface of boss is greater than 27 end of cyclonic chamber
The vertical height of mouth.Four eddy flow notch 24 are uniformly distributed along 25 surrounding of boss.Using boss 25, it is convenient for high-speed rotating gas
In adfluxion, the suction of single eddy flow part 2 is improved.
As shown in Figure 2 and Figure 3, eddy flow part 2 is cyclone 21 clockwise or cyclone 211 counterclockwise, cyclone clockwise
21 is contrary with the back-out of eddy flow notch 24 of cyclone 211 counterclockwise.In the process of 2 grasp handling substrate 12 of eddy flow part
In, reduce 12 horizontal-shift of handling substrate the case where occur, improve handling device carrying accuracy.
As shown in Figure 2 and Figure 3, crawl plate 11 is set there are four eddy flow part 2, and four eddy flow parts 2 include two eddy flows clockwise
Device 21 and two cyclones 211 counterclockwise.Two cyclones 21 clockwise and two cyclones 211 counterclockwise it is adjacent between staggeredly
Setting.Convenient for weakening the tangential friction force of handling substrate 12, so that handling substrate 12 keeps phase with during carrying in crawl
To stabilization.
As shown in Figures 1 and 2, between adjacent eddy flow part 2 be equipped with telescopic adjustment part 3,3 both ends of telescopic adjustment part respectively with phase
Adjacent eddy flow part 2 is fixedly connected.Using telescopic adjustment part 3, convenient for adjusting the spacing between adjacent eddy flow part 2, to adapt to different tables
The handling substrate 12 of area.
As shown in Figure 1, telescopic adjustment part 3 include with the retracting cylinder 31 that is fixedly connected of crawl plate 11 and two respectively with it is flexible
The telescopic rod 32 of 31 both ends grafting of cylinder, end of the telescopic rod 32 far from retracting cylinder 31 is fixedly connected with corresponding eddy flow part 2.Retracting cylinder
31 are equipped with multiple card holes 33, and multiple card holes 33 are uniformly distributed along 31 axis direction of retracting cylinder, telescopic rod 32 be equipped at least one with
The elastic lock ball 34 that card hole 33 is clamped.Retracting cylinder 31 uses six card holes 33 in the present embodiment, each telescopic rod 32 is all made of
Five elastic lock balls 34.Using telescopic rod 32 and 31 grafting of retracting cylinder, so that spacing is easy to operate between adjacent eddy flow part 2.Benefit
With elastic lock ball 34, it is convenient for telescopic rod 32 and retracting cylinder 31 is fixed.
The course of work: feeder provides air-flow to cavity 23, after air-flow shunts in cavity 23, revolves through eddy flow notch 24
Into cyclonic chamber 27, air-flow is under the action of the centrifugal force in high speed rotation in cavity 23, so that between cyclonic chamber 27 and handling substrate 12
Dead level 13 generate negative pressuren zone, convenient for by the non-contact crawl of handling substrate 12, reduce the energy consumption of handling device, improve carrying
Device suction.Using multiple eddy flow parts 2, so that 12 stable operation of handling device grasp handling substrate.Utilize multiple eddy flow notch
24, so that the suction that eddy flow part 2 generates more is uniformly distributed, improve the stability of 2 grasp handling substrate 12 of eddy flow part.
This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability
Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but
As long as all by the protection of Patent Law in the scope of the claims of the utility model.
Claims (7)
1. a kind of contactless substrate grasp handling device, it is characterized in that: being fixedly connected including barrow (1) and with barrow (1)
Crawl plate (11)；The crawl plate (11) lower surface is equipped with multiple eddy flow parts (2), and line encloses between adjacent eddy flow part (2)
Form polygonal region；The eddy flow part (2) includes main body (26) and the cavity (23) being placed in main body (26)；The main body
(26) upper surface is equipped with air supply opening (22), and air supply opening (22) one end is connected to cavity (23), and the other end is connect with feeder；Institute
Main body (26) lower surface is stated equipped with cyclonic chamber (27), cyclonic chamber (27) inner sidewall is equipped with multiple rotations being connected to cavity (23)
It flows notch (24).
2. a kind of contactless substrate grasp handling device according to claim 1, it is characterized in that: the main body (26) is equipped with
The back-out direction of four eddy flow notch (24), adjacent eddy flow notch (24) is mutually perpendicular to.
3. a kind of contactless substrate grasp handling device according to claim 1, it is characterized in that: the cyclonic chamber (27) pushes up
Wall is equipped with boss (25), and multiple eddy flow notch (24) are uniformly distributed along boss (25) surrounding.
4. a kind of contactless substrate grasp handling device according to claim 1, it is characterized in that: the eddy flow part (2) is
Cyclone (21) clockwise or counterclockwise cyclone (211), the cyclone (21) clockwise and cyclone counterclockwise (211)
The back-out of eddy flow notch (24) is contrary.
5. a kind of contactless substrate grasp handling device according to claim 4, it is characterized in that: the crawl plate (11) sets
There are four eddy flow part (2), four eddy flow parts (2) include two cyclones (21) clockwise and two cyclones (211) counterclockwise；
Two cyclones (21) clockwise and two cyclones (211) counterclockwise it is adjacent between be staggered.
6. a kind of contactless substrate grasp handling device described in -5 any one according to claim 1, it is characterized in that: adjacent institute
It states and is equipped with telescopic adjustment part (3) between eddy flow part (2), telescopic adjustment part (3) both ends are fixed with adjacent eddy flow part (2) respectively
Connection.
7. a kind of contactless substrate grasp handling device according to claim 6, it is characterized in that: the telescopic adjustment part
(3) include and the telescopic rod with retracting cylinder (31) both ends grafting respectively of crawl plate (11) retracting cylinder (31) that is fixedly connected and two
(32), the telescopic rod (32) is fixedly connected far from the end of retracting cylinder (31) with corresponding eddy flow part (2)；The retracting cylinder (31)
Equipped with multiple card holes (33), the telescopic rod (32) is equipped with the elastic lock ball (34) of at least one and card hole (33) clamping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821197197.2U CN208592862U (en) | 2018-07-27 | 2018-07-27 | A kind of contactless substrate grasp handling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821197197.2U CN208592862U (en) | 2018-07-27 | 2018-07-27 | A kind of contactless substrate grasp handling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208592862U true CN208592862U (en) | 2019-03-12 |
Family
ID=65603797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821197197.2U Expired - Fee Related CN208592862U (en) | 2018-07-27 | 2018-07-27 | A kind of contactless substrate grasp handling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208592862U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112520412A (en) * | 2020-12-11 | 2021-03-19 | 南京思达捷信息科技有限公司 | Chip production equipment with high stability |
-
2018
- 2018-07-27 CN CN201821197197.2U patent/CN208592862U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112520412A (en) * | 2020-12-11 | 2021-03-19 | 南京思达捷信息科技有限公司 | Chip production equipment with high stability |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190312 Termination date: 20190727 |