CN208588493U - Water proof type pressure sensor - Google Patents
Water proof type pressure sensor Download PDFInfo
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- CN208588493U CN208588493U CN201821100651.8U CN201821100651U CN208588493U CN 208588493 U CN208588493 U CN 208588493U CN 201821100651 U CN201821100651 U CN 201821100651U CN 208588493 U CN208588493 U CN 208588493U
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Abstract
The utility model, which provides, can be realized low thickness and can be by the water proof type pressure sensor of closing line reliably sealing.The water proof type pressure sensor of the utility model includes pressure detecting element；Shell, the edge part that there is the recess portion of installation pressure detecting element and be arranged in around recess portion；The closing line being connect with pressure detecting element；Sealing resin, height is set as to be lower from peripheral portion to central portion, pressure detecting element and closing line is set not to expose and be embedded to them in recess portion, the water proof type pressure sensor is characterized in that, when the side orthogonal with bottom surface looks up, closing line is configured at the join domain close to the edge part between the center and edge part of recess portion, in a preferred mode, using the bottom surface of recess portion as benchmark, the height of the minimum position of sealing resin is lower than the height on the vertex of the ring of closing line, and the height of the highest position of sealing resin is higher than the height on vertex.
Description
Technical field
The utility model relates to water proof type pressure sensors, are more specifically related to sealing resin covering pressure detecting member
The water proof type pressure sensor of part.
Background technique
In the case where going for water-proof function in pressure sensor, the soft sealing resin coating with gel etc. is needed
Lid pressure detecting element.The sealing resin, in solidification, peripheral portion can creep up wall surface, therefore become center portion and be recessed
Concave and solidify.
In patent document 1, it discloses the back side of sensor chip relative pressure made of gel member sealing
The pressure sensor of formula.In the pressure sensor, it is arranged in pressure entrance hole by the core of the back side sealing of sensor chip
Piece back side gel member.As the chip back side gel member, for harder gel overlay on soft gel 2
Layer construction.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2006-220456 bulletin
In the water proof type pressure sensor for being embedded to pressure sensor with this sealing resin, connect on pressure sensor
In the case where being connected to closing line, closing line is also required to be embedded to by sealing resin.But when sealing resin becomes concave,
The top section of a lower height of center portion, the ring (loop) of closing line may expose.Especially, for low thickness
Degreeization and when reducing the height of sealing resin, a possibility that closing line exposes, is higher.When closing line is not by sealing, it is likely to become
The bad reason of corrosion etc..
Utility model content
The purpose of the utility model is to provide can be realized low thickness and can be by closing line reliably sealing
Water proof type pressure sensor.
In order to solve the above problems, the water proof type pressure sensor of the utility model, has: pressure detecting element；Shell,
With the edge part installing the recess portion of pressure detecting element and being arranged in around recess portion；Closing line connects with pressure detecting element
It connects；And sealing resin, it is set as height and is lower from peripheral portion to central portion, pressure detecting element and closing line are made in recess portion
Do not expose and be embedded to them, which is characterized in that, in the direction orthogonal with the bottom surface of above-mentioned recess portion
When viewing, above-mentioned closing line is configured in join domain, and the join domain is between the central and above-mentioned edge part of above-mentioned recess portion
Above-mentioned edge part.
It, can be in the height for the sealing resin being arranged in a manner of being crept up from center to edge part according to this composition
Higher part, i.e., with avoid sealing resin production meniscus lens shapes bottom part and also be sealing resin and recess portion
The mode of the shorter part of the distance of bottom surface configures closing line, and closing line is reliably embedded in sealing resin.
In above-mentioned water proof type pressure sensor, be also possible on the basis of the bottom surface of recess portion, sealing resin it is minimum
The height of position is lower than the height on the vertex of the ring of closing line, the ring of the height of the highest position of sealing resin than closing line
The height on vertex is high.By having this composition, even if will height change from peripheral portion to central portion based on meniscus lens shapes
The sealing resin low thickness of low concave, can also make closing line not expose and be embedded to.
In above-mentioned water proof type pressure sensor, it is also possible to that the bottom surface of recess portion is provided with connecting component, pressure detecting
Element and connecting component are connected by closing line.Accordingly, the freedom degree of the layout of closing line improves, and is easy in sealing resin
Higher-height position configures closing line.
In above-mentioned water proof type pressure sensor, it is also possible to be also equipped with the circuit element be connected with pressure detecting element,
Circuit element and connecting component are connected by closing line.Accordingly, it connects with directly passing through pressure detecting element with circuit element
The case where zygonema connects is compared, and can reduce the position on the ring vertex of closing line, can be reliably embedded to sealing resin.At this
In the case of, the conducting (electrical connection) of pressure detecting element and circuit element, at least can via connecting component and closing line and into
Row.Moreover it is preferred that the closing line connecting with circuit element is being located at when the direction orthogonal with the bottom surface of recess portion is watched
One end of recess portion center side is connect with circuit element, is connect in the other end with connecting component.It is sometimes preferred that with recess portion
When the orthogonal direction in bottom surface is watched, connecting component is connect in the center side of recess portion with closing line.
In above-mentioned water proof type pressure sensor, it is also possible to be also equipped with lid, which is arranged on edge part, has
The opening that pressure is imported to pressure detecting element, is provided with reducing diameter part in the midway of the depth direction of opening.Hereby it is possible to make to bury
The height for entering the sealing resin of recess portion stops in the position of reducing diameter part.In this case, it is preferable to be integrally located in closing line
The closing line with the region of superposition of end gap in join domain.In above-mentioned region, the thickness of sealing resin relatively thickens,
Therefore the closing line for being located at the region is not easy to expose from sealing resin.
In above-mentioned water proof type pressure sensor, it is also possible to the boundary that sealing resin is set as covering edge part and lid.
Hereby it is possible to reliably cover the gap of edge part and lid by sealing resin, waterproofness can be improved.
The effect of utility model
According to the utility model, being capable of providing can be realized low thickness and can be by the anti-of closing line reliably sealing
Water type pressure sensor.
Detailed description of the invention
Fig. 1 is to illustrate the perspective view of water proof type pressure sensor of the present embodiment.
Fig. 2A is to illustrate the top view of water proof type pressure sensor of the present embodiment, and Fig. 2 B is had an X-rayed in Fig. 2A
The top view of cover.
Fig. 3 is to illustrate the cross-sectional view of water proof type pressure sensor of the present embodiment.
Fig. 4 is to illustrate the top view for the water proof type pressure sensor that reference example is related to.
Fig. 5 is to illustrate the cross-sectional view for the water proof type pressure sensor that reference example is related to.
Fig. 6 is the cross-sectional view for indicating the example for the water proof type pressure sensor low thickness for being related to reference example.
Fig. 7 is to illustrate the cross-sectional view of the water proof type pressure sensor with reducing diameter part.
Fig. 8 is to illustrate the cross-sectional view of the water proof type pressure sensor of the lid with nozzle-type.
Symbol description
1,2 ... water proof type pressure sensors
10 ... pressure detecting elements
15 ... circuit elements
20 ... shells
21 ... recess portions
The bottom surface 21a ...
22 ... edge parts
25 ... connecting components
30 ... lids
30a ... recessed portion
31 ... pressure entrance holes
35 ... reducing diameter parts
50 ... sealing resins
60 ... seal members
BW ... closing line
S1 ... middle section
S2 ... join domain
H-BW ... height
H1, h2 ... height
Specific embodiment
Hereinafter, being illustrated based on attached drawing to the embodiments of the present invention.In addition, in the following description, to same
One component is accompanied by same symbol, for illustrating primary component, is suitably illustrated to omit.
(composition of water proof type pressure sensor)
Fig. 1 is to illustrate the perspective view of water proof type pressure sensor of the present embodiment.
Fig. 2A is to illustrate the top view of water proof type pressure sensor of the present embodiment.Fig. 2 B is saturating in fig. 2
Depending on the top view covered.
Fig. 3 is to illustrate the cross-sectional view of water proof type pressure sensor of the present embodiment.Fig. 2A institute is shown in Fig. 3
The line A-A cross-sectional view shown.
Water proof type pressure sensor 1 of the present embodiment is to detect the pressure being applied with pressure detecting element 10
Sensor, and be by sealing resin 50 cover pressure detecting element 10 around to water-proof function sensing
Device.
Water proof type pressure sensor 1 has pressure detecting element 10, shell 20, closing line BW and sealing resin 50.Pressure
Power detecting element 10 is, for example, the chip part for forming diaphragm (diaphragm) by etching etc. to the semiconductor of silicon.
The edge part 22 that shell 20 has the recess portion 21 of installation pressure detecting element 10 and is arranged in around recess portion 21.Shell
Body 20 is formed for example, by the ceramics of aluminium oxide etc..In company of the formation such as bottom surface 21a of recess portion 21 as metal spraying pattern
Relay part 25.In the present embodiment, in recess portion 21 other than pressure detecting element 10 is installed, circuit element 15 is also installed.
Closing line BW is connected on pressure detecting element 10, circuit element 15, obtains the conducting with connecting component 25.
Lid 30 is set on the edge part of shell 20 22.Lid 30 passes through bonding agent, glass, the solder such as epoxy adhesive
Such grafting material and be mounted on edge part 22.Lid 30 and shell 20 are used in the same manner ceramics.Lid 30 substantially in
Centre setting pressure entrance hole 31.The diameter of pressure entrance hole 31 is smaller than the diameter of the opening of the vertical view of recess portion 21.With by lid 30
The state being mounted on shell 20, pressure entrance hole 31 are configured in the position Chong Die with recess portion 21.
Sealing resin 50 is arranged in recess portion 21.That is, sealing resin 50 will be will be installed on the pressure detecting element of recess portion 21
10, circuit element 15 and the mode of closing line BW covering are filled in recess portion 21.Sealing resin 50 is solidifying using such as fluorine gel, silicon
Glue.By sealing resin 50, pressure detecting element 10, circuit element 15 and closing line BW will not expose and be embedded in.
In the water proof type pressure sensor 1 for having this composition, using the bottom surface 21a of recess portion 21 as benchmark, setting
For the height h1 of the minimum position of sealing resin 50 is lower than the height h-BW on the vertex of the ring of closing line BW, sealing resin
Height h-BW high of the height h2 of 50 highest position than vertex.That is, the height h- BW on the vertex of the ring of closing line BW
Between the height h1 of the minimum position of sealing resin 50 and the height h2 of highest position.
Here, sealing resin 50 is set as concave (shape being recessed from periphery to central portion) in recess portion 21.That is, will
When the soft sealing resin 50 of gel etc. is poured into recess portion 21 and is allowed to solidify, the peripheral portion meeting of sealing resin 50 when solidifying
The wall surface to edge part 22 is crept up, therefore becomes central portion recess, the concave that peripheral portion thickens and solidification.
In order to cover ring vertex and the low thickness of closing line BW always in the sealing resin 50 for becoming this shape
Change, is laid out in such a way that closing line BW is not located at the central portion for the sealing resin 50 that height is lower.In the present embodiment, exist
When the direction orthogonal with the bottom surface 21a of recess portion 21 is watched, in the outside of the middle section S1 of sealing resin 50, i.e., than recess portion 21
Center closer to edge part 22 join domain S2 configure closing line BW.
The diameter of the opening of pressure entrance hole 31 relative to lid 30, the diameter of middle section S1 be 30% or more 60% with
Lower degree, join domain S2 are the regions more more outward than middle section S1.According to this composition, even if making height from periphery
50 low thickness of sealing resin that portion is lower to central portion, also can make closing line BW not expose and be embedded to.That is, avoiding sealing
Though a lower height of middle section S1 of resin 50, it is being located at the envelope being arranged in a manner of creeping up from center to edge part
Gu the join domain S2 of the higher-height part of resin 50 configures closing line BW, so as to seek reliably to be embedded to and energy
Enough seek the low thickness of sealing resin 50.
Here, if be used to form the material of sealing resin 50 and overlay condition be it is common, be formed by sealing tree
The shape of the concave-convex lens of rouge 50 is that the depth of the smaller then recess portion of the diameter of the upper end is more shallow.If the depth shallower of recess portion,
A possibility that closing line BW is prominent from sealing resin 50 is lower.Also, the diameter of the upper end of sealing resin 50, according to lid 30
It determines in the opening of pressure entrance hole 31 with the diameter of the part of the upper-end contact of sealing resin 50.Therefore, the pressure of lid 30
The diameter of the opening of power entrance hole 31 is smaller, then the diameter of the upper end of sealing resin 50 is easier becomes smaller.Therefore, according to making to engage
The viewpoint that line BW is reduced a possibility that prominent from sealing resin 50, the preferably diameter of the opening of the pressure entrance hole 31 of lid 30 compared with
It is small.Specifically, the area of the opening of the pressure entrance hole 31 of lid 30, relative to the floor space of recess portion 21, sometimes for 60% with
Under be preferred, be sometimes preferred for 50% or less.
As shown in Figure 2 B, in water proof type pressure sensor 1 of the present embodiment, at the bottom of the recess portion 21 of shell 20
Pressure detecting element 10 and circuit element 15 is arranged side by side in face 21a, and connecting component 25 is configured with around them.Pressure inspection
The conducting (electrical connection) for surveying element 10 and circuit element 15, at least carries out via connecting component 25 and closing line BW.It is specific and
Speech, pressure detecting element 10 are connect with connecting component 25 by closing line BW, and circuit element 15 is with connecting component 25 by connecing
Zygonema BW and connect, the connecting component 25 being electrically connected with pressure detecting element 10 and the interconnecting piece being electrically connected with circuit element 15
Part 25 is electrically connected by the wiring set by the inside of shell 20 (not shown).By using this connection, can reduce
The height on the vertex of the ring for the closing line BW being connect with pressure detecting element 10, circuit element 15, water proof type pressure sensor 1
More easily realize the requirement for coping with low thickness.
In addition, as shown in Figure 2 B, in water proof type pressure sensor 1 of the present embodiment, connecting with circuit element 15
The closing line BW connect when overlooking when the direction orthogonal with the bottom surface 21a of recess portion 21 is watched, is being located at 21 center side of recess portion
One end is connect with circuit element 15, is connect in the other end with connecting component 25.If being configured so that closing line BW, with circuit elements
The closing line BW that part 15 connects is not easy centrally located region S1, therefore closing line BW a possibility that exposing from sealing resin 50 is more
It steadily reduces, is preferred.
Also, as shown in Figure 2 B, in water proof type pressure sensor 1 of the present embodiment, connecting component 25,
In the center side of recess portion 21, that is, side middle section S1 when vertical view, it is connect with closing line BW.Connecting component 25 with this configuration make
Opposite shorten of closing line BW becomes easy.Closing line BW is longer, then the height on the vertex of the ring of closing line BW is also easier gets higher,
Therefore closing line BW is not easy to expose from sealing resin 50 in this composition.In addition, being connect in connecting component 25 with closing line BW
Part opposite side, i.e. the part of 22 side of edge part of shell 20 is provided with the interconnecting piece with the wiring in shell 20.
Also, as shown in Figure 2 B, in water proof type pressure sensor 1 of the present embodiment, in closing line BW, have
It is integrally located at the closing line in join domain S2 with the region of the superposition of end gap of lid 30.In other words, it is integrally located at join domain S2
In with the closing line BW in the region of the superposition of end gap of lid 30 be 1 or more.In join domain S2 with the area of the superposition of end gap of lid 30
Domain is that in contrast sealing resin 50 is easy to become most thick region, therefore configures the closing line BW in the region, is not easy from envelope
Gu resin 50 exposes.In addition, in the present embodiment, middle section S1 is defined as, the area at the center including recess portion 21 is overlooked
Domain and be the duplicate region not occurred with closing line BW.
(reference example)
Fig. 4 is to illustrate the top view for the water proof type pressure sensor that reference example is related to.
Fig. 5 is to illustrate the cross-sectional view for the water proof type pressure sensor that reference example is related to.B- shown in Fig. 4 is shown in Fig. 5
B line cross-sectional view.
In the water proof type pressure sensor 2 that reference example is related to, with water proof type pressure sensor 1 of the present embodiment
Similarly, have pressure detecting element 10, shell 20, closing line BW and sealing resin 50, but closing line BW is also disposed on center
Region S1.In water proof type pressure sensor 2, the usage amount of sealing resin 50 is set, so that the engagement of centrally located region S1
Line BW is not prominent from sealing resin 50.As a result, the height of lid 30 is got higher, 2 nothing of water proof type pressure sensor shown in fig. 5
The requirement of method reply low thickness.
Fig. 6 is to illustrate the cross-sectional view of the example for the water proof type pressure sensor low thickness for being related to reference example.
About water proof type pressure sensor 2 shown in fig. 5, a scheme for coping with the requirement of low thickness is to drop
The height of low lid 30 and the amount for reducing the sealing resin 50 being embedded to the recess portion 21 of shell 20.But it is constructed in this way
Change when, the height of the few thus central portion of the quantitative change of sealing resin 50 becomes lower, and as shown in Figure 6, is configured at
Expose from sealing resin 50 at the ring top part of the closing line BW in centre portion.It, can when such closing line BW exposes from sealing resin 50
The bad of corrosion etc. can occur.Therefore, the amount for reducing sealing resin 50 is difficult, as a result, cannot achieve sufficient low thickness
Degreeization.
As in the present embodiment, it avoids middle section S1 and configures closing line BW in the join domain S2 on its periphery, from
And even if reducing the amount of sealing resin 50 to which the height of the sealing resin 50 of middle section S1 is lower, it is sealed in join domain S2
Gu the height of resin 50 be also the ring top part that can cover closing line BW always until height, also it is possible to realize low thickness
Change and is stood with the two of the sufficient sealing of closing line BW.
In addition, not being the water proof type pressure being related to such as reference example in water proof type pressure sensor 1 of the present embodiment
Force snesor 2 is directly connect by closing line BW like that, by pressure detecting element 10 with circuit element 15, but is passed through respectively
Connecting component 25 is connected with closing line BW.Connecting component 25 is set to the bottom surface 21a of recess portion 21, thus by with the interconnecting piece
Part 25 connects, and can reduce the height on the ring top of closing line BW.In addition, by the way that connecting component 25 is configured at join domain S2,
It can be improved the freedom degree of the layout of closing line BW.Accordingly, it is easy in the configuration engagement of the higher-height position of sealing resin 50
Line BW.
In addition, sealing resin 50 is preferably arranged to the edge part 22 of covering shell 20 and the boundary of lid 30.Edge part 22 with
Although lid 30 is connected by bonding agent, when generating gap between the two, sufficient waterproofness can not be also played sometimes.Cause
This, it is more top than edge part 22 and the boundary of lid 30 by being filled into always sealing resin 50, thus sealing resin 50
It enters in the gap on boundary, can be improved the waterproofness in gap.Furthermore it is possible to improve the engagement between edge part 22 and lid 30
Intensity.
Fig. 7 is to illustrate the cross-sectional view of the water proof type pressure sensor with reducing diameter part.
Depth direction in water proof type pressure sensor 1 shown in Fig. 7, in the opening (pressure entrance hole 31) of lid 30
Midway be provided with reducing diameter part 35.The internal diameter of reducing diameter part 35, the internal diameter than opening (pressure entrance hole 31) are small.Reducing diameter part 35 be
The convex portion of the midway setting of the inner wall of opening (pressure entrance hole 31).
It, can be in reducing diameter part when filling sealing resin 50 to recess portion 21 if being provided with reducing diameter part 35 on lid 30
35 position stops.That is, the peripheral portion of sealing resin 50 can be along recess portion 21, opening when filling sealing resin 50 and solidifying
The inner wall of (pressure entrance hole 31) is crept up, but by being provided with reducing diameter part 35, can make the sealing resin 50 crept up
Stop in the position of reducing diameter part 35.Hereby it is possible to which the opening (pressure entrance hole 31) to recess portion 21 and lid 30 reliably injects rule
Quantitative sealing resin 50.In addition, reducing diameter part 35 is the smallest portion of opening split shed area of the pressure entrance hole 31 of lid 30
Point, so the upper end by sealing resin 50 is located at the part, the recess portion of the meniscus lens shapes of sealing resin 50 can be made
Depth shallower can more stably reduce a possibility that closing line BW is prominent from sealing resin 50.
Fig. 8 is to illustrate the cross-sectional view of the water proof type pressure sensor of the lid with nozzle-type.
In water proof type pressure sensor 1 shown in Fig. 8, the lid 30 being connected on edge part 22 is nozzle-type.It is spraying
The midway of the lid 30 of mouth formula is provided with recessed portion 30a, is equipped with the seal member 60 of O-ring etc. in recessed portion 30a.It will prevent
In the case that water type pressure sensor 1 is installed on object, the lid 30 and object of nozzle-type connect via seal member 60
It connects.
Setting is just like step as recessed portion 30a on lid 30, so as to carry out water proof type pressure using the step
The positioning of sensor 1.That is, correctly installing the step and shell 20 of lid 30 when lid 30 is installed in the edge part of shell 20 22
Positional relationship.As a result, when water proof type pressure sensor 1 is installed on object, on the basis of the position of the step of lid 30, from
And object and the positional relationship of pressure detecting element 10 can be made correctly to align.
As described above, by present embodiment, being capable of providing can be realized low thickness and can will engage
The water proof type pressure sensor 1 of line BW reliably sealing.
In addition, present embodiment is illustrated among the above, but the utility model is not limited to these examples.Example
Such as, for embodiment above-mentioned, after those skilled in the art suitably carry out the addition, deletion, design alteration of constituent element
Embodiment, the embodiment by the feature of the configuration example of each embodiment after appropriately combined, as long as having the utility model
Objective, be just contained in the scope of the utility model.
Claims (11)
1. a kind of water proof type pressure sensor, has:
Pressure detecting element；
Shell has the recess portion for installing above-mentioned pressure detecting element and the edge part being arranged in around above-mentioned recess portion；
Closing line is connect with above-mentioned pressure detecting element；
Sealing resin, be set as height be lower from peripheral portion to central portion, make in above-mentioned recess portion above-mentioned pressure detecting element and
Above-mentioned closing line does not expose and is embedded to them,
Above-mentioned water proof type pressure sensor is characterized in that,
When the direction orthogonal with the bottom surface of above-mentioned recess portion is watched, above-mentioned closing line is configured in join domain, the join domain
Close to the central above-mentioned edge part between above-mentioned edge part of above-mentioned recess portion.
2. water proof type pressure sensor according to claim 1, which is characterized in that
Using the above-mentioned bottom surface of above-mentioned recess portion as benchmark, the height of the minimum position of above-mentioned sealing resin is than above-mentioned closing line
The height on the vertex of ring is low, and the height of the highest position of above-mentioned sealing resin is higher than the height on above-mentioned vertex.
3. water proof type pressure sensor according to claim 1 or 2, which is characterized in that
In the above-mentioned bottom surface of above-mentioned recess portion, it is provided with connecting component,
Above-mentioned pressure detecting element is connect with above-mentioned connecting component by above-mentioned closing line.
4. water proof type pressure sensor according to claim 3, which is characterized in that
It is also equipped with the circuit element be connected with above-mentioned pressure detecting element,
Foregoing circuit element is connect with above-mentioned connecting component by above-mentioned closing line.
5. water proof type pressure sensor according to claim 4, which is characterized in that
The conducting of above-mentioned pressure detecting element and foregoing circuit element, at least via above-mentioned connecting component and above-mentioned closing line and into
Row.
6. water proof type pressure sensor according to claim 4 or 5, which is characterized in that
When the direction orthogonal with the bottom surface of above-mentioned recess portion is watched, the above-mentioned closing line connecting with foregoing circuit element is positioned at upper
The one end for stating the center side of recess portion is connect with foregoing circuit element, is connect in the other end with above-mentioned connecting component.
7. water proof type pressure sensor according to claim 3, which is characterized in that
When the direction orthogonal with the bottom surface of above-mentioned recess portion is watched, above-mentioned connecting component is connect in the center side of above-mentioned recess portion with above-mentioned
Zygonema connection.
8. water proof type pressure sensor according to claim 1 or 2, which is characterized in that
It is also equipped with lid, which is arranged on above-mentioned edge part, and has the opening that pressure is imported to above-mentioned pressure detecting element.
9. water proof type pressure sensor according to claim 8, which is characterized in that
In above-mentioned closing line, there is the closing line being integrally located in above-mentioned join domain with the region of above-mentioned superposition of end gap.
10. water proof type pressure sensor according to claim 8, which is characterized in that
In the midway of the depth direction of the above-mentioned opening of above-mentioned lid, it is provided with reducing diameter part.
11. water proof type pressure sensor according to claim 8, which is characterized in that
Above-mentioned sealing resin is set as covering above-mentioned edge part and the boundary of above-mentioned lid.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017003445U JP3212911U (en) | 2017-07-27 | 2017-07-27 | Waterproof pressure sensor |
| JP2017-003445U | 2017-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208588493U true CN208588493U (en) | 2019-03-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821100651.8U Active CN208588493U (en) | 2017-07-27 | 2018-07-12 | Water proof type pressure sensor |
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| Country | Link |
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| JP (1) | JP3212911U (en) |
| CN (1) | CN208588493U (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019176527A1 (en) | 2018-03-15 | 2019-09-19 | 株式会社村田製作所 | Semiconductor device and electronic device |
| WO2022102234A1 (en) * | 2020-11-16 | 2022-05-19 | 株式会社村田製作所 | Semiconductor device and electronic apparatus |
| WO2022137702A1 (en) * | 2020-12-23 | 2022-06-30 | 株式会社村田製作所 | Semiconductor device and electronic device |
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2017
- 2017-07-27 JP JP2017003445U patent/JP3212911U/en active Active
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- 2018-07-12 CN CN201821100651.8U patent/CN208588493U/en active Active
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| JP3212911U (en) | 2017-10-05 |
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Address after: Tokyo, Japan, Japan Patentee after: Alpine Alpine Company Address before: Tokyo, Japan, Japan Patentee before: Alps Electric Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder |