CN208574427U - Emission-control equipment and vacuum coating system - Google Patents

Abstract

The utility model provides a kind of emission-control equipment and vacuum coating system.Wherein, emission-control equipment is for removing and recycling the arsenic in exhaust gas, including condensation part and scraper portion, the air inlet that condensation part has condensation chamber and is connected to condensation chamber, exhaust outlet and discharge gate, condensation part is used to cool down to being passed through the exhaust gas in condensation chamber by air inlet, so that being cooled on the inner wall for condense in condensation chamber in exhaust gas in gaseous arsenic forms solid-state arsenic, scraper portion is rotatably arranged in condensation chamber, and the part of the surface in scraper portion is abutted with the inner wall of condensation chamber, scraper portion rotates and scrapes the solid-state arsenic on the inner wall for condensing in condensation chamber, the solid-state arsenic scraped is discharged by discharge gate.The utility model solves emission-control equipment in the prior art when removing and recycling the arsenic in exhaust gas, the excessively high problem of economic cost.

Description

Emission-control equipment and vacuum coating system

Technical field

The utility model relates to technical field of waste gas treatment, in particular to a kind of emission-control equipment and Vacuum Deposition Membranous system.

Background technique

Contain arsenic in the exhaust gas that vacuum coating equipment generates, directly the arsenic in exhaust gas is emitted into external environment, will lead to Environment is polluted, the health of the mankind is endangered.

In the prior art in order to solve this technical problem, strong oxidizer aqueous solution spray exhaust gas, and additional height are generallyd use The mode of fast centrifugal device separates and collects the arsenic in exhaust gas, and the program needs to consume chemical reagent, to cause at exhaust gas The economic cost of reason is higher, in addition, the program can also generate waste water and water-containing waste gas, to increase the subsequent place of exhaust-gas treatment Step is managed, the economic cost of exhaust-gas treatment is further increased.

Utility model content

The main purpose of the utility model is to provide a kind of emission-control equipment and vacuum coating systems, existing to solve Emission-control equipment in technology is when removing and recycling the arsenic in exhaust gas, the excessively high problem of economic cost.

To achieve the goals above, one aspect according to the present utility model provides a kind of emission-control equipment, is used for It removes and recycles the arsenic in exhaust gas, comprising: condensation part, condensation part have condensation chamber and the air inlet being connected to condensation chamber, exhaust Mouthful and discharge gate, condensation part is used to cool down to being passed through the exhaust gas in condensation chamber by air inlet, so as to be in gaseous state in exhaust gas Arsenic be cooled on the inner wall for condense in condensation chamber and form solid-state arsenic；Scraper portion, scraper portion are rotatably arranged in condensation chamber, And the part of the surface in scraper portion is abutted with the inner wall of condensation chamber, scraper portion rotates and will condense on the inner wall of condensation chamber Solid-state arsenic scrapes, and the solid-state arsenic scraped is discharged by discharge gate.

Further, condensation chamber is cylindrical, and scraper portion is material scraping plate, the length of material scraping plate and the diameter of condensation chamber or half Diameter is identical, and the thickness of material scraping plate is identical as the height of condensation chamber, and at least one air hole is offered on material scraping plate.

Further, discharge gate is located at the bottom of condensation part in the vertical direction.

Further, condensation part also has overcurrent chamber, inlet and leakage fluid dram, wherein overcurrent chamber is set with condensation chamber interval It sets, inlet and leakage fluid dram are connected to overcurrent chamber, and refrigerant flows successively through inlet, overcurrent chamber and leakage fluid dram, to control condensation Intracavitary temperature.

Further, condensation part includes: cylinder；Two cover boards, two cover boards cover respectively to be set at both ends of the cylinder body, two lids Condensation chamber is surrounded between plate and cylinder；Overcurrent chamber is formed on cylinder and/or at least one cover board.

Further, mounting hole is offered on cover board, emission-control equipment further includes driving portion, and driving portion includes: shell, One end of shell is connect with condensation part, and is located at mounting hole；Actuator, actuator are arranged in the other end of shell and by wearing The intracorporal drive shaft of shell is located to connect with scraper portion；Bearing, bearing are mounted in shell, and the position punishment at the both ends of drive shaft It is not provided with a bearing.

Further, emission-control equipment further includes sealing flange, and shell passes through the connection of sealing flange and cover board；Shell There is the magnetic fluid for sealing between drive shaft.

Another aspect according to the present utility model provides a kind of vacuum coating system, comprising: vacuum coating equipment, vacuum Coating machine has Waste gas outlet；The air inlet of emission-control equipment, emission-control equipment is connected with Waste gas outlet, exhaust gas Processing unit is above-mentioned emission-control equipment.

Using the technical solution of the utility model, condensation part has condensation chamber and the air inlet being connected to condensation chamber and exhaust Mouthful, exhaust gas is passed through in condensation chamber by air inlet, condensation part cools down to exhaust gas, makes to be condensed in exhaust gas in gaseous arsenic Knot forms solid-state arsenic on the inner wall of condensation chamber, and later, scraper portion rotates and scrapes solid-state arsenic, the solid-state arsenic scraped It is expelled to outside condensation chamber by discharge gate under gravity, the exhaust gas of arsenic removal is gone to be expelled to outside condensation chamber by exhaust outlet.This Shen The emission-control equipment that please be provided is structurally simple, economical at low cost, can be effectively removed and recycle the arsenic in exhaust gas.

Detailed description of the invention

The accompanying drawings constituting a part of this application is used to provide a further understanding of the present invention, this is practical Novel illustrative embodiments and their description are not constituteed improper limits to the present invention for explaining the utility model. In the accompanying drawings:

Fig. 1 shows a kind of structural schematic diagram of the emission-control equipment of alternative embodiment according to the present utility model；

Fig. 2 shows the partial cutaway view schematics of the emission-control equipment in Fig. 1.

Wherein, the above drawings include the following reference numerals:

10, condensation part；11, condensation chamber；12, air inlet；13, exhaust outlet；14, discharge gate；15, overcurrent chamber；16, cylinder； 17, cover board；171, mounting hole；20, scraper portion；21, air hole；30, driving portion；31, shell；32, actuator；33, bearing； 34, drive shaft；40, sealing flange；50, magnetic fluid.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Be to the description only actually of at least one exemplary embodiment below it is illustrative, never as to this is practical Novel and its application or any restrictions used.Based on the embodiments of the present invention, those of ordinary skill in the art are not having Every other embodiment obtained under the premise of creative work is made, is fallen within the protection scope of the utility model.

In order to solve emission-control equipment in the prior art when removing and recycling the arsenic in exhaust gas, economic cost is excessively high The problem of, the utility model provides a kind of emission-control equipment and vacuum coating system, wherein vacuum coating system includes upper It states and following emission-control equipments.

As depicted in figs. 1 and 2, for removing and recycling the emission-control equipment of the arsenic in exhaust gas, including 10 He of condensation part Scraper portion 20, air inlet 12, exhaust outlet 13 and the discharge gate 14 that condensation part 10 has condensation chamber 11 and is connected to condensation chamber 11 are cold Solidifying portion 10 is for cooling down to the exhaust gas being passed through in condensation chamber 11 by air inlet 12, so as to be cooled in exhaust gas in gaseous arsenic Formation solid-state arsenic on the inner wall of condensation chamber 11 is condensed in, scraper portion 20 is rotatably arranged in condensation chamber 11, and scraper portion 20 part of the surface is abutted with the inner wall of condensation chamber 11, and scraper portion 20 rotates and will condense on the inner wall of condensation chamber 11 Solid-state arsenic scrapes, and the solid-state arsenic scraped is discharged by discharge gate 14.

In this application, air inlet 12 and exhaust outlet 13 that condensation part 10 has condensation chamber 11 and is connected to condensation chamber 11, Exhaust gas is passed through in condensation chamber 11 by air inlet 12, condensation part 10 cools down to exhaust gas, so that the arsenic in exhaust gas is cooled and condenses in On the inner wall of condensation chamber 11, solid-state arsenic is formed, later, scraper portion 20 rotates and scrapes solid-state arsenic, the solid-state arsenic scraped It is expelled to outside condensation chamber by discharge gate 14 under gravity, the exhaust gas of arsenic removal is gone to be expelled to condensation chamber 11 by exhaust outlet 13 Outside.Emission-control equipment provided by the present application is structurally simple, economical at low cost, can be effectively removed and recycle in exhaust gas Arsenic.

In addition, emission-control equipment provided by the present application is compared with emission-control equipment in the prior art, the application is adopted With physical method, chemical reagent is not needed, waste water and water-containing waste gas will not be generated, to reduce the warp of emission-control equipment Ji cost, recycles the solid-state arsenic on the inner wall for condensing in condensation chamber 11 by scraper portion 20, compared with the prior art In high speed centrifugation device technical solution that arsenic is recycled compare, the application has structure simply and easy to operate spy Point.

In this application, the temperature controlled in condensation chamber 11 is lower than the freezing point of arsenic, to keep the gaseous state arsenic in exhaust gas solidifying Become the solid-state arsenic for the sheet being attached on the inner wall of condensation chamber 11.

As shown in Figure 1, condensation chamber 11 is cylindrical, scraper portion 20 is material scraping plate, length and the condensation chamber 11 of material scraping plate Diameter or radius are identical, and the thickness of material scraping plate is identical as the height of condensation chamber 11, and at least one is offered on material scraping plate thoroughly Stomata 21.In this way, control material scraping plate rotation, the surface at the both ends of the thickness direction of material scraping plate and material scraping plate length direction The surface abutted against with the inner wall of condensation chamber 11 scrapes the solid-state arsenic on the inner wall for condensing in condensation chamber 11.In addition, At least one air hole 21 is offered on material scraping plate, exhaust gas can be flowed in the two sides of material scraping plate by air hole 21, be scraped Solid-state arsenic also can pass through under gravity air hole 21 and fall directly into discharge gate 14 or fall at discharge gate 14.

As shown in Figure 1, discharge gate 14 is located at the bottom of condensation part 10 in the vertical direction.In this way, the solid-state arsenic scraped Can be under gravity to the congregate of condensation part 10, and be successfully expelled under gravity by discharge gate 14 Outside condensation chamber 11.

As depicted in figs. 1 and 2, condensation part 10 also have overcurrent chamber 15, inlet and leakage fluid dram, wherein overcurrent chamber 15 with The setting of the interval of condensation chamber 11, inlet and leakage fluid dram are connected to overcurrent chamber 15, and refrigerant flows successively through inlet, 15 and of overcurrent chamber Leakage fluid dram, to control the temperature in condensation chamber 11.In this way, by being cyclically passed through refrigerant into overcurrent chamber 15, to control cold Temperature in solidifying chamber 11, and then realize and cool down to the exhaust gas in condensation chamber 11.

As shown in Figure 1, condensation part 10 includes cylinder 16 and two cover boards 17, two cover boards 17 cover be located at cylinder 16 respectively Both ends surround condensation chamber 11 between two cover boards 17 and cylinder 16；Overcurrent chamber 15 is formed in cylinder 16 and/or at least one cover board On 17.

In the alternative embodiment of Fig. 1, spaced air inlet 12, exhaust outlet 13 and discharge gate are offered on cylinder 16 14 and air inlet 12 and exhaust outlet 13 be oppositely arranged, discharge gate 14 relative to exhaust outlet 13 close to air inlet 12 be arranged.It is using When, discharge gate 14 is located at the bottom of cylinder 16 in the vertical direction, to enable the solid-state arsenic scraped in the effect of gravity Under successfully from discharge gate 14 be discharged.Exhaust gas fills during by air inlet 12 to exhaust outlet 13 with the interior wall of condensation chamber 11 Tap touching, since the temperature in condensation chamber 11 is lower than the freezing point of arsenic, so that the gaseous state arsenic in exhaust gas be made to be condensed into consolidating for sheet State arsenic has been attached on the inner wall of condensation chamber 11.

Optionally, air inlet 12 is provided with inlet flange, and exhaust outlet 13 is provided with exhaust flange, is provided at discharge gate 14 Discharge flange, in this way, emission-control equipment can be easily attached with other devices by flange.

Optionally, the angle between air inlet 12 and exhaust outlet 13 is more than or equal to 170 ° and is less than or equal to 190 °, air inlet Angle between 12 and discharge gate 14 is more than or equal to 15 ° and is less than or equal to 45 °.

Preferably, the angle between air inlet 12 and exhaust outlet 13 is 180 °, in this way, being entered convenient for exhaust gas by air inlet 12 In condensation chamber 11, and it is expelled to outside condensation chamber 11 by exhaust outlet 13, the angle between air inlet 12 and discharge gate 14 is 30 °, this Sample, for setting inlet flange, exhaust flange and discharge flange, there are installation spaces.

Optionally, air inlet 12 and/or exhaust outlet 13 are multiple, wherein air inlet 12 is identical as the quantity of exhaust outlet 13 Or it is different.

In the embodiment not shown of the application one, spaced air inlet 12 and discharge gate are offered on a cover board 17 14, exhaust outlet 13 is offered on another cover board 17.

As depicted in figs. 1 and 2, mounting hole 171 is offered on cover board 17, emission-control equipment further includes driving portion 30, is driven Dynamic portion 30 includes shell 31, actuator 32, bearing 33 and drive shaft 34, and one end of shell 31 is connect with condensation part 10, and is located at At mounting hole 171, the other end of shell 31 and drive shaft 34 and scraper by being threaded through in shell 31 is arranged in actuator 32 Portion 20 connects, and bearing 33 is mounted in shell 31, and a bearing 33 is respectively arranged at the position at the both ends of drive shaft 34.It can Selection of land, the tube structure that condensation part 10 is integrated, driving portion 30 are mounted on the top of cylinder, and solid-state arsenic is arranged via the bottom of cylinder Out.

Optionally, actuator 32 be motor, hydraulic motor perhaps rotary cylinder by control motor, hydraulic motor or Rotary cylinder starting, motor, hydraulic motor or rotary cylinder drive scraper portion 20 to rotate by drive shaft 34.In Fig. 1 and Fig. 2 In the alternative embodiment shown, actuator 32 is rotary cylinder.

As depicted in figs. 1 and 2, emission-control equipment further includes sealing flange 40, and shell 31 passes through sealing flange 40 and lid The connection of plate 17；There is the magnetic fluid 50 for sealing between shell 31 and drive shaft 34.In this way, driving portion 30 and condensation part 10 it Between be provided with sealing flange 40, have the magnetic fluid 50 for sealing between shell 31 and drive shaft 34, by be arranged dual-seal, Avoid toxic exhaust gas diffusion into external environment, to make emission-control equipment that there is good safety in utilization.

Present invention also provides a kind of vacuum coating system, including vacuum coating equipment and emission-control equipment, vacuum coatings Machine has Waste gas outlet, and the air inlet 12 of emission-control equipment is connected with Waste gas outlet, and emission-control equipment is above-mentioned Emission-control equipment.In this way, vacuum coating system provided by the present application, in the production process that GaAs is plated in substrate, The exhaust gas including arsenic is generated, the air inlet 12 of emission-control equipment is connected with Waste gas outlet, produces vacuum coating system Raw exhaust gas is passed through in emission-control equipment, is removed and is recycled arsenic.

Optionally, vacuum coating system further includes the filter for going arsenic removal, useless by handling through emission-control equipment Gas is passed through filter again, further handles arsenic remaining in exhaust gas, further improves vacuum coating system Environmental-protecting performance.In addition, not needing to be replaced as frequently as filter core since the arsenic of the processing of filter is less, to reduce Vacuum Deposition The economic cost of the processing exhaust gas of membranous system.

It is manually replaced since replacement filter core needs to control after vacuum coating equipment stops working, the labour of the worker increased is strong Degree, endangers the health of worker, influences the production efficiency of vacuum coating equipment, vacuum coating system provided by the present application does not need Frequently replacement filter core reduces the economic cost of vacuum coating system to be conducive to be promoted the production efficiency of vacuum coating equipment.

Operating method for operating above-mentioned emission-control equipment includes the following steps: step S1, control condensation part 10 The temperature of condensation chamber 11 is lower than the freezing point of arsenic；Exhaust gas is passed through in condensation chamber 11 by step S2 by the air inlet 12 of condensation part 10, So as to be in the inner wall face contact of gaseous arsenic and condensation chamber 11 in exhaust gas and condense on the inner wall of condensation chamber 11, formed solid State arsenic, treated, and exhaust gas is expelled to outside condensation chamber 11 by the exhaust outlet 13 of condensation part 10；Step S3 controls emission-control equipment Driving portion 30 start, driving scraper portion 20 rotates, and the rotation of scraper portion 20 is by consolidating on the inner wall for condensing in condensation chamber 11 State arsenic is expelled to outside condensation chamber 11 by discharge gate 14 under gravity after scraping.

Emission-control equipment provided by the present application has the advantage that avoiding use is chemically removed, saving Reagent is learned, consumption of raw materials is reduced；It needs not to be removed that condenser is manually removed, reduces labor intensity of workers, reduce shutdown Maintenance time；It avoids worker to contact with arsenic, improves the safety in utilization of emission-control equipment；Complement filter device in use, Filter element life can be significantly increased, reduce the replacement frequency of the filter core of filter；With good sealing performance, exhaust gas is avoided It leaks.

It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.

Unless specifically stated otherwise, positioned opposite, the digital table of the component and step that otherwise illustrate in these embodiments Up to the unlimited the scope of the utility model processed of formula and numerical value.Simultaneously, it should be appreciated that for ease of description, each shown in attached drawing The size of a part is not to draw according to actual proportionate relationship.For skill known to person of ordinary skill in the relevant Art, method and apparatus may be not discussed in detail, but in the appropriate case, and the technology, method and apparatus should be considered as awarding Weigh part of specification.In shown here and discussion all examples, any occurrence should be construed as merely example Property, not as limitation.Therefore, the other examples of exemplary embodiment can have different values.It should also be noted that similar Label and letter similar terms are indicated in following attached drawing, therefore, once be defined in a certain Xiang Yi attached drawing, then with In attached drawing afterwards do not need that it is further discussed.

In the description of the present invention, it should be understood that the noun of locality such as " front, rear, top, and bottom, left and right ", " laterally, Vertically, vertically, it is horizontal " and " pushing up, bottom " etc. indicated by orientation or positional relationship be normally based on orientation or position shown in the drawings Relationship is set, is merely for convenience of describing the present invention and simplifying the description, in the absence of explanation to the contrary, these nouns of locality Do not indicate that and imply that signified device or element must have a particular orientation or be constructed and operated in a specific orientation, because This should not be understood as the limitation to scope of protection of the utility model；The noun of locality " inside and outside " refers to the wheel relative to each component itself Wide is inside and outside.

For ease of description, spatially relative term can be used herein, as " ... on ", " ... top ", " ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy The spatial relation of sign.It should be understood that spatially relative term is intended to comprising the orientation in addition to device described in figure Except different direction in use or operation.For example, being described as if the device in attached drawing is squeezed " in other devices It will be positioned as " under other devices or construction after part or construction top " or the device of " on other devices or construction " Side " or " under other devices or construction ".Thus, exemplary term " ... top " may include " ... top " and " in ... lower section " two kinds of orientation.The device can also be positioned with other different modes and (is rotated by 90 ° or in other orientation), and And respective explanations are made to the opposite description in space used herein above.

In addition, it should be noted that, limiting components using the words such as " first ", " second ", it is only for be convenient for Corresponding components are distinguished, do not have Stated otherwise such as, there is no particular meanings for above-mentioned word, therefore should not be understood as to this The limitation of utility model protection range.

It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet Include " when, indicate existing characteristics, step, work, device, component and/or their combination.

It should be noted that the description and claims of this application and term " first " in above-mentioned attached drawing, " Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way Data be interchangeable under appropriate circumstances, so that presently filed embodiment described herein can be in addition to illustrating herein Or the sequence other than those of description is implemented.

The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.

Claims (8)

1. a kind of emission-control equipment, for removing and recycling the arsenic in exhaust gas characterized by comprising

Condensation part (10), the air inlet that the condensation part (10) has condensation chamber (11) and is connected to the condensation chamber (11) (12), exhaust outlet (13) and discharge gate (14), the condensation part (10) is for being passed through the condensation to by the air inlet (12) Exhaust gas in chamber (11) cools down, so that being cooled in the exhaust gas in gaseous arsenic condenses in the interior of the condensation chamber (11) Solid-state arsenic is formed on wall surface；

Scraper portion (20), the scraper portion (20) is rotatably arranged in the condensation chamber (11), and the scraper portion (20) Part of the surface abutted with the inner wall of the condensation chamber (11), the scraper portion (20) rotation and the condensation chamber will be condensed in (11) the solid-state arsenic on inner wall scrapes, and the solid-state arsenic scraped is discharged by the discharge gate (14).

2. emission-control equipment according to claim 1, which is characterized in that the condensation chamber (11) is cylindrical, described Scraper portion (20) is material scraping plate, and the length of the material scraping plate is identical as the diameter of the condensation chamber (11) or radius, and described is scraped The thickness of flitch is identical as the height of the condensation chamber (11), and at least one air hole (21) is offered on the material scraping plate.

3. emission-control equipment according to claim 1, which is characterized in that the discharge gate (14) position in the vertical direction In the bottom of the condensation part (10).

4. emission-control equipment according to claim 1, which is characterized in that the condensation part (10) also has overcurrent chamber (15), inlet and leakage fluid dram, wherein the overcurrent chamber (15) and the condensation chamber (11) interval be arranged, the inlet and The leakage fluid dram is connected to the overcurrent chamber (15), and refrigerant flows successively through the inlet, the overcurrent chamber (15) and described Leakage fluid dram, to control the temperature in the condensation chamber (11).

5. emission-control equipment according to claim 4, which is characterized in that the condensation part (10) includes:

Cylinder (16)；

Two cover boards (17), two cover boards (17) cover the both ends for being located at the cylinder (16), two cover boards respectively (17) it is surrounded between the cylinder (16) condensation chamber (11)；

The overcurrent chamber (15) is formed on the cylinder (16) and/or at least one described cover board (17).

6. emission-control equipment according to claim 5, which is characterized in that offer mounting hole on the cover board (17) (171), the emission-control equipment further includes driving portion (30), and the driving portion (30) includes:

One end of shell (31), the shell (31) is connect with the condensation part (10), and is located at the mounting hole (171)；

Actuator (32), the actuator (32) are arranged the other end in the shell (31) and by being threaded through the shell (31) drive shaft (34) in is connect with the scraper portion (20)；

Bearing (33), the bearing (33) are mounted in the shell (31), and at the position at the both ends of the drive shaft (34) It is respectively arranged with the bearing (33).

7. emission-control equipment according to claim 6, which is characterized in that the emission-control equipment further includes Sealing Method Blue (40), the shell (31) are connect by the sealing flange (40) with the cover board (17)；The shell (31) with it is described There is the magnetic fluid (50) for sealing between drive shaft (34).

8. a kind of vacuum coating system characterized by comprising

Vacuum coating equipment, the vacuum coating equipment have Waste gas outlet；

The air inlet (12) of emission-control equipment, the emission-control equipment is connected with the Waste gas outlet, the exhaust gas Processing unit is emission-control equipment described in any one of claims 1 to 7.