CN208562506U - A kind of target - Google Patents
A kind of target Download PDFInfo
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- CN208562506U CN208562506U CN201820762425.XU CN201820762425U CN208562506U CN 208562506 U CN208562506 U CN 208562506U CN 201820762425 U CN201820762425 U CN 201820762425U CN 208562506 U CN208562506 U CN 208562506U
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- target
- target body
- thickness
- interlude
- adhesive layer
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Abstract
The utility model is about a kind of target.The target includes: backing pipe；It is formed in the target body of the outer surface of backing pipe；Wherein, target body includes: two end sections and interlude；Wherein, the first thickness of the end section is greater than the second thickness of the interlude.The technical solution increases the thickness of the end section of target body, extends the consumption duration of target in use and improves the utilization rate of target to prevent target body both ends from first depleting.
Description
Technical field
The utility model relates to Material Field more particularly to a kind of targets.
Background technique
Target is to sputter at the sputtering that various function films are formed on substrate under appropriate process conditions by magnetron sputtering
Source；Wherein, the principle of magnetron sputtering includes: electronics under the action of electric field, is touched during flying to substrate with ar atmo
It hits, its ionization is made to produce Ar cation and new electronics；New electronics flies to substrate, and Ar ion accelerates to fly under electric field action
Cathode target, and target surface is bombarded with high-energy, sputter target.In sputtering particle, neutral target atom or molsink
Product forms film on substrate, and target atom is gradually bombarded and is deposited on matrix.
Currently, the shape of target mainly has flat target and rotary target.For rotary target, it is generally made into isometric cylinder.
But target generally applies in magnetron sputtering, it is contemplated that end electromagnetic field intensity is higher, the probability of ion bombardment end target
Also higher, therefore target consumption in end is also very fast.To cause target body both ends first to deplete, and intermediate target residual is more,
To cause the effective rate of utilization of target lower, production cost is virtually increased.
Utility model content
The utility model embodiment provides a kind of target；The utility model embodiment needs to solve the effective rate of utilization of target
Low problem, the technical solution is as follows:
According to the utility model embodiment in a first aspect, providing a kind of target, comprising:
Backing pipe；
It is formed in the target body of the outer surface of the backing pipe；
Wherein, the target body includes: two end sections and interlude；Wherein, the first thickness of the end section is greater than
Second thickness of the interlude.
The technical solution that the embodiments of the present invention provide can include the following benefits: increase the end of target body
The thickness of section extends the consumption duration of target in use and improves the benefit of target to prevent target body both ends from first depleting
With rate.
In one embodiment, the target body further include:
Changeover portion between described two end sections and the interlude, wherein the thickness edge of the changeover portion
The direction of axis gradually decreases to second thickness from first thickness；The changeover portion, interlude and end
The material of section is all identical.
In one embodiment, the target further include:
The adhesive layer being formed between the backing pipe and the target body；
Wherein, the viscosity of material of the adhesive layer is greater than the viscosity of material of the target body, the adhesive layer and the target
The material composition of material body is identical, but material composition proportion is different.
In one embodiment, the target further include:
The initial layers being formed between target body and adhesive layer；
Wherein, the material of the initial layers is identical as the material of the target body, but the initial layers and the target body
Preparation process it is different.
In one embodiment, the range of the gradient of the changeover portion is between 3-30 °.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The utility model can be limited.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets the utility model
Embodiment, and be used to explain the principles of the present invention together with specification.
Fig. 1 is the structural schematic diagram of target shown according to an exemplary embodiment.
Fig. 2 is the structural schematic diagram of target shown according to an exemplary embodiment.
Fig. 3 is the structural schematic diagram of target shown according to an exemplary embodiment.
Fig. 4 is the structural schematic diagram of target shown according to an exemplary embodiment.
Fig. 5 is the structural schematic diagram of target shown according to an exemplary embodiment.
Specific embodiment
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistent with the utility model.On the contrary, they be only with such as
The example of the consistent device and method of some aspects be described in detail in the appended claims, the utility model.
Fig. 1 is a kind of structural schematic diagram of target shown according to an exemplary embodiment, as shown in Figure 1, the target 10
It include: the target body 102 of backing pipe 101 with the outer surface for being formed in backing pipe 101.
For rotary target material, the shape of backing pipe 101 can be isometric cylinder.
Wherein, target body 102 includes: two end sections 1021 and interlude 1022；
Wherein, the first thickness of section 1021 is held to be greater than the second thickness of interlude 1022.
In the present embodiment, backing pipe 101 is the bottom liner of target body, and target body 102 is helped to form, and target body is attached to backing
On pipe 101, backing pipe 101 can be stainless steel material.
Optional first thickness of the present embodiment is 0.52 inch, and the second thickness is 0.672 inch.
Target body 102 is for the sputter in physical coating, wherein target body 102 may include metal targets body and ceramics
Target body, wherein the material composition of metal targets body can be copper and indium gallium ingredient, silver-colored indium gallium ingredient, golden indium gallium ingredient, copper and tin gallium
Ingredient, silver-colored tin gallium ingredient, golden tin gallium ingredient, copper silver indium gallium ingredient, copper gold indium gallium ingredient etc..Preferred material composition is copper and indium gallium
Ingredient.
As shown in Figure 1, end section 1021 and interlude 1022 are disposably preparation completions, and the thickness of each position of the two
Degree is all uniformly that the first thickness of the present embodiment middle-end section is big, that is to say, that target of the end section for sputtering also compares
It is more, in this way, end 1021 target body of section is increased, then the elapsed time of end section 1021 just elongates, then interlude 1022 is being drawn
This long part-time can also continue to consume, and increase the consumption of interlude, improve the utilization rate of target.
Optionally, the diameter of backing pipe is 5.202 inches, bilateral with a thickness of 0.672 inch, the second target of the first target
It is bilateral with a thickness of 0.52 inch.
Target shape provided in this embodiment is similar to the thick intermediate thin dog bone shape in both ends, compared to current technology,
The target for increasing the thickness of the end section of target body is able to extend consumption duration of the target in sputtering process, to prevent target
Material body both ends first deplete, and improve the utilization rate of target.
In one embodiment, as shown in Fig. 2, target body 102 further include:
The changeover portion 1023 held between section 1021 and interlude 1022 positioned at two, wherein the target of changeover portion 1023 is thick
Degree gradually decreases to the second thickness from the first thickness along the direction of axis；Changeover portion 1023, interlude 1022 and end
The material of section 1011 is all identical.Changeover portion 1023 can be what machining on the basis of holding section 1021 obtained.
Due to, if be directly connected to, there is no transition section, then in preparation process between end section 1021 and interlude 1022
The two coupling part may have out-of-flatness, and therefore, many targets may be slatterned by being directly machined to right angle；And by
In the both ends closer to target body 10, then target consumption is more serious, wherein the end consumption of section 1021 is the most serious, therefore, such as schemes
Shown in 3, can end section 1021 and interlude 1022 between machine a smooth transition region, that is, changeover portion 1023, prevent by
The target caused by changeover portion 1023 first runs out of can not continue to use, and at the same time, changeover portion 1023 can reduce machining
Workload.
Optionally, the target length 12.7mm of section, the target length 28.7mm of changeover portion, the target length of interlude are held
975.3mm。
In one embodiment, sectional drawing as shown in Figure 4, target 10 further include:
The adhesive layer 103 being formed between backing pipe 101 and target body 102；
Wherein, the viscosity of material of adhesive layer 103 is greater than the viscosity of material of target body 102.Adhesive layer 103 is even application
, thickness difference is not present.
Adhesive layer 103 further prevents target body 102 to fall off, adhesive layer for bonding backing pipe 101 and target body 102
103 material can be the higher material of indium content, in this way, the viscosity of adhesive layer 103 is higher, plays well and backing pipe is viscous
The effect of knot.Adhesive layer 103 can be that copper content is lower and the higher material of indium content.
In one embodiment, sectional drawing as shown in Figure 5, target 10 further include:
The initial layers 104 being formed between target body 102 and adhesive layer 103；
Wherein, the material of initial layers 104 is identical as the material of target body 102, but the initial layers and the target body
Preparation process is different.Initial layers 104 are both needed to spraying, and thickness difference is not present.Adhesive layer 103 and initial layers in the present embodiment
104 material composition is identical, all includes copper and indium gallium, but composition proportion is different, wherein since indium has certain caking property, bonding
Layer indium content is higher.
On the basis of adhesive layer 103, initial layers 104 are formed, this layer there can be excellent bond effect with adhesive layer, together
When due to its ingredient it is identical as target body ingredient, play good transition effect.
In one embodiment, the range of the gradient of changeover portion 1023 is between 3-30 °.
Optionally, the range of gradient is between 5-15 °.
It in the present embodiment, in target preparation process, prepares target and generally passes through one and spray gun is completed, spray gun is from backing pipe
One end the other end of backing pipe is moved to along backing pipe, wherein movement speed of the spray gun in default end fragment position is than pre-
If the movement speed of intermediate fragment position is slow, therefore, spray gun movement velocity is slower, then, the amount of corresponding site spraying is more, instead
?.
Due to not being sprayed since backing pipe two-end-point in spraying process, need reserved certain at backing pipe both ends
Gap, therefore, current embodiment require that pre-set the end section to form target body position and formed target body interlude
Position, to select suitable movement speed in order to which spray gun spraying goes out target.
In the present embodiment, since the amount that spray gun sprays is constant, the movement speed of spray gun is slower, which sprays to the first target
The amount of material will be more, in this way, increasing the amount of two end section sprayings, have delayed the consumption duration at target body both ends, prevented target
Body both ends first deplete, and improve the utilization rate of target.
About the device in above-described embodiment, wherein modules execute the concrete mode of operation in related this method
Embodiment in be described in detail, no detailed explanation will be given here.
Those skilled in the art will readily occur to the utility model after considering specification and practicing disclosure disclosed herein
Other embodiments.This application is intended to cover any variations, uses, or adaptations of the utility model, these changes
Type, purposes or adaptive change follow the general principle of the utility model and including the undocumented this technologies of the utility model
Common knowledge or conventional techniques in field.The description and examples are only to be considered as illustrative, the utility model it is true
Positive scope and spirit are indicated by the following claims.
It should be understood that the utility model is not limited to the accurate knot for being described above and being shown in the accompanying drawings
Structure, and various modifications and changes may be made without departing from the scope thereof.The scope of the utility model is only wanted by appended right
It asks to limit.
Claims (5)
1. a kind of target characterized by comprising
Backing pipe；
It is formed in the target body of the outer surface of the backing pipe；
Wherein, the target body includes: two end sections and interlude；Wherein, the first thickness of the end section is greater than described
Second thickness of interlude.
2. target according to claim 1, which is characterized in that the target body further include:
Changeover portion between described two end sections and the interlude, wherein the thickness of the changeover portion is along axis
Direction gradually decrease to second thickness from first thickness；The changeover portion, interlude and end section
Material is all identical.
3. target according to claim 1, which is characterized in that the target further include:
The adhesive layer being formed between the backing pipe and the target body；
Wherein, the viscosity of material of the adhesive layer is greater than the viscosity of material of the target body, the adhesive layer and the target body
Material composition it is identical, but material composition proportion is different.
4. target according to claim 3, which is characterized in that the target further include:
The initial layers being formed between target body and adhesive layer；
Wherein, the material of the initial layers is identical as the material of the target body, but the system of the initial layers and the target body
Standby technique is different.
5. target according to claim 2, which is characterized in that the range of the gradient of the changeover portion is between 3-30 °.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820762425.XU CN208562506U (en) | 2018-05-21 | 2018-05-21 | A kind of target |
| PCT/CN2019/087798 WO2019223685A1 (en) | 2018-05-21 | 2019-05-21 | Target, and preparation method and apparatus therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820762425.XU CN208562506U (en) | 2018-05-21 | 2018-05-21 | A kind of target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208562506U true CN208562506U (en) | 2019-03-01 |
Family
ID=65482024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820762425.XU Active CN208562506U (en) | 2018-05-21 | 2018-05-21 | A kind of target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208562506U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108425096A (en) * | 2018-05-21 | 2018-08-21 | 米亚索乐装备集成（福建）有限公司 | A kind of target, target preparation method and device |
| WO2019223685A1 (en) * | 2018-05-21 | 2019-11-28 | 米亚索乐装备集成（福建）有限公司 | Target, and preparation method and apparatus therefor |
| CN110983263A (en) * | 2019-12-18 | 2020-04-10 | 厦门佰事兴新材料科技有限公司 | Target material back tube and production method thereof |
-
2018
- 2018-05-21 CN CN201820762425.XU patent/CN208562506U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108425096A (en) * | 2018-05-21 | 2018-08-21 | 米亚索乐装备集成（福建）有限公司 | A kind of target, target preparation method and device |
| WO2019223685A1 (en) * | 2018-05-21 | 2019-11-28 | 米亚索乐装备集成（福建）有限公司 | Target, and preparation method and apparatus therefor |
| CN110983263A (en) * | 2019-12-18 | 2020-04-10 | 厦门佰事兴新材料科技有限公司 | Target material back tube and production method thereof |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191202 Address after: 101407 Beijing city Huairou District Yanqi Park Economic Development Zone No. 38 Street Patentee after: Lingfan new energy technology (Beijing) Co., Ltd Address before: 362000 42 Purple Mountain Road, Gaoxin District, Licheng District, Fujian, Quanzhou Patentee before: Mia Alfonso Lo equipment integration (Fujian) Co., Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211119 Address after: No.31 Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Dongjun new energy Co.,Ltd. Address before: No.38, Paradise Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee before: Lingfan new energy technology (Beijing) Co.,Ltd. |
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| TR01 | Transfer of patent right |