CN208561705U - A kind of polycrystalline silicon reducing furnace electrode structure - Google Patents
A kind of polycrystalline silicon reducing furnace electrode structure Download PDFInfo
- Publication number
- CN208561705U CN208561705U CN201821204421.6U CN201821204421U CN208561705U CN 208561705 U CN208561705 U CN 208561705U CN 201821204421 U CN201821204421 U CN 201821204421U CN 208561705 U CN208561705 U CN 208561705U
- Authority
- CN
- China
- Prior art keywords
- reducing furnace
- electrode
- dead ring
- chassis
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model relates to a kind of polycrystalline silicon reducing furnace electrode structures, including electrode body, the electrode body is mounted in chassis of reducing furnace, electrode insulation set is equipped between the electrode body and chassis of reducing furnace, the electrode insulation set is socketed and fits closely with electrode body, the electrode body is also socketed with dead ring, the dead ring is located at the top of electrode insulation set, the dead ring is mounted below upper flange, it is equipped with Upper gasket between the upper flange and dead ring upper surface, lower gasket is equipped between the dead ring lower end surface and the upper surface of chassis of reducing furnace.The utility model structure is simple, greatly improves insulation sleeve service life, reduces electrode and clears up dead zone, improves polysilicon quality；High-temperature water can be used in chassis again simultaneously, the recycling of " flash distillation " waste heat then is carried out to chassis water, reach synthesis energy saving consumption reduction effect.
Description
Technical field
The utility model relates to technical field of polysilicon production, and in particular to a kind of polycrystalline silicon reducing furnace electrode structure.
Background technique
The starting method of country's polycrystalline silicon reducing furnace is all to be punctured silicon core using 8000~10000 volts of high voltage at present
Starting, to guarantee safety in production, it is necessary to which component --- electrode carries out corresponding insulation measures to its conduction.Consider polysilicon
Characteristic, electrode insulation component are generally used the insulation sleeve of pure polytetrafluoroethylene (PTFE) material.In addition polysilicon production process is
Phenomena such as vapor deposition processes of one high temperature, hot environment can generate carbonization, ablation to pure polytetrafluoroethylene (PTFE), so needing
Cooling provision, the generally electrode of water flowing and the water flowing as shown in Figure 1: of existing electrode structure are taken to pure teflon insulation set
Chassis cools down insulation sleeve simultaneously, but in the highest insulation sleeve upper limb of temperature, only chassis water it is cooled down (electrode with
Have ceramics between insulation sleeve, can not directly cool down insulation sleeve) so that insulation sleeve upper limb scaling loss most serious, seriously affects insulation sleeve
Service life, and the gap difficulty or ease cleaning between electrode and insulation sleeve is easy the accumulation impurity such as silicon powder, to next furnace silicon rod
Quality has an impact.In addition because the upper limb of insulation sleeve is to provide cooling by chassis, in order to guarantee cooling effect, it is necessary to
The temperature of chassis cooling water is reduced, so that chassis cooling water can not carry out pre- recuperation of heat by modes such as flash distillations.
Utility model content
Purpose of the utility model is to overcome the above-mentioned shortcomings and provide a kind of polycrystalline silicon reducing furnace electrode structures, can
To improve insulation sleeve service life, reduces electrode and clear up dead zone, improve polysilicon quality；High temperature can be used in chassis again simultaneously
Water then carries out the recycling of " flash distillation " waste heat to chassis water, reaches synthesis energy saving consumption reduction effect.
Purpose of the utility model is realized as follows:
A kind of polycrystalline silicon reducing furnace electrode structure, including electrode body, the electrode body is mounted in chassis of reducing furnace, described
Electrode insulation set is equipped between electrode body and chassis of reducing furnace, the electrode insulation set is socketed and fits closely, institute with electrode body
State electrode body and be also socketed with dead ring, the dead ring is located at the top of electrode insulation set, the electrode body be equipped with upper flange and
Lower flange, the dead ring are mounted below upper flange, and Upper gasket is equipped between the upper flange and dead ring upper surface, described
Lower gasket is equipped between dead ring lower end surface and the upper surface of chassis of reducing furnace, the dead ring lower end surface is equipped with annular protrusion,
The annular protrusion protrudes between at the top of electrode insulation set and chassis of reducing furnace, and the electrode insulation covers corresponding lower flange and is equipped with platform
Rank, be equipped with inside and outside the step respectively in fluororubber pad and outer fluororubber pad.
Preferably, the Upper gasket and lower gasket are all made of the high temperature resistant gasket of RSB material, play time sealing function.
Preferably, the compression ratio of the Upper gasket and lower gasket is 35-40%, and response rate is greater than 15%.
Preferably, the electrode insulation set is teflon insulation set.
Preferably, the dead ring is silicon nitride or quartz insulator ring, and there are 1- with upper flange bottom for dead ring upper surface
The gap 2mm.
Preferably, the fluororubber pad and outer fluororubber pad with a thickness of 5-6mm, play main seal.
Preferably, the outer diameter of the upper flange is not less than the outer diameter of chassis of reducing furnace.
Preferably, the outer diameter of the lower end surface of the dead ring is greater than the outer diameter of chassis of reducing furnace.
The beneficial effects of the utility model are:
1. the sealing of electrode upper flange can avoid it and cover shadow to teflon insulation by pyroreaction air bound absolutely outside
It rings, extends the service life of teflon insulation set；
2. silicon powder can be blocked in outside by the sealing of electrode upper flange, avoids silicon powder from entering " dead zone " of difficulty or ease cleaning, subtract
Few impurity is brought into, and polysilicon quality is improved；
3. chassis cooling water can directly cool down insulation sleeve, no longer limited by teflon insulation set heat resistance；
4. the upper limb of teflon insulation set no longer provides cooling by chassis, thus chassis of reducing furnace can be used 100 ~
150 DEG C of high-temperature water is cooled down, and can then be flashed to chassis water, recovery waste heat reaches energy-saving effect.
Detailed description of the invention
Fig. 1 is existing polycrystalline silicon reducing furnace electrode structure schematic diagram.
Fig. 2 is the structural schematic diagram of the utility model.
Wherein: 1, electrode body；2, chassis of reducing furnace；3, electrode insulation set；4, dead ring；5, upper flange；6, Upper gasket；7,
Lower gasket；8, annular protrusion；9, interior fluororubber pad；10, outer fluororubber pad.
Specific embodiment
Referring to fig. 2, the utility model relates to a kind of polycrystalline silicon reducing furnace electrode structure, including electrode body 1, the electrode bodies
1 is mounted in chassis of reducing furnace 2, and electrode insulation set 3, the electrode insulation are equipped between the electrode body 1 and chassis of reducing furnace 2
Set 3 is socketed and fits closely with electrode body 1, and the electrode body 1 is also socketed with dead ring 4, and the dead ring 4 and electrode body 1 are tight
Closely connected conjunction, the dead ring 4 are located at the top of electrode insulation set 3, and the electrode body 1 is equipped with upper flange 5 and lower flange, described exhausted
Edge ring 4 is mounted on 5 lower section of upper flange, is equipped with Upper gasket 6, the dead ring 4 between 4 upper surface of the upper flange 5 and dead ring
Lower gasket 7 is equipped between lower end surface and the upper surface of chassis of reducing furnace 2,4 lower end surface of dead ring is equipped with annular protrusion 8, institute
It states annular protrusion 8 to protrude between 2 top of electrode insulation set 3 and chassis of reducing furnace, the corresponding lower flange of the electrode insulation set 3 is equipped with
Step, be equipped with inside and outside the step respectively in fluororubber pad 9 and outer fluororubber pad 10.
The Upper gasket 6 and lower gasket 7 are all made of the high temperature resistant gasket of RSB material, are made by Upper gasket 6 and lower gasket
Between 4 upper surface of flange 5 and dead ring, sealing is compressed between 4 lower end surface of dead ring and the upper surface of chassis of reducing furnace 2, is risen secondary
Sealing function, stop portions pyroreaction gas and silicon powder.
The compression ratio of the Upper gasket 6 and lower gasket 7 is 35-40%, and response rate is greater than 15%.
The electrode insulation set 3 is teflon insulation set.The electrode insulation set 3 passes through interior 9 He of fluororubber pad
Outer fluororubber pad 10 compresses with electrode body 1 and chassis of reducing furnace seal respectively, plays primary seal, prevents outside pyroreaction gas
It lets out.
The dead ring 4 is silicon nitride or quartz insulator ring, and there are between 1-2mm for 4 upper surface of dead ring and 5 bottom of upper flange
Gap, gap size need fixed according to the decrement of RSB gasket and fluororubber pad, it is ensured that when fluororubber pad seals, RSB gasket
It has compressed.
The fluororubber pad 9 and outer fluororubber pad 10 with a thickness of 5-6mm, fluorine content >=70%.
The outer diameter of the upper flange 5 is not less than the outer diameter of chassis of reducing furnace 2.The outer diameter of the lower end surface of the dead ring 4 is big
In the outer diameter of chassis of reducing furnace 2.Silicon powder can be blocked in outside, silicon powder is avoided to enter " dead zone " of difficulty or ease cleaning.
In addition to the implementation, the utility model further includes having other embodiments, all to use equivalents or equivalent
The technical solution that alternative is formed, should all fall within the protection scope of the utility model claims.
Claims (8)
1. a kind of polycrystalline silicon reducing furnace electrode structure, it is characterised in that: including electrode body (1), the electrode body (1) is mounted on also
In former furnace hearth plate (2), electrode insulation set (3) are equipped between the electrode body (1) and chassis of reducing furnace (2), the electrode insulation
Set (3) is socketed and fits closely with electrode body (1), and the electrode body (1) is also socketed with dead ring (4), dead ring (4) position
In the top of electrode insulation set (3), the electrode body (1) is equipped with upper flange (5) and lower flange, and the dead ring (4) is mounted on
Below upper flange (5), Upper gasket (6) are equipped between the upper flange (5) and dead ring (4) upper surface, under the dead ring (4)
Lower gasket (7) are equipped between end face and the upper surface of chassis of reducing furnace (2), dead ring (4) lower end surface is equipped with annular protrusion
(8), the annular protrusion (8) is protruded between at the top of electrode insulation set (3) and chassis of reducing furnace (2), the electrode insulation set (3)
Corresponding lower flange is equipped with step, is equipped with interior fluororubber pad (9) and outer fluororubber pad (10) respectively inside and outside the step.
2. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the Upper gasket (6) and
Lower gasket (7) is all made of the high temperature resistant gasket of RSB material, plays time sealing function.
3. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the Upper gasket (6) and
The compression ratio of lower gasket (7) is 35-40%, and response rate is greater than 15%.
4. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the electrode insulation set
It (3) is teflon insulation set.
5. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the dead ring (4) is
Silicon nitride or quartz insulator ring, there are the gaps 1-2mm with upper flange (5) bottom for dead ring (4) upper surface.
6. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the fluororubber pad
(9) and outer fluororubber pad (10) with a thickness of 5-6mm, play main seal.
7. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the upper flange (5)
Outer diameter is not less than the outer diameter of chassis of reducing furnace (2).
8. a kind of polycrystalline silicon reducing furnace electrode structure according to claim 1, it is characterised in that: the dead ring (4)
The outer diameter of lower end surface is greater than the outer diameter of chassis of reducing furnace (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821204421.6U CN208561705U (en) | 2018-07-27 | 2018-07-27 | A kind of polycrystalline silicon reducing furnace electrode structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821204421.6U CN208561705U (en) | 2018-07-27 | 2018-07-27 | A kind of polycrystalline silicon reducing furnace electrode structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208561705U true CN208561705U (en) | 2019-03-01 |
Family
ID=65448596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821204421.6U Active CN208561705U (en) | 2018-07-27 | 2018-07-27 | A kind of polycrystalline silicon reducing furnace electrode structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208561705U (en) |
-
2018
- 2018-07-27 CN CN201821204421.6U patent/CN208561705U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103882246B (en) | Vacuum magnesium manufacturing device and vacuum magnesium manufacturing method | |
| CN105088274B (en) | A kind of device for processing and reclaiming aluminium electroloysis solid waste | |
| KR101460286B1 (en) | Method for manufacturing magnesium | |
| CN208561705U (en) | A kind of polycrystalline silicon reducing furnace electrode structure | |
| CN203683634U (en) | Vacuum magnesium smelting device | |
| CN105624436A (en) | Production method for high-purity chromium metal and vacuum arc furnace adopted by production method | |
| CN111500870A (en) | Vacuum electroslag furnace | |
| CN113587653B (en) | Vacuum furnace for continuous production of silicon oxide powder scraping type and method for continuous production of silicon oxide | |
| CN203148236U (en) | Novel graphite electrode sealing device | |
| CN101311318B (en) | Sealing device of solid oxide electrolytic cell for high-temperature electrolytic hydrogen production and sealing method thereof | |
| CN105060296B (en) | A kind of parallel SiC synthesis stove of thermal source | |
| CN205115572U (en) | Metallic glass system of smelting | |
| CN204959051U (en) | Aluminium electroloysis solid waste material's device is handled and retrieved | |
| CN107043955A (en) | A kind of method of active gases assisting growth crystalline silicon | |
| CN213147419U (en) | Furnace chamber structure of silicon carbide furnace | |
| CN205616966U (en) | Earth metal electrolytic groove | |
| CN202193621U (en) | Sealing structure of electrode for reduction furnace | |
| CN212374889U (en) | High-temperature furnace capable of continuously producing artificial graphite | |
| CN218879475U (en) | Polycrystalline silicon reduction furnace electrode insulation mounting structure and polycrystalline silicon reduction furnace | |
| CN207091011U (en) | A kind of polycrystalline silicon reducing furnace insulating component | |
| CN103072993A (en) | Method for removing boron in polycrystalline silicon | |
| CN206654959U (en) | High-temperature solid oxide electrolytic cell | |
| CN207864616U (en) | Prebaked anode roaster furnace seal washer and sealing structure | |
| CN105752992A (en) | Method for preparing silicon oxide and preparation equipment | |
| CN203272940U (en) | Lower seal valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |