CN208556251U - A kind of flexible jig - Google Patents

A kind of flexible jig Download PDF

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Publication number
CN208556251U
CN208556251U CN201820610087.8U CN201820610087U CN208556251U CN 208556251 U CN208556251 U CN 208556251U CN 201820610087 U CN201820610087 U CN 201820610087U CN 208556251 U CN208556251 U CN 208556251U
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CN
China
Prior art keywords
flexible jig
semiconductor chip
plate
servo
heating
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Active
Application number
CN201820610087.8U
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Chinese (zh)
Inventor
阳金武
彭小金
陈志鹏
罗诚
朱绍德
高云峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Han Family Sealing And Testing Technology Co ltd
Original Assignee
Shenzhen Han's Photoelectric Equipment Co ltd
Han s Laser Technology Industry Group Co Ltd
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Application filed by Shenzhen Han's Photoelectric Equipment Co ltd, Han s Laser Technology Industry Group Co Ltd filed Critical Shenzhen Han's Photoelectric Equipment Co ltd
Priority to CN201820610087.8U priority Critical patent/CN208556251U/en
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Publication of CN208556251U publication Critical patent/CN208556251U/en
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Abstract

The utility model relates to micro semiconductor chip bonding equipment field more particularly to a kind of flexible jigs.A kind of flexible jig is provided, including the adsorbent support mechanism for fixing semiconductor chip, the heating mechanism for semiconductor chip heating below adsorbent support mechanism is set, and the elevating mechanism below heating mechanism for driving adsorbent support mechanism to move up and down is set.By the way that an adsorbent support mechanism is arranged in heating mechanism, under the premise of meeting bonding wire processing temperature, it can effectively prevent the tail portion of welding caused by loosening because of semiconductor chip not of uniform size, improve welding precision, welding quality and production efficiency, reduce scrappage, easy to operate;The height for being used to adjust adsorbent support mechanism by increasing an elevating mechanism again, semiconductor chip that can be different to a variety of height carry out bonding wire, improve the versatility of fixture.

Description

A kind of flexible jig
Technical field
The utility model relates to micro semiconductor chip bonding equipment field more particularly to a kind of flexible jigs.
Background technique
It is mostly currently on the market to be completed under artificial operation to the bonding wire of micro semiconductor chip.Specific operation process is more Micro semiconductor chip manually to be placed corresponding position and carries out bonding wire under automanual machine.The effect of such bonding wire is simultaneously Undesirable, can generate following problems: the tail portion of welding is not of uniform size, and welding precision is poor, and welding quality is bad, and production efficiency is low, Scrappage is high and higher to the technical requirements of operator.
Utility model content
The technical problem to be solved by the present invention is in view of the above drawbacks of the prior art, provide a kind of adjustable clamp Tool, overcome the tail portion of existing welding not of uniform size, welding precision is poor, and welding quality is bad, and production efficiency is low, scrappage height with And to the technical requirements of operator it is higher the problems such as.
The technical scheme adopted by the utility model to solve the technical problem is as follows: providing a kind of flexible jig, including it is used for The heating for semiconductor chip heating below adsorbent support mechanism is arranged in the adsorbent support mechanism of fixed semiconductor chip Mechanism, and the elevating mechanism below heating mechanism for driving adsorbent support mechanism to move up and down is set.
The still more preferably scheme of the utility model is: the elevating mechanism includes pedestal, leading of being set on the base To plate, the servo-actuated riser being slidably arranged on guide plate, transporting for driving servo-actuated riser to do lifting for guide plate side is set Dynamic screw mechanism, the servo-actuated riser are connected with heating mechanism.
The still more preferably scheme of the utility model is: the flexible jig further includes the bottom being arranged in below pedestal Plate, threaded hole is provided on the bottom plate and the X for adjusting the displacement of flexible jig X-direction is displaced adjustment structure, the pedestal On be provided with threaded hole cooperation for adjust flexible jig Y-direction displacement Y be displaced adjustment structure.
The still more preferably scheme of the utility model is: the elevating mechanism further includes one that guide plate two sides are arranged in End connects the extension spring of servo-actuated riser other end connection pedestal.
The still more preferably scheme of the utility model is: the heating mechanism includes the heat dissipation bottom to connect with servo-actuated riser Plate and the heat block for semiconductor chip heating being arranged on radiating bottom plate.
The still more preferably scheme of the utility model is: the flexible jig further includes being arranged in servo-actuated riser and heat dissipation The connecting plate equipped with heat release hole between bottom plate is provided with heat dissipation air vent connector and the heat dissipation equipped with perforation on the connecting plate Piece, the heat dissipation air vent connector are connected by perforation with the heat release hole on connecting plate.
The still more preferably scheme of the utility model is: the adsorbent support mechanism includes the top being connected on heat block Plate, be arranged on top plate for fixing the bulk cargo jig of semiconductor chip and being arranged in the vacuum pipe of heat block side, The first vacuum stomata is offered on the top plate, the vacuum pipe is connected with the first vacuum stomata.
The still more preferably scheme of the utility model is: the adsorbent support mechanism further includes being arranged on connecting plate Preceding vertical block and afterwards vertical block are arranged in preceding vertical block and the rear thermal insulation board stood on block, are arranged on thermal insulation board and determine for bulk cargo jig The limit plate component of position.
The still more preferably scheme of the utility model is: the flexible jig further include setting heat block and top plate it Between elastic hold-down mechanism.
The still more preferably scheme of utility model is: the elastic hold-down mechanism includes the light being arranged on heat block Axis, the clamping jaw being rotatably arranged on optical axis, the compressed spring being arranged between clamping jaw and heat block, the clamping jaw is far from compression bullet One end of spring sticks on top plate.
The utility model has the beneficial effects that: being met by the way that an adsorbent support mechanism is arranged in heating mechanism Under the premise of bonding wire processing temperature, it can effectively prevent the tail portion of welding caused by loosening because of semiconductor chip not of uniform size, mention High welding precision, welding quality and production efficiency reduce scrappage, easy to operate;It is used again by increasing an elevating mechanism In the height of adjustment adsorbent support mechanism, semiconductor chip that can be different to a variety of height carries out bonding wire, improves the logical of fixture The property used.
Detailed description of the invention
Utility model is described further below in conjunction with accompanying drawings and embodiments, in attached drawing:
Fig. 1 is the flexible jig structural schematic diagram of the utility model embodiment;
Fig. 2 is the structural schematic diagram of the elevating mechanism of the utility model embodiment;
Fig. 3 is the structural schematic diagram of the heating mechanism of the utility model embodiment;
Fig. 4 is the structural schematic diagram of the adsorbent support mechanism of the utility model embodiment.
Specific embodiment
Now in conjunction with attached drawing, elaborate to the preferred embodiment of the utility model.
As shown in Figure 1, a kind of flexible jig of the present embodiment, including the adsorbent support mechanism for fixing semiconductor chip 1, the heating mechanism 2 for semiconductor chip heating below adsorbent support mechanism 1 is set, and is arranged in heating mechanism 2 The elevating mechanism 3 that lower section is used to that adsorbent support mechanism 1 to be driven to move up and down.By the way that an absorption is arranged in heating mechanism 2 Supporting mechanism 1 can effectively prevent welding caused by loosening because of semiconductor chip under the premise of meeting bonding wire processing temperature Tail portion is not of uniform size, improves welding precision, welding quality and production efficiency, reduces scrappage, easy to operate;Pass through increasing again Add an elevating mechanism 3 for adjusting the height of adsorbent support mechanism 1, semiconductor chip that can be different to a variety of height carries out Bonding wire improves the versatility of fixture.
As shown in Figure 1, 2, the elevating mechanism 3 include pedestal 31, be set on the base guide plate 32, be slidably arranged in Servo-actuated riser 33 on guide plate 32, the lead screw for driving servo-actuated perpendicular 33 plates to move up and down that 32 side of guide plate is set Mechanism 34, the servo-actuated riser 33 are connected with heating mechanism 2.The screw mechanism 34 includes that one end is rotatably arranged on pedestal 31 On T-type lead screw 341, the feed screw nut 342 that is socketed on T-type screw rod 341.By by heating mechanism 2 and servo-actuated 33 phase of riser Connection, then servo-actuated riser 33 is connected with feed screw nut 342, then by turning T-type screw rod 341, can realize feed screw nut 342 Lifting, while adsorbent support mechanism 1 on elevating mechanism 3 can be driven to complete elevating movement.Certainly screw mechanism herein can To be replaced by cylinder, the elevating movement of supporting mechanism 1 is realized by cylinder.Described 341 one end of T-type screw rod is additionally provided with knob, It can be used for reversing T-type screw rod 341 manually, structure is simple, convenient to use.Certainly may be otherwise use is driven by electricity T-type screw rod 341 rotations, it is more convenient.The T-type screw rod 341 is provided with bearing with 31 junction of pedestal, reduces the friction of the two, mentions The efficiency of high flexible jig.The T-type screw rod 341 is additionally provided with anchor ear close to one end of pedestal 31, can online welder when making, hold tightly T-type screw rod 341 prevents T-type screw rod 341 from rotating, and improves fixture stability.The guide plate 32, which is equipped with, intersects ball slide rail, The servo-actuated riser 33, which is mounted on, to intersect on ball slide rail.Intersect ball slide rail by increasing, can effectively reduce servo-actuated perpendicular Friction between plate 33 and guide plate 32, lifting system efficiency.
The flexible jig further includes the bottom plate 4 being arranged in below pedestal 31, is provided with threaded hole and use on the bottom plate 4 It is displaced adjustment structure 41 in the X of adjustment flexible jig X-direction displacement, is provided on the pedestal 31 with threaded hole cooperation for adjusting The Y of whole flexible jig Y-direction displacement is displaced adjustment structure 311.By increasing the position X for adjusting the displacement of flexible jig X-direction Transposition section structure 41, and Y displacement adjustment structure 311 for adjusting the displacement of flexible jig Y-direction is, it can be achieved that flexible jig The fine tuning of X-direction and Y-direction position, the position that can adjust flexible jig at any time adapt to processing, improve processing effect.The X Displacement adjustment structure 41 is strip hole, and the Y displacement adjustment structure 311 is strip hole.
The elevating mechanism 3 further includes one end connection servo-actuated 33 other end of riser connection bottom that 32 two sides of guide plate are arranged in The extension spring of seat 31.By increase an extension spring, can to servo-actuated riser 33 apply a pretightning force, can effectively prevent with Dynamic riser 33 processes mistake caused by sliding, and improves fixture stability.
As shown in Figure 1-3, the heating mechanism 2 includes that the radiating bottom plate 21 to connect with servo-actuated riser 33 and setting exist The heat block 22 for semiconductor chip heating on radiating bottom plate 21.Semiconductor chip can be added by heat block 22 Heat, the temperature requirements before meeting semiconductor chip wire bonding;One radiating bottom plate 21 is set below heat block 22, heat block can be prevented 22 temperature are excessively high, damage to the elevating mechanism 3 of lower section.
As shown in Figure 1-3, the flexible jig further includes that being equipped between servo-actuated riser 33 and radiating bottom plate 21 is arranged in The connecting plate 6 of heat release hole is provided with heat dissipation air vent connector 61 and the cooling fin 62 equipped with perforation on the connecting plate 6, described Heat dissipation air vent connector 61 is connected by perforation with the heat release hole on connecting plate.By between servo-actuated riser 33 and radiating bottom plate 21 Increase a connecting plate 6, the heat release hole being connected to heat dissipation air vent connector 61 is offered on the connecting plate 6, can effectively be dropped Influence of the low heat block 22 to elevating mechanism 3, can increase the service life of fixture.
As shown in Fig. 1,3,4, the adsorbent support mechanism 1 includes the top plate 11 being connected on heat block 22, is arranged and is pushing up On plate 11 for fixing the bulk cargo jig 12 of semiconductor chip and being arranged in the vacuum pipe 13 of 22 side of heat block, institute It states and offers the first vacuum stomata 111 on top plate 11, the vacuum pipe 13 is connected with the first vacuum stomata 111.It is logical It crosses and the vacuum pipe 13 is connected with the first vacuum stomata 111, vacuum pipe 13 is connected with vacuum air valve, just The first vacuum stomata 111 can be led to bulk cargo jig 12 is absorbed and fixed on top plate 11.The bulk cargo jig 12 be equipped with it is multiple with The through-hole that vacuum pipe 13 is connected to, for adsorbing semiconductor chip of the fixed placement on bulk cargo jig 12.In the present embodiment Bulk cargo jig 12 is detachable installation, and different bulk cargo jigs can be replaced according to different semiconductor chips, improves adjustable clamp The versatility of tool.Vacuum pipe 13 in this implementation is vacuum copper pipe, and copper pipe has the performances such as non-leakage, not combustion-supporting, corrosion-resistant, can Increase the service life of fixture.It is offered on the heat block 22 and the second vacuum stomata, the second vacuum stomata and vacuum Pipeline 13, state the first vacuum stomata 111 be interconnected.By by the second vacuum stomata and vacuum pipe 13, state the first vacuum gas Hole 111 is interconnected, and can promote the heating effect of 12 semiconductor-on-insulator chip of bulk cargo jig.
As shown in Figs 1-4, the adsorbent support mechanism 1 further includes that block 14 and afterwards vertical block are found before being arranged on connecting plate 6 15, preceding vertical block 14 and the rear thermal insulation board 16 stood on block 15 are set, positioning on thermal insulation board 16 for bulk cargo jig 12 is set Limit plate component 17.The limit plate component 17 includes L-type limit plate 171 and front limit plate 172, passes through two limit plates Cooperate it is achievable to bulk cargo jig 12 position, guarantee wire bonding work is normally carried out.Limit can be effectively protected in thermal insulation board 16 Board group part 17 does not receive the influence of heat, improves the service life of fixture.
As shown in figure 3, the flexible jig further includes the elastic hold-down mechanism being arranged between heat block 22 and top plate 11 5.The elastic hold-down mechanism 5 includes the optical axis 51 being arranged on heat block 22, the clamping jaw 52 being rotatably arranged on optical axis 51, sets The compressed spring 53 between clamping jaw 52 and heat block 22 is set, the clamping jaw 52 sticks on top plate far from one end of compressed spring 53 On 11.By the way that optical axis 51 is arranged in heat block 22, clamping jaw 52 can turn an angle along optical axis 52, then by 52 one end of clamping jaw Increase a compressed spring 53 between heat block 22, the other end of clamping jaw 52 can be made to compress the top plate being connected on heat block 2 11。
It should be understood that above embodiments are only to illustrate the technical solution of the utility model, it is rather than its limitations, right For those skilled in the art, it can modify to technical solution illustrated in the above embodiments, or to part of skill Art feature is equivalently replaced;And all such modifications and replacement, it all should belong to the protection of the appended claims for the utility model Range.

Claims (9)

1. a kind of flexible jig, it is characterised in that: including the adsorbent support mechanism for fixing semiconductor chip, setting is being adsorbed The heating mechanism for semiconductor chip heating below supporting mechanism, and be arranged below heating mechanism for driving absorption The elevating mechanism that supporting mechanism moves up and down;
The elevating mechanism includes pedestal, is set on the base guide plate, is set the servo-actuated riser being slidably arranged on guide plate Set the screw mechanism for driving servo-actuated riser to move up and down in guide plate side, the servo-actuated riser and heating mechanism phase Connection.
2. flexible jig according to claim 1, it is characterised in that: the flexible jig further includes being arranged below pedestal Bottom plate, threaded hole is provided on the bottom plate and the X for adjusting the displacement of flexible jig X-direction is displaced adjustment structure, it is described It is provided on pedestal and is displaced adjustment structure with the Y for adjusting the displacement of flexible jig Y-direction of threaded hole cooperation.
3. flexible jig according to claim 2, it is characterised in that: the elevating mechanism further includes being arranged in guide plate two One end of side connects the extension spring of servo-actuated riser other end connection pedestal.
4. flexible jig according to claim 1, it is characterised in that: the heating mechanism includes connecting with servo-actuated riser Radiating bottom plate and the heat block for semiconductor chip heating being arranged on radiating bottom plate.
5. flexible jig according to claim 4, it is characterised in that: the flexible jig further includes being arranged in servo-actuated riser The connecting plate equipped with heat release hole between radiating bottom plate is provided with heat dissipation air vent connector on the connecting plate and is equipped with perforation Cooling fin, the heat dissipation air vent connector by perforation is connected with the heat release hole on connecting plate.
6. flexible jig according to claim 5, it is characterised in that: the adsorbent support mechanism includes being connected to heat block On top plate, be arranged on top plate for fix semiconductor chip bulk cargo jig and the true of heat block side is set Vacant duct offers the first vacuum stomata on the top plate, and the vacuum pipe is connected with the first vacuum stomata.
7. flexible jig according to claim 6, it is characterised in that: the adsorbent support mechanism further includes that setting is connecting Preceding vertical block on plate and rear vertical block, preceding vertical block and thermal insulation board on rear vertical block are set, be arranged on thermal insulation board for bulk cargo The limit plate component of jig positioning.
8. flexible jig according to claim 6, it is characterised in that: the flexible jig further include setting in heat block and Elastic hold-down mechanism between top plate.
9. flexible jig according to claim 8, it is characterised in that: the elastic hold-down mechanism includes being arranged in heat block On optical axis, the clamping jaw being rotatably arranged on optical axis, the compressed spring that is arranged between clamping jaw and heat block, the clamping jaw is separate One end of compressed spring sticks on top plate.
CN201820610087.8U 2018-04-26 2018-04-26 A kind of flexible jig Active CN208556251U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820610087.8U CN208556251U (en) 2018-04-26 2018-04-26 A kind of flexible jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820610087.8U CN208556251U (en) 2018-04-26 2018-04-26 A kind of flexible jig

Publications (1)

Publication Number Publication Date
CN208556251U true CN208556251U (en) 2019-03-01

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ID=65481408

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820610087.8U Active CN208556251U (en) 2018-04-26 2018-04-26 A kind of flexible jig

Country Status (1)

Country Link
CN (1) CN208556251U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110877240A (en) * 2019-12-25 2020-03-13 无锡新柯工具制造有限公司 Automatic clamping jaw of wood chisel
CN115283926A (en) * 2022-09-29 2022-11-04 江苏时代新能源科技有限公司 Welding jig and welding equipment
CN117564594A (en) * 2024-01-15 2024-02-20 宁波尚进自动化科技有限公司 Manual welding table

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110877240A (en) * 2019-12-25 2020-03-13 无锡新柯工具制造有限公司 Automatic clamping jaw of wood chisel
CN115283926A (en) * 2022-09-29 2022-11-04 江苏时代新能源科技有限公司 Welding jig and welding equipment
CN115283926B (en) * 2022-09-29 2023-01-06 江苏时代新能源科技有限公司 Welding jig and welding equipment
CN117564594A (en) * 2024-01-15 2024-02-20 宁波尚进自动化科技有限公司 Manual welding table

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong

Patentee after: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd.

Patentee after: Shenzhen Dazu Photoelectric Equipment Co.,Ltd.

Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong

Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd.

Patentee before: SHENZHEN HAN'S PHOTOELECTRIC EQUIPMENT Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20220311

Address after: 518000 floor 6, building 5, Han's laser Industrial Park, No. 128, Chongqing Road, Fuyong street, Bao'an District, Shenzhen, Guangdong Province

Patentee after: Shenzhen Dazu Photoelectric Equipment Co.,Ltd.

Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong

Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd.

Patentee before: Shenzhen Dazu Photoelectric Equipment Co.,Ltd.

CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 518000 floor 6, building 5, Han's laser Industrial Park, No. 128, Chongqing Road, Fuyong street, Bao'an District, Shenzhen, Guangdong Province

Patentee after: Shenzhen Han family sealing and Testing Technology Co.,Ltd.

Address before: 518000 floor 6, building 5, Han's laser Industrial Park, No. 128, Chongqing Road, Fuyong street, Bao'an District, Shenzhen, Guangdong Province

Patentee before: Shenzhen Dazu Photoelectric Equipment Co.,Ltd.