CN208502978U - A kind of position-limit foot for aspiration pump - Google Patents

A kind of position-limit foot for aspiration pump Download PDF

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Publication number
CN208502978U
CN208502978U CN201821064532.1U CN201821064532U CN208502978U CN 208502978 U CN208502978 U CN 208502978U CN 201821064532 U CN201821064532 U CN 201821064532U CN 208502978 U CN208502978 U CN 208502978U
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China
Prior art keywords
limit
foot
aspiration pump
feet station
limit foot
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Active
Application number
CN201821064532.1U
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Chinese (zh)
Inventor
何成伟
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Harmony Integrated Circuit Equipment (shanghai) Co Ltd
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Harmony Integrated Circuit Equipment (shanghai) Co Ltd
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Priority to CN201821064532.1U priority Critical patent/CN208502978U/en
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Publication of CN208502978U publication Critical patent/CN208502978U/en
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Abstract

The utility model discloses a kind of position-limit foots for aspiration pump, the utility model has structurally reasonable simple, production cost is low, it is easy for installation, it is multiple functional, the shockproof specification of the design considerations of this position-limit foot is to be designed, by using this position-limit foot, so that aspiration pump is at runtime, the movement in the horizontal direction of its equipment is limited, to reduce aspiration pump displacement in the horizontal direction, further weaken the vibration of the appendix of aspiration pump, influence so as to avoid aspiration pump self vibration to other equipment, the environment worked normally so as to improve aspiration pump, and ensure that other equipment run well;The equipment work that needs repairing also is set to become convenient simultaneously.

Description

A kind of position-limit foot for aspiration pump
Technical field
The utility model relates to pump technical field, in particular to a kind of position-limit foot for aspiration pump are evacuated in dust free room.
Background technique
It is also more accurate since aspiration pump application is more frequent in Electronics Factory especially in semiconductor factory, wherein aspiration pump Stability it is particularly important;Since aspiration pump itself can generate vibration at work, so the equipment is extremely unstable.But by In aspiration pump itself designs the characteristics of, vertical direction can substantially overcome the vibration of its vertical direction due to gravity. But aspiration pump itself operates the vibration that can also generate horizontal direction, so that aspiration pump meeting left-right and front-back is shaken, long-term water It is flat to shake the connector part generation fatigue damage phenomenon that will lead to appendix.In addition, the rolling of the horizontal direction due to appendix It is dynamic its vibration to be further transmitted to other precision instruments, it is done so as to cause other precision instruments by the vibration of its appendix It disturbs, to destroy the normal work of other precision instruments, very big influence further will cause on its product quality.It is evacuated simultaneously Pump is also the more frequent equipment of maintenance, it is often necessary to which the mobile equipment goes to repair.So needing to invent a kind of fixed knot Structure carries out limit and easy-to-dismount fixed structure to its horizontal direction, so that it is guaranteed that aspiration pump itself and being connected thereto Precision instrument energy optimum state operating.
Utility model content
The purpose of this utility model is that solve the above-mentioned problems, and provides a kind of position-limit foot for aspiration pump.
To solve the above-mentioned problems, the utility model provides a kind of technical solution: a kind of position-limit foot for aspiration pump, It include: aspiration pump and mounting platform, the aspiration pump is arranged on mounting platform, and innovative point is: further including position-limit foot;Institute State the specific structure of position-limit foot are as follows: including limiting feet station foot, position-limit foot clamping screw, position-limit foot movable plate, fixing bolt, limit Feet station sole and limit plate;The L-shaped shape of the limit feet station foot, the limit feet station foot are fixedly connected on limit feet station sole Plate upper surface it is upper;A position-limit foot activity is connected with by position-limit foot clamping screw on the lateral surface of limit feet station foot upper end Plate, the position-limit foot movable plate are parallel to each other with horizontal plane;A limit for limit is equipped with below the position-limit foot movable plate Position plate, the limit plate are fixedly connected on the lateral surface of limit feet station foot;In the limit feet station sole there are two connections The fixing bolt being spaced apart from each other;Specific connection relationship between the aspiration pump and mounting platform and position-limit foot are as follows: the limit Foot is two, and the diagonal line two sides of aspiration pump are arranged in the position-limit foot;The position-limit foot connects by the way that two fixing bolts are fixed It connects on mounting platform, the position-limit foot movable plate on two position-limit foots resists former and later two sides of aspiration pump, two institutes State left and right two sides that the limit feet station foot on position-limit foot resists aspiration pump.
Preferably, the position-limit foot is stainless steel material.
Preferably, the limit feet station sole is rectangular.
The utility model has the beneficial effects that the utility model have it is structurally reasonable it is simple, production cost is low, easy for installation, Multiple functional, the shockproof specification of the design considerations of this position-limit foot is to be designed, by using this position-limit foot, so that aspiration pump is being transported When row, equipment movement in the horizontal direction is limited, to reduce aspiration pump displacement in the horizontal direction, is further weakened The vibration of the appendix of aspiration pump, the influence so as to avoid aspiration pump self vibration to other equipment, so as to improve pumping The environment worked normally is pumped, and ensures that other equipment run well;The equipment work that needs repairing also is set to become convenient simultaneously.
Detailed description of the invention
The present invention is described in detail by the following detailed description and drawings for ease of explanation,.
Fig. 1 is conventional aspiration pump scheme of installation.
Fig. 2 is the structural schematic diagram of the utility model.
Fig. 3 is the detailed structure schematic diagram of the utility model.
Fig. 4 is the portion the C enlarged structure schematic diagram of the utility model.
Fig. 5 is the portion the B enlarged structure schematic diagram of the utility model.
Fig. 6 is the structural schematic diagram of the utility model position-limit foot.
Fig. 7 is the structural schematic diagram of the utility model position-limit foot.
1- aspiration pump;2- mounting platform;3- position-limit foot;31- limits feet station foot;32- position-limit foot clamping screw;33- limit Foot movable plate;34- fixing bolt;35- limits feet station sole;36- limit plate.
Specific embodiment
As shown in Figures 2 to 7, present embodiment uses a kind of following technical scheme: position-limit foot for aspiration pump, It include: aspiration pump 1 and mounting platform 2, it further includes position-limit foot 3 that the aspiration pump 1, which is arranged on mounting platform 2,;The position-limit foot 3 specific structure are as follows: including limit feet station foot 31, position-limit foot clamping screw 32, position-limit foot movable plate 33, fixing bolt 34, limit Position feet station sole 35 and limit plate 36;The L-shaped shape of the limit feet station foot 31, the limit feet station foot 31 are fixedly connected on limit 35 upper surface of position feet station sole it is upper;It is connected on the 31 upper end lateral surface of limit feet station foot by position-limit foot clamping screw 32 There is a position-limit foot movable plate 33, the position-limit foot movable plate 33 is parallel to each other with horizontal plane;Under the position-limit foot movable plate 33 Side is equipped with a limit plate 36 for limit, and the limit plate 36 is fixedly connected on the lateral surface of limit feet station foot 31;Institute State the fixing bolt 34 being spaced apart from each other there are two connections in limit feet station sole 35;The aspiration pump 1 and mounting platform 2 and limit Specific connection relationship between the foot 3 of position are as follows: the position-limit foot 3 is two, and the diagonal line of aspiration pump 1 is arranged in the position-limit foot 3 Two sides;The position-limit foot 3 is fixedly connected on mounting platform 2 by two fixing bolts 34, the limit on two position-limit foots 3 Position foot movable plate 33 resists former and later two sides of aspiration pump 1, and the limit feet station foot 31 on two position-limit foots 3 resists pumping Left and right two sides of air pump 1.
Wherein, the position-limit foot 3 is stainless steel material;The limit feet station sole 35 is rectangular.
The use state of the utility model are as follows: in use, two position-limit foot movable plates 33 resist forward and backward the two of aspiration pump 1 A side, two limit feet station feet 31 resist left and right two sides of aspiration pump 1, so that it is in the horizontal direction to reduce aspiration pump 1 Displacement, when needing to overhaul aspiration pump 1, rotary spacing foot movable plate 33, so that position-limit foot movable plate 33 does not resist aspiration pump 1, i.e., extensible aspiration pump 1 is overhauled.
The basic principles and main features of the present invention and the advantages of the present invention, current row has been shown and described above The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention, the utility model Claimed range is defined by the appending claims and its equivalent thereof.

Claims (3)

1. a kind of position-limit foot for aspiration pump, comprising: aspiration pump (1) and mounting platform (2), aspiration pump (1) setting exist On mounting platform (2), it is characterised in that: further include position-limit foot (3);
The specific structure of the position-limit foot (3) are as follows: living including limit feet station foot (31), position-limit foot clamping screw (32), position-limit foot Movable plate (33), fixing bolt (34), limit feet station sole (35) and limit plate (36);
The L-shaped shape of the limit feet station foot (31), the limit feet station foot (31) are fixedly connected on limit feet station sole (35) Upper surface it is upper;A limit is connected with by position-limit foot clamping screw (32) on the lateral surface of limit feet station foot (31) upper end Foot movable plate (33), the position-limit foot movable plate (33) are parallel to each other with horizontal plane;It is set below the position-limit foot movable plate (33) Have one for limit limit plate (36), the limit plate (36) be fixedly connected on limit feet station foot (31) lateral surface on; There are two the fixing bolts (34) being spaced apart from each other for connection in limit feet station sole (35);
Specific connection relationship between the aspiration pump (1) and mounting platform (2) and position-limit foot (3) are as follows: the position-limit foot (3) is Two, the position-limit foot (3) is arranged in the diagonal line two sides of aspiration pump (1);The position-limit foot (3) passes through two fixing bolts (34) it is fixedly connected on mounting platform (2), the position-limit foot movable plate (33) on two position-limit foots (3) resists aspiration pump (1) former and later two sides, the limit feet station foot (31) on two position-limit foots (3) resist left and right the two of aspiration pump (1) A side.
2. a kind of position-limit foot for aspiration pump according to claim 1, it is characterised in that: the position-limit foot (3) is not Rust steel material.
3. a kind of position-limit foot for aspiration pump according to claim 1, it is characterised in that: the limit feet station sole (35) rectangular.
CN201821064532.1U 2018-07-05 2018-07-05 A kind of position-limit foot for aspiration pump Active CN208502978U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821064532.1U CN208502978U (en) 2018-07-05 2018-07-05 A kind of position-limit foot for aspiration pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821064532.1U CN208502978U (en) 2018-07-05 2018-07-05 A kind of position-limit foot for aspiration pump

Publications (1)

Publication Number Publication Date
CN208502978U true CN208502978U (en) 2019-02-15

Family

ID=65283209

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821064532.1U Active CN208502978U (en) 2018-07-05 2018-07-05 A kind of position-limit foot for aspiration pump

Country Status (1)

Country Link
CN (1) CN208502978U (en)

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