CN208465784U - The mixing arrangement of medical fluid and supercritical fluid - Google Patents
The mixing arrangement of medical fluid and supercritical fluid Download PDFInfo
- Publication number
- CN208465784U CN208465784U CN201820545197.0U CN201820545197U CN208465784U CN 208465784 U CN208465784 U CN 208465784U CN 201820545197 U CN201820545197 U CN 201820545197U CN 208465784 U CN208465784 U CN 208465784U
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- Prior art keywords
- fluid
- supercritical fluid
- medical fluid
- medical
- mixing arrangement
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/80—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations
- B01F31/86—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations with vibration of the receptacle or part of it
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/04—Specific aggregation state of one or more of the phases to be mixed
- B01F23/043—Mixing fluids or with fluids in a supercritical state, in supercritical conditions or variable density fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/45—Magnetic mixers; Mixers with magnetically driven stirrers
- B01F33/453—Magnetic mixers; Mixers with magnetically driven stirrers using supported or suspended stirring elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/71805—Feed mechanisms characterised by the means for feeding the components to the mixer using valves, gates, orifices or openings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/75—Discharge mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/24—Mixing of ingredients for cleaning compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The purpose of this utility model is to provide the mixing arrangements of a kind of medical fluid and supercritical fluid, while preventing the pollution of the chamber interior of mixing arrangement, realize the mixing between medical fluid and supercritical fluid, rapidly and swimmingly so as to shorten the base-plate cleaning time.For realizing the mixing arrangement that the medical fluid of the utility model of the purpose and the mixing arrangement of supercritical fluid are for admixing medical solutions and supercritical fluid, medical fluid and supercritical fluid are used for cleaning base plate, the mixing arrangement of medical fluid and supercritical fluid includes: chamber, its supply for obtaining the medical fluid and supercritical fluid, and realize the mixing of medical fluid and supercritical fluid；And vibration generating unit, it is set to the outside of the chamber, is vibrated by causing in the medical fluid and supercritical fluid in the chamber interior and realizes mixing.
Description
Technical field
The utility model relates to the mixing arrangements of a kind of medical fluid and supercritical fluid, in further detail, are related to a kind of medical fluid
With the mixing arrangement of supercritical fluid, while the pollution of the chamber interior of mixing arrangement can be prevented, rapidly realize medical fluid and
Mixing between supercritical fluid.
Background technique
In general, cleaning is divided into wet-cleaned and dry clean, wherein wet-cleaned is extensive in the art of semiconductor manufacturing
It utilizes.Wet-cleaned is to use the chemical substance for being suitble to polluter in each step and continuously remove the mode of polluter,
The polluter for remaining on substrate is removed using a large amount of bronsted lowry acids and bases bronsted lowry solution.
But the chemical substance utilized in the wet-cleaned not only has an adverse effect to environment, but also technique
Complexity, to be so that the principal element that the unit cost of production of product rises significantly is moreover being used in as highly integrated
When the cleaning of the same delicate part of circuit, due to interfacial tension, the pattern of fine structure narrows and is destroyed, and thus existing can not
The problem of effectively realizing pollutant removal.
As the scheme for solving described problem, developing recently will be as non-toxic and incombustible, cheap
And the carbon dioxide of environment-friendly type substance is used as the dry-type cleaning method of solvent.The advantages of carbon dioxide, is, because having low
Critical-temperature and critical pressure, so supercriticality can be easily reached, and interfacial tension is faced close to zero (zero) super
Under boundary's state, it is easy to due to high compressibility so that density or solvent strength are with change in pressure, and because lead to
It crosses decompression and is converted to gaseous state, therefore can simply separate solvent from solute.
As described above, an example as look-ahead technique relevant to the base plate cleaning device of supercritical fluid is used,
Fig. 1 shows the mixing of medical fluid and supercritical fluid that the prior art is recorded as in publication the 10-2010-0054455th
The composition figure of device.
The mixing arrangement of existing medical fluid and supercritical fluid includes: holding tank 50, is used to store medical fluid；Spray pump
51, it is set as drawing medical fluid from the holding tank 50 with certain pressure；Carbon dioxide pump 53 is drawn from carbon dioxide tank 52
Carbon dioxide；Mixer 54 obtains the medical fluid and dioxy that the spray pump 51 and carbon dioxide pump 53 supply with certain pressure
Change carbon, and the medical fluid and carbon dioxide are mixed；Seat ring 55 obtains carbon dioxide and medicine that the mixer 54 supplies
The supply of the mixture of liquid, and wafer W is cleaned.
The mixer 54 is provided with blender 56, to equably mix to carbon dioxide and medical fluid, seat ring
55 are configured to that wafer W may make to place and rotate, and valve 57 is provided between mixer 54 and seat ring 55.In other words, two
Holding tank 50 from the carbon dioxide tank 52 and for storing medical fluid of carbonoxide and medical fluid is supplied to mixer 54 and equably
It is mixed, this is to clean wafer W while supply again to seat ring 55.
But constituted according to as described above, it is arranged by the blender 56 of motor driving in the form for penetrating through mixer 54,
Accordingly, when the outstanding supercritical fluid of permeability infiltrates into the gas in order to be kept stirring between the rotary shaft of device 56 and mixer 54
When close and the seal member of setting inside and return, metallic particles and fraction compositions are mixed into the mixer 54 of mixing arrangement
Portion, to there are problems that leading to pollution.
Utility model content
The utility model is proposed to solve the problems, such as described above, its purpose is to provide a kind of medical fluid and is surpassed
The mixing arrangement of critical fluids while preventing the pollution of the chamber interior of mixing arrangement, realizes rapidly and swimmingly medical fluid
Mixing between supercritical fluid, so as to shorten the base-plate cleaning time.
It is to be used for for realizing the medical fluid of the utility model of purpose as described above and the mixing arrangement of supercritical fluid
The mixing arrangement of admixing medical solutions and supercritical fluid, medical fluid and supercritical fluid are used for cleaning base plate, medical fluid and supercritical fluid
Mixing arrangement include: chamber, obtain the supply of the medical fluid and supercritical fluid, and realize medical fluid and supercritical fluid
Mixing；And vibration generating unit, it is set to the outside of the chamber, passes through the medical fluid and shooting flow in the chamber interior
Cause to vibrate and realize mixing in body.
The vibration generating unit may be configured as including oscillator and oscillator, and oscillator generates frequency, oscillator with it is described
Oscillator is electrically connected, and is installed on the outer wall of the chamber, is applied to the medical fluid and supercritical fluid of the chamber interior
Add vibration.
The oscillator can produce the ultrasonic wave of 20~100kHz.
The oscillator can produce the high frequency of 100kHz or more.
Around the outer wall of the chamber multiple oscillators can be provided in the form of there is interval up and down.
It may be provided with the stirring magnet of rotatable state in the lower part of chamber, the chamber locating for the stirring magnet
Motor magnet and motor are provided on the outside of room, motor magnet is used to using magnetic force the stirring magnet is rotated, horse
Up to the driving force provided for rotating the motor magnet.
The stirring magnet and motor magnet can carry out in a non-contact manner in the state of across the chamber
Rotation.
The stirring magnet and motor magnet can be provided with the pole N and the pole S in opposed facing face in form repeatedly.
The stirring magnet is formed as propeller form.
Medical fluid flows into pipe and supercritical fluid flows into pipe and may connect to the side of the chamber, the connection of fluid-mixing supply pipe
In the other side of the chamber, fluid-mixing supply pipe is used for the seat ring side to cleaning or the drying for realizing substrate and supplies by medical fluid
With the mixed fluid-mixing of supercritical fluid.
Pipe is flowed into the medical fluid and supercritical fluid flows into pipe and fluid-mixing supply pipe and may be provided with for being opened and closed respectively
From the valve of pipeline.
The medical fluid can be isopropanol (IPA) or cosolvent, and the supercritical fluid can be overcritical titanium dioxide
Carbon.
The mixing arrangement of medical fluid and supercritical fluid according to the present utility model is produced by the external setting vibration in chamber
Life portion, so that generating vibration in the medical fluid and supercritical fluid for flowing into chamber interior to promote to mix, to prevent from mixing
While the pollution of the chamber interior of device, the mixing between medical fluid and supercritical fluid, Jin Erke are realized rapidly and swimmingly
Shorten the base-plate cleaning time, at the same time, improves cleaning performance.
In addition, magnet is stirred in setting in the lower part of chamber, it is non-contact simultaneously in the external setting and stirring magnet progress of chamber
The motor magnet of rotation passes through the change repeatedly of gravitation and repulsion between stirring magnet and the facing polarity of motor magnet
It moves and to stir magnet rotation, therefore can more improve the mixed performance between medical fluid and supercritical fluid.
Detailed description of the invention
Fig. 1 is the composition figure of the mixing arrangement of medical fluid and supercritical fluid according to prior art.
Fig. 2 is the phasor (phase diagram) according to the temperature and pressure of carbon dioxide.
Fig. 3 is the distribution map for being applicable in the substrate board treatment of the utility model.
Fig. 4 is the composition figure according to the mixing arrangement of the medical fluid and supercritical fluid of the utility model first embodiment.
Fig. 5 is the composition figure according to the mixing arrangement of the medical fluid and supercritical fluid of the utility model second embodiment.
Specific embodiment
Hereinafter, composition and effect to the preferred embodiment for the utility model carry out as follows specifically referring to attached drawing
It is bright.
Firstly, referring to Fig. 2, to the carbon dioxide (CO according to the supercritical fluid for being suitable for the utility model2) temperature
It is illustrated with the phasor of pressure.
In general, substance has three kinds of gaseous state (gas), liquid (liquid) and solid-state (solid) states (three-phase).As shown in Fig. 2,
The three-phase is divided into, and is indicated the vapor pressure curve of the boundary between gaseous state and liquid, is indicated boundary between gaseous state and solid-state
Sublimation curve and the solubility curve for indicating boundary between solid-state and liquid.The overlapped point of these three-phases is three phase point
(triple point) reaches gaseous state and what liquid coexisted faces if vapor pressure curve extends from the three phase point to high temperature side
Boundary's point.In such critical point, gaseous state is identical with the density of liquid, and the phase interface of gas and liquid coexisting state disappears.With regard to two
Carbonoxide (CO2) the case where for, critical-temperature be 31.3 DEG C, critical pressure 7.38Mpa.
In the state of the high temperature compared with the critical point and high pressure, without the area between gaseous state and liquid condition
Not, substance becomes single-phase supercritical fluid.Supercritical fluid is in the highdensity fluid of the above boil down to of critical-temperature.It is super to face
Boundary's fluid has the property that in the prevailing aspect of extension of solvent molecule, similar with gas, cannot ignore
Similar with liquid in the aspect of the influence of the cohesiveness of molecule, supercritical fluid has the characteristic of dissolution many kinds of substance accordingly.
In addition, supercritical fluid has wellability more higher than liquid, there is the characteristic that can be easy to be impregnated with microstructure.In addition, super
Critical fluids are directly gaseous state from supercriticality transfer, and do not have surface tension, therefore do not destroy the micro- of substrate
Thin pattern, and there is the characteristic that can the foreign matters such as medical fluid between fine pattern cleaned and be dried.
Referring to Fig. 3, the substrate board treatment 1 suitable for the utility model includes: supercritical fluid cylinder 101, is used to deposit
The supercritical fluid of liquid storage state；Gasifier 102 makes the supercritical fluid of liquid gasify；Supercritical fluid slot 103 is used
It is stored in the supercritical fluid of gasification；Clarifier 104 filters foreign matter in gaseous shooting flow body；High-pressure pump
105, force feed is carried out to supercritical fluid with high pressure；Heater 106, makes supercritical fluid heat up；Medical fluid and overcritical
The mixing arrangement 200 of fluid comprising rinse mixer 107 or cleaning mixer 108, rinse mixer 107 to for rushing
The medical fluid and supercritical fluid for washing substrate are mixed, and clean mixer 108 to the medical fluid and shooting flow for cleaning base plate
Body is mixed；Seat ring 300 is executed the cleaning of substrate by the supercritical fluid mixed with medical fluid or is dried work
Skill；Separator 109 is discharged medical fluid and recycles gaseous supercritical fluid after the treatment process of completing substrate；Regenerator
110, it is used for so that foreign matter contained in supercritical fluid by separator 109 is filtered, and to supercritical fluid
It is recycled.
Referring to Fig. 4, according to the mixing arrangement 200-1 of the medical fluid of the utility model one embodiment and supercritical fluid, 200
It is the mixing arrangement for admixing medical solutions and supercritical fluid, medical fluid and supercritical fluid are used for cleaning base plate W, and medical fluid faces with super
The mixing arrangement 200-1 of boundary's fluid, 200 include: chamber 210, obtain the supply of the medical fluid and supercritical fluid, and realize
The mixing of medical fluid and supercritical fluid；And vibration generating unit 220, it is set to the outside of the chamber 210, by described
Cause to vibrate and realize mixing in medical fluid and supercritical fluid inside chamber 210.
The vibration generating unit 220 is configured to include oscillator 221 and oscillator 222, and oscillator 221 generates frequency,
Oscillator 222 is electrically connected with the oscillator 221, and is installed on the outer wall of the chamber 210, into the chamber 210
The medical fluid and supercritical fluid in portion apply vibration.
The oscillator 221 can produce the ultrasonic wave of 20~100kHz, or generate the high frequency of 100kHz or more.
Around the outer wall of chamber 210 multiple oscillators 222 can be provided in the form of there is interval up and down.This reality
It applies and shows the feelings that the oscillator 222 is set as three layers around the outer wall of chamber 210 in the form of having interval up and down in example
The example of condition, but its setting number is without being limited thereto.
The top side of the chamber 210 is provided with medical fluid inflow pipe 230 and the first valve 231, the first valve 231 are right
The pipeline that medical fluid flows into pipe 230 is opened and closed, and the top other side of the chamber 210 is provided with supercritical fluid and flows into pipe
240 and second valve 232, the pipeline that the second valve 232 flows into pipe 240 to supercritical fluid be opened and closed.
The lower part of the chamber 210 is provided with fluid-mixing supply pipe 250 and supply valve 251, fluid-mixing supply
Pipe 250 is the fluid-mixing mixed to 300 side of the seat ring supply cleaned or dried to substrate by medical fluid and supercritical fluid
Flow path, supply valve 251 flow path of fluid-mixing supply pipe 250 is opened and closed.
It is internally provided with platform 310 in the seat ring 300, process object substrate W is placed in platform 310, in seat ring 300
Lower part be provided with discharge pipe 320 and discharge valve 321, discharge pipe 320, which is used to be discharged, to be completed to clean or dry treatment process
The flow path of discharge pipe 320 is opened and closed in medical fluid and supercritical fluid and the foreign matter removed from substrate W, discharge valve 321.
To according to the medical fluid of the utility model one embodiment formed as described above and the mixing arrangement of supercritical fluid
200-1,200 effect be illustrated, pipe 230 and supercritical fluid flowed by medical fluid flow into pipe 240 and flow into and be stored in chamber
Medical fluid and supercritical fluid inside room 210 obtain the transmitting of the vibrational energy generated using ultrasonic wave or high frequency, pass through
The physical vibration may make medical fluid and supercritical fluid to mix in a short time, and the ultrasonic wave or high frequency are that vibration generates
Oscillator 221 and oscillator 222 excitation in portion 220.
As a result, the medicine for being mixed into supercriticality rapidly can be supplied to seat ring 300 by fluid-mixing supply pipe 250
The fluid-mixing of liquid and supercritical fluid, accordingly can promptly to the foreign matter between the pattern for remaining on substrate W carry out dissolution and
Removal, therefore the substrate processing process time can be shortened, and the performance of cleaning and dry foreign matter can be improved.
Hereinafter, being filled referring to Fig. 5 to the mixing of the medical fluid and ultrasonic fluid of another embodiment according to the present utility model
Set 200-2,200 composition and effect be illustrated, assign identical drawing reference numeral to component identical with embodiment above-mentioned,
Omit the repeated explanation to this.
For according to the mixing arrangement 200-2 of the medical fluid of the present embodiment and ultrasonic fluid, 200, in the chamber 210
Lower part be provided with the stirring magnet 260 of rotatable state, the chamber 210 locating for the stirring magnet 260 it is outer
Side is provided with motor magnet 270 and motor 280, and motor magnet 270 is used to using magnetic force the stirring magnet 260 is revolved
Turn, motor 280 provides the driving force for rotating the motor magnet 270.
The stirring magnet 260 and motor magnet 270 can be provided with the pole N in opposed facing face in form repeatedly
With the pole S, the stirring magnet 260 is formed as propeller form.As a result, when the motor 280 is rotated and driven, by described
It stirs the variation repeatedly of gravitation and repulsion between magnet 260 and the facing polarity of motor magnet 270 and to stir magnetic
Iron 260 rotates, therefore can more improve the mixed performance between medical fluid and supercritical fluid.
In addition, the stirring magnet 260 and motor magnet 270 are in the state of across chamber 210 with non-contact
Form rotated, therefore from it is in the prior art in the form of penetrating through chamber be arranged the composition of blender it is different, can prevent
Only while pollution inside chamber 210, the mixing between medical fluid and supercritical fluid is realized rapidly.
In the embodiment, medical fluid can be isopropanol (IPA) or cosolvent, and the supercritical fluid can be super face
Boundary's carbon dioxide.But the type of medical fluid and supercritical fluid is not limited to this, it is of course possible to other fluid, insteads.
As described above, the utility model is not limited to the embodiment, in no disengaging claims
In requested the utility model technical idea in the case where, in technical field belonging to the utility model have general knowledge
Technical staff be able to carry out obvious deformation implementation, and the deformation implementation belongs to the scope of the utility model.
Label declaration
1: substrate board treatment 101: supercritical fluid cylinder
102: gasifier 103: supercritical fluid slot
104: clarifier 105: high-pressure pump
106: heater 107: rinsing mixer
108: cleaning mixer 109: separator
110: regenerator
200,200-1,200-2: the mixing arrangement of medical fluid and supercritical fluid
210: chamber 220: vibration generating unit
221: oscillator 222: oscillator
230: medical fluid flows into 231: the first valve of pipe
240: supercritical fluid flows into 241: the second valve of pipe
250: fluid-mixing supply pipe 251: supply valve
260: stirring magnet 270: motor magnet
280: motor 300: seat ring
310: platform 320: discharge pipe
321: discharge valve W: substrate
Claims (12)
1. the mixing arrangement of a kind of medical fluid and supercritical fluid is the mixing arrangement for admixing medical solutions and supercritical fluid,
Medical fluid and supercritical fluid are used for cleaning base plate, which is characterized in that the mixing arrangement of medical fluid and supercritical fluid includes:
Chamber, obtains the supply of the medical fluid and supercritical fluid, and realizes the mixing of medical fluid and supercritical fluid；And
Generating unit is vibrated, the outside of the chamber is set to, by the medical fluid and supercritical fluid of the chamber interior
Cause to vibrate and realize mixing.
2. the mixing arrangement of medical fluid according to claim 1 and supercritical fluid, which is characterized in that the vibration generating unit
Include:
Oscillator generates frequency；
Oscillator is electrically connected with the oscillator, and is installed on the outer wall of the chamber, to the medicine of the chamber interior
Liquid and supercritical fluid apply vibration.
3. the mixing arrangement of medical fluid according to claim 2 and supercritical fluid, which is characterized in that
The oscillator generates the ultrasonic wave of 20~100kHz.
4. the mixing arrangement of medical fluid according to claim 2 and supercritical fluid, which is characterized in that
The oscillator generates the high frequency of 100kHz or more.
5. the mixing arrangement of medical fluid according to claim 2 and supercritical fluid, which is characterized in that
Multiple oscillators are provided in the form of there is interval up and down around the outer wall of the chamber.
6. the mixing arrangement of medical fluid according to claim 1 and supercritical fluid, which is characterized in that
The lower part of the chamber is provided with the stirring magnet of rotatable state,
Motor magnet and motor are provided on the outside of the chamber locating for the stirring magnet, motor magnet is for benefit
With magnetic force the stirring magnet is rotated, motor provides the driving force for rotating the motor magnet.
7. the mixing arrangement of medical fluid according to claim 6 and supercritical fluid, which is characterized in that
The stirring magnet and motor magnet are rotated in a non-contact manner in the state of across the chamber.
8. the mixing arrangement of medical fluid according to claim 6 and supercritical fluid, which is characterized in that
The stirring magnet and motor magnet are provided with the pole N and the pole S in opposed facing face in form repeatedly.
9. the mixing arrangement of medical fluid according to claim 8 and supercritical fluid, which is characterized in that
The stirring magnet is formed as propeller form.
10. the mixing arrangement of medical fluid according to claim 1 and supercritical fluid, which is characterized in that
Medical fluid flows into pipe and supercritical fluid flows into the side that pipe is connected to the chamber,
Fluid-mixing supply pipe is connected to the other side of the chamber, fluid-mixing supply pipe be used for the cleaning for realizing substrate or
The fluid-mixing that dry seat ring side supply is mixed by medical fluid and supercritical fluid.
11. the mixing arrangement of medical fluid according to claim 10 and supercritical fluid, which is characterized in that
Pipe is flowed into the medical fluid and supercritical fluid flows into pipe and fluid-mixing supply pipe is provided with for being opened and closed respective pipeline
Valve.
12. the mixing arrangement of medical fluid according to claim 1 and supercritical fluid, which is characterized in that
The medical fluid is isopropanol (IPA) or cosolvent,
The supercritical fluid is supercritical carbon dioxide.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170049517A KR20180116802A (en) | 2017-04-18 | 2017-04-18 | Mixing device for chemical and supercritical fluid |
| KR10-2017-0049517 | 2017-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208465784U true CN208465784U (en) | 2019-02-05 |
Family
ID=64099066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820545197.0U Active CN208465784U (en) | 2017-04-18 | 2018-04-17 | The mixing arrangement of medical fluid and supercritical fluid |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20180116802A (en) |
| CN (1) | CN208465784U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102378329B1 (en) | 2019-10-07 | 2022-03-25 | 세메스 주식회사 | Apparatus and method for treating substrate |
-
2017
- 2017-04-18 KR KR1020170049517A patent/KR20180116802A/en not_active Application Discontinuation
-
2018
- 2018-04-17 CN CN201820545197.0U patent/CN208465784U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180116802A (en) | 2018-10-26 |
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