CN208462125U - A kind of high line direct current hollow cathode source of large size low-voltage high-efficiency - Google Patents

Abstract

This realization is novel to provide a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency, it includes cathode mechanism, first anode mechanism, second plate mechanism and control power supply, aura area is formed between first anode mechanism and second plate mechanism, aerating mechanism is provided at the top of cathode mechanism, its by between anode seat and cathode plate on-load voltage make the gas aura being passed through generate plasma, and anode ring and anode seat are connected as one, directly collection beam acceleration is carried out using anode ring plasma, the electronics in second plate mechanism plasma is recycled to be drawn and absorbed, solves the technical issues of electronics injury target, guiding acceleration is carried out to Ar cation simultaneously, avoid loss, improve working efficiency.

Description

A kind of high line direct current hollow cathode source of large size low-voltage high-efficiency

Technical field

The utility model relates to vacuum coating plasma generation technique field, specially a kind of large-scale low-voltage high-efficiency Gao Shu Flow direct current hollow cathode source.

Background technique

There is a kind of physical gas phase deposition technology in the method for vacuum coating, refers to that under vacuum conditions, utilization is various Plating material is gasificated into atom, molecule or makes its ionization ion, the method being deposited directly on matrix surface by physical method.System Standby hard reaction film is made mostly with physical gas-phase deposite method, it utilizes certain physical process, such as the thermal evaporation of substance, or by When to ion bombardment phenomena such as the sputtering of material surface atom, material atom controllably shifting from source substance to film is realized Journey.

And in the way of the sputtering of ion bombardment material surface atom, it is not only applied in plated film work, to plated film work Before work to workpiece surface carry out impurity removing during, it is also desirable to use.Its working principle is that using cathode and rising The electronics generated between brightness electrode under the action of electric field E, during flying to substrate with ar atmo or other inert gases Atom collides, its ionization is made to produce Ar cation and new electronics, and new electronics flies to substrate, and Ar cation is made in electric field Cathode target is flown to lower acceleration, and target surface is bombarded with high-energy, sputters target.

In the utility model patent of Patent No. CN201620457732.8, it is hollow to disclose a kind of compact type large power Cathode discharge device is passed through multiple gases into hollow-cathode tube via seal pipe using gas introduction port, by controlling power supply In rise an arc power certain voltage is loaded between cathode plate and impressed current anode plate, make gas formed arc discharge form, Permanent magnet forms stable magnetic field inside hollow-cathode tube, after the arc discharge several seconds, opens constant current source, and close the starting the arc Power supply so that generating stable plasma in hollow-cathode tube, and is sprayed by impressed current anode board bottom portion, due to electric and magnetic fields Effect, plasma at divergent shape reach orificed anode plate, to form the plasma line of high ionization level.

In the utility model patent of Patent No. CN201620457557.2, a kind of utilization hollow cathode adjusting is disclosed Sample is placed between sample rack and orificed anode plate by the device of ion energy, then using gas introduction port via Seal pipe is passed through multiple gases into hollow-cathode tube, at this point, being added between cathode plate and impressed current anode plate by playing arc power Certain voltage is carried, gas is made to form the form of arc discharge, after arc discharge maintains the several seconds, opens striking power supply, and close Arc power is played, so that generating stable plasma in hollow-cathode tube, and is escaped by impressed current anode board bottom portion, into vacuum chamber Interior, under the constraint in magnetic field, plasma reaches orificed anode plate and simultaneously passes through orificed anode plate, formed high ionization level it is equal from Daughter line, due to the back bias voltage between orificed anode plate and sample rack, so that ion is towards the direction of sample rack Accelerate, so that sample be made to obtain different ion energies.

But existing Hollow Cathode devices carry out plasma after Ar cation and new electronic plasma occurs Target is bombarded after boundling, the electrons in plasma damage target, and be directed to specification target when, due to the sky in aura area Between it is excessive, loss occurs in moving process for plasma, it may occur that a large amount of losses influence working efficiency.

Utility model content

In view of the above problems, the utility model provides a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency, By between anode seat and cathode plate on-load voltage so that the gas aura being passed through is generated plasma, and by anode ring and anode seat It is connected as one, directly carries out collection beam acceleration using anode ring plasma, recycle second plate mechanism plasma In electronics drawn and absorbed, solve electronics injury target the technical issues of, while to Ar cation carry out guiding plus Speed avoids loss, improves working efficiency.

To achieve the above object, the utility model provides a kind of large-scale low-voltage high-efficiency high line direct current hollow cathode source, packet It includes:

Cathode mechanism, the cathode mechanism include cathode plate, are detachably connected below the cathode plate and are provided with cathode tube, The cathode tube is internally provided with cylindrical hollow cathode, which is internally provided with air inlet pipe；

First anode mechanism, the first anode mechanism are set to the lower section of the cathode mechanism, with the cathode machine Structure is detachably connected setting, and it is ignition voltage mechanism, the plasma which issues the hollow cathode Carry out boundling processing；

Second plate mechanism, the second plate mechanism are set to the lower section of the first anode mechanism, with described Aura area is spaced between one anode mechanism, and it is striking motor mechanism, which attracts the cathode mechanism hair Electronics out；And

Power supply is controlled, the control power supply has included arc power and striking power supply, the connection of the described arc power yin Pole plate and the first anode mechanism, the cathode of the striking power supply are connect with the cathode plate, the anode of the striking power supply It is connect with the second plate mechanism.

As an improvement, the cathode mechanism further include:

Target, the target are located at the lower section of the cathode plate, by upper between the cathode mechanism Insulation board is detachably connected setting；And

Outer steel cylinder, the outer steel cylinder are sheathed on the outside of the cathode tube, upper and lower ends by dead ring respectively with include yin Pole plate and the connection setting of first anode mechanism.

As an improvement, the top of the cathode plate is provided with the first cooling water channel, the upper and lower ends portion of the target It is respectively arranged with the second cooling water channel.

As an improvement, the hollow cathode includes:

Tantalum pipe, the tantalum pipe and the cathode tube are coaxially disposed, and lower end is provided with tungsten pipe, and the tungsten pipe passes through first Insulation sleeve and the cathode tube, which are set up, to be connected.

As an improvement, the top of the cathode plate is additionally provided with aerating mechanism, which includes:

Aerating seat is provided with air ventilation passage in the middle part of the aerating seat, the lower end of the air ventilation passage with it is described Air inlet pipe in hollow cathode is connected to setting, and the outer wall of the aerating seat is arranged by insulation sleeve and the cathode plate fitting, and Its top is detachably connected setting with the cathode plate；And

Gas-adding pipe, the gas-adding pipe are set to the top of the aerating seat, input gas to the air ventilation passage.

As an improvement, the first anode mechanism includes:

Anode seat is provided with middle insulation board between the anode seat and the cathode plate, the anode seat and the cathode plate Coaxially connected setting, and the anode seat is connect with described arc power；

Anode ring, the anode ring are set to the center position of the anode seat, and hollow cathode described in face is arranged, And it is detachably connected setting with the anode seat, and protection ring and protection ring pads are provided at the top of the anode ring；

Lower insulation plate, the lower insulation plate are set to the lower end of the anode seat, are detachably connected with the anode seat；

Connecting plate, the connecting plate are set to the lower section of the lower insulation plate, connect with the upper baffle plate in the aura area Connect setting；And

Cylinder is protected, the top of the protection cylinder is connect with the lower part of the anode seat to be set foot in, and the lower part of the protection cylinder is protruded into In the aura area.

As an improvement, being provided with the third cooling water channel around anode ring setting on the anode seat.

As an improvement, the lower openings of the anode ring are tubaeform flaring setting outwardly.

As an improvement, the second plate mechanism includes:

Impressed current anode seat, the setting of first anode mechanism described in the impressed current anode seat face, under the aura area Portion's partition is detachably connected setting, and it is provided with insulating barrier between the lower partition, the impressed current anode seat with it is described The anode of striking power supply is connected；

Anode rod, the anode rod are set to the top of the impressed current anode seat, detachable with the impressed current anode seat Connection, and its top is located in the aura area；

Arc extinguishing ring, the arc extinguishing ring set is set to the top of the anode rod, and it pads between the impressed current anode seat and sets There is the first insulation lantern ring；And

Outer cover, the outer cover cover at the outside of the anode rod, are provided with the second insulation between the arc extinguishing ring Lantern ring.

The 4th cooling cooling water channel is carried out with anode rod to it as an improvement, being provided in the impressed current anode seat.

The utility model has the beneficial effects that:

(1) the utility model makes to be passed through by being combined into one the on-load voltage between cathode plate using anode seat and anode ring Gas aura generate plasma after, anode ring plasma carries out collection beam acceleration immediately, recycles second plate mechanism Electronics in plasma is drawn and is absorbed, and avoids electronics injury target, while carrying out guiding to Ar cation and adding Speed avoids loss, improves Ar cation working efficiency；

(2) the utility model forms high concentration in narrow space inside the outer steel cylinder using the air inlet pipe in hollow cathode Argon gas, between anode seat and cathode plate load a lower voltage, so that it may form strong aura, can be effective Reduce voltage, guarantees safety, while reducing energy consumption；

(3) the utility model is directly arranged at the lower section of hollow cathode using anode ring, generated after argon gas aura etc. Gas ions directly carry out boundling by anode ring and acceleration is handled, and avoid plasma and are arriving at anode ring process from hollow cathode In loss, while enhancing the energy of plasma；

(4) the utility model is in the lower section of first anode mechanism setting protection cylinder, using protection cylinder to through anode ring boundling The plasma of sending carries out insulation blocking, avoids interference and influence of the plasma by device；

(5) the utility model is attracted using second plate mechanism plasma, and plasma is avoided to be gathered in sky The heart-yin extremely near, aura region is bigger, is adapted to the processing of larger product, and plasma can carry out more at a distance Transition, while second plate mechanism absorbs electronics；

(6) during the utility model draws electronics using second plate mechanism with the argon gas in aura area into The secondary even more multiple impact ionization of row, improves the ionization level of argon gas, keeps the concentration of Ar cation higher, enhances in aura area Aura intensity, improve working efficiency；

(7) the utility model is positive to cathode mechanism, first anode mechanism and second using coolant liquid is passed through from bottom to top Pole mechanism is cooled down, and coolant liquid can be made sufficiently to be full of first to fourth cooling water channel, sufficiently cooled down, and is avoided cooled Occurs cooling blind area in journey.

In conclusion the utility model has many advantages, such as that safety, low energy consumption, ionization level is high, work efficiency is high, it is especially suitable In vacuum coating plasma generation technique field.

Detailed description of the invention

Fig. 1 is the utility model schematic cross-sectional view；

Fig. 2 is the utility model cathode mechanism structural schematic diagram；

Fig. 3 is structure enlargement diagram at A in Fig. 2；

Fig. 4 is structure enlargement diagram at B in Fig. 1；

Fig. 5 is structure enlargement diagram at C in Fig. 1；

Fig. 6 is structure enlargement diagram at D in Fig. 1；

Fig. 7 is the utility model anode ring boundling status diagram；

Fig. 8 is the utility model electronics and Ar cation transition state schematic diagram.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for Convenient for description the utility model and simplify description, rather than the equipment of indication or suggestion meaning or element must have specifically Orientation is constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.

In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or Implicitly include one or more of the features.The meaning of " plurality " is two or two in the description of the present invention, More than, unless otherwise specifically defined.

Embodiment:

As shown in Figures 1 and 2, the high line direct current hollow cathode source of a kind of large-scale low-voltage high-efficiency, comprising:

Cathode mechanism 1, the cathode mechanism 1 include cathode plate 10, and the lower section of the cathode plate 10, which is detachably connected, to be provided with Cathode tube 11, the cathode tube 11 are internally provided with cylindrical hollow cathode 12, which is internally provided with air inlet Pipe 13；

First anode mechanism 2, the first anode mechanism 2 are set to the lower section of the cathode mechanism 1, with the cathode Mechanism 1 is detachably connected setting, and it is ignition voltage mechanism, which issues the hollow cathode 12 Plasma carries out boundling processing；

Second plate mechanism 3, the second plate mechanism 3 are set to the lower section of the first anode mechanism 2, and described Aura area 4 is spaced between first anode mechanism 2, and it is striking motor mechanism, which attracts the cathode machine The electronics that structure 1 issues；And

Power supply 5 is controlled, the control power supply 5 has included arc power 51 and striking power supply 52, the company of described arc power 51 The cathode plate 10 and described arc power 51 are connect, the cathode of the striking power supply 52 is connect with the cathode plate 10, described to draw The anode of arc power 52 is connect with the second plate mechanism 3.

As shown in Figure 2 and Figure 3, wherein the cathode mechanism 1 further include:

Target 14, the target 14 is located at the lower section of the cathode plate 10, between the cathode plate 10 Setting is detachably connected by upper insulation plate 15；And

Outer steel cylinder 16, the outer steel cylinder 16 are sheathed on 11 outside of cathode tube, and upper and lower ends are divided by dead ring 17 Not with include cathode plate 10 and first anode mechanism 2 connect setting.

Further, the top of the cathode plate 10 is provided with the first cooling water channel 101, the target 14 up and down Both ends are respectively arranged with the second cooling water channel 141.

Further, the hollow cathode 12 includes:

Tantalum pipe 121, the tantalum pipe 121 are coaxially disposed with the cathode tube 11, and lower end is provided with tungsten pipe 122, and should Tungsten pipe 122 is set up with the cathode tube 11 by the first insulation sleeve 123 and is connected.

It should be noted that meeting gassy, the gas can be Ar, He, N2 etc. in outer steel cylinder 16 by air inlet pipe 13 One of gas is a variety of, and the present embodiment is preferably Ar, after being filled with gas, plays arc power 51 in first anode mechanism 2 and yin Apply high-frequency and high-voltage power supply between pole plate 10, initial voltage can reach 200-400V, so that Ar is formed arc discharge, is discharging In crossing, electron bombardment Ar atom makes the ionization of Ar atom produce Ar cation and new electronics (plasma), and same with this When, striking power supply 52 applies Constant Direct Current power supply between second plate mechanism 3 and cathode plate 10, discharges at cathode mechanism 1 The electric arc of formation is drawn to second plate mechanism 3, also, electronics is also migrated in second plate mechanism 3.

Further illustrate, the intensity of aura be occur plasma quantity number, depend on two factors, I.e. in unit space Ar atomic quantity number and play that the voltage that arc power 51 originates is strong and weak, the number of Ar atom in unit space Amount is more, and the voltage for playing the starting of arc power 51 is stronger, then the intensity of aura is stronger, and the quantity of the plasma of generation is also got over It is more, it can be understood as, Ar atom is more, and voltage is stronger, and the quantity of electron collision Ar atom is also more, the Ar cation of generation Quantity it is also more.

But the starting voltage for playing arc power 51 the big more be easy to cause sparking, causes the damage of equipment, therefore how While guaranteeing aura intensity, reduces the starting voltage of arc power 51 as far as possible, in the utility model, passes through the outer steel of utilization Cylinder 16 and cathode tube 11 form a more narrow space therebetween, former using the Ar for forming high concentration in the space Subspace, then cooperate certain voltage that build-up of luminance power supply 51 applies between first anode mechanism 2 and cathode plate 10, make electronics and Ar The collision ratio of atom increases, so that it may aura intensity obtained by high voltage power supply ability is obtained, by so set, effectively reducing The voltage of build-up of luminance power supply 51 improves the safety of equipment, and the initial voltage that the utility model plays arc power 51 is 200- 400V, and the voltage after stabilising arc and electric current are only 20V/100A.

Wherein, in process gas discharge, cathode plate 10 and outer steel cylinder 16 and hollow cathode 12 all can be by high temperature Calcination, thus by be arranged the first cooling water channel 101 cathode plate 10 is carried out with outer steel cylinder 16 with the second cooling water channel 141 it is cold But, it avoids burning.

It is worth noting that, by the way that tungsten pipe 122 is arranged in the end of tantalum pipe 121, utilizing the fusing point of tungsten in the utility model Greater than the advantage of the fusing point of tantalum, so that tungsten pipe 122 is subjected to the calcination of Ar gas discharge process high temperature, tantalum pipe can be effectively protected 121 end is not consumed by high temperature sintering, while will not influence the normal work of the starting the arc, avoids tantalum pipe 121 in use process In gradually shortened by calcination.

As shown in figure 4, as a preferred embodiment, the top of the cathode plate 10 is additionally provided with aerating mechanism 6, The aerating mechanism 6 includes:

Aerating seat 61 is provided with air ventilation passage 611 in the middle part of the aerating seat 61, under the air ventilation passage 611 End is connected to setting with the air inlet pipe 13 in the hollow cathode 12, the outer wall of the aerating seat 61 by insulation sleeve 62 with it is described The setting of 10 fitting of cathode plate, and its top is detachably connected setting with the cathode plate 10；And

Gas-adding pipe 63, the gas-adding pipe 63 are set to the top of the aerating seat 61, to the air ventilation passage 611 Input gas.

It should be noted that being passed through Ar gas to air inlet pipe 13 using gas-adding pipe 63, make Ar gas in 12 end of hollow cathode Center at loss open, it is ensured that the distribution of Ar atom at hollow cathode 12 it is the strongest.

As shown in figure 5, as a preferred embodiment, the first anode mechanism 2 includes:

Anode seat 21 is provided with middle insulation board 22 between the anode seat 21 and the cathode mechanism 1, the anode seat 21 with The coaxially connected setting of the cathode plate 10, and the anode seat 21 connect setting with described arc power 51；

Anode ring 23, the anode ring 23 are set to the center position of the anode seat 21, hollow yin described in face Pole 12 is arranged, and it is detachably connected setting with the anode seat 21, and the top of the anode ring 23 is provided with protection ring 24 and protects Retaining ring pad 25；

Lower insulation plate 26, the lower insulation plate 26 are set to the lower end of the anode seat 21, removable with the anode seat 21 Unload connection；

Connecting plate 27, the connecting plate 27 are set to the lower section of the lower insulation plate 26, the top with the aura area 4 The connection setting of partition 41；And

Cylinder 28 is protected, the top of the protection cylinder 28 is connect with the lower part of the anode seat 21 to be set foot in, the protection cylinder 28 Lower part is protruded into the aura area 4.

Further, the third cooling water channel 211 around the anode ring 23 setting is provided on the anode seat 21.

Further, the lower openings of the anode ring 23 are tubaeform flaring setting outwardly.

As shown in Figure 7, it should be noted that anode seat 21 is connect with arc power 51 is played, and upper insulation plate 15 completely cuts off anode seat 21 with cathode plate 10, make to form potential difference between anode seat 21 and cathode plate 10, so by build-up of luminance power supply 51 make Ar pneumoelectric from.

It further illustrates, is wholely set anode ring 23 and anode seat 21 by utilizing, in its ionic discharge shape of Ar After aura, Ar cation and electronics after 21 pairs of anode seat ionization carry out boundling processing, make Ar cation and electronics gather from The outward opening at the middle part of anode seat 21 projects, and in clustering process, Ar cation and electronics obtain the acceleration of battery, make Ar just from Son and electron transfer rate are faster.

It should be noted that the migration path of protection 28 pairs of Ar cations of cylinder and electronics is defined protection, Ar is being avoided just Ion and electronics, by the interference and influence of other devices, migrate Ar cation and electronics to brightness in transition process In light area 4.

Wherein, due to that can generate high temperature in gas discharge glow discharge process, anode seat 21 is cooled down with anode ring 23, Therefore anode seat 21 and anode ring 23 are cooled down by the way that third cooling water channel 211 is arranged.

It further illustrates, the water outlet of third cooling water channel 211 is connected with the water inlet of the second cooling water channel 141 Logical, the mouth of a river of blowing of the second cooling water channel 141 is connected with the water inlet of the first cooling water channel 101, and coolant liquid is from third cooling water Road 211, which starts to flow up, to flow out through the second cooling water channel 141 from the first cooling water channel.

It further explains, in the first cooling water channel 101, the second cooling water channel 141 and third cooling water channel 211 In, coolant liquid is all bottom-up flowing, and coolant liquid can be filled with upwards from lower part, cold full of the first cooling water channel 101, second But water channel 141 and third cooling water channel 211 guarantee that the first cooling water channel 101, the second cooling water channel 141 and third are cooling Without cooling dead angle in water channel 211.

As shown in fig. 6, as a preferred embodiment, the second plate mechanism 3 includes:

Impressed current anode seat 31, first anode mechanism 2 described in 31 face of impressed current anode seat is arranged, with the aura area 4 lower partition 42 is detachably connected setting, and it is provided with insulating barrier 30 between the lower partition 42, auxiliary sun The anode of the pre- striking power supply 52 of electrode seat 31 is connected；

Anode rod 32, the anode rod 32 are set to the top of the impressed current anode seat 31, with the impressed current anode seat 31 are detachably connected, and its top is located in the aura area 4；

Arc extinguishing ring 33, the arc extinguishing ring 33 are sheathed on the top of the anode rod 32, and itself and the impressed current anode seat 31 Between pad be equipped with first insulation lantern ring 34；And

Outer cover 35, the outer cover 35 cover at the outside of the anode rod 32, are provided between the arc extinguishing ring 33 Second insulation lantern ring 36.

Further, it is provided in the impressed current anode seat 31 and the 4th cooling cooling water channel is carried out with anode rod 32 to it 311。

As shown in Figure 8, it should be noted that the cathode of striking power supply 52 is connect with cathode plate 10, anode and impressed current anode Seat 31 connects, and striking power supply 52 is constant-current dc power supply, and electric current and voltage are respectively 200A/35V, higher than the starting the arc after stabilising arc Power supply 51, the potential difference formed between cathode plate 10 and impressed current anode seat 31 by striking power supply 52 will be located at hollow cathode Electric arc near 12 is drawn downwards to anode rod 32, and the material of the anode rod 32 is copper, in simultaneous plasma Electronics is concentrated from the traction of electric field to anode rod 32 and is migrated, and target will not be caused to be damaged by electron collision to target movement It is bad even to puncture.

It further illustrates, electric arc is pulled past downwards aura area 4 using anode rod 32 and arrives at second plate mechanism 2 During, it is the process for drawing electronics and Ar cation downwards, if there is no second plate mechanism, then most electronics It will accumulate at hollow cathode 12 with Ar cation, form the effect that similar light bulb shines, can not be formed in entire aura area 4 Electric arc can not also be suitable for the processing of large-size workpiece.

Further explain, electronics 4 inward turning anode rod 32 of aura area migrate during, can in aura area 4 Ar gas collide again, separation forms Ar cation and new electronics, can provide the ionization level of Ar, raising unit space The concentration of interior Ar cation, and then improve the efficiency to work pieces process.

It is worth noting that, being applied to cathode plate 10 and sun when electric arc is attracted to anode rod 32 by hollow cathode 12 An arc power 51 between electrode seat 21 can close, and striking power supply 52 is used as stabilising arc power supply, maintain hollow cathode 12 and anode rod Aura electric arc between 32.

Wherein, target mechanism 7 is set in aura area, and target mechanism 7 includes target 71 and bias supply 72, bias supply 72 cathode is connect with target 71, plus earth, target 71 due to bias supply 72 setting, just by the Ar in plasma Ion is attracted on target 71, and Ar cation bombards target 71, removing target 71 (target is workpiece substrate at this time) table The impurity in face, the process are etching；Also it can use Ar cation to bombard target 71 (target is plating material at this time), make target Material sputters atom, and in the inert atmosphere using Ar gas by the atomic deposition to workpiece substrate sputtered, which is plating Film.

The course of work:

Gas-adding pipe 63 passes through air inlet pipe 13, can be full of Ar gas in outside steel cylinder 16, after being filled with gas, plays an arc power 51 and exists Apply high-frequency and high-voltage power supply between anode seat 21 and cathode plate 10, Ar gas is made to form arc discharge, in discharging, electronics bangs Ar atom is hit, the ionization of Ar atom is made to produce Ar cation and new electronics (plasma), and at the same time, striking power supply 52 Apply Constant Direct Current power supply between impressed current anode seat 31 and cathode plate 10, the electric arc to be formed carries out to discharging at hollow cathode 12 On traction to anode rod 32, also, electronics is migrated on cathode rod 32, and target 71 passes through application bias supply 72, will Ar cation attracts, and bombards it.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model Protection scope within.

Claims (10)

1. a kind of high line direct current hollow cathode source of large size low-voltage high-efficiency characterized by comprising

Cathode mechanism (1), the cathode mechanism (1) include cathode plate (10), are detachably connected and set below the cathode plate (10) Be equipped with cathode tube (11), which is internally provided with cylindrical hollow cathode (12), the hollow cathode (12) it is interior Portion is provided with air inlet pipe (13)；

First anode mechanism (2), the first anode mechanism (2) are set to the lower section of the cathode mechanism (1), with the yin Pole mechanism (1) is detachably connected setting, and it is ignition voltage mechanism, and the first anode mechanism (2) is to the hollow cathode (12) plasma issued carries out boundling processing；

Second plate mechanism (3), the second plate mechanism (3) is set to the lower section of the first anode mechanism (2), with institute Interval aura area (4) between first anode mechanism (2) is stated, and it is striking motor mechanism, which attracts institute State the electronics of cathode mechanism (1) sending；And

It controls power supply (5), the control power supply (5) has included arc power (51) and striking power supply (52), described arc power (51) the connection cathode plate (10) and the first anode mechanism (2), the cathode and the yin of the striking power supply (52) The anode of pole plate (10) connection, the striking power supply (52) is connect with the second plate mechanism (3).

2. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 1, which is characterized in that described Cathode mechanism (1) further include:

Target (14), the target (14) are located at the lower section of the cathode plate (10), with the cathode plate (10) Between be detachably connected setting by upper insulation plate (15)；And

Outer steel cylinder (16), the outer steel cylinder (16) are sheathed on the outside of the cathode tube (11), and upper and lower ends pass through dead ring (17) respectively with include cathode plate (10) and first anode mechanism (2) connect setting.

3. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 2, which is characterized in that described The top of cathode plate (10) is provided with the first cooling water channel (101), and the upper and lower ends portion of the target (14) is respectively set There are the second cooling water channel (141).

4. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 1, which is characterized in that described Hollow cathode (12) includes:

Tantalum pipe (121), the tantalum pipe (121) and the cathode tube (11) are coaxially disposed, and lower end is provided with tungsten pipe (122), And the tungsten pipe (122) is set up by the first insulation sleeve (123) and the cathode tube (11) and is connected.

5. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 1, which is characterized in that described The top of cathode plate (10) is additionally provided with aerating mechanism (6), which includes:

Aerating seat (61), aerating seat (61) middle part are provided with air ventilation passage (611), the air ventilation passage (611) Lower end setting is connected to the air inlet pipe (13) in the hollow cathode (12), the outer wall of the aerating seat (61) passes through insulation It covers (62) and the cathode plate (10) fitting is arranged, and its top is detachably connected setting with the cathode plate (10)；And

Gas-adding pipe (63), the gas-adding pipe (63) is set to the top of the aerating seat (61), to the air ventilation passage (611) gas is inputted.

6. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 1, which is characterized in that described First anode mechanism (2) includes:

Anode seat (21) is provided with middle insulation board (22) between the anode seat (21) and the cathode mechanism (1), the anode seat (21) with the cathode plate (10) coaxially connected setting, and the anode seat (21) is connected with described arc power (51)；

Anode ring (23), the anode ring (23) are set to the center position of the anode seat (21), hollow described in face Cathode (12) setting, and it is detachably connected setting with the anode seat (21), is provided with protection at the top of the anode ring (23) Ring (24) and protection ring pads (25)；

Lower insulation plate (26), the lower insulation plate (26) are set to the lower end of the anode seat (21), with the anode seat (21) It is detachably connected；

Connecting plate (27), the connecting plate (27) are set to the lower section of the lower insulation plate (26), with the aura area (4) Upper baffle plate (41) connection setting；And

It protects cylinder (28), the top of protection cylinder (28) is connect with the lower part of the anode seat (21) to be set foot in, the protection cylinder (28) lower part is protruded into the aura area (4).

7. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 6, which is characterized in that described The third cooling water channel (211) around the anode ring (23) setting is provided on anode seat (21).

8. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 6, which is characterized in that described The lower openings of anode ring (23) are tubaeform flaring setting outwardly.

9. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 1, which is characterized in that described Second plate mechanism (3) includes:

Impressed current anode seat (31), the setting of first anode mechanism (2) described in impressed current anode seat (31) face, with the aura The lower partition (42) in area (4) is detachably connected setting, and it is provided with insulating barrier between the lower partition (42) (30), which is connected with the anode of the striking power supply (52)；

Anode rod (32), the anode rod (32) is set to the top of the impressed current anode seat (31), with the impressed current anode Seat (31) is detachably connected, and its top is located in the aura area (4)；

Arc extinguishing ring (33), the arc extinguishing ring (33) are sheathed on the top of the anode rod (32), and itself and the impressed current anode seat (31) pad is equipped with the first insulation lantern ring (34) between；And

Outer cover (35), the outer cover (35) cover at the outside of the anode rod (32), set between the arc extinguishing ring (33) It is equipped with the second insulation lantern ring (36).

10. a kind of high line direct current hollow cathode source of large-scale low-voltage high-efficiency according to claim 9, which is characterized in that institute It states to be provided in impressed current anode seat (31) and the 4th cooling cooling water channel (311) is carried out with anode rod (32) to it.