CN208460783U - The novel graphite boat structure of pipe P monitor SPC - Google Patents
The novel graphite boat structure of pipe P monitor SPC Download PDFInfo
- Publication number
- CN208460783U CN208460783U CN201821339004.2U CN201821339004U CN208460783U CN 208460783 U CN208460783 U CN 208460783U CN 201821339004 U CN201821339004 U CN 201821339004U CN 208460783 U CN208460783 U CN 208460783U
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- Prior art keywords
- boat
- spc
- detection
- piece
- sheet glass
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model provides the novel graphite boat structure of pipe P monitor SPC a kind of, including several boat pieces, the boat on piece is equipped with multiple silicon wafers, the boat on piece is at least provided with a detection hole, detection sheet glass is embedded in the detection hole, the detection glass flake reflected rate is identical as silicon wafer wool making face reflectivity.The novel graphite boat structure of pipe P monitor SPC provided by the utility model a kind of is arranged detection sheet glass using graphite boat boat on piece, the coating film thickness of silicon nitride on detection sheet glass can be tested when testing SPC, it avoids taking silicon test, reduce piece of largely doing over again, economize on resources, reduces production cost.
Description
Technical field
The utility model relates to solar battery sheet technical fields, more particularly to the novel graphite of pipe P monitor SPC a kind of
Boat structure.
Background technique
Due to monitoring the needs of SPC, each graphite boat meeting diagonally opposing corner extracts the silicon wafer measurement film thickness after plated film according to this at present
And refractive index, the silicon wafer after measuring is since there are finger-marks and scratch, Friction mark on surface, so selection is directly done over again.
With the increase of yield, this monitoring mode results in piece of largely doing over again, and the wasting of resources, increased production cost.
Utility model content
The technical problem to be solved by the utility model is in order to overcome the shortcomings in the prior art, the utility model mentions
For the novel graphite boat structure of pipe P monitor SPC a kind of.
The utility model solves its technical problem technical solution to be taken: a kind of novel graphite of pipe P monitor SPC
Boat structure, including several boat pieces, the boat on piece are equipped with multiple silicon wafers, and the boat on piece is described at least provided with a detection hole
Detection sheet glass is embedded in detection hole, the detection glass flake reflected rate is identical as silicon wafer wool making face reflectivity.
Boat on piece is arranged multiple silicon wafers and is used to carry out silicon wafer plated film processing, and detection hole is for being arranged detection sheet glass, plating
The identical detection sheet glass of same detection hole shape size is put into before film in detection hole, detects glass flake reflected rate and silicon wafer wool making
Face reflectivity is identical, and the coating film thickness of silicon nitride on detection sheet glass can be tested when testing SPC, avoids taking silicon test, subtract
Lack piece of largely doing over again, economized on resources, reduces production cost.
Further, it quickly will test sheet glass for convenience to be installed into detection hole, the detection hole bottom, which is equipped with, to be used
In the ring limit block for limiting the detection sheet glass position, the limited block is threadedly coupled with the boat piece.Limited block is mentioned
Before be installed into detection hole, will test in sheet glass push-in detection hole until contacted with limited block, guarantee that detection sheet glass is quick
It is installed in place.
Further, in order to which the silicon chip film-coated whether uniform of each position of boat on piece detected, the boat piece is respectively set on four angles
There is the detection hole.
The beneficial effects of the utility model are: the novel graphite boat knot of pipe P monitor SPC provided by the utility model a kind of
Structure is arranged detection sheet glass using graphite boat boat on piece, the plating film thickness of silicon nitride on detection sheet glass can be tested when testing SPC
Degree, avoids taking silicon test, reduces piece of largely doing over again, economizes on resources, and reduces production cost.
Detailed description of the invention
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is the structural schematic diagram of the best embodiment of the utility model；
Fig. 2 is the structural schematic diagram for detecting sheet glass and being mounted on boat on piece；
Fig. 3 is the diagrammatic cross-section of A-A in Fig. 2.
In figure: 1, boat piece, 2, silicon wafer, 3, detection hole, 4, detection sheet glass, 5, limited block.
Specific embodiment
The utility model is described in detail presently in connection with attached drawing.This figure is simplified schematic diagram, only in a schematic way
Illustrate the basic structure of the utility model, therefore it only shows composition related with the utility model.
As shown in Figure 1-3, the novel graphite boat structure of pipe P monitor SPC of the utility model a kind of, including several boat pieces 1,
The boat piece 1 is equipped with multiple silicon wafers 2, is respectively provided with a detection hole 3 on 1 four angles of the boat piece, is embedded in the detection hole 3
There is detection sheet glass 4,4 reflectivity of detection sheet glass is identical as the 2 making herbs into wool face reflectivity of silicon wafer.
3 bottom of detection hole is equipped with the ring limit block 5 for limiting detection 4 position of sheet glass, the limit
Block 5 is threadedly coupled with the boat piece 1.
Use process:
Before plated film, limited block 5 is screwed onto 3 side of detection hole, staff will test sheet glass 4 and be embedded in detection hole 3, directly
To being contacted with limited block 5, graphite boat is put into film-coating mechanism, plated film is carried out to silicon wafer 2, after the completion of plated film, turns limited block 5,
It will test sheet glass 4 to squeeze out out of detection hole 3, scratch can be caused to influence test its surface to avoid when taking detection sheet glass 4,
Staff carries out coating film thickness measurement to detection sheet glass 4, completes detection.
It is enlightenment, through the above description, relevant work with the above-mentioned desirable embodiment according to the utility model
Personnel can carry out various changes and amendments in without departing from the scope of the utility model completely.This item utility model
Technical scope is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.
Claims (3)
1. a kind of novel graphite boat structure of pipe P monitor SPC, it is characterised in that: including several boat pieces (1), on the boat piece (1)
Equipped with multiple silicon wafers (2), at least provided with a detection hole (3) on the boat piece (1), the detection hole (3) is interior to be embedded with detection
Sheet glass (4), detection sheet glass (4) reflectivity are identical as the silicon wafer (2) making herbs into wool face reflectivity.
2. the novel graphite boat structure of pipe P monitor SPC as described in claim 1, it is characterised in that: detection hole (3) bottom
Portion is equipped with the ring limit block (5) for limiting described detection sheet glass (4) position, the limited block (5) and the boat piece (1)
It is threadedly coupled.
3. the novel graphite boat structure of pipe P monitor SPC as described in claim 1, it is characterised in that: the boat piece (1) four
The detection hole (3) is respectively provided on angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821339004.2U CN208460783U (en) | 2018-08-17 | 2018-08-17 | The novel graphite boat structure of pipe P monitor SPC |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821339004.2U CN208460783U (en) | 2018-08-17 | 2018-08-17 | The novel graphite boat structure of pipe P monitor SPC |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208460783U true CN208460783U (en) | 2019-02-01 |
Family
ID=65178767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821339004.2U Active CN208460783U (en) | 2018-08-17 | 2018-08-17 | The novel graphite boat structure of pipe P monitor SPC |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208460783U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111628045A (en) * | 2020-05-28 | 2020-09-04 | 湖南红太阳光电科技有限公司 | Feeding and discharging method for PECVD surface coating based on coating detection |
-
2018
- 2018-08-17 CN CN201821339004.2U patent/CN208460783U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111628045A (en) * | 2020-05-28 | 2020-09-04 | 湖南红太阳光电科技有限公司 | Feeding and discharging method for PECVD surface coating based on coating detection |
| CN111628045B (en) * | 2020-05-28 | 2021-12-24 | 湖南红太阳光电科技有限公司 | Feeding and discharging method for PECVD surface coating based on coating detection |
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