CN208438591U - A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device - Google Patents
A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device Download PDFInfo
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- CN208438591U CN208438591U CN201820910143.XU CN201820910143U CN208438591U CN 208438591 U CN208438591 U CN 208438591U CN 201820910143 U CN201820910143 U CN 201820910143U CN 208438591 U CN208438591 U CN 208438591U
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- China
- Prior art keywords
- workbench
- adjustment mechanism
- rotary shaft
- worktable lifting
- cutting machine
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 16
- 238000005520 cutting process Methods 0.000 title claims abstract description 15
- 230000007246 mechanism Effects 0.000 claims abstract description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 32
- 239000010703 silicon Substances 0.000 claims abstract description 32
- 239000013078 crystal Substances 0.000 claims abstract description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims description 9
- 230000004807 localization Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 9
- 238000003825 pressing Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of monocrystalline silicon rod cross-cutting machine workbench to adjust device, belong to silicon single crystal rod processing technique field, comprising: worktable lifting adjustment mechanism, the lower section of the workbench front and/or rear is arranged in the worktable lifting adjustment mechanism, is used to drive the worktable lifting；And driving water translational shifting adjustment mechanism, the side of the workbench front and/or rear is arranged in the driving water translational shifting adjustment mechanism, and is connected with the side of the front and/or rear of the workbench, is used to drive the horizontal shift of the workbench.The utility model, which is particularly suitable for placement position inconsistent to front and back thickness and on the table, makes the axial cutting processing with the silicon single crystal rod of cut direction deflection of silicon rod.
Description
Technical field
The utility model belongs to silicon single crystal rod processing technique field more particularly to a kind of monocrystalline silicon rod cross-cutting machine workbench tune
Engagement positions.
Background technique
The method of production monocrystalline silicon is usually that bar-like single crystal silicon is grown from melt with vertical pulling method or floating zone method, single
The section of crystal silicon is circle.The shape, size for meeting silicon wafer in production process for convenience, need to be truncated silicon single crystal rod, monocrystalline
Silicon rod truncation is an indispensable step in production process semiconductor devices early period, currently, truncation monocrystalline silicon is cutting
The special equipment of silicon single crystal rod --- monocrystalline shear.
Existing monocrystalline shear generally comprises pedestal, transmission shaft component, cutter and silicon single crystal rod fixture, wherein bottom
Seat is equipped with the work top for placing silicon single crystal rod, and fixture is arranged on work top.Since monocrystal rod thickness is uneven,
At present used in height of table cannot be adjusted with angle, cause monocrystal rod in truncated process with saw band out of plumb, end face
Gradient is exceeded.Patent CN207190018U discloses a kind of monocrystalline truncation machine worktable regulating device, wherein on the pedestal
It is welded with fixed block A, shaft A passes through fixed block A, and shaft A is welded on lower layer's panel one end, lower layer's panel other end weldering
It is connected to fixed block B, bolt B passes through fixed block B, and the subsurface board bottom portion is welded with nut, bolt A is equipped on nut,
Bolt A is stood on pedestal, and lower layer's upper panel is welded with shaft B, and shaft B passes through upper layer panel, the upper layer panel
On be welded with V-groove for containing silicon single crystal rod.The workbench regulating device adjusts level height by adjusting bolt
With left and right angle.Defect existing for this regulative mode are as follows: regulative mode is to manually adjust, not only time-consuming and laborious, but also is adjusted
When rely on human eye completely to judge whether the adjustment in place, error is larger.
It can be seen that the existing technology needs further improvement and improves.
Summary of the invention
The utility model is in place of avoiding above-mentioned the shortcomings of the prior art, to provide a kind of monocrystalline silicon rod cross-cutting machine work
Make platform adjustment device, the horizontal position of truncation machine worktable can be adjusted according to the size and practical application scene of silicon single crystal rod
And height and position.
The technology employed by the present utility model is
A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device, comprising: worktable lifting adjustment mechanism, the workbench liter
The lower section of the workbench front and/or rear is arranged in drop adjustment mechanism, is used to drive the worktable lifting；And work
Make platform horizontal shift adjustment mechanism, the driving water translational shifting adjustment mechanism is arranged in the workbench front and/or rear
Side, and be connected with the side of the front and/or rear of the workbench, be used to drive the horizontal of the workbench to move
Position.
The workbench adjustment device further includes control unit, and described control unit is for controlling the worktable lifting tune
Complete machine structure drives the stroke of worktable lifting and drives driving water for controlling the driving water translational shifting adjustment mechanism
The stroke of translational shifting.
The shear further includes detection and localization unit, the detection and localization unit be used to detect the axial direction of silicon single crystal rod with
Inclination angle between the cut direction of the shear saw blade；The detection and localization unit and described control unit communicate to connect.
The adjustment unit further include: the middle part of the workbench, the rotary shaft is arranged in rotary shaft, the rotary shaft
Axial direction it is parallel with the width direction of the workbench, when the worktable lifting, workbench can be rotated around the rotary shaft；
The lower section of the rotary shaft is arranged in spill spin block, the spill spin block, and the rotary shaft and the spill spin block are rotatablely connected；Support
Seat, the support base are used to support the spill spin block, and when the driving water translational shifting, workbench is together with the spill spin block
It can be rotated around vertical direction.
By adopting the above-described technical solution, being had the beneficial effect that acquired by the utility model
The utility model can by the adjustment unit come the level height of adjust automatically workbench and left and right angle, with
Ensure that the axial direction of various sizes of silicon single crystal rod can be perpendicular with the cut direction of shear saw blade, ensure that silicon single crystal rod is cut
The cut quality in cut node face.Moreover, the adjustment mode in the utility model realizes automatic operation, manpower is saved, is adjusted
Efficiency also greatly improves.
Detailed description of the invention
Attached drawing described herein is used to provide a further understanding of the present invention, and constitutes one of the utility model
Point, the exemplary embodiment of the utility model and the description thereof are used to explain the utility model, does not constitute to the utility model
Improper restriction.In the accompanying drawings:
Fig. 1 is the schematic front view of embodiment 1.
Fig. 2 is the schematic side view of embodiment 1.
Fig. 3 is the structural schematic diagram that block and pressing plate are pressed described in embodiment 1.
Fig. 4 is the schematic front view of embodiment 2.
Fig. 5 is the schematic side view of embodiment 2.
Wherein,
1, workbench 2, rotary shaft 3, rotation be fast 4, support base 5, worktable lifting adjustment mechanism 6, workbench are horizontal
Shift adjustment mechanism 7, silicon single crystal rod 8, clamping limb 9, clamping limb driving mechanism 10, pressure holding block 11, pressing plate 12, pressure holding block
Lift drive mechanism
Specific embodiment
In order to it is clearer illustrate the utility model general idea, with reference to the accompanying drawings of the specification in an illustrative manner into
Row is described in detail.
Many details are explained in the following description in order to fully understand the utility model, still, this is practical
Novel to be implemented using other than the one described here other modes, therefore, the protection scope of the utility model is simultaneously
It is not limited by the specific embodiments disclosed below.
In addition, in the description of the present invention, it should be understood that term " center ", "upper", "lower", " preceding ",
The instructions such as " rear ", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " axial direction ", " radial direction ", " circumferential direction "
Orientation or positional relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description the utility model and simplification
Description, rather than the device or element of indication or suggestion meaning must have a particular orientation, constructed and grasped with specific orientation
Make, therefore is not considered as limiting the invention.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be
Mechanical connection, is also possible to be electrically connected, can also be communication；It can be directly connected, the indirect phase of intermediary can also be passed through
Even, the connection inside two elements or the interaction relationship of two elements be can be.For those of ordinary skill in the art
For, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature is in the second feature " on " or " down "
It can be that the first and second features directly contact or the first and second features are by intermediary mediate contact.In this specification
Description in, reference term " one embodiment ", " some embodiments ", " example ", " specific example " or " some examples " etc.
Description means that particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained in the utility model
In at least one embodiment or example.In the present specification, schematic expression of the above terms are necessarily directed to identical
Embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiments
Or it can be combined in any suitable manner in example.
Embodiment 1:
As shown in Figure 1 to Figure 3, a kind of monocrystalline silicon rod cross-cutting machine, including workbench 1, the workbench 1 is for described in support
Silicon single crystal rod 7.The shear further includes control unit and detection and localization unit.
The detection and localization unit is for detecting the axial between the cut direction of the shear saw blade of silicon single crystal rod 7
Inclination angle, wherein the arrow direction in Fig. 1 illustrates the cut direction of the shear saw blade.Preferably, the detection and localization
Unit is double-shaft tilt angle sensor, and the double-shaft tilt angle sensor is arranged on the workbench 1 and can be with the monocrystalline silicon
The position that stick 7 contacts.The double-shaft tilt angle sensor and described control unit communicate to connect.
The shear further includes workbench adjustment device, and the workbench adjustment device is used to adjust the water of workbench 1
Prosposition is set, height and position is so that the axial direction for the silicon single crystal rod 7 being located on workbench 1 and the cut direction of the shear saw blade are hung down
Directly.
The workbench adjustment device includes worktable lifting adjustment mechanism 5, and the worktable lifting adjustment mechanism 5 is arranged
In 1 front of workbench or the lower section at rear portion, it is used to that the workbench 1 to be driven to go up and down.
There are many structure types of the worktable lifting adjustment mechanism 5, as long as being able to drive the lifting of workbench 1 i.e.
Can, for example, it may be hydraulic cylinder or cylinder, in the present embodiment, the hydraulic cylinder or cylinder drive before workbench is arranged in
The lower section at portion or rear portion, for driving workbench side to go up and down.In addition, in the present embodiment, the worktable lifting adjusts machine
Structure 5 also plays the role of part support to the workbench 1 simultaneously, can set in the piston rod end of the hydraulic cylinder or cylinder
A supporting block is set, to increase the contact area with 1 bottom of workbench.
The workbench adjustment device further includes rotary shaft 2, and the middle part of the workbench 1, institute is arranged in the rotary shaft 2
The axial direction for stating rotary shaft 2 is parallel with the width direction of the workbench 1, and when the workbench 1 is gone up and down, workbench 1 can be around institute
State the rotation of rotary shaft 2.In the present embodiment, the workbench 1 and the rotary shaft 2, which cooperatively form one jointly and be similar to, lifts up
The structure of plate adjusts workbench 1 by unilateral worktable lifting adjustment mechanism 5 and goes up and down, when the front of workbench 1 rises under rear side
Rear side rises when drop, front side drop.
The workbench adjustment device further includes driving water translational shifting adjustment mechanism 6, the driving water translational shifting tune
The side at 1 front of workbench or rear portion, and the side phase with the front of the workbench 1 or rear portion is arranged in complete machine structure 6
Even, it is used to drive the horizontal shift of the workbench 1.
There are many structure types of the driving water translational shifting adjustment mechanism 6, moves as long as being able to drive the workbench 1
Position, for example, it may be hydraulic cylinder or cylinder, in the present embodiment, the hydraulic cylinder or cylinder driving are arranged in workbench 1
Front or rear portion side (left or right side that " side " refers to workbench), the piston of the hydraulic cylinder or cylinder
Bar is connected with the side of workbench, for driving the horizontal shift of workbench.
The workbench adjustment device further includes spill spin block 3, and the lower section of the rotary shaft 2, institute is arranged in the spill spin block 3
It states rotary shaft 2 and the spill spin block 3 is rotatablely connected；Support base 4, the support base 4 are used to support the spill spin block 3, the work
When making 1 horizontal shift of platform, workbench 1 can be rotated together with the spill spin block 3 around vertical direction, to realize workbench
The adjustment of 1 or so angle.
The axial direction that the utility model passes through the silicon single crystal rod 7 on the double-shaft tilt angle sensor real-time detection workbench 1
Angle between the cut direction of shear saw blade, when the angle for detecting the two is 90 °, described control unit controls institute
It states worktable lifting adjustment mechanism 5 and driving water translational shifting adjustment mechanism 6 stops corresponding drive actions, to realize workbench
The adjustment of 1 level height and left and right angle realizes the axis direction to the silicon single crystal rod 7 by adjusting the position of workbench 1
Adjustment in space keeps the cut direction of the axis direction and shear saw blade of the silicon single crystal rod 7 perpendicular, guarantees cutting
The planarization of end face.
The shear further includes clamping unit, and the clamping unit is used to carry out clamping position to the silicon single crystal rod 7.
The clamping unit includes two clamping limbs 8, and two clamping limbs 8 are located at the two sides of the workbench 1, and with the workbench 1
Cooperatively form the inverted dovetail groove for accommodating silicon single crystal rod 7.
The clamping unit further includes clamping limb driving mechanism 9, and the clamping limb driving mechanism 9 is for driving described in two
Clamping limb 8 moves, to clamp or unclamp the silicon single crystal rod 7 in the dovetail groove.The structure of the clamping limb driving mechanism 9
There are many forms, moves as long as being able to drive the clamping limb 8, for example, it may be hydraulic cylinder or cylinder, the hydraulic cylinder
Or the piston rod of cylinder is connected with the clamping limb 8, controls the hydraulic cylinder or cylinder piston rod by described control unit
Flexible stroke.
As shown in Figure 1 to Figure 3, the shear further includes pressure holding unit, and the pressure holding unit is located at the upper of workbench 1
Side, the pressure holding unit is for carrying out pressure holding positioning to the silicon single crystal rod 7.
The pressure holding unit includes: pressure holding block 10, and the bottom of pressure holding block 10 is provided with pressing plate 11, the section of the pressing plate 11
It is arc-shaped；And pressure holding block lift drive mechanism 12, the pressure holding block lift drive mechanism 12 is for driving the pressure holding block 10
It moves up and down, to press the silicon single crystal rod 7 or be detached from from the top of the silicon single crystal rod 7.
In the present embodiment, the pressure holding block 10 has multiple, and multiple pressure holding blocks 10 are along the length of the workbench 1
Direction arrangement, corresponding, the pressure holding unit is configured to that there is pressure holding block identical with 10 quantity of pressure holding block lifting to drive
Motivation structure 12.
In order to enable the pressing plate 11 to be compatible with the silicon single crystal rod of more sizes, the radius of curvature of the pressing plate 11 can be set
Be set to larger size, such as, it can be provided be frequently necessary to cutting silicon single crystal rod in silicon rod size it is maximum compatible
Radius size.
There are many structure types of the pressure holding block lift drive mechanism 12, rises as long as being able to drive the pressure holding block 10
Drop movement.For example, it may be the piston rod of hydraulic cylinder or cylinder, the hydraulic cylinder or cylinder and 10 phase of pressure holding block
Even, the flexible stroke of the hydraulic cylinder or cylinder piston rod is controlled by described control unit.For another example, motor and ball be can be
The form that lead screw pair matches, ball screw assembly, include ball-screw and feed screw nut compatible with the ball-screw, are incited somebody to action
The feed screw nut is connected by connector with the pressure holding block 10, and motor drives ball-screw rotation, and passes through the lead screw
Nut and connector drive the pressure holding block 10 to go up and down.
Embodiment 2:
The present embodiment and the structure and principle of embodiment 1 are essentially identical, and different places are:
As shown in Figure 4 and Figure 5, in the present embodiment, it there are two the worktable lifting adjustment mechanisms 5, is respectively set
In the lower section of 1 front and rear of workbench, there are two the driving water translational shifting adjustment mechanisms 6, is separately positioned on
The side (left or right side that " side " refers to workbench) of 1 front and rear of workbench, to realize more
Quickly adjust.
The part that do not address in the utility model uses or uses for reference prior art and can be realized.
All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment
Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.Especially for system reality
For applying example, since it is substantially similar to the method embodiment, so being described relatively simple, related place is referring to embodiment of the method
Part explanation.
The above description is only the embodiments of the present invention, is not intended to limit the utility model.For this field
For technical staff, various modifications and changes may be made to the present invention.All institutes within the spirit and principle of the utility model
Any modification, equivalent substitution, improvement and etc. of work, should be included within the scope of the claims of the utility model.
Claims (4)
1. a kind of monocrystalline silicon rod cross-cutting machine workbench adjusts device characterized by comprising
The workbench front and/or rear is arranged in worktable lifting adjustment mechanism, the worktable lifting adjustment mechanism
Lower section is used to drive the worktable lifting；And
Driving water translational shifting adjustment mechanism, driving water translational shifting adjustment mechanism setting the workbench front and/
Or the side at rear portion, and be connected with the side of the front and/or rear of the workbench, it is used to drive the water of the workbench
Translational shifting.
2. a kind of monocrystalline silicon rod cross-cutting machine workbench according to claim 1 adjusts device, which is characterized in that
The workbench adjustment device further includes control unit, and described control unit is for controlling the worktable lifting adjustment machine
Structure drives the stroke of worktable lifting and drives driving water translation for controlling the driving water translational shifting adjustment mechanism
The stroke of position.
3. a kind of monocrystalline silicon rod cross-cutting machine workbench according to claim 2 adjusts device, which is characterized in that
The shear further includes detection and localization unit, the detection and localization unit be used to detect the axial direction of silicon single crystal rod with it is described
Inclination angle between the cut direction of shear saw blade；The detection and localization unit and described control unit communicate to connect.
4. a kind of monocrystalline silicon rod cross-cutting machine workbench according to claim 1 adjusts device, which is characterized in that
The adjustment device further include: the middle part of the workbench, the axis of the rotary shaft is arranged in rotary shaft, the rotary shaft
To parallel with the width direction of the workbench, when the worktable lifting, workbench can be rotated around the rotary shaft；Rotation
The lower section of the rotary shaft is arranged in block, the spill spin block, and the rotary shaft and the spill spin block are rotatablely connected；Support base, institute
It states support base and is used to support the spill spin block, when the driving water translational shifting, workbench can together with the spill spin block
It is rotated around vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820910143.XU CN208438591U (en) | 2018-06-12 | 2018-06-12 | A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820910143.XU CN208438591U (en) | 2018-06-12 | 2018-06-12 | A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208438591U true CN208438591U (en) | 2019-01-29 |
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ID=65089696
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820910143.XU Expired - Fee Related CN208438591U (en) | 2018-06-12 | 2018-06-12 | A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device |
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| Country | Link |
|---|---|
| CN (1) | CN208438591U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111186039A (en) * | 2020-01-15 | 2020-05-22 | 上海磐盟电子材料有限公司 | Automatic cutting system of crystal bar |
| CN116872365A (en) * | 2023-08-25 | 2023-10-13 | 宁夏中欣晶圆半导体科技有限公司 | Cutting method for efficiently cutting carbon plate |
-
2018
- 2018-06-12 CN CN201820910143.XU patent/CN208438591U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111186039A (en) * | 2020-01-15 | 2020-05-22 | 上海磐盟电子材料有限公司 | Automatic cutting system of crystal bar |
| CN111186039B (en) * | 2020-01-15 | 2021-08-20 | 上海磐盟电子材料有限公司 | Automatic cutting system of crystal bar |
| CN116872365A (en) * | 2023-08-25 | 2023-10-13 | 宁夏中欣晶圆半导体科技有限公司 | Cutting method for efficiently cutting carbon plate |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190129 |