CN208346243U - Mask plate - Google Patents
Mask plate Download PDFInfo
- Publication number
- CN208346243U CN208346243U CN201820440125.XU CN201820440125U CN208346243U CN 208346243 U CN208346243 U CN 208346243U CN 201820440125 U CN201820440125 U CN 201820440125U CN 208346243 U CN208346243 U CN 208346243U
- Authority
- CN
- China
- Prior art keywords
- mask plate
- outline border
- mask
- wire side
- support bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model embodiment provides a kind of mask plate, which includes outline border and the exposure mask wire side that is set on outline border, and further comprises support bar of the fixed exposure mask wire side to the fixed strip of outline border and carrying exposure mask wire side.By way of fixed strip and support bar is arranged between the mask wire side and outline border in mask plate the excessive situation of the mask wire side sag of chain of mask plate has been effectively relieved, and then effectively increase the exposure mask precision of mask plate in mask plate provided by the embodiment of the utility model.
Description
Technical field
The utility model relates to field of display technology, and in particular to a kind of mask plate.
Background technique
During the glass substrate of existing display device vapor deposition, since (for example G6 is for the exposure mask of line for large scale mask plate
Plate) opening size it is larger, the transition region size between adjacent apertures is smaller, therefore mask plate cannot be born too during throwing the net
Big tension.It cannot bear the sag of chain control of the too mask plate of hightension just as the Major Difficulties during vapor deposition, specifically
Ground, when the sag of chain of mask plate is excessive, the exposure mask precision that will lead to mask plate is deteriorated.
Utility model content
In view of this, the utility model embodiment is dedicated to providing a kind of mask plate, to solve existing large scale mask plate
Sag of chain be difficult to the problem of managing.
An embodiment of the present invention provides a kind of mask plate, which includes outline border and the exposure mask that is set on outline border
Wire side, and further comprise support bar of the fixed exposure mask wire side to the fixed strip of outline border and carrying exposure mask wire side.
In an embodiment of the utility model, support bar is set to the transition region between exposure mask wire side opening.
In an embodiment of the utility model, support bar is fixed to outline border.
In an embodiment of the utility model, the quantity of support bar is multiple, is parallel to each other or hands between multiple support bars
Fork setting.
In an embodiment of the utility model, it is fixed between support bar and outline border by fixed strip.
In an embodiment of the utility model, the outer ledge of the inside edge of outline border and exposure mask wire side is there are crossover region,
Fixed strip is set to crossover region.
In an embodiment of the utility model, outline border includes symmetry axis, a symmetrical axial symmetry setting of the fixed strip along outline border.
In an embodiment of the utility model, fixed strip is welding item and/or fastening bar.
In an embodiment of the utility model, the quantity of fixed strip is greater than the joint quantity of support bar and outline border.
In an embodiment of the utility model, mask plate is universal metal mask plate or precision metallic mask plate.
Mask plate provided by the embodiment of the utility model is fixed by being arranged between the mask wire side and outline border of mask plate
The mode of item and support bar has been effectively relieved the excessive situation of the mask wire side sag of chain of mask plate, and then has effectively increased and cover
The exposure mask precision of template.
Detailed description of the invention
Fig. 1 show the structural schematic diagram of the mask plate of the utility model first embodiment offer.
The mask plate that Fig. 2 show the offer of the utility model first embodiment removes the structural schematic diagram after exposure mask wire side.
Fig. 3 show the structural schematic diagram of the mask plate of the utility model second embodiment offer.
Fig. 4 show the structural schematic diagram of the mask plate of the utility model 3rd embodiment offer.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
It clearly and completely describes, it is clear that described embodiment is only the utility model a part of the embodiment, rather than whole realities
Apply example.Based on the embodiments of the present invention, those of ordinary skill in the art institute without making creative work
The every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1 show the structural schematic diagram of the mask plate of the utility model first embodiment offer.Fig. 2 show practical
The mask plate that novel first embodiment provides removes the structural schematic diagram after exposure mask wire side.As depicted in figs. 1 and 2, this is practical new
The mask plate 1 that type first embodiment provides includes outline border 11 and is stacked in the exposure mask wire side 12 on outline border 11, wherein outline border
11 be cyclic annular rectangular frame structure, and exposure mask wire side 12 is rectangle wire side, the inside edge of outline border 11 and the outside of exposure mask wire side 12
It include crossover region between edge.
In addition, mask plate 1 further comprises that exposure mask wire side 12 is fixed to the fixed strip 13 of outline border 11 and is used to carry to cover
The support bar 14 of film wire side 12, wherein the quantity of support bar 14 be it is multiple, multiple 14 transverse and longitudinals of support bar are arranged alternately, and each
The both ends of support bar 14 cross to form joint with outline border 11 respectively, and fixed strip 13 is set to crossing for support bar 14 and outline border 11
Point, and crossover region of the partial region of fixed strip 13 between outline border 11 and mask wire side 12.
Note that the both ends of support bar 14 also not necessarily cross to form joint with outline border 11, that is to say, that support bar 14
Either end or both ends can vacantly be arranged according to the actual situation, if support bar 14 that either end or both ends are vacantly arranged and other
The fixed support bar 14 finished can be realized fixed purpose there are crosspoint and by crosspoint.By appointing for support bar 14
One or both ends, which are set as hanging form, can sufficiently improve the adaptability and widespread popularity of mask plate 1, will to realize
Support bar 14 limit to exposure mask wire side 12 be open between transition region while guarantee support bar 14 be capable of providing enough support forces
Purpose provide guarantee.
It should be appreciated that the particular number of support bar 14 and the specific location relationship of each support bar 14 can be according to the actual situation
Sets itself, sufficiently to improve the adaptability and widespread popularity of mask plate mentioned by the utility model embodiment, this reality
This is limited without unified with new embodiment.For example, multiple support bars 14 being parallel to each other can only be set.
In addition, it should be understood that the concrete shape of fixed strip 13 can sets itself according to the actual situation, sufficiently to improve this reality
The adaptability and widespread popularity of the mask plate mentioned by new embodiment, the utility model embodiment is to this without system
One limits.
Preferably, the shape setting of fixed strip 13 is round or oval, and the setting of fixed strip 13 is round or oval
Fixed force suffered by the exposure mask wire side 12 that the edge of fixed strip 13 can be made to be related to is more evenly, that is to say, that by fixed strip
13 shape setting, which is round or oval, can make exposure mask wire side 12 be not easy to be fixed the tearing of item 13.
Preferably, fixed strip 13 is welding item, and support bar 14 is connected to outline border 11 by welding item, i.e., support bar 14 with outside
Frame 11 is attached by welding manner.It should be appreciated that the support bar 14 connected by welding manner and the connection of outline border 11 are steady
It is qualitative good, and connection type is simple to operation.
In an embodiment of the utility model, fixed strip 13 is fastening bar, and support bar 14 is connected to outline border by fastening bar
11, i.e. support bar 14 is attached with outline border 11 by manner.It should be appreciated that the support bar 14 connected by manner
Good with the connection flexibility of outline border 11, the connection that can be supported item 14 and outline border 11 according to the actual situation at any time adjusts.
Note that the specific structure of fastening bar and specific manner can sets itself according to the actual situation, this is practical new
Type embodiment limits this without unified.
The mask plate that the utility model first embodiment provides between the mask wire side and outline border of mask plate by being arranged
The mode of fixed strip and support bar has been effectively relieved the excessive situation of the mask wire side sag of chain of mask plate, and then has effectively improved
The exposure mask precision of mask plate.
In an embodiment of the utility model, mask plate 1 includes the fixed strip 13 that exposure mask wire side 12 is fixed to outline border 11,
It but does not include the support bar 14 of carrying exposure mask wire side 12.That is, exposure mask wire side 12 only arrives exposure mask wire side 12 by setting
The fixation of itself is realized with the fixed strip 13 of the crossover region of outline border 11, is protected while simplifying mask structure being as far as possible to realize
The sag of chain of card mask plate is in the purpose in zone of reasonableness.
In another embodiment of the utility model, multiple support bars 14 are arranged in parallel.Support arranged in parallel
Item 14 can provide direction consistent support force for exposure mask wire side 12, to realize the control to the power of throwing the net of exposure mask wire side 12 more
Add accurately purpose.
Fig. 3 show the structural schematic diagram of the mask plate of the utility model second embodiment offer.In the utility model
Extend the utility model second embodiment, the utility model second embodiment and first embodiment base on the basis of one embodiment
This is identical, and only emphasis describes difference below, and something in common repeats no more.
As shown in figure 3, it is mask net that position, which is arranged, in the support bar 14 for the mask plate 1 that the utility model second embodiment provides
Transition region between the opening 121 in face 12, i.e. support bar 14 do not block opening 121, once it is blocked with preventing support bar 14
Opening 121, then the case where may will affect evaporation effect.
It should be appreciated that the opening 121 of mask wire side 12 is located at the specific location and its own concrete shape of mask wire side 12
It should be set according to the concrete condition of actual glass substrate to be deposited, it is provided by the embodiment of the utility model sufficiently to improve
The adaptability and widespread popularity of mask plate 1, the utility model embodiment to opening 121 specific location and concrete shape not
Make unified limit.
The utility model second embodiment provide mask plate by by support bar be set to mask wire side opening between mistake
The mode for crossing area effectively prevents the generation for the case where set support bar influences evaporation effect.
Fig. 4 show the structural schematic diagram of the mask plate of the utility model 3rd embodiment offer.In the utility model
Extend the utility model 3rd embodiment, the utility model 3rd embodiment and first embodiment base on the basis of one embodiment
This is identical, and only emphasis describes difference below, and something in common repeats no more.
As shown in figure 4, fixed strip 13 is not only set in branch in the mask plate 1 that the utility model 3rd embodiment provides
The joint of stay 14 and outline border 11, and except the removing joint of the crossover region between outline border 11 and mask wire side 12
Also there is fixed strip 13 in other regions.That is, the quantity of fixed strip 13 is greater than the points that cross of support bar 14 and outline border 11
Amount.
Preferably, the actual fabrication process of mask plate provided in the utility model embodiment are as follows: first in outline border 11
It is upper to be laid with several stays 14, it is then laid with exposure mask wire side 12 on being laid with the outline border for finishing support bar 14, finishes and covers in laying
Fixed strip 13 is arranged in joint based on support bar 14 and outline border 11 after film wire side 12, finally according to the practical need of product to be deposited
It asks and removes the support bar 14 for blocking the opening of exposure mask wire side 12.
The mask plate that the utility model 3rd embodiment provides at the joint of setting support bar and outline border by being provided with
Fixed strip, and the side that other regions except joint also have fixed strip is removed in the crossover region of outline border and mask wire side
Formula has further prevented the excessive situation of sag of chain of the mask wire side of mask plate, to further improve the precision of mask plate.
In an embodiment of the utility model, outline border 11 includes symmetry axis, a symmetry axis pair of the fixed strip 13 along outline border 11
Claim setting.Symmetrically arranged fixed strip 13 is more conducive to the operation of actually throwing the net of mask wire side 12, and making to throw the net, it is more square to operate
Just and the power of throwing the net that is subject to of mask wire side 12 is more uniform.
It should be appreciated that mask plate mentioned by the utility model above-described embodiment includes but is not limited to be universal metal exposure mask
Plate or precision metallic mask plate, it is wide with the adaptability and the application that sufficiently improve mask plate mentioned by the utility model embodiment
General property, the utility model embodiment limit this without unified.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, made any modification, equivalent replacement etc. should be included in the protection of the utility model
Within the scope of.
Claims (10)
1. a kind of mask plate, including outline border and the exposure mask wire side being set on the outline border, which is characterized in that further comprise solid
Determine the support bar of the exposure mask wire side to the fixed strip of the outline border and the carrying exposure mask wire side.
2. mask plate according to claim 1, which is characterized in that the support bar is set between the exposure mask wire side opening
Transition region.
3. mask plate according to claim 1, which is characterized in that the support bar is fixed to the outline border.
4. mask plate according to claim 1, which is characterized in that the quantity of the support bar is multiple, multiple branch
It is parallel to each other between stay or arranged in a crossed manner.
5. mask plate according to claim 1, which is characterized in that by described solid between the support bar and the outline border
Determine item to be fixed.
6. mask plate according to claim 1, which is characterized in that the inside edge of the outline border and the exposure mask wire side
There are crossover region, the fixed strips to be set to the crossover region for outer ledge.
7. mask plate according to claim 1, which is characterized in that the outline border includes symmetry axis, and the fixed strip is along institute
State a symmetrical axial symmetry setting of outline border.
8. mask plate according to claim 1, which is characterized in that the fixed strip is welding item and/or fastening bar.
9. mask plate according to claim 1, which is characterized in that the quantity of the fixed strip is greater than the support bar and institute
State the joint quantity of outline border.
10. mask plate according to claim 1, which is characterized in that the mask plate is universal metal mask plate or precision
Metal mask plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820440125.XU CN208346243U (en) | 2018-03-29 | 2018-03-29 | Mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820440125.XU CN208346243U (en) | 2018-03-29 | 2018-03-29 | Mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208346243U true CN208346243U (en) | 2019-01-08 |
Family
ID=64885476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820440125.XU Active CN208346243U (en) | 2018-03-29 | 2018-03-29 | Mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208346243U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110735108A (en) * | 2019-11-27 | 2020-01-31 | 京东方科技集团股份有限公司 | Mask plate |
-
2018
- 2018-03-29 CN CN201820440125.XU patent/CN208346243U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110735108A (en) * | 2019-11-27 | 2020-01-31 | 京东方科技集团股份有限公司 | Mask plate |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106884140B (en) | A kind of mask assembly and its assemble method | |
| CN208346243U (en) | Mask plate | |
| CN108509676A (en) | A kind of geographical retraction automatic drafting method of figure of power system | |
| CN106200254A (en) | Mask plate and mask exposure system, splicing exposure method, substrate | |
| CN108565543A (en) | MIMO antenna structure and handheld device with the MIMO antenna structure | |
| SE504712C2 (en) | Method and apparatus for routing traffic in a circuit-switched network | |
| CN107436735A (en) | State of memory cells update method in a kind of distributed file system | |
| CN207775334U (en) | Sub- mask plate and mask plate | |
| CN105870852A (en) | Trapezoid bridge frame and manufacturing method thereof | |
| Marsalek | Research on the design storm concept | |
| CN108034929A (en) | A kind of substrate bearing device applied to vacuum sputtering equipment | |
| WO2013143234A1 (en) | Gusset plate for iron tower and iron tower | |
| CN107621714A (en) | Forming method, display panel assembly and the display device of display panel | |
| CN108600115A (en) | The method and device of network bandwidth resources optimization | |
| CN208151877U (en) | A kind of built-in type sand-protecting barrier and its component | |
| CN208167974U (en) | The irregular II type concrete space lattice box structure of multilayer large-span | |
| CN209195165U (en) | It is a kind of for protecting the device of land use range | |
| CN106156402A (en) | The laying out pattern method of fpga logic block array and laying out pattern | |
| CN206614508U (en) | A kind of efficient suspension assembly | |
| CN109348311A (en) | It is a kind of convenient for fixed router fixed frame | |
| GB725286A (en) | Improvements in or relating to welded grids or gratings | |
| CN106408974B (en) | Bank light and method of controlling for intersection | |
| CN110017051A (en) | A kind of novel T of double-circuit line connects tower | |
| CN104290434B (en) | Metal screen for printing | |
| CN208002274U (en) | A kind of sandy beach parasols |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |