CN208336173U - Wafer transfer box conversion equipment - Google Patents
Wafer transfer box conversion equipment Download PDFInfo
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- CN208336173U CN208336173U CN201820645122.XU CN201820645122U CN208336173U CN 208336173 U CN208336173 U CN 208336173U CN 201820645122 U CN201820645122 U CN 201820645122U CN 208336173 U CN208336173 U CN 208336173U
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Abstract
The utility model provides a kind of wafer transfer box conversion equipment, wherein the wafer transfer box conversion equipment includes: box body, and the box body includes the first opening；The box cover of first opening is covered, the box cover and the box body are hinged by the first hinge；Support rod, the support rod includes opposite first end and second end, the support rod applies the active force along support rod axial direction to the box cover, the active force has the first torque relative to first hinge, the gravity of the box cover has the second torque relative to the first hinge, first torque is contrary with the second torque, and the first torque when box cover is opened is greater than the first torque when box cover is closed.The wafer transfer box conversion equipment is not easy to fall after box cover can be made to open, and then reduces the loss to wafer.
Description
Technical field
The utility model relates to semiconductor equipment technology field more particularly to a kind of wafer transfer box conversion equipments.
Background technique
Key link of the IC manufacturing equipment industry as IC industry is the typical case of high and new technology equipment industry
It represents, is the product of many sciemtifec and technical sphere last word joint developments.
With the development of integrated circuit, the requirement to IC manufacturing equipment is higher and higher.Front equipment end module
(EFEM) be IC manufacturing equipment critical component, can be realized chip and taken out from wafer transfer box conversion equipment, is brilliant
The functions such as circle classification, prealignment, are the important component parts of full-automatic semiconductor facilities.
In EFEM, whole box wafer is taken out in order to help people to be put into, is provided with load port, it is installed in EFEM
Before, it is the window of wafer disengaging front-end module.The load port front end is provided with wafer transfer box conversion equipment, the wafer
Feeder conversion equipment is using that can open box cover design, to make wafer transfer box conversion equipment and EFEM closing, Jin Erneng
The wafer in wafer transfer box conversion equipment is enough prevented to be directly exposed to air for a long time contaminated.The wafer transfer box turns
Hand basket (cassette) is provided in changing device, for placing wafer.Before transmitting wafer, needs to open wafer transfer box and turn
The hand basket is placed in the wafer transmitting box by the lid of changing device.
However, the prior art is easily damaged wafer during hand basket is placed in wafer transfer box conversion equipment.
Summary of the invention
The utility model solves the problems, such as to be to provide a kind of wafer transfer box conversion equipment, can reduce the damage of wafer.
To solve the above problems, the utility model provides a kind of wafer transfer box conversion equipment, comprising: box body, the box
Body includes the first opening；The box cover of first opening is covered, the box cover and the box body are hinged by the first hinge；Support
Bar, the support rod include that opposite first end and second end, the first end and the box cover are hinged by the second hinge, institute
It is hinged by third hinge to state second end and the box body, the support rod applies the effect along support rod axial direction to the box cover
Power, the active force have the first torque relative to first hinge, and the gravity of the box cover has second relative to the first hinge
Torque, first torque is contrary with the second torque, and when the box cover is closed, first torque is less than or waits
In the second torque, the first torque when box cover is opened is greater than the first torque when box cover is closed.
Optionally, the box body includes: two opposite side plates of bottom plate and connecting bottom board, and the box cover is completely covered
Or part covers the top plate top board surface；It is hinged by first hinge at the top of the box cover and box body；The support rod
There is acute angle between axis and the backplate surface.
Optionally, the box cover is completely covered at the top of the side plate, and described first is hinged the side plate and the box cover；
The box body further include: the top plate of two side plates of connection, the top plate are opposite with the bottom plate；The top plate covers two side plates
Atop part surface, the box cover covers the top surface for the side plate that the top plate exposes；Described first be hinged it is described
Top plate and the box cover.
Optionally, it described second is hinged the first end and covers the box cover at the top of the side plate；Alternatively, the wafer
Feeder conversion equipment further include: be fixed on the first connector covered on the box cover at the top of the side plate, described second is hinged
Connect the first end and first connector.
Optionally, the side plate includes: side plate main body and the side frame for surrounding the side plate main body；The side frame includes
With the bottom side frame of the contacts baseplate；The third is hinged the second end and the bottom side frame；Alternatively, the wafer
Feeder conversion equipment further includes the second connector for being fixed on the bottom side frame, the third be hinged the second end and
Second connector.
Optionally, the side frame further includes the side side frame for connecting bottom side frame both ends, side side frame with
The bottom side frame is crossed to form bottom corners；It is described when the third is hinged the second end and the bottom side frame
Third hinge is connect with the bottom corners；When the third is hinged the second end and the second connector, described second connects
Fitting is connect with the bottom corners.
Optionally, the material of the side plate main body is glass or transparent plastic, and the material of the bottom side frame is metal.
Optionally, when the lid is closed, first hinge, the second hinge are conllinear with the center that third is cut with scissors.
Optionally, the box cover includes: box cover top plate and the connection box cover top plate on the box body top
Lid side panels；The box cover top plate includes: box cover top plate main body and the box cover top plate side for surrounding the box cover top plate main body
Frame；The lid side panels include: lid side panels main body and the lid side panels frame for surrounding the lid side panels main body.
Optionally, the material of the box cover top plate main body and lid side panels main body is glass or transparent plastic；The box cover
The material of top plate frame and lid side panels frame is metal.
Optionally, the support rod is atmospheric pressure pole or spring.
Optionally, the support rod is damping cylinder or damping spring.
Optionally, excessively it is described first hinge center and perpendicular to the plane of horizontal plane be interface；First hinge and institute
The center of gravity for stating box cover is located at the same side of the interface, and the support rod applies pressure to the box cover；Alternatively, described first
Hinge and the center of gravity of the box cover are located at the two sides of the interface, and the support rod applies pulling force to the box cover.
Optionally, when the box cover fully opens, first torque is greater than the second torque.
Optionally, when the lid is closed, the distance between second hinge and third hinge center are 230mm ~ 290mm；Institute
Stating the distance between the first hinge and the second hinge center is 35mm ~ 45mm；The support rod is applied to the active force of the box cover
Size is 63N ~ 77N；The quality of the box cover is 1.5N ~ 2N.
Optionally, the support rod is cylinder, wafer transfer box conversion equipment further include: air-control device, for controlling branch
The elongation and shortening of strut.
Compared with prior art, the technical solution of the utility model has the advantage that
In the wafer transfer box conversion equipment that technical solutions of the utility model provide, the wafer transfer box conversion equipment packet
Include support rod, the support rod can apply the active force along support rod axial direction to the box cover, and first torque and the
Two torques it is contrary.Since the first torque is contrary with the second torque, then when opening the box cover, the support
Bar can support the box cover, so as to prevent box cover from falling under gravity.
Further, there is acute angle between the axis of the support rod and the backplate surface, be conducive to increase support
The length of bar, so as to increase the distance between the second hinge and third hinge.Increase the distance between the second hinge and third hinge, energy
When enough making to open and close box cover, the rotation angle of support rod is smaller, so as to reduce the variation of the first torque, and then can subtract
Few first torque reduces switching noise, and reduce the collision between box cover and box body to the impact force of box body.
Further, it described second is hinged the first end and covers the box cover or described first at the top of the side plate
End is hinged by first connector and the box cover at the top of the covering side plate, and the third hinge is connect with the turning or institute
It states the second connector to connect with the turning, the length of the support rod can be further increased, thus reduce switching noise, and
Reduce the collision between box cover and box body.
Further, the support rod is cylinder.Since the active force that cylinder is applied to box cover will not be with support pole length
Variation and change, can guarantee cylinder be applied to box cover active force it is constant, thus be conducive to control the first torque, can
It is fallen after preventing box cover from opening, and the collision of box cover switching noise and box cover and box body can be reduced.
Further, the support rod is damping cylinder.Damping cylinder can reduce first torque, so as to reduce
The speed that box cover opens and closes, and then the collision of box cover switching noise and box cover and box body can be reduced.
Further, when the lid is closed, first hinge, the second hinge are conllinear with the center that third is cut with scissors, then when box cover is closed
When, the support rod is applied to the active force of box cover by second hinge center, to make first torque zero, in turn
The sum of the first torque and the second torque can be made to be equal to the second torque, therefore, when box cover can be made to close, box cover is closed.
Further, the material of the box cover top plate main body and lid side panels main body is glass or transparent plastic.Due to glass
For transparent material or transparent plastic, tray interior can be observed through box cover top plate main body and lid side panels main body, so as to
It is enough that the case where tray interior content is observed at any time.
Further, when the box cover fully opens, first torque is greater than the second torque, then the mistake opened in box cover
Cheng Zhong, there are an equilbrium positions, when box cover is in the equilbrium position described in the first torque be equal to the second torque.When box cover around
Behind overbalance position, the first torque is greater than the second torque, and therefore, box cover can automatically turn on after bypassing equilbrium position, Jin Erneng
Enough save manpower.
Further, the support rod is cylinder, and the wafer transfer box conversion equipment includes the air-control device, then described
Air-control device can control the elongation and shortening of the support rod, then the air-control device can control the box cover unlatching and
It closes, so as to realize the full-automatic opening and closing of box cover.
Detailed description of the invention
Fig. 1 and Fig. 2 is a kind of structural schematic diagram of wafer transfer box conversion equipment；
Fig. 3 to Fig. 8 is the structural schematic diagram of the wafer transfer box conversion equipment first embodiment of the utility model；
Fig. 9 is the structural schematic diagram of the wafer transfer box conversion equipment second embodiment of the utility model；
Figure 10 and Figure 11 is the structural schematic diagram of the wafer transfer box conversion equipment 3rd embodiment of the utility model；
Figure 12 is the structural schematic diagram of the wafer transfer box conversion equipment fourth embodiment of the utility model；
Figure 13 is the structural schematic diagram of the 5th embodiment of wafer transfer box conversion equipment of the utility model.
Specific embodiment
There are problems for wafer transfer box conversion equipment, such as: it is easily damaged wafer in use.
Existing wafer transfer box conversion equipment is analyzed in use now in conjunction with a kind of wafer transfer box conversion equipment
The reason of being easily damaged wafer:
Fig. 1 and Fig. 2 is a kind of structural schematic diagram of wafer transmitting box.
Fig. 1 and Fig. 2 are please referred to, Fig. 2 is the top view of Fig. 1, and the wafer transfer box conversion equipment includes: box body 100, institute
Stating box body 100 includes the first opening and the second opening, and first opening is for being put into hand basket, and second opening is for being put into
Or take out wafer；The box cover 110 of first opening is covered, the box cover 110 is cut with scissors at the top of the box body 100 by hinged shaft
It connects.
The step of being put into hand basket into shown wafer transfer box conversion equipment includes: by making box cover 110 around the hinged shaft
Box cover 110 described in axis Unscrew；It opens the lid after 110, the hand basket is put into the wafer transfer box conversion equipment
In.However, the box cover 110 is easy in gravity during being put into hand basket in the wafer transfer box conversion equipment
It is fallen under effect, the wafer being easy in touching hand basket, to damage wafer.
Box cover 110 is fallen during hand basket is put into the wafer transfer box conversion equipment in order to prevent, Yi Zhongfang
Method is, realizes the hinged of box cover 110 and the box body 100 using the hinge with damping.However, due to having in the hinge with damping
There is anti-lubricating oil, the frictional force between box cover 110 and box body 10 can be increased by anti-lubricating oil, thus after preventing box cover 110 from opening
It falls.
However, due to anti-lubricating oil be liquid, the wafer transfer box conversion equipment in use, anti-lubricating oil be easy from
It flows out, is dropped on wafer in hinge, to be easy pollution wafer.
To solve the technical problem, the utility model provides a kind of wafer transfer box conversion equipment, comprising: box body,
The box body includes the first opening；The box cover of first opening is covered, the box cover and the box body are hinged by the first hinge；
Support rod, the support rod include that opposite first end and second end, the first end and the box cover are cut with scissors by the second hinge
It connects, the second end and the box body are hinged by third, and the support rod applies to the box cover along support rod axial direction
Active force, the active force have the first torque relative to first hinge, and the gravity of the box cover has relative to the first hinge
Second torque, first torque is contrary with the second torque, and when the box cover is closed, first torque is less than
Or it is equal to the second torque, the first torque when box cover is opened is greater than the first torque when box cover is closed.
It is understandable to enable the above objects, features, and advantages of the utility model to become apparent, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.
Fig. 3 to Fig. 8 is the structural schematic diagram of the wafer transfer box conversion equipment first embodiment of the utility model.
Fig. 3 to Fig. 8 is please referred to, the wafer transfer box conversion equipment includes: box body, and the box body includes the first opening
271；
It is hinged by the first hinge 251 to cover the box cover of first opening 271, the box cover and the box body；
Support rod 260, the support rod 260 include opposite first end and second end, the first end and the box cover
Hinged by the second hinge 252, hingedly by third hinge 253, the support rod 260 is to the box for the second end and the box body
Lid applies the active force axial along support rod 260, and the active force has the first torque relative to first hinge 251, described
The gravity of box cover has the second torque relative to the first hinge 251, and first torque is contrary with the second torque, and works as institute
When stating box cover closing, first torque is less than or equal to the second torque, and the first torque when box cover is opened is closed greater than box cover
When the first torque.
The wafer transfer box conversion equipment includes support rod 260, and the support rod 260 can apply edge to the box cover
The axial active force of support rod 260, and first torque is contrary with the second torque.Due to the first torque and the second power
Square it is contrary, then when opening the box cover, the support rod 260 can support the box cover, so as to prevent box
Lid is fallen under gravity.
It is hinged by first hinge 251 at the top of the box cover and box body；The axis and the bottom plate of the support rod 260
There is acute angle between surface.
There is acute angle between the axis and the backplate surface of the support rod 260, be conducive to increase support rod 260
Length, so as to increase the distance between the second hinge 252 and third hinge 253.Increase by second hinge 252 with third hinge 253 it
Between distance, can make open and close box cover when, the rotation angle of support rod 260 is smaller, so as to reduce the first torque
Variation, and then can reduce by the first torque and switching noise is reduced to the impact force of box body, and reduce touching between box cover and box body
It hits.
In the present embodiment, the box body includes: that two of opposite bottom plate and top plate 240 and connecting bottom board are opposite
Side plate 230；The top plate 240 covers the atop part surface of two side plates 230, and the box cover covers the exposure of top plate 240
The top surface of side plate 230 out.
The box body includes opposite bottom plate and two opposite side plates 230, and the bottom plate and two side plates 230 surround
First opening 271；The box cover and the top plate 240 are hinged by first hinge 251.
In the present embodiment, the box cover is connect by first hinge 251 with the top plate 240.
In other embodiments, the box body does not include top plate, and the side plate top surface is completely covered in the box cover, then
The box cover at the top of the first hinge and the side plate by connecting.
In the present embodiment, the wafer transfer box conversion equipment further include: be fixed on the box for covering 230 top of side plate
The first connector 261 covered, second hinge 252 connect the first end and first connector 261.The first end
It is connect by the first connector 261 with the box cover, is conducive to the position of the second hinge of control, so that the first torque of control is big
It is small.
In other embodiments, the wafer transfer box conversion equipment does not include first connector.Second hinge
It connects the first end and covers the box cover at the top of the side plate.
In the present embodiment, the side plate 230 includes: side plate main body 232 and the side frame for surrounding the side plate main body 232
231；The side frame 231 includes the bottom side frame with the contacts baseplate；Connect the side side at bottom side frame both ends
Frame, side side frame and the bottom side frame are crossed to form bottom corners；Two sides side frame is connected, and opposite with bottom side frame
Top side frame.
In the present embodiment, the top plate 240 is arranged in parallel with the bottom plate.
In the present embodiment, 230 side of side plate is pentagon, and the extending direction of the top side frame is parallel to bottom side
The extending direction of edge.
In the present embodiment, the side side frame for surrounding first opening 271 includes: vertical side frame and inclined lateral side
Frame, the vertical side frame is perpendicular to the backplate surface；There is acute angle between the inclined side frame and the bottom plate.
There is acute angle between the inclined side frame and the bottom plate, be conducive to hold from the oblique upper of the box body
Object of receiving is put into the box body, to improve the comfort level for being put into content.
In the present embodiment, the material of the side frame 231 is metal.In other embodiments, the material of the side frame
It can also be rigid plastics.The material of side frame be metal, be conducive to the processing of side frame, thus be advantageously implemented side frame with
The connection of third hinge.
In the present embodiment, the material of the side plate main body 232 is transparent material.Specifically, the material of the side plate main body 232
Material is glass or transparent plastic.
The material of the side plate main body 232 is transparent material.Since transparent material can be observed through side plate main body 232
Tray interior, so as to observe at any time the case where tray interior content.
In the present embodiment, the wafer transfer box conversion equipment further includes the second connection for being fixed on the bottom side frame
Part, the third hinge 253 connect the second end and the second connector.
In other embodiments, the third is hinged the second end and the bottom side frame.
Box cover or the first end of second hinge, 252 the connection first end and covering 230 top of side plate
It is connect by first connector 261 with the box cover for covering 230 top of side plate, the third hinge 253 and the bottom
Turning connection or third hinge 253 are connect with second connector 262, can further increase the support rod 260
Length to reduce switching noise, and reduces the collision between box cover and box body.
The box cover includes: the box cover side of the box cover top plate and the connection box cover top plate on the box body top
Plate；The box cover top plate includes: box cover top plate main body and the box cover top plate frame for surrounding the box cover top plate main body；The box
Lid side plate includes: lid side panels main body and the lid side panels frame for surrounding the lid side panels main body.
The material of the box cover top plate main body and lid side panels main body is transparent material, such as glass or plastics；The box
The material of lid top panel frame and lid side panels frame is metal.
The material of the box cover top plate main body and lid side panels main body is transparent material, can observe box body through glass
Inside, so as to observe at any time the case where tray interior content.
Specifically, in the present embodiment, 253 connection of the third hinge second end and the second connector, then described second
Connector is connect with the bottom corners, alternatively, the 253 connection second ends of third hinge and the bottom side frame, then institute
Third hinge 253 is stated to connect with the bottom corners.
Second connector 262 is connect with the bottom corners or third hinge 253 connects with the bottom corners
The length that can further increase support rod 260 is connect, touching for box cover switching noise and box cover and box body can be further reduced
It hits.
In the present embodiment, the wafer transfer box conversion equipment further includes the second connection for being fixed on the bottom side frame
Part, the third hinge 253 connect the second end and the second connector.
In the present embodiment, second connector connects the fixed company of bottom corners that the bottom plate and vertical side frame are formed
It connects.In other embodiments, the third is hinged the bottom corners and second end.
In the present embodiment, second connector is connect with the bottom corners or the third cuts with scissors 253 and the bottom
The connection of portion turning.In other embodiments, second connector connects what the inclined side frame was formed with vertical side frame
Top corner, alternatively, described second is hinged the top plate turning and the second end.
The side side frame of second opening 272 is surrounded perpendicular to the backplate surface.
In the present embodiment, the box cover includes: the top box lid for being parallel to the backplate surface, described in the top box lid covering
Top side frame；It is parallel to the inclination box cover 210 of the inclined side frame extending direction, the inclination box cover when the lid is closed
210 are fixedly connected with the top box lid；When the lid is closed, described vertical perpendicular to the vertical box cover 220 of the backplate surface
Box cover 220 is fixedly connected with the inclination box cover 210.
In the present embodiment, the material of the top box lid is metal, steel or aluminium alloy.The top box lid of metal material is convenient for welding
And installation.In other embodiments, the material of the top box lid can also be rigid plastics.
In the present embodiment, the inclination box cover 210 includes inclination box cover main body 212 and the encirclement inclination box cover main body
212 inclination box cover frame 211.
The vertical box cover 220 includes: vertical box cover main body 222 and the vertical cassette for surrounding the vertical box cover main body 222
Lid frame 221, the top box lid, vertical box cover frame 221 and inclination box cover frame 211 constitute the box cover frame, described to hang down
Straight box cover main body 222 and the inclination box cover main body 212 constitute the box cover main body.
When box cover fully opens, first torque is greater than the second torque.
When the box cover fully opens, first torque is greater than the second torque, then during box cover is opened, deposits
An equilbrium position, when box cover is in the equilbrium position described in the first torque be equal to the second torque.When box cover is around overbalance
Behind position, the first torque is greater than the second torque, and therefore, box cover can automatically turn on after bypassing equilbrium position, and then can save
Manpower.
In the present embodiment, the working principle for opening the feeder includes: when box cover closure, and first torque is less than
Second torque, then the box cover closes under the action of the second torque that gravity generates；First described in when box cover fully opens
Torque is greater than the second torque, then first torque makes box cover have pressure to top plate 240, and top plate 240 has anti-make to box cover
Support force, the support force form third torques, first torque, the second torque and for first hinge 251
Three torques keep it turned on box cover, so as to prevent box cover from falling.
Specifically, in the present embodiment, with the unlatching of box cover, the box cover around the first hinge 251 axis rotation, described the
One torque increases, and the second torque reduces.When the first torque and equal the second torque, institute is worked as in box cover balance position
Box cover is stated around behind equilbrium position, the box cover can automatically spring open, so as to save manpower.
The working principle for closing the feeder includes: when box cover fully opens, and first torque is greater than the second power
Square.Make box cover around the axis rotation of first hinge 251, during closing the box cover, first torque is gradually reduced,
Second torque gradually increases.When box cover balance state, the first torque is equal to the second torque.When box cover passes through balance
Behind position, first torque can be automatically closed less than the second torque, the box cover under the second moment loading.
In the present embodiment, when the lid is closed, 251, second hinge 252 of the first hinge is conllinear with the center of third hinge 253.
In other embodiments, when the lid is closed, the center of first hinge, the second hinge and third hinge can not be conllinear.
When the lid is closed, 251, second hinge 252 of the first hinge is conllinear with the center of third hinge 253, then when box cover closes
When closing, the support rod 260 is applied to the extension line of the active force of box cover by second hinge, 252 centers, to make described
First torque is zero, and then therefore the sum of the first torque and the second torque can be made, which to be equal to the second torque, can be such that box cover closes
When, box cover closes.
In the present embodiment, when box cover closure, second hinge 252 is located between the first hinge 251 and third hinge 253.When
When the box cover is opened, first torque is gradually increased, and second torque is gradually reduced, when the first torque and the second torque
When equal, the box cover is in equilbrium position, and after the box cover bypasses the equilbrium position, second torque is less than the
One torque, box cover can bounce automatically.
It crosses the center of first hinge 251 and is interface perpendicular to the plane of horizontal plane.In the present embodiment, described first
Hinge 251 and the center of gravity of the box cover are located at the same side of the interface, and the support rod 260 applies pressure to the box cover.
In other embodiments, first hinge and the center of gravity of the box cover are located at the two sides of the interface, institute
It states support rod and pulling force is applied to the box cover.
In the present embodiment, the support rod 260 is cylinder, specifically, the support rod 260 is atmospheric pressure pole.In other realities
It applies in example, the support rod can be spring.
Since the active force that atmospheric pressure pole is applied to box cover will not change, Neng Goubao with the variation of 260 length of support rod
The active force that card atmospheric pressure pole is applied to box cover is constant, to be conducive to the first torque of control, after the opening that can prevent box cover
It falls, and the collision of box cover switching noise and box cover and box body can be reduced.
Specifically, the support rod 260 is damping cylinder in the present embodiment.Damping cylinder can reduce first power
Square so as to reduce the speed of box cover opening and closing, and then can reduce box cover switching noise and box cover and box body
Collision.
In other embodiments, the support rod can be the cylinder without damping.
In the present embodiment, the distance between described box cover center of gravity to the first 251 centers of hinge is being parallel to baseplate surface direction
On component be 125mm ~ 155mm, such as: 140mm.
Specifically, the top box cover rim is 54mm ~ 66mm perpendicular to the size on vertical 220 surface of box cover, and such as: 60mm；
The length of the inclination box cover frame 211 is 215mm ~ 255mm, such as: 240mm；
If the distance between second hinge 252 and 253 centers of third hinge are excessive when the lid is closed, it is easy to increase branch
The length of strut 260 increases material cost；If second hinge 252 and third are cut with scissors between 253 centers when the lid is closed
Apart from too small, it is unfavorable for reducing box cover to the impact force of box body.Specifically, second hinge 252 is cut with scissors with third in the present embodiment
Length between 253 centers is 230mm ~ 290mm, such as: 262mm.The distance between first hinge and the second hinge center are
35mm ~ 45mm, such as: 40mm.
In the case where certain second hinge 252 of the second torque cuts with scissors the distance between 253 centainly with third, if the branch
Strut 260 is excessive to the pressure of box cover, is easy to cause the first torque excessive, so as to cause open and close box cover when to box body
Impact force is larger, and noise is larger；If the support rod 260 is too small to the pressure of box cover, it is unfavorable for making the second torque to be greater than the
One torque prevents box cover from falling to be unfavorable for after opening box cover.Specifically, the support rod 260 is right in the present embodiment
The pressure of box cover is 63N ~ 77N, such as: 70N.
In the present embodiment, the bottom plate is the bottom plate with mounting hole, and the mounting hole is for installing content.At other
In embodiment, also there is groove in the bottom plate, the groove extends upward through the bottom plate in base plate thickness side, and the groove is used
In the mobile station for accommodating installation wafer support.
Second opening 272 is used as the channel for being removed and placed into wafer.
In other embodiments, the feeder further include covering it is described second opening cover board, the cover board with it is described
Box body is detachably installed.
In the present embodiment, the feeder further include: be fixedly connected with the handle 250 of the box cover.
Fig. 9 is the structural schematic diagram of the wafer transfer box conversion equipment second embodiment of the utility model.
Referring to FIG. 9, the embodiments of the present invention also provide another wafer transfer box conversion equipment, the present embodiment
This will not be repeated here for the something in common of wafer transfer box conversion equipment and a upper embodiment, and difference includes:
In the present embodiment, second hinge 252 is located at the two sides of the interface, the support rod with box cover center of gravity
260 pairs of box covers apply pulling force.
In the present embodiment, the box body includes top plate 240, and 230 top of side plate is completely covered in the box cover.The box
Lid passes through the 251 connection side plate 230 of the first hinge.The box cover further include: the third for being fixed on the box cover top board surface connects
Fitting 263, the third connector 263 to the box body protrude, described second be hinged the third connector 263 with it is described
Side plate.
The box cover further includes cantilever portion, and the cantilever portion and top box cover are fixedly connected as an entirety.The third
The junction in connector 263 connecting cantilever portion and top box cover.
In the present embodiment, the material of the cantilever portion is metal.
In the present embodiment, when the lid is closed, the center of first hinge, the second hinge and third hinge is not conllinear.At other
In embodiment, it can make when the lid is closed, first hinge, the second hinge are conllinear with the center that third is cut with scissors.
Figure 10 and Figure 11 is the structural schematic diagram of the wafer transfer box conversion equipment 3rd embodiment of the utility model.
Figure 10 to Figure 11 is please referred to, Figure 11 is the structural schematic diagram of the air-control device 290 in the utility model embodiment.
The something in common of the present embodiment and Fig. 2 to embodiment illustrated in fig. 8 does not repeat herein, the difference is that:
The support rod 260 is cylinder, the feeder further include: air-control device 290, for controlling support rod 260
Elongation and shortening.
The support rod 260 is cylinder, and the wafer transfer box conversion equipment includes the air-control device 290, then described
Air-control device 290 can control the elongation and shortening of the support rod 260, then the air-control device 290 can control the box
The opening and closing of lid, so as to realize the full-automatic opening and closing of box cover.
In the present embodiment, the support rod 260 includes cylinder body 260b, has atmospheric pressure cavity in the cylinder body 260b；Positioned at institute
The piston 280 in cylinder body 260b is stated, the piston 280 surrounds closed cavity 281,281 side wall of closed cavity with atmospheric pressure cavity
In there is stomata, the stomata and the closed cavity 281 penetrate through；One end connects the rod piece 260a of the piston 280.The gas
Control device 290 is connected to the stomata.
In the present embodiment, the air-control device 290 makes closed cavity by being passed through gas into the closed cavity 281
281 volumes increase, to make piston 280 towards away from the movement of the direction of the closed cavity 281；When the extraction closed cavity
When gas in 281, the piston 280 is mobile towards the closed cavity 281.
In the present embodiment, the closed cavity 281 and the rod piece 260a are located at 280 two sides of piston, then when
When being passed through gas into the closed cavity 281, the length of the support rod 260 increases, and the box cover is opened；Described in extraction
When gas in closed cavity 281, the length of the support rod 260 reduces, and the box cover is closed.
In other embodiments, the rod piece 260a and the closed cavity 281 are located at the same side of the piston 280,
Then when being passed through gas into the closed cavity 281, the length of the support rod 260 reduces；When the extraction closed cavity
When gas in 281, the length of the support rod 260 increases.
Figure 12 is the structural schematic diagram of the wafer transfer box conversion equipment fourth embodiment of the utility model.
Please refer to Figure 12, in the present embodiment support rod 260 it is identical as wafer transfer box conversion equipment shown in Figure 11 it
This is in not repeat, the difference is that:
The piston 280 surrounds the first closed cavity 282 and the second closed cavity 283, institute with the cylinder body 260b side wall
Rod piece 260a is stated through first closed cavity 282.
The air-control device includes: the first atmosphere-comtrolling apparatus 291, first atmosphere-comtrolling apparatus 291 and first closing chamber
Body 282 is connected to；Second atmosphere-comtrolling apparatus 292, second atmosphere-comtrolling apparatus 292 are connected to second closed cavity 283.
First atmosphere-comtrolling apparatus 291 is for being passed through gas or extraction first envelope into first cavity 282
Gas in closed chamber body 282；Second atmosphere-comtrolling apparatus 292 is for being passed through gas or pumping into second closed cavity 283
Gas in second closed cavity 283 out.
In the present embodiment, when make the air pressure in first closed cavity 282 less than the air pressure in the second closed cavity 283
When, the length of the body of rod in the cylinder body 260b reduces, and the length of the support rod 260 increases；When making first envelope
When air pressure in closed chamber body 282 is greater than the air pressure in the second closed cavity 283, the length of the body of rod in the cylinder body 260b
Increase, the length of the support rod 260 reduces.
Figure 13 is the structural schematic diagram of the 5th embodiment of wafer transfer box switching device of the utility model.
Please refer to Figure 13, this will not be repeated here for the something in common of the present embodiment and Fig. 9, and difference includes:
In the present embodiment, the support rod 260 is cylinder, the feeder further include: air-control device 290, for controlling
The elongation and shortening of support rod 260.
The support rod 260 is cylinder, and the wafer transfer box conversion equipment includes the air-control device 290, then described
Air-control device 290 can control the elongation and shortening of the support rod 260, then the air-control device 290 can control the box
The opening and closing of lid, so as to realize the full-automatic opening and closing of box cover.
In the present embodiment, when the length of the support rod 260 reduces, the box cover is opened, when the support rod 260
When length increases, the box cover is closed.
Although the utility model discloses as above, the utility model is not limited to this.Anyone skilled in the art,
It does not depart from the spirit and scope of the utility model, can make various changes or modifications, therefore the protection scope of the utility model
It should be defined by the scope defined by the claims..
Claims (16)
1. a kind of wafer transfer box conversion equipment characterized by comprising
Box body, the box body include the first opening；
The box cover of first opening is covered, the box cover and the box body are hinged by the first hinge；
Support rod, the support rod include that opposite first end and second end, the first end and the box cover pass through the second hinge
Hingedly, the second end and the box body are hinged by third, and the support rod applies to the box cover along support rod axial direction
Active force, the active force has the first torque relative to first hinge, and the gravity of the box cover is relative to the first hinge tool
There is the second torque, first torque is contrary with the second torque, and when the box cover is closed, first torque is small
In or be equal to the second torque, box cover open when the first torque be greater than box cover close when the first torque.
2. wafer transfer box conversion equipment as described in claim 1, which is characterized in that the box body includes:
Two opposite side plates of bottom plate and connecting bottom board, the box cover is completely covered or part covers table at the top of the side plate
Face；It is hinged by first hinge at the top of the box cover and box body；
There is acute angle between the axis of the support rod and the backplate surface.
3. wafer transfer box conversion equipment as claimed in claim 2, which is characterized in that the side plate is completely covered in the box cover
Top, described first is hinged the side plate and the box cover；
The box body further include: the top plate of two side plates of connection, the top plate are opposite with the bottom plate；The top plate covers two
The atop part surface of side plate, the box cover cover the top surface for the side plate that the top plate exposes；Described first is hinged
The top plate and the box cover.
4. wafer transfer box conversion equipment as claimed in claim 2, which is characterized in that described second is hinged the first end
With the box cover at the top of the covering side plate；Alternatively, the wafer transfer box conversion equipment further include: be fixed on the covering side plate
The first connector on the box cover at top, described second is hinged the first end and first connector.
5. wafer transfer box conversion equipment as claimed in claim 2, which is characterized in that the side plate includes:
Side plate main body and the side frame for surrounding the side plate main body；The side frame includes the bottom side with the contacts baseplate
Frame；
The third is hinged the second end and the bottom side frame；Alternatively, the wafer transfer box conversion equipment further includes
It is fixed on the second connector of the bottom side frame, the third is hinged the second end and the second connector.
6. wafer transfer box conversion equipment as claimed in claim 5, which is characterized in that the side frame further includes described in connection
The side side frame at bottom side frame both ends, side side frame and the bottom side frame are crossed to form bottom corners；
When the third is hinged the second end and the bottom side frame, the third hinge is connect with the bottom corners；
When the third is hinged the second end and the second connector, second connector is connect with the bottom corners.
7. wafer transfer box conversion equipment as claimed in claim 5, which is characterized in that the material of the side plate main body is glass
Or transparent plastic, the material of the bottom side frame are metal.
8. wafer transfer box conversion equipment as described in claim 1, which is characterized in that when the lid is closed, first hinge,
Second hinge is conllinear with the center that third is cut with scissors.
9. wafer transfer box conversion equipment as described in claim 1, which is characterized in that the box cover includes:
The lid side panels of box cover top plate and the connection box cover top plate at the top of the box body；The box cover top plate packet
It includes: box cover top plate main body and the box cover top plate frame for surrounding the box cover top plate main body；
The lid side panels include: lid side panels main body and the lid side panels frame for surrounding the lid side panels main body.
10. wafer transfer box conversion equipment as claimed in claim 9, which is characterized in that the box cover top plate main body and box cover
The material of side plate main body is glass or transparent plastic；The material of the box cover top plate frame and lid side panels frame is metal.
11. wafer transfer box conversion equipment as described in claim 1, which is characterized in that the support rod is atmospheric pressure pole or bullet
Spring.
12. wafer transfer box conversion equipment as claimed in claim 11, which is characterized in that the support rod be damping cylinder or
Damping spring.
13. wafer transfer box conversion equipment as described in claim 1, which is characterized in that excessively it is described first hinge center and hang down
Directly in the plane of horizontal plane be interface；
First hinge and the center of gravity of the box cover are located at the same side of the interface, and the support rod applies the box cover
Pressure；Alternatively, first hinge and the center of gravity of the box cover are located at the two sides of the interface, the support rod is to described
Box cover applies pulling force.
14. wafer transfer box conversion equipment as described in claim 1, which is characterized in that when the box cover fully opens, institute
The first torque is stated greater than the second torque.
15. wafer transfer box conversion equipment as described in claim 1, which is characterized in that when the lid is closed, second hinge
The distance between third hinge center is 230mm~290mm；First hinge and the distance between second hinge center for 35mm~
45mm；The size that the support rod is applied to the active force of the box cover is 63N~77N；The quality of the box cover be 1.5N~
2N。
16. wafer transfer box conversion equipment as described in claim 1, which is characterized in that the support rod is cylinder, and wafer passes
Send box conversion equipment further include: air-control device, for controlling the elongation and shortening of support rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820645122.XU CN208336173U (en) | 2018-05-02 | 2018-05-02 | Wafer transfer box conversion equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820645122.XU CN208336173U (en) | 2018-05-02 | 2018-05-02 | Wafer transfer box conversion equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208336173U true CN208336173U (en) | 2019-01-04 |
Family
ID=64779684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820645122.XU Active CN208336173U (en) | 2018-05-02 | 2018-05-02 | Wafer transfer box conversion equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208336173U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111430265A (en) * | 2019-11-28 | 2020-07-17 | 合肥晶合集成电路有限公司 | Shielding device and method for machine station window and semiconductor equipment |
-
2018
- 2018-05-02 CN CN201820645122.XU patent/CN208336173U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111430265A (en) * | 2019-11-28 | 2020-07-17 | 合肥晶合集成电路有限公司 | Shielding device and method for machine station window and semiconductor equipment |
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Address after: 518109 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Zhongke feice Technology Co.,Ltd. Address before: 518109 room 1618, area a, kaihaoda Plaza office, No.1, Dalang Industrial Park Road, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Zhongke Flying Test Technology Co.,Ltd. |