CN208328103U - Stable MOCVD heater - Google Patents
Stable MOCVD heater Download PDFInfo
- Publication number
- CN208328103U CN208328103U CN201820541091.3U CN201820541091U CN208328103U CN 208328103 U CN208328103 U CN 208328103U CN 201820541091 U CN201820541091 U CN 201820541091U CN 208328103 U CN208328103 U CN 208328103U
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- brace rod
- ceramic ring
- whorl brace
- thermal insulation
- upper substrate
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Abstract
The utility model discloses a kind of stable MOCVD heaters, the upper substrate surface is vertically equipped with multiple connection conductive bars, each connection conductive bar bottom end is all fixed on lower substrate, top is all equipped with conduction legs, the conduction legs pass through thermal insulation board and apical support has heating element, and the thermal insulation board is fixed together by multiple fastening assemblies with upper substrate and fixed plate.The utility model design structure is simple, improves 60% compared to traditional heater heating efficiency through production inspection；Thermal insulation board is fixed on the heaters by multiple novel fastening assemblies, it avoids lower isolation ceramic ring and upper isolation ceramic ring surprisingly slight crack is occurred by big pretightning force, fracture failure when further avoiding heated, it ensure that the whole of equipment operates normally, extend the service life of each component, to realize continuous production, the yields of wafer product is effectively improved；As the reduction of frequency of maintenance also reduces maintenance cost, reduce maintenance workload.
Description
Technical field
The utility model relates to a kind of heater, specifically a kind of stable MOCVD heater belongs to semiconductor system
Standby field.
Background technique
In the production technology of semiconductor transistor elements, wherein a crucial step is that semiconductor transistor elements are placed on heater
Heating, wherein MOCVD heater is more commonly used heating equipment, is usually to make heating sheet or heating using substrate energization
Silk fever, then the millstone plate for being loaded with wafer is placed in above heating sheet and can be heated.It is found in practical operation, a side
The thermal efficiency of face heater heating is not high, on the other hand, in order to avoid substrate is thermally damaged during fever, it usually needs
One layer of thermal insulation board is set for preventing heat from being passed down to substrate, current thermal insulation board is usual between heating sheet and charged substrate
It is directly to be fixedly connected on substrate by insulated fasteners, is found in practical operation, since insulated fasteners intensity is lower,
Once application pretightning force is excessive slight crack will directly occurs in fastener cycle, direct fracture failure after heated time is too long causes
Thermal insulation board can not play due heat-blocking action during heating, reduce making for heater substrate and heater other component
With the service life, the yields of wafer is also reduced, since operation stability is poor, is unfavorable for realizing continuous production.
Summary of the invention
In view of the above-mentioned problems of the prior art, the purpose of the utility model is to provide a kind of heating efficiency height, it can
The stabilization of heat-insulated Board position and working effect is kept, can prolong the service life, realize the stable MOCVD of quantity-produced
Heater.
A kind of in order to achieve the above purposes, the technical solution adopted by the utility model is: stable MOCVD heater,
Upper substrate and lower substrate including parallel arrangement are equipped with fixed plate between the upper substrate and lower substrate, and lower substrate is by upright bar
Support, the upper substrate surface are vertically equipped with multiple connection conductive bars, and each connection conductive bar bottom end is all fixed on down
On substrate, top is all equipped with conduction legs, and the conduction legs pass through thermal insulation board and apical support has heating element, described
Thermal insulation board is fixed together by multiple fastening assemblies with upper substrate and fixed plate；The fastening assembly includes whorl brace rod,
The whorl brace rod sequentially passes through thermal insulation board, upper substrate and fixed plate, and the whorl brace rod and upper substrate from top to bottom
Between be equipped with isolated part, the isolated part includes upper isolation ceramic ring and lower isolation ceramic ring, the upper isolation ceramic ring
It is spun on whorl brace rod from top and end is embedded between upper substrate and whorl brace rod, the lower isolation ceramic ring is from below
It is spun on whorl brace rod and between end insertion upper substrate and whorl brace rod, the whorl brace rod is located at thermal insulation board and upper
Part between substrate is arranged with supporting sleeve, and whorl brace rod is screwed with first between supporting sleeve and upper isolation ceramic ring
Fastening nut part, whorl brace rod are screwed with the second fastening nut part between fixed plate and lower isolation ceramic ring；The screw thread connects
The end sleeve that extension bar exposes thermal insulation board is equipped with heat-insulated crab bolt, and the end sleeve that whorl brace rod exposes fixed plate is equipped with fixed plate spiral shell
It is female.
Preferably, the heating element is heating sheet or heater strip.
Preferably, for the ease of processing, the upper substrate, lower substrate, fixed plate and thermal insulation board are all circular.
Preferably, the first fastening nut part includes the first nut, between first nut and upper isolation ceramic ring
Equipped with the first flat shim.The first nut of turn can fix upper isolation ceramic ring by the first flat shim, and the first nut is attacked
The unbalance stress of isolation ceramic ring is easily caused when silk perpendicularity deviation or overproof flatness, the first flat shim of setting can make
The stress distribution that first nut applies more evenly, reduces the upper probability that ceramic ring breakage is isolated as caused by unbalance stress.
Preferably, the second fastening nut part includes the second nut, and second nut is set respectively close to both sides of the face
There is one second flat shim.The second nut of turn can fix lower isolation ceramic ring by the second flat shim, and the second nut is attacked
The unbalance stress of lower isolation ceramic ring, the second nut two sides setting second are easily caused when silk perpendicularity deviation or overproof flatness
The stress distribution that flat shim can be such that the second nut applies more evenly, avoids the lower isolation ceramic ring as caused by unbalance stress
The phenomenon that rupture.
Preferably, the supporting sleeve is molybdenum tube.Molybdenum tube can high temperature resistant, and intensity is high, can be in the feelings of high-temperature heating
Support strength is kept under condition.
The utility model is connected together upper substrate and lower substrate by connection conductive bar, in use, upper substrate connection electricity
Source anode, lower substrate connects power cathode, while being powered to upper substrate and lower substrate, and electric current is transmitted to connection conductive bar and passes through
Conduction legs reach heating element, make heating element can with fast heating, to above it millstone plate and wafer carry out it is quick
Heating.
The utility model design structure is simple, improves through production inspection compared to traditional heater heating efficiency
60%；Thermal insulation board is fixed on the heaters by multiple novel fastening assemblies, and supporting sleeve improves the branch of fastening assembly
Intensity is supportted, the setting of the first fastening nut part and the second fastening nut part can generate reversed offset to the pretightning force excessively applied
Surprisingly is there is slight crack by big pretightning force so as to avoid lower isolation ceramic ring and upper isolation ceramic ring, further in active force
Fracture failure when avoiding heated can be stablized heat-insulated since the position of thermal insulation board entirety remains stable, ensure that equipment
It is whole operate normally, extend the service life of each component, to realize continuous production, effectively improve wafer product
Yields；As the reduction of frequency of maintenance also reduces maintenance cost, reduce maintenance workload.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the enlarged drawing in Fig. 1 at A；
Fig. 3 is the schematic diagram of the fastening assembly in the utility model；
In figure, 1. upper substrates, 2. fixed plates, 3. thermal insulation boards, 4. heating elements, 5. lower substrates, 51. upright bars, 61. connection biographies
Guide rod, 62. conduction legs, I, fastening assembly, 11. whorl brace rods, 12. supporting sleeves, 13. heat-insulated crab bolts, 14. fixed plates
Nut, is isolated ceramic ring on 31., 32. it is lower be isolated ceramic rings, 41. first nuts, the first flat shim of 41a., 42. second nuts,
The second flat shim of 42a..
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawing.In following the application about the description in orientation
In, with the top in Fig. 1 be it is upper, under the lower section in Fig. 1 is.
As shown, a kind of stable MOCVD heater, upper substrate 1 and lower substrate 5 including parallel arrangement, institute
It states and is equipped with fixed plate 2 between upper substrate 1 and lower substrate 5, and lower substrate 5 is supported by upright bar 51,1 surface of upper substrate is vertically worn
Equipped with multiple connection conductive bars 61, each 61 bottom end of connection conductive bar is all fixed on lower substrate 5, and top is all equipped with biography
Bracket 62 is led, the conduction legs 62 pass through thermal insulation board 3 and apical support has heating element 4, and the thermal insulation board 3 passes through multiple
Fastening assembly I is fixed together with upper substrate 1 and fixed plate 2；The fastening assembly I includes whorl brace rod 11, the screw thread
Connecting rod 11 sequentially passes through thermal insulation board 3, upper substrate 1 and fixed plate 2, and the whorl brace rod 11 and upper substrate 1 from top to bottom
Between be equipped with isolated part, the isolated part includes upper isolation ceramic ring 31 and lower isolation ceramic ring 32, and the upper isolation is made pottery
Ceramic ring 31 is spun on whorl brace rod 11 from top and between end insertion upper substrate 1 and whorl brace rod 11, the lower isolation
Ceramic ring 32 is spun on whorl brace rod 11 from below and between end insertion upper substrate 1 and whorl brace rod 11, the screw thread
Part of the connecting rod 11 between thermal insulation board 3 and upper substrate 1 is arranged with supporting sleeve 12, and whorl brace rod 11 is in support sleeve
The first fastening nut part is screwed between pipe 12 and upper isolation ceramic ring 31, whorl brace rod 11 is in fixed plate 2 and lower isolation ceramics
The second fastening nut part is screwed between ring 32；The end sleeve that the whorl brace rod 11 exposes thermal insulation board 3 is equipped with heat-insulated crab bolt
13, the end sleeve that whorl brace rod 11 exposes fixed plate 2 is equipped with fixed crab bolt 14.
Preferably, the heating element 4 is heating sheet or heater strip.
Preferably, for the ease of processing, the upper substrate 1, lower substrate 5, fixed plate 2 and thermal insulation board 3 are all circular.
Preferably, the first fastening nut part includes the first nut 41, first nut 41 and upper isolation ceramic ring
The first flat shim 41a is equipped between 31.The first nut of turn 41 can fix upper isolation ceramic ring by the first flat shim 41a
31, and the unbalance stress of isolation ceramic ring 31 is easily caused when 41 tapping perpendicularity deviation of the first nut or overproof flatness,
Be arranged the first flat shim 41a can make the first nut 41 apply stress distribution more evenly, reduce since unbalance stress causes
Upper isolation ceramic ring 31 rupture probability.
Preferably, the second fastening nut part includes the second nut 42, and second nut 42 is close to both sides of the face point
It She You not one second flat shim 42a.The second nut of turn 42 can fix lower isolation ceramic ring by the second flat shim 42a
32, and the unbalance stress of lower isolation ceramic ring 32 is easily caused when 42 tapping perpendicularity deviation of the second nut or overproof flatness,
Second nut, 42 two sides be arranged the second flat shim 42a can make the second nut 42 apply stress distribution more evenly, avoid by
The phenomenon that lower isolation ceramic ring 32 caused by unbalance stress ruptures.
Preferably, the supporting sleeve 12 is molybdenum tube.Molybdenum tube can high temperature resistant, and intensity is high, can be in high-temperature heating
In the case of keep support strength.Supporting sleeve 12 is also provided with more piece, adjacent to be sequentially sleeved on whorl brace rod 11.More piece branch
Support set pipe 12 can disperse to undertake stress, improve whole stress condition；And direct dismounting and change is facilitated in damage.
When installing fastening assembly I, upper isolation ceramic ring 31, while turn second are fixed by the first nut of turn 41
Nut 42 fixes lower isolation ceramic ring 32, then screws heat-insulated crab bolt 13 and fixed crab bolt 14 applies pretightning force, fixed
Crab bolt 14 compresses lower isolation ceramic ring 32 by the second flat shim 42a and the second nut 42, and heat-insulated crab bolt 13 applies pre-
Clamp force can be transferred to the first nut 41 by supporting sleeve 12, and in this process, the pretightning force that fixed crab bolt 14 applies can
Part is offset by the reaction of the second nut 42, and the pretightning force that heat-insulated crab bolt 13 applies can partially be offset by the first nut 41,
There is slight crack by big pretightning force so as to avoid lower isolation ceramic ring 32 and upper isolation ceramic ring 31 are unexpected, avoids heated
When fracture failure.The utility model is connected together upper substrate 1 and lower substrate 5 by connecting conductive bar 61, in use, upper substrate
1 connection positive pole, lower substrate 5 connects power cathode, while being powered to upper substrate 1 and lower substrate 5, and electric current is transmitted to connection and passes
Guide rod 61 simultaneously reaches heating element 4 by conduction legs 62, makes heating element 4 can be with fast heating, to the millstone plate above it
And wafer is quickly heated, heating efficiency is very high.
Claims (6)
1. a kind of stable MOCVD heater, upper substrate (1) and lower substrate (5) including parallel arrangement, the upper substrate
(1) fixed plate (2) are equipped between lower substrate (5), and lower substrate (5) is supported by upright bar (51), which is characterized in that the upper base
Plate (1) surface is vertically equipped with multiple connection conductive bars (61), and each connection conductive bar (61) bottom end is all fixed on lower base
On plate (5), top is all equipped with conduction legs (62), the conduction legs (62) pass through thermal insulation board (3) and apical support have plus
Thermal part (4), the thermal insulation board (3) are fixed together by multiple fastening assemblies (I) and upper substrate (1) and fixed plate (2)；Institute
Stating fastening assembly (I) includes whorl brace rod (11), the whorl brace rod (11) sequentially pass through from top to bottom thermal insulation board (3),
Upper substrate (1) and fixed plate (2), and isolated part, the isolation are equipped between the whorl brace rod (11) and upper substrate (1)
Component includes upper isolation ceramic ring (31) and lower isolation ceramic ring (32), and the upper isolation ceramic ring (31) is spun on screw thread from top
In connecting rod (11) and end is embedded between upper substrate (1) and whorl brace rod (11), and the lower isolation ceramic ring (32) is under
Side is spun on whorl brace rod (11) and between end insertion upper substrate (1) and whorl brace rod (11), the whorl brace rod
(11) part between thermal insulation board (3) and upper substrate (1) is arranged with supporting sleeve (12), and whorl brace rod (11) is propping up
The first fastening nut part is screwed between support set pipe (12) and upper isolation ceramic ring (31), whorl brace rod (11) is in fixed plate (2)
The second fastening nut part is screwed between lower isolation ceramic ring (32)；The whorl brace rod (11) exposes the end of thermal insulation board (3)
Portion is arranged with heat-insulated crab bolt (13), and the end sleeve that whorl brace rod (11) exposes fixed plate (2) is equipped with fixed crab bolt (14).
2. stable MOCVD heater according to claim 1, which is characterized in that the heating element (4) is to add
Backing or heater strip.
3. stable MOCVD heater according to claim 1, which is characterized in that the upper substrate (1), lower base
Plate (5), fixed plate (2) and thermal insulation board (3) are all circular.
4. stable MOCVD heater according to claim 1, which is characterized in that the first fastening nut part
Including the first nut (41), the first flat shim (41a) is equipped between first nut (41) and upper isolation ceramic ring (31).
5. stable MOCVD heater according to claim 1, which is characterized in that the second fastening nut part
Including the second nut (42), second nut (42) is respectively equipped with one second flat shim (42a) close to both sides of the face.
6. stable MOCVD heater according to claim 1, which is characterized in that the supporting sleeve (12) is
Molybdenum tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820541091.3U CN208328103U (en) | 2018-04-15 | 2018-04-15 | Stable MOCVD heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820541091.3U CN208328103U (en) | 2018-04-15 | 2018-04-15 | Stable MOCVD heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208328103U true CN208328103U (en) | 2019-01-04 |
Family
ID=64781623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820541091.3U Active CN208328103U (en) | 2018-04-15 | 2018-04-15 | Stable MOCVD heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208328103U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111910177A (en) * | 2019-05-08 | 2020-11-10 | 聚灿光电科技股份有限公司 | MOCVD reaction device |
| CN115899034A (en) * | 2022-12-31 | 2023-04-04 | 楚赟精工科技(上海)有限公司 | Insulating fastening assembly and MOCVD heater |
-
2018
- 2018-04-15 CN CN201820541091.3U patent/CN208328103U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111910177A (en) * | 2019-05-08 | 2020-11-10 | 聚灿光电科技股份有限公司 | MOCVD reaction device |
| CN115899034A (en) * | 2022-12-31 | 2023-04-04 | 楚赟精工科技(上海)有限公司 | Insulating fastening assembly and MOCVD heater |
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