CN208308951U - A kind of surface particle source - Google Patents
A kind of surface particle source Download PDFInfo
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- CN208308951U CN208308951U CN201820275266.0U CN201820275266U CN208308951U CN 208308951 U CN208308951 U CN 208308951U CN 201820275266 U CN201820275266 U CN 201820275266U CN 208308951 U CN208308951 U CN 208308951U
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Abstract
The utility model discloses a kind of surface particle sources, it includes curved surface electric discharge target, water-cooled jacket, binding post, insulation sleeve, magnetic boots, (multiple groups) sieve, air inlet, fixation kit, curved surface electric discharge target is connected into negative voltage by binding post, glow discharge can be generated, it is influenced by discharge electrode shape, hollow cathode discharge effect occurs for converging electron beam, anode i.e. but water cooling air inlet pipe also can sieve, anode adds positive electricity electronics ready to receive, again can accelerated particle output, sieve can add negative electricity, it can be used as the extraction pole of particle, the cooperation of three kinds of electrodes, it can get a large amount of high energy particles, electric discharge cathode is to be spliced by multiple groups metal substrate and can be brazed nonmetallic materials on its surface and be bolted on the water-cooled jacket by stainless steel pipe surface welding water cooling coil pipe, insulation sleeve can be realized to insulate between various components, magnet built in magnetic boots component.The utility model is to provide high energy particle in pvd coating preparation process using the hollow cathode effect in hollow cathode discharge process.
Description
Technical field
The invention belongs to technical field of vacuum plating, in particular to surface particle sources.
Background technique
Physical vapour deposition (PVD) (PVD) is mainly by passing through evaporation, laser irradiation or gas discharge etc. for certain raw material
Physical process realizes the change (solid-state becomes gaseous state, solid-state becomes the atomic state that can be overflowed) of certain physical state, and is deposited on
The process of workpiece surface to be plated.The state of processes of physical vapor deposition chinese raw materials has very big shadow to the quality of film forming coatings
It rings.Such as: the material of evaporation coating process deposition is the material after gasification, can only utilize high vacuum (10-3Pa under), biggish gas
Body atom free path carrys out depositing coating, and deposition and atomic energy is low, and coating quality is relatively poor；Magnetron sputtering (glow discharge) passes through
The deposition materials ionization level that the inert gas bombardment of ionization sputters is low, and sputtered atom energy is low, and the coating structure of formation is loose；
Arc ion plating (arc discharge) is by the arc discharge energetic hot electrons ionization deposited particles between electrode, but discharge process
In be accompanied by bulky grain, all have an impact to the properity of coating.
At this stage, processes of physical vapor deposition is the particle for obtaining high energy, can only be realized by ion source.But at this stage
Ion source there are probelem in two aspects: first is that the power of ion source is lower, cannot be formed big line ion source (it is conventional from
For component discharge current between 0.1-10A, plasma density is very low), cause deposition rate extremely low；On the other hand at this stage from
Component ionization object is mainly inert gas (Ar), reaction gas (C2H2) based on, it cannot be directly to the metal of deposition or nonmetallic
Atom (Ti, Si) carries out ionization.
DLC film (Diamond-like carbon film) due to many excellent physics, chemically
Can, such as high rigidity, low-friction coefficient, excellent wearability, high dielectric constant, high-breakdown-voltage, broad-band gap, chemical inertness and life
Object compatibility etc..By the development of many years, application of the DLC film in many fields has also entered practical and industrialized production rank
Section.However, in the preparation process of diamond-like coating, there are still more problems.
Existing DLC deposition technique is mainly physical vapour deposition (PVD) (PVD) and chemical vapor deposition (CVD), and PVD is mainly wrapped
Include ion beam depositing (IBD), magnetron sputtering, multi-arc ion coating, pulse laser deposition etc., CVD include hot-wire chemical gas-phase deposition,
Plasma chemical enhancing vapor deposition (PECVD), these types of technology all have some problems: ion beam depositing sputters speed because of graphite
Low two deposition rate of rate is low；Magnetron sputtering deposition one side sputter rate is low, and another aspect nuclear energy is low to lead to short texture
Hardness is low；A large amount of carbon particles can be generated in multi-arc ion coating deposition process；Pulse laser deposits energy consumption height, and coating uniformity is poor,
Effective deposition regions are small；Heated filament gas phase deposition technology depositing temperature is high, significantly limits the range of basis material；Although PECVD
Reaction temperature is effectively reduced, but deposition efficiency is lower in deposition process, carbon atom ionization level is low, and quality of forming film structure is inadequate
It is fine and close.
Existing carbon granules component mainly has gaseous carbon particle source, controlled sputtering source, multi sphere particle plating carbon granules component, laser carbon
Particle source etc., wherein gaseous carbon particle source mainly pass through ion source and other plasma devices to hydrocarbon gas carry out from
Change, controlled sputtering source refers to magnetron sputtering graphite target, provides carbon particle for deposition, multi-arc ion coating carbon granules component is to graphite target
Or metal carbides target surface carries out arc discharge；Wherein gaseous carbon particle source is because needing ionization of gas, and one side ionization level is low, separately
In one side ionization process, carbon particle can be deposited on source, be will affect the stability of discharge process and the continuity of production, needed
Frequent manual cleaning；And controlled sputtering source deposition rate is low, ionization level is low and multi-arc ion coating carbon granules component graphic discharge
Characteristic, the presence of bulky grain all affects the application of multi-arc ion coating carbon granules component in discharge process.
Summary of the invention
The technical problem to be solved by the embodiment of the invention is that provide it is a kind of can high effective deposition and with high ionization level
Surface particle source can be used as clipped wire component, gas ion source, but also as the carbon particle of diamond-like coating functional layer
Source.
To achieve the above object, the technical scheme is that including particle source main body, which includes magnetic
Boots component, insulation sleeve component, target, electrode and water-cooled jacket, the target heat transfer is fixedly connected on the inside of water-cooled jacket, described
Target include the first surface electric discharge target being symmetrically distributed and the second target curved surface electric discharge target, magnetic boots component includes
There are the first magnetic boots component and the second magnetic boots component, the first magnetic boots component and the second magnetic boots component pass through insulation sleeve component respectively and be arranged
On the outside of the water-cooled jacket corresponding to first surface electric discharge target and the second target curved surface electric discharge target, first surface electric discharge target
And second target curved surface electric discharge target both ends between be respectively arranged with the first opening and the second opening, first surface discharges target
With the second target curved surface electric discharge target by multiple groups can the metal substrates watt of surface recombination nonmetallic materials form, the target
Internal cavities constitute gas ionization zone, the first opening of the curved surface target constitutes process gas air inlet, described song
Second opening constituent particle exit portal of face target；First opening of the curved surface target is provided with air inlet pipe, should be into
The air inlet of the internal cavities of corresponding target is set on the side wall of tracheae；The first surface electric discharge target and the second target are bent
Discharge target connection negative voltage in face, can generate glow discharge, be influenced by target shape, hollow cathode discharge occurs for converging electron beam
Effect；The outer end of second opening is provided with two groups of sieves being spaced apart from each other, wherein the sieve close to the second opening is to connect
The anode screen of positive voltage, another group of sieve are the extraction pole sieve for connecing negative voltage.
Further setting is that the radian of second opening is greater than the radian of the first opening.
Further setting is the first magnetic boots component and the second magnetic boots component includes backboard and is fixedly installed on backboard
Multi-disc magnet that is upper and mutually successively arranging, and magnetic opposed between adjacent magnet, the first magnetic boots component and second
Magnetic boots component forms closed magnetic field in the first opening, and particle is inhibited to overflow, and forms divergence form magnetic field in the second opening, helps
It is overflowed in the ionization of particle.
It is one of titanium, chromium, tungsten, copper, aluminium or its alloy that further setting, which is the metal substrate watt of the target,.
The present invention also provides the schemes of second of structure type, that is, provide a kind of center anode curved surface of diamond-like coating
Particle source, including particle source main body, the particle source main body include magnetic boots component, insulation sleeve component, target, electrode and water cooling
Set, the target heat transfer are fixedly connected on the inside of water-cooled jacket, and the target is the curved surface electric discharge target with a side opening
Material, the internal cavities of the curved surface electric discharge target constitute gas ionization zone, the opening constituent particle of curved surface electric discharge target
Exit portal, magnetic boots component is set to curved surface by insulation sleeve component and discharges corresponding to target on the outside of water-cooled jacket,
The gas ionization zone of the inside of the curved surface electric discharge target is provided centrally with the axial direction along curved surface electric discharge target
Direction is arranged and is connected with the center anode air inlet pipe of positive voltage, is provided with multiple air inlets on the side wall of the center anode air inlet pipe
Hole, the two sides of the center anode air inlet pipe are connected with the refrigerant seat for the heat dissipation of center anode air inlet pipe, the curved surface electric discharge
The outer end of the opening of target is provided with the extraction pole sieve for connecing negative voltage.
Further setting is that magnetic boots component includes backboard and is fixedly installed on backboard and mutually successively arranges more
Piece magnet, and magnetic opposed between adjacent magnet is discharged so that constituting closed magnetic field between adjacent magnets close to curved surface
The magnetic identical setting of the magnet of the opening two sides of target forms divergence form magnetic field in opening, and the ionization for facilitating particle is overflow
Out.
It is 30 ° -90 ° that further setting, which is the arc angles of the opening of curved surface electric discharge target,.
The present invention also provides the schemes of structure type in third, that is, provide a kind of double sieve curved surface grains of diamond-like coating
Component, including carbon granules component main body, the carbon granules component main body include magnetic boots component, insulation sleeve component, target, electrode and water cooling
Set, the target heat transfer are fixedly connected on the inside of water-cooled jacket, and the target is the curved surface electric discharge target with a side opening
Material, the internal cavities of the curved surface electric discharge target constitute gas ionization zone, the opening constituent particle of curved surface electric discharge target
Exit portal, magnetic boots component is set to curved surface by insulation sleeve component and discharges corresponding to target on the outside of water-cooled jacket,
The gas ionization zone of the inside of the curved surface electric discharge target is provided centrally with the axial direction along curved surface electric discharge target
Central intake pipe is arranged in direction, and multiple ventholes are provided on the side wall of the central intake pipe, and the two sides of the central intake pipe connect
Be connected to the Water-cooling seat for central intake pipe heat dissipation, the outer end of the opening of the described curved surface electric discharge target be provided with two groups it is mutual
The sieve at interval, wherein the sieve close to opening is the anode screen for connecing positive voltage, another group of sieve is to connect drawing for negative voltage
Pole sieve out.
Further setting is that magnetic boots component includes backboard and is fixedly installed on backboard and mutually successively arranges more
Piece magnet, and magnetic opposed between adjacent magnet is discharged so that constituting closed magnetic field between adjacent magnets close to curved surface
The magnetic identical setting of the magnet of the opening two sides of target forms divergence form magnetic field in opening, and the ionization for facilitating particle is overflow
Out.
Innovation Mechanism of the invention is: curved surface electric discharge target connected by negative voltage by binding post, glow discharge can be generated,
It is influenced by curved surface electric discharge target shape, hollow cathode discharge effect occurs for electronics beam convergence, and anode can be center anode air inlet
Pipe also but anode screen, anode add positive electricity electronics ready to receive, and can accelerated particle output, sieve can add negative electricity, can be used as
The extraction pole of particle, the cooperation of three kinds of electrodes can get a large amount of high energy particles, and electric discharge cathode can be can compound non-gold by multiple groups
The metal substrate splicing for belonging to material is fixed on water-cooled jacket, be can also be and is fixed on water-cooled jacket by the splicing of multiple groups metal substrate, absolutely
Edge set mainly insulate between various components, magnet built in magnetic boots component.The present invention is using in hollow cathode discharge process
Hollow cathode effect provides high energy particle for diamond-like coating.
Compared with prior art, diamond-like coating particle source provided by the invention has following essential distinction and shows
The progress of work property:
1) cathode targets are using metal substrate watt and compound (bonding) the nonmetallic materials tile type splicing of metal substrate watt
The mode being mechanically fixed is fixed on water cooling tube, on the one hand can efficiently cool down target, another aspect metal and metal and nonmetallic
Common sputtering can get high-energy metal particles, nonmetal particle and metal and nonmetal compound particle, answer in effective solution coating
The problem of power.
2) curved cathode designs, and can assemble multiple groups closed magnetic group, efficiently using target and can improve ionization effect.
3) annular design, big line high energy electron convergence, efficiently sputters ionization particle.
4) in equipment deposition process, big beam electrons stream can efficient ionization particle, one side sputtering effect can be in matrix table
Face obtains the coating without bulky grain, and on the other hand high energy ionization carbon particle can reduce graphite-phase in preparing diamond-like coating
In the presence of promoting the quality of diamond-like coating.
5) compared to traditional gas ion source, breakthrough forms metal, nonmetallic high energy particle source.
In short, surface particle source provided by the present invention, utilizes ring discharge electronics beam convergence technology in high vacuum, it can be only
The vertical particle ionization for completing big line, and overflowed from side opening, so as to obtain high energy high deposition rate in matrix surface
High ionization level particle.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention, for those of ordinary skill in the art, without any creative labor, according to
These attached drawings obtain other attached drawings and still fall within scope of the invention.
Fig. 1 is the schematic diagram of the section structure of embodiment one provided by the present invention；
The structural schematic diagram of Fig. 2 target；
Fig. 3 is the structural schematic diagram of water-cooled jacket；
Fig. 4 is the structural schematic diagram of shield assembly and insulation sleeve component；
Fig. 5 is the structural schematic diagram of magnetic boots and support fixation；
Fig. 6 is the schematic diagram of the section structure of embodiment two provided by the present invention；
The structural schematic diagram of Fig. 7 target；
Fig. 8 is the structural schematic diagram of water-cooled jacket；
Fig. 9 is the structural schematic diagram of shield assembly and insulation sleeve component；
Figure 10 is the structural schematic diagram of magnetic boots and support fixation；
Figure 11 is the schematic diagram of the section structure of embodiment three provided by the present invention；
The structural schematic diagram of Figure 12 target；
Figure 13 is the structural schematic diagram of water-cooled jacket；
Figure 14 is the structural schematic diagram of shield assembly and insulation sleeve component；
Figure 15 is the structural schematic diagram of magnetic boots and support fixation；
Figure 16 magnetic simulation schematic diagram.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, the present invention is made into one below in conjunction with attached drawing
Step ground detailed description.
The direction and position term that the present invention is previously mentioned, for example, "upper", "lower", "front", "rear", "left", "right", "inner", "
Outside ", " top ", " bottom ", " side " etc. are only direction or position with reference to attached drawing.Therefore, the direction used and position term
It is rather than the limiting the scope of the invention to illustrate and understand the present invention.
For convenient for drawing, in curved surface discharge tube, water cooling rectangular-ambulatory-plane pipeline is welded on cooling pipe, target is four groups of tiles
Formula is assembled, in practical application, to enable target to be closely bonded water cooling tube, target will tile types more as far as possible it is assembled；Class
Section components are not drawn into (magnet, external water cooling tube, external air inlet pipeline) in diamond coatings discharge tube.Water of the present invention
Cold set and Water-cooling seat preferably use water-cooled jacket or Water-cooling seat using water as cooling medium.
For the description advantages of the present invention and feature of more high-lighting, embodiment used in the present invention is with diamond-like
It is described based on particle source used in stone coating preparation process, it is well known that the present invention can be to different gold
Belong to and nonmetallic carry out high energy ionization, is not merely only limited to clipped wire component in diamond-like coating, nonmetal particle source, gold
Category and nonmetal particle source.
In the following, being illustrated to the specific working mode of workpiece in the present invention.
Embodiment one, bilateral open side anode diamond-like coating carbon particle source
Shown in Figure 1: a kind of bilateral opening curved surface diamond-like coating carbon granules component 10, is side dual openings knot
Structure comprising curved surface electric discharge target 101, water-cooled jacket 102, binding post 103,105, two groups of shield assembly 104, insulation sleeve magnetic boots groups
Part 106, fixation kit 107, multiple groups sieve 108, air inlet pipe 109.Water-cooled jacket 102 is stainless steel pipe surface welding water cooling tube, is connect
Terminal 103 is assemblied on water-cooled jacket 102, and curved surface electric discharge target 101 is by multiple groups metal substrate watt surface recombination (bonding)
Graphite flake, which splices and passes through bolt Mechanical Method, to be fixed on water-cooled jacket 102, and insulation sleeve component 105 includes multiple insulating parts to entire
Charging member and non-electrical component insulate in cathode, and shield assembly 104 is shielded by 2 pairs of cathode target surfaces of shielding group
It covers, multiple groups magnet built in magnetic boots component 106, forms symmetrical closed magnetic field, fixation kit 107 passes through Screw assembly magnetic boots component
106, and can be in assembly air inlet pipe 109 and multiple groups sieve 108, the sustainable fixed entire carbon granules component 10 of fixation kit 107.
Participate in shown in Fig. 2: curved surface electric discharge target 101 is spliced by three groups 1011 watts of metal substrate, metal substrate watt
There is array threaded hole on 1011, can be fixed on by bolt mechanical means on water-cooled jacket 102, nonmetallic materials 1012 pass through target
The form of processing method compound (bonding) a kind of be fixed on metal substrate watt 1011.
Referring to shown in Fig. 3,4,5: 102 steel-pipe welding rectangular-ambulatory-plane cold water road of water-cooled jacket, external electrode 103 are assemblied in water-cooled jacket
On 102, shield assembly 104 includes upper end housing 1041, lower end housing 1042, upper end housing 1041, lower end housing
1042 itself assembly detent, insulation sleeve component 105 include insulation end socket 1051, first surface insulation sleeve 1052, the second curved surface
Insulation sleeve 1053, insulation plug 1054, electrode insulation set (not showing in figure, be sleeved on external electrode), first surface is exhausted
1053 sets of edge cutting ferrule 1052 and the second curved surface insulation sleeve, which are assemblied on water-cooled jacket 102, makes water-cooled jacket 102 and magnetic boots component 106
Between insulate, insulation end socket 1051 be sleeved on 102 upper and lower ends of water-cooled jacket and insulation plug 1054 be set with 102 end face of water-cooled jacket
On make to insulate between water-cooled jacket 102 and shield assembly 104, upper and lower end housing 1041,1042 be sleeved on insulation end socket 1051
On, by magnetic boots and therewith, the backboard of screw threads for fastening forms magnetic boots component 106；Supporting fixation kit 107 includes that cathode is fixed exhausted
Embolium 1071, cathode fixed plate 1072, cathode fixed plate are fastened by bolts on the shield assembly 104 of cathode, and centre is yin
Extremely fixed insulating trip 1071,1072 one end of cathode fixed plate are welded with external air pipe sleeve 1073, can assemble air inlet pipe 109, carry out work
The gas distribution of skill gas, using the effect of air-flow, conducive to the spilling of carbon granules subflow, it is solid that 1072 opposite side of cathode fixed plate is welded with sieve
Fixed set, can assemble fixed end 1081, insulating ceramic film 1082, extraction pole sieve 1083, anode screen 1084.One group of magnetic boots group
Four groups of magnet NSNS are assembled on part 106, another group of magnetic boots component 106 assembles three groups of magnet SNS, can be in low-angle opening
Closed magnetic field is formed, particle is inhibited to overflow, forms divergence form magnetic field in wide-angle opening, the ionization for facilitating particle is overflowed.
Referring to shown in Fig. 1-5: bilateral is open curved surface diamond-like coating carbon granules component 10 under vacuum conditions, passes through wiring
Column 103 connect negative voltage (300v-500v), at high vacuum (0.1-1.0Pa), occur glow discharge, process gas argon gas from
Change, collides 101 surface of target, sputter metallic, carbon particle, in ring pipe discharge process, electronics beam convergence, in magnetic field
Under effect, a large amount of ionization metallics, carbon particle, the metallics of ionization states, carbon particle are by air-flow and extraction pole sieve 1083
Influence, will be overflowed from wide-angle opening, substrate surface apply back bias voltage, under the action of electric field, metal ion, carbon ion
It is deposited on matrix surface, obtains diamond-like coating.
Embodiment two, center anode curved surface diamond-like coating carbon granules component
It is shown in Figure 6: a kind of center anode curved surface diamond-like coating carbon granules component 11, for single side face opening knot
Structure, opening angle be 30 ° -90 ° comprising curved surface discharge target 111, water-cooled jacket 112, binding post 113, shield assembly 114, absolutely
Edge covers 115, magnetic boots component 116, fixation kit 117, sieve 118, air inlet pipe 119, and water-cooled jacket 112 is stainless steel pipe surface welding
Water cooling tube, binding post 113 are assemblied on water-cooled jacket 112, and curved surface electric discharge target 111 is by multiple groups metal substrate watt surface recombination
(bonding) graphite flake splices and passes through bolt Mechanical Method and is fixed on water-cooled jacket 112, and insulation sleeve 115 includes multiple insulating parts
To insulating for charging member in entire cathode and non-electrical component, shield assembly 114 includes three shielding parts to cathode target surface
It is shielded, multiple groups magnet built in magnetic boots component 116, forms closed magnetic field, the fixed entire cathode of fixation kit 117, sieve 118
It is assemblied on fixation kit, as extraction pole, air inlet pipe 119 is the anode air inlet pipe that both ends are equipped with water cooling, is assemblied in fixation
On component.
Participate in shown in Fig. 7: target 111 is spliced by three groups 1111 watts of metal substrate, is had on metal substrate watt 1111
Array threaded hole can be fixed on water-cooled jacket 112, one kind that nonmetallic materials 10112 pass through target by bolt mechanical means
The form of processing method compound (bonding is soldering processes) is fixed on metal substrate watt 1111.
Referring to shown in Fig. 8,9: 112 steel-pipe welding rectangular-ambulatory-plane cold water road of water-cooled jacket, binding post 113 are assemblied in water-cooled jacket 112
On, shield assembly 114 includes upper and lower ends housing 1141, end face housing 1142, and insulation sleeve component 115 includes electrode insulation
Set 1151, insulation end socket 1152, planar insulative cover 1153, curved surface insulating cover 1154, and 1154 sets of curved surface insulating cover are assemblied in water cooling
Make to insulate between water-cooled jacket 112 and magnetic boots 116 on set 112, insulation end socket 1152 is sleeved on 112 upper and lower ends of water-cooled jacket and puts down
Face insulation sleeve 1153, which is set on 112 end face of water-cooled jacket, to be made to insulate between water-cooled jacket 112 and shield assembly 114, upper and lower ends shielding
Set 1141 is sleeved on insulation end socket 1152, and end face housing 1142 is fixed on upper and lower ends housing 1141, magnetic boots component
116 include magnetic receiver 1161 and backboard 1162.Assemble nine groups of magnet NSNSNSNSN on magnetic boots 116, on the one hand two groups of magnet it
Between can form the closure magnetic line of force, two groups of nearest magnet polarities of another aspect opening are identical, form the open type magnetic line of force, help
It is overflowed in the ionization of particle.
Shown in Figure 10: fixation kit 117 (floating potential) is screwed magnetic boots 116 and by air inlet 119
The Water-cooling seat 1191 that is screwed fixes entire cathode, can pass through ceramic gasket 1171 on fixation kit 117 and tabletting 1181 is assembled
Sieve 118 is used as extraction pole.By the insulating trip and fixation kit 117 that are set in air inlet pipe 119, be screwed Water-cooling seat
1191, it can be achieved that the entirely fixation and detent of cathode.
Referring to shown in Fig. 6-10: center anode curved surface diamond-like coating carbon granules component 11 under vacuum conditions, by connecing
Terminal 113 connects negative voltage (300v-500v), and at high vacuum (0.1-1.0Pa), glow discharge, process gas argon gas occurs
Ionization collides 111 surface of target, sputters metallic, carbon particle, in ring pipe discharge process, electronics beam convergence, in magnetic field
Under the action of, a large amount of ionization metallics, carbon particle, the metallics of ionization states, carbon particle acceptor center anode and extraction pole
It influences, will be overflowed from opening, substrate surface applies back bias voltage, and under the action of electric field, metal ion, carbon ion are deposited on base
Body surface face obtains diamond-like coating.
Embodiment three, side anode curved surface diamond-like coating carbon granules component
It is shown in Figure 11: a kind of center anode curved surface diamond-like coating carbon granules component 12, for single side face opening knot
Structure, opening angle be 30 ° -90 ° comprising curved surface discharge target 121, water-cooled jacket 122, binding post 123, shield assembly 124, absolutely
Edge covers 125, magnetic boots component 126, fixation kit 127, two groups of sieves 128, air inlet pipe 129, and water-cooled jacket 122 is stainless steel pipe surface
Water cooling tube is welded, binding post 123 is assemblied on water-cooled jacket 122, and target 121 is by multiple groups metal substrate watt surface recombination
(bonding) graphite flake splices and passes through bolt Mechanical Method and is fixed on water-cooled jacket 122, and insulation sleeve 125 includes multiple insulating parts
To insulating for charging member in entire cathode and non-electrical component, shield assembly 124 includes three shielding parts to cathode target surface
It is shielded, multiple groups magnet built in magnetic boots component 126, forms closed magnetic field, the fixed entire cathode of fixation kit 127, two groups of sieves
Net 128 is assemblied on fixation kit, and one group of sieve 1284 is used as extraction pole, and another group of sieve 1283 is used as anode, air inlet pipe 119
For the air inlet pipe being assemblied on fixation kit 127.
Participate in shown in Figure 12: target 111 is spliced by three groups 1111 watts of metal substrate, is had on metal substrate watt 1111
Array threaded hole can be fixed on water-cooled jacket 112 by bolt mechanical means, and graphite 10112 passes through a kind of processing side of target
The compound form of method is fixed on metal substrate watt 1111.
Referring to shown in Figure 13,14: 122 steel-pipe welding rectangular-ambulatory-plane cold water road of water-cooled jacket, binding post 123 are assemblied in water-cooled jacket
On 122, shield assembly 124 includes upper and lower ends housing 1241, end face housing 1242, and insulation sleeve component 125 includes electrode
Insulation sleeve 1251, insulation end socket 1252, planar insulative cover 1253, curved surface insulating cover 1254, and 1254 sets of curved surface insulating cover are assemblied in
Make to insulate between water-cooled jacket 122 and magnetic boots 126 on water-cooled jacket 122, insulation end socket 1252 is sleeved on 122 upper and lower ends of water-cooled jacket
And make to insulate between water-cooled jacket 122 and shield assembly 124 on 1253 suit 122 end face of water-cooled jacket of planar insulative set, upper and lower ends
Housing 1241 is sleeved on insulation end socket 1252, and end face housing 1242 is fixed on upper and lower ends housing 1241, magnetic boots
126 include magnetic receiver 1261 and backboard 1262.Magnetic boots component 126 assembles nine groups of magnet NSNSNSNSN, on the one hand two groups of magnet
Between can form the closure magnetic line of force, two groups of nearest magnet polarities of another aspect opening are identical, form the open type magnetic line of force, have
The ionization for helping particle is overflowed.
Shown in Figure 15: fixation kit 127 (floating potential) is screwed magnetic boots component 126 and passes through air inlet
129 seat 1291 that is screwed fixes entire cathode, can pass through ceramic gasket 1271 on fixation kit 127 and tabletting 1281 fills
Extraction pole is used as anode, sieve 1284 with sieve 1283.Pass through the insulating trip and fixation kit being set in air inlet 129
127, seat 1291 is screwed, it can be achieved that the entirely fixation and detent of cathode.
Referring to shown in Figure 11-15: side anode curved surface diamond-like coating carbon granules component 11 under vacuum conditions, by connecing
Terminal 113 connects negative voltage (300v-500v), and at high vacuum (0.1-1.0Pa), glow discharge, process gas argon gas occurs
Ionization collides 111 surface of target, sputters metallic, carbon particle, in ring pipe discharge process, electronics beam convergence, in magnetic field
Under the action of, a large amount of ionization metallics, carbon particle, the metallics of ionization states, carbon particle are by side anode and extraction pole
It influences, will be overflowed from opening, substrate surface applies back bias voltage, and under the action of electric field, metal ion, carbon ion are deposited on base
Body surface face obtains diamond-like coating.
Figure 16 is magnetic in the diamond-like coating curved surface carbon granules component of single radial cut applied by embodiment two and embodiment three
Analog case, the magnet that the magnetic boots in carbon granules component are placed is multiple groups (no less than three groups), uses nine groups of magnetic in this simulation
Swage is quasi-, magnet arrangement NSNSNSNSN, forms divergence expression magnetic field in opening, is conducive to the spilling of particle.
The above disclosure is only the preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly
It encloses, therefore equivalent changes made in accordance with the claims of the present invention, is still within the scope of the present invention.
Claims (9)
1. a kind of surface particle source is dual openings surface particle source, including particle source main body, which includes magnetic
Boots component, insulation sleeve component, target, electrode and water-cooled jacket, the target heat transfer are fixedly connected on the inside of water-cooled jacket, special
Sign is: the target include symmetrically be distributed first surface electric discharge target and the second target curved surface electric discharge target,
Magnetic boots component includes the first magnetic boots component and the second magnetic boots component, and the first magnetic boots component and the second magnetic boots component pass through absolutely respectively
Edge set component is set on the outside of water-cooled jacket corresponding to first surface electric discharge target and the second target curved surface electric discharge target, this first
Curved surface, which discharges, is respectively arranged with the first opening and the second opening between target and the both ends of the second target curved surface electric discharge target, and first
Curved surface electric discharge target and the second target curved surface electric discharge target are by multiple groups metal substrate watt or multiple groups metal substrate watt surface recombination
Nonmetallic materials composition, the internal cavities of the target constitute gas ionization zone, and the first opening of the curved surface target is constituted
Process gas air inlet, the second opening constituent particle exit portal of the curved surface target；The of the curved surface target
One opening is provided with air inlet pipe, and the air inlet of the internal cavities of corresponding target is arranged on the side wall of the air inlet pipe；Described
One curved surface electric discharge target and the second target curved surface electric discharge target connect negative voltage, can generate glow discharge, be influenced by target shape,
Hollow cathode discharge effect occurs for converging electron beam；The outer end of second opening is provided with two groups of sieves being spaced apart from each other,
Wherein the sieve close to the second opening is the anode screen for connecing positive voltage, and another group of sieve is the extraction pole sieve for connecing negative voltage.
2. surface particle source according to claim 1, it is characterised in that: the radian of second opening is greater than first
The radian of opening.
3. surface particle source according to claim 1, it is characterised in that: the first magnetic boots component and the second magnetic boots component wrap
The multi-disc magnet for including backboard and being fixedly installed on backboard and mutually successively arranging, and it is magnetic opposite between adjacent magnet
Arrangement, the first magnetic boots component and the second magnetic boots component form closed magnetic field in the first opening, inhibit particle to overflow, second
Opening forms divergence form magnetic field, and the ionization for facilitating particle is overflowed.
4. surface particle source according to claim 1, it is characterised in that: the metal substrate watt of the target be titanium, chromium,
One of tungsten, copper, aluminium or its alloy.
5. a kind of surface particle source is center anode surface particle source, including particle source main body, the particle source main body include
Magnetic boots component, insulation sleeve component, target, electrode and water-cooled jacket, the target heat transfer are fixedly connected on the inside of water-cooled jacket,
Be characterized in that: the target is the curved surface electric discharge target with a side opening, the internal cavities of the curved surface electric discharge target
Gas ionization zone, the exit portal of the opening constituent particle of curved surface electric discharge target are constituted, magnetic boots component passes through insulation sleeve component
It is set on the outside of water-cooled jacket corresponding to curved surface electric discharge target,
The gas ionization zone of the inside of the curved surface electric discharge target is provided centrally with the axial direction along curved surface electric discharge target
It is arranged and is connected with the center anode air inlet pipe of positive voltage, is provided with multiple ventholes on the side wall of the center anode air inlet pipe,
The two sides of the center anode air inlet pipe are connected with the Water-cooling seat for the heat dissipation of center anode air inlet pipe, the curved surface electric discharge target
The outer end of opening be provided with the extraction pole sieve for connecing negative voltage.
6. surface particle source according to claim 5, it is characterised in that: magnetic boots component includes backboard and fixed setting
In on backboard and the mutually multi-disc magnet successively arranged, and magnetic opposed between adjacent magnet so that adjacent magnets it
Between constitute closed magnetic field, the magnetic identical setting of magnet close to the opening two sides of curved surface electric discharge target is formed in opening and is sent out
Type magnetic field is dissipated, the ionization for facilitating particle is overflowed.
7. surface particle source according to claim 5, it is characterised in that: the arc angles of opening of curved surface electric discharge target are
30°-90°。
8. a kind of surface particle source includes for double sieve surface particle sources, including carbon granules component main body, the carbon granules component main body
There are magnetic boots component, insulation sleeve component, target, electrode and water-cooled jacket, the target heat transfer is fixedly connected on the inside of water-cooled jacket,
It is characterized by: the target is the curved surface electric discharge target with a side opening, the inside of the curved surface electric discharge target is empty
Chamber constitutes gas ionization zone, the exit portal of the opening constituent particle of curved surface electric discharge target, and magnetic boots component passes through insulation sleeve group
Part is set on the outside of water-cooled jacket corresponding to curved surface electric discharge target,
The gas ionization zone of the inside of the curved surface electric discharge target is provided centrally with the axial direction along curved surface electric discharge target
Central intake pipe is set, is provided with multiple air inlets on the side wall of the central intake pipe, the two sides of the central intake pipe are connected with
For the Water-cooling seat of central intake pipe heat dissipation, the outer end of the opening of the curved surface electric discharge target is provided with two groups and is spaced apart from each other
Sieve, wherein the sieve close to opening is the anode screen for connecing positive voltage, another group of sieve is the extraction pole for connecing negative voltage
Sieve.
9. surface particle source according to claim 8, it is characterised in that: magnetic boots component includes backboard and fixed setting
In on backboard and the mutually multi-disc magnet successively arranged, and magnetic opposed between adjacent magnet so that adjacent magnets it
Between constitute closed magnetic field, the magnetic identical setting of magnet close to the opening two sides of curved surface electric discharge target is formed in opening and is sent out
Type magnetic field is dissipated, the ionization for facilitating particle is overflowed.
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| CN201820275266.0U CN208308951U (en) | 2018-02-26 | 2018-02-26 | A kind of surface particle source |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820275266.0U CN208308951U (en) | 2018-02-26 | 2018-02-26 | A kind of surface particle source |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108342707A (en) * | 2018-02-26 | 2018-07-31 | 温州职业技术学院 | A kind of surface particle source |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108342707A (en) * | 2018-02-26 | 2018-07-31 | 温州职业技术学院 | A kind of surface particle source |
| CN108342707B (en) * | 2018-02-26 | 2023-10-31 | 温州职业技术学院 | Curved surface particle source |
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