CN208297810U - A kind of dispersion collimator objective - Google Patents
A kind of dispersion collimator objective Download PDFInfo
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- CN208297810U CN208297810U CN201820941588.4U CN201820941588U CN208297810U CN 208297810 U CN208297810 U CN 208297810U CN 201820941588 U CN201820941588 U CN 201820941588U CN 208297810 U CN208297810 U CN 208297810U
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Abstract
The utility model discloses a kind of dispersion collimator objectives, the dispersion collimator objective includes several simple lenses, the light of the luminous point of continuous spectrum light source different wave length after the dispersion collimator objective is emitted with different dispersion angles, by adjusting the position of luminous point, if to be located in design wavelength segment limit, there are the dispersion angles of a wavelength light beam close to zero degree, it is then negative value less than the dispersion angle of the light beam of the wavelength, the dispersion angle greater than the wavelength is positive value.The independent objective system to realize Spectral Confocal dispersion object lens function can be freely combined with current existing commercially available image-forming objective lens or microcobjective or laser processing focusing objective len in the utility model, the measurement function of current measuring system will be extended, and coaxial height tracing will be solved for laser micro-machining system, depth equidimension measures problem after processing, and intelligence and the precise treatment for significantly improving equipment and instrument are horizontal.
Description
Technical field
The utility model relates to a kind of object lens, in particular to a kind of continuous spectrum light source is quasi- by the dispersion of the utility model
Outgoing beam is the dispersion object lens of approximate collimated light beam after straight object lens, belongs to Liar field.The utility model is mainly applied
In non-contact detection field.
Background technique
Early in last century the seventies, scholar Courtney Pratt et al. proposes a kind of micro objective that can be used
The technology of color difference progress surface profile measurement；The scholars such as Molesini camera lens specially designed using one group of color difference later, takes
A stylobate has been built in the surface profiler of Spectral Confocal principle；Boyde.A et al. has been promoted the use of to microscope field
It brings in the confocal microscope technology of revolutionary variation.Hereafter, external many scholars are to the survey based on Spectral Confocal principle
Amount technology has made intensive studies, and derives many application examples in fields of measurement: such as the measurement, micro- of surface profile and pattern
The measurement of nanometer scale fine structure, semi-conductor industry and displacement measurement, optical glass and biofilm in auto manufacturing
Thickness measure, paint and the color measuring of printing industry etc..Currently, developed country is very mature to the grasp of the technology,
The Spectral Confocal Related product for having technical grade in the market occurs, and work frequency response reaches kHz or more.
China starts late the field, and the report of domestic related fields research achievement is also less.Chinese science president
Spring optical precision optical machinery and the Zhu Wanbin of physics Institute et al. devise the dedicated dispersion object lens of optical spectrum encoded sensor, use
The service band of 486nm~656nm has reached certain axial dispersion range.Qiao Yang of Changchun University of Science and Technology et al. is based on light
Spectral encoding principle devises a set of lens thickness measuring system, has reached 23.4mm's using the service band of 600nm~900nm
Measurement range.Ma little Jun of Laser Fusion Research Center, Chinese Academy of Engineering Physics et al., using Spectral Confocal principle to gold
Belong to film and carried out precise measurement, show stability needed for the measuring principle substantially meets inertial confinement fusion parameter measurement and
Non-destructive requirement.
Spectral Confocal displacement sensor is the noncontacting proximity sensor that wide spectrum light source is used based on confocal principle, most high-precision
Degree can arrive Nano grade, can almost measure all material surfaces, due to its non-contact, high-precision feature so application is wide
It is general.Publication No. is that the Chinese utility model patent of 104238077 A of CN discloses a kind of linear dispersion object lens, this objective system
For autonomous system, it is used alone, coaxial measuring system can not be combined into existing focusing objective len in the market.Publication No. is CN
The Chinese utility model patent of 102650515 A discloses a kind of chromatic confocal point sensor light of the measurement range of band extension
Pen, and expansion measurement range later is integrated with the concentrating element of itself, it can not be combined into together with existing focusing objective len in the market
Axis measuring system.Application No. is CN201621253067.7 and application No. is the Chinese utility model patents of 201611031833.X
A kind of dispersion object lens of big axial chromatic aberration based on aspheric surface technology are disclosed, which is focus state, and
Exclusive use can not be combined into coaxial measuring system with existing focusing objective len on the market.
Size detection after precision machinery processing or laser processing is the key that guarantee one step of processing quality.Non-contact
Detection field is based especially on the two-dimensional Precision measurement field of image identifying and processing, is either based on general industry at present
Object lens are still based on doubly telecentric object lens, by being then based on image-forming principle, are only capable of measuring the size perpendicular to optical axial plane,
Depth equidimension along optical axis direction all cannot achieve processing hole, groove depth or boss, pillar height it is coaxial
Line detection.Be 104,238,077 102650515 A of A, CN of CN with publication No., and application No. is CN201621253067.7,
For dispersion object lens disclosed in the Chinese patent of CN201611031833X, these dispersion object lens are all the independent systems of self-contained,
Luminous point is directly focused to a series of focuses scattered along axial direction after dispersion object lens, only can detecte the ruler of optical axis direction
It is very little, it can not be coaxially integrated with presently commercially available general industry object lens or doubly telecentric object lens.
In Laser Micro-Machining field, the coaxial real-time tracking of focal position of the laser after micro- focusing objective len, processing
The synchronous detection of depth afterwards is all difficult point.It is the system of metal for processing object, generallys use capacitance sensor, with processing pair
As a part for capacitor, carry out real-time tracking focusing focal position of laser, but is nonmetallic (such as glass for processing object
Glass, crystal, plastic film etc.) for, due to it is nonmetallic be not conductor, so capacitance sensor can not then work, then can not
It realizes on-axis tracking, is 104,238,077 102650515 A of A, CN of CN according to publication No., and application No. is
Dispersion object lens disclosed in the Chinese patent of CN201621253067.7, CN201611031833X can only tilt installation, Wu Fashi
It now processes optical path and light path is coaxial.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of dispersion collimator objectives, with multimode fibre or single-mode optics
Fine goes out for light end, and continuous spectrum light source outgoing beam after the dispersion collimator objective of the utility model is approximate collimated light
Beam, convenient for integrated with current market sales of infinity microcobjective, laser focusing objective len etc..
The technical solution of the utility model is as follows:
A kind of dispersion collimator objective, the dispersion collimator objective include several simple lenses, and continuous spectrum light source shines
The light of point different wave length after the dispersion collimator objective is emitted with different dispersion angles, by adjusting the position of luminous point
It sets, if making there are the dispersion angles of a wavelength light beam in design wavelength segment limit close to zero degree, is less than the wavelength
Light beam dispersion angle be negative value, greater than the wavelength dispersion angle be positive value.
The service band of the dispersion collimator objective is from short wavelength to long wavelength as a further improvement of the utility model,
In segment limit, lens group meets:
So that:
And:
Wherein: 1~n be since luminous point to light end out single eyeglass sequence number；D is the effective of i-th of simple lens
Light passing diameter；For the focal power of i-th of simple lens；viFor the Abbe number of i-th of simple lens；F is entire dispersion collimator objective
Center wave band focal length；λnFor any wavelength in dispersion collimator objective design work wavelength band, and λn∈[λa, λb], λaFor
Shortwave wavelength in dispersion collimator objective design work wavelength band, λbFor in dispersion collimator objective design work wavelength band
Long wavelength；It is λ for the wavelength in dispersion collimator objective design work wavelength bandnCorresponding dispersion angle.
The dispersion collimator objective and condenser lens or infinity microcobjective as a further improvement of the utility model,
Focusing is improved after combination and focal position is unfolded along Z axis.
The luminous point of the continuous spectrum light source is located at dispersion collimator objective work as a further improvement of the utility model,
Make in wavelength band near the corresponding focal position of any one wavelength.
As a further improvement of the utility model, the simple lens include successively arrange with negative power it is single thoroughly
Mirror L1, the simple lens L2 with positive light coke, the simple lens L3 with negative power, simple lens L4 and tool with positive light coke
There is the simple lens L5 of negative power.
The luminous point of continuous spectrum light source is going out for single mode or multimode fibre as a further improvement of the utility model,
Light end or confocal aperture position.
The beneficial effects of the utility model are as follows:
For luminous point after the dispersion object lens of the utility model, different wave length corresponds to different dispersion angles, and light end is out
Less parallel light, can be integrated same with commercial standard microcobjective, general industry object lens or telecentric objective after light combination mirror
Axial light path system, to realize axis focal point position tracking and the coaxial numerical value measurement (ruler in measurement perpendicular to optical axis direction
Also may be implemented while very little measurement and the depth in light shaft coaxle direction, displacement equidimension measure) purpose.
The utility model can be with current existing commercially available image-forming objective lens or microcobjective or laser processing focusing objective len
The independent objective system to realize Spectral Confocal dispersion object lens function is freely combined, it will extend the measurement function of current measuring system
Can, and coaxial height tracing will be solved for laser micro-machining system, depth equidimension measures problem after processing.It significantly improves
The intelligence of equipment and instrument and precise treatment are horizontal.
Detailed description of the invention
Fig. 1 is the structure principle chart of the utility model dispersion collimator objective.
Fig. 2 is the structure principle chart of conventionally known dispersion object lens.
Fig. 3 is the structural schematic diagram of the utility model embodiment one.
Fig. 4 is that the spectral wavelength of the utility model embodiment one corresponds to focal length variations spirogram.
Fig. 5 is the structural schematic diagram of the utility model embodiment two.
Fig. 6 is the dispersion range figure of the utility model embodiment two.
Fig. 7 is the spherical aberration curve graph of the 450mm wavelength focus of the utility model embodiment two.
Fig. 8 is the spherical aberration curve graph of the 500mm wavelength focus of the utility model embodiment two.
Fig. 9 is the spherical aberration curve graph of the 550mm wavelength focus of the utility model embodiment two.
Figure 10 is the spherical aberration curve graph of the 600mm wavelength focus of the utility model embodiment two.
Figure 11 is the spherical aberration curve graph of the 650mm wavelength focus of the utility model embodiment two.
Marked in the figure: 1- continuous spectrum luminous point；2- dispersion collimator objective；The first optical surface of 201-；The second light of 202-
Learn surface；203- third optical surface；The 4th optical surface of 204-；The 5th optical surface of 205-；The 6th optical surface of 206-；
The 7th optical surface of 207-；The 8th optical surface of 208-；The 9th optical surface of 209-；The tenth optical surface of 210-；3- dispersion object
Mirror；401- long wavelength's light；Wavelength light among 402-；403- short wavelength light；501- short wavelength's focal position；Among 502-
Wavelength focus position；503- long wavelength's focal position.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.
The structural principles of existing dispersion object lens as shown in Fig. 2, continuous spectrum luminous point 1 by the dispersion object lens 3 it
It focuses, can not be applied in combination with commercial standard focusing objective len along optical axis direction afterwards.
The structural principle of the dispersion collimator objective of the utility model is as shown in Figure 1, with multimode fibre or single mode optical fiber
Out for light end, go out light end or the position of confocal aperture of multimode fibre or single mode optical fiber are shining for continuous spectrum light source
Point is located within the scope of dispersion collimator objective service band near the corresponding focal position of any one wavelength, continuous spectrum light source
After the dispersion collimator objective of the utility model, the light beam of different wave length corresponds to different dispersion angle outgoing (including long wave
Long light 401, intermediate wavelength light 402, short wavelength light 403), approximate collimated light.By adjusting the position of luminous point, if making
Be located in design wavelength segment limit that theres are the dispersion angle of one wavelength light beam close to zero degree, then be less than the light beam of the wavelength
Dispersion angle is negative value, and the dispersion angle greater than the wavelength is positive value.Convenient for the micro- object in current market sales of infinity
Mirror, laser focusing objective len etc. are integrated.
For the dispersion collimator objective of the utility model, if design work wavelength band is λa~λb(λa< λb) then for
Any λn(λn∈[λa, λb]) meet
It may make
Guarantee that dispersion collimator objective there are enough dispersion ranges within the scope of service band simultaneously.Usual dispersion collimation goes out
The dispersion angle of irradiating light beam is no more than 52mrad, i.e., the collimated light beam spread angle range in dispersion collimator objective working range meetsFocusing and focal position can be improved after the dispersion collimator objective and ideal focusing lens combination
(including short wavelength's focal position 501, intermediate wavelength focus position 502, long wavelength's focal position 503) is unfolded along Z axis.
Wherein 1~n be microscope group since luminous point to light end out single eyeglass sequence number.
Wherein D is effective light passing diameter of simple lens.
WhereinFor the focal power of i-th of eyeglass.
Wherein viFor the Abbe number of i-th of single eyeglass.
Wherein f is the center wave band focal length of entire dispersion collimator objective.
Wherein λaFor the shortwave wavelength in dispersion collimator objective design work wavelength band.
Wherein λbFor the long wavelength in dispersion collimator objective design work wavelength band.
Wherein λnFor any wavelength in dispersion collimator objective design work wavelength band.
WhereinIt is λ for the wavelength in dispersion collimator objective design work wavelength bandnCorresponding dispersion angle.
Embodiment one
As shown in figure 3, the present embodiment provides a kind of dispersion collimator objectives being made of five lens.Connect in this embodiment
Continuous spectral luminescence point 1 (position for going out light end or confocal aperture of single mode or multimode fibre), is located at 2 work of dispersion collimator objective
Make in wavelength band near the corresponding focal position of any one wavelength.Five lens include the simple lens with negative power
L1, the simple lens L2 with positive light coke, the simple lens L3 with negative power, the simple lens L4 with positive light coke and have
The simple lens L5 of negative power.Wherein, with the simple lens L1 of negative power, there are two optical surface (the first optical surfaces for tool
201 and second optical surface 202), for the first optical surface 201 towards continuous spectrum luminous point 1, the second optical surface 202 is light
The light-emitting surface of beam, the simple lens L1 with negative power are first work eyeglass of incident beam；List with positive light coke
Lens L2, adjacent with the simple lens L1 with negative power, there are two optical surface (third optical surface 203 and for same tool
Four optical surfaces 204), wherein third optical surface 203 is adjacent with the second optical surface 202, the 4th optical surface 204 be with
Among the light-emitting surface of the simple lens L2 of positive light coke, with the simple lens L1 with negative power at intervals, light beam passes through
After crossing the simple lens L1 with negative power, the simple lens L2 with positive light coke is directly reached, then from positive light coke
Simple lens L2 outgoing；Simple lens L3 with negative power, adjacent with the simple lens L2 with positive light coke, there are two same tools
Optical surface (the 5th optical surface 205 and the 6th optical surface 206).Wherein the 5th optical surface 205 and the 4th optical surface
204 is adjacent, and the 6th optical surface 206 is the light-emitting surface of the simple lens L3 with negative power, thoroughly with the list with positive light coke
Among mirror L2 at intervals, for light beam after the simple lens L2 with positive light coke, directly reaching has negative power
Simple lens L3, then from negative power simple lens L3 outgoing；Simple lens L4 with positive light coke, and with negative light focus
The simple lens L3 of degree is adjacent, and there are two optical surface (the 7th optical surface 207 and the 8th optical surfaces 208) for same tool, wherein
7th optical surface 207 is adjacent with the 6th optical surface 206, and the 8th optical surface 208 is the simple lens L4 with positive light coke
Light-emitting surface, among the simple lens L3 with negative power at intervals, light beam pass through with negative power list
After lens L3, the simple lens L4 with positive light coke is directly reached, then be emitted from the simple lens L4 with positive light coke；With negative
The simple lens L5 of focal power, adjacent with the simple lens L4 with positive light coke, there are two optical surface (the 9th optics tables for same tool
Face 209 and the tenth optical surface 210), wherein the 9th optical surface 209 is adjacent with the 8th optical surface 208, the tenth optical surface
210 be the simple lens L5 with negative power light-emitting surface, with the simple lens L4 interphase with positive light coke every it is certain away from
From light beam directly reaches the simple lens L5 with negative power after the simple lens L4 with positive light coke, then negative from having
The simple lens L5 of focal power is emitted.
It should be appreciated that the present embodiment is illustrated with five lens structures, but based on the utility model principle
The dispersion collimator objective of other quantity and arrangement mode equally can be realized the purpose of this utility model, the above-mentioned act of the present embodiment
Example should not become the limitation to scope of protection of the utility model.
Table 1 is the specific design parameter of the present embodiment, wherein the numerical aperture value NA=0.1 of light emitting end surface.
The relevant parameter of 1 dispersion collimator objective embodiment one of table
| Surface number | Radius of curvature | Thickness | Material | Face type |
| 1 | Infinity | 15 | ||
| 2 | -4.20 | 3.35 | H-F4 | Spherical surface |
| 3 | -5.88 | 5.84 | Spherical surface | |
| 4 | 14.46 | 1.22 | H-ZF6 | Spherical surface |
| 5 | -25.94 | 3.83 | Spherical surface | |
| 6 | -7.21 | 0.8 | H-ZLAF55D | Spherical surface |
| 7 | -71.17 | 5.54 | Spherical surface | |
| 8 | 11.47 | 2.3 | H-ZF52 | Spherical surface |
| 9 | 27.31 | 5.49 | Spherical surface | |
| 10 | 4.99 | 1.62 | H-ZF7LA | Spherical surface |
| 11 | 3.99 |
For the present embodiment,
The example is that corresponding spectral line range is 450nm~650nm, and microscope group is in the corresponding focal length of 450nm short-wave band
19.09mm, it is -13.226mrad that short wavelength, which corresponds to the angle of divergence,；Microscope group is 22.57mm in the corresponding focal length of 650nm long-wave band, long
It is+6.9mrad that wave, which corresponds to the angle of divergence, and object lens correspond to shortwave to long wave within entire spectrum 450nm~650nm as seen from Figure 4
The focal length of section is monotonic increase.And the dispersion angle difference of short wavelength and long wavelength are 20.126mrad, in the model of 52mrad
Within enclosing.In Fig. 4, curvilinear abscissa is design work band wavelength；Ordinate is the opposite variation of object lens different wave length focal length
Amount.
The application example of one associated ideal focusing objective len of embodiment
As shown in figure 5, the present embodiment provides a kind of dispersion collimator objectives by embodiment one and the micro- object in the infinity 20x
Microscope group closes the independent objective system to realize Spectral Confocal dispersion object lens function.
By Fig. 6, the dispersion collimator objective of embodiment one produces about near the design focal plane of the infinity 20x microcobjective
The dispersion range of 1.1mm, has accomplished and the combination of existing object lens, realizes the common optical axis function in imaging and z-axis measurement.
The light beam for the different wave length that the dispersion collimator objective known to Fig. 7-11 issues can be focused object lens and improve focusing.
In conclusion the light beam of continuous spectrum goes out after the dispersion collimator objective of the utility model at approximate collimating status
It penetrates.The utility model is mainly used in non-contact detection field, can be used for forming with commercial standard focusing objective len based on spectrum
The Spectral Confocal system of confocal principle or other use Spectral Confocal technology (chromatic Confocal Technology)
Device.The utility model is suitable for displacement, transparent element thickness, hole depth, groove depth, pillar height, boss height, surface three
Tie up the detection of the numerical quantities such as pattern and the focal position tracking in precise laser micro Process field etc..
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (6)
1. a kind of dispersion collimator objective, which is characterized in that the dispersion collimator objective includes several simple lenses, continuous spectrum light
The light of the luminous point in source different wave length after the dispersion collimator objective is emitted with different dispersion angles, by adjusting shining
The position of point is less than if making there are the dispersion angles of a wavelength light beam in design wavelength segment limit close to zero degree
The dispersion angle of the light beam of the wavelength is negative value, and the dispersion angle greater than the wavelength is positive value.
2. dispersion collimator objective according to claim 1, which is characterized in that the service band of the dispersion collimator objective from
In short wavelength to long wavelength's segment limit, lens group meets:
So that:
And:
Wherein: 1~n be since luminous point to light end out single eyeglass sequence number；D is effective light passing of i-th of simple lens
Diameter；For the focal power of i-th of simple lens；viFor the Abbe number of i-th of simple lens；F is in entire dispersion collimator objective
Cardiac wave section focal length；λnFor any wavelength in dispersion collimator objective design work wavelength band, and λn∈[λa, λb], λaFor dispersion
Shortwave wavelength in collimator objective design work wavelength band, λbFor the long wave in dispersion collimator objective design work wavelength band
Wavelength；It is λ for the wavelength in dispersion collimator objective design work wavelength bandnCorresponding dispersion angle.
3. dispersion collimator objective according to claim 1 or 2, which is characterized in that the dispersion collimator objective and focusing are saturating
Focusing is improved after mirror or the combination of infinity microcobjective and focal position is unfolded along Z axis.
4. dispersion collimator objective according to claim 1 or 2, which is characterized in that the luminous point of the continuous spectrum light source
Near the corresponding focal position of any one wavelength within the scope of dispersion collimator objective service band.
5. dispersion collimator objective according to claim 1 or 2, which is characterized in that the simple lens includes successively arranging
Simple lens L1 with negative power, the simple lens L2 with positive light coke, the simple lens L3 with negative power, there is positive light
The simple lens L4 of focal power and simple lens L5 with negative power.
6. dispersion collimator objective according to claim 1 or 2, which is characterized in that the luminous point of continuous spectrum light source is single
Light end or the confocal aperture position out of mould or multimode fibre.
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| CN201820941588.4U CN208297810U (en) | 2018-06-19 | 2018-06-19 | A kind of dispersion collimator objective |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535846A (en) * | 2018-06-19 | 2018-09-14 | 南京引创光电科技有限公司 | A kind of dispersion collimator objective |
| CN114236761A (en) * | 2021-12-20 | 2022-03-25 | 福建福光股份有限公司 | Quasi-linear dispersion objective lens for high-precision surface morphology detection |
-
2018
- 2018-06-19 CN CN201820941588.4U patent/CN208297810U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535846A (en) * | 2018-06-19 | 2018-09-14 | 南京引创光电科技有限公司 | A kind of dispersion collimator objective |
| CN114236761A (en) * | 2021-12-20 | 2022-03-25 | 福建福光股份有限公司 | Quasi-linear dispersion objective lens for high-precision surface morphology detection |
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