CN208284464U - Electrical pumping processing equipment - Google Patents
Electrical pumping processing equipment Download PDFInfo
- Publication number
- CN208284464U CN208284464U CN201820964738.3U CN201820964738U CN208284464U CN 208284464 U CN208284464 U CN 208284464U CN 201820964738 U CN201820964738 U CN 201820964738U CN 208284464 U CN208284464 U CN 208284464U
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- China
- Prior art keywords
- rack
- blow
- cooling chamber
- down panel
- conveying mechanism
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Abstract
The utility model relates to silicon wafer production equipment technologies, more particularly, to a kind of electrical pumping processing equipment, including rack, conveying mechanism, fan, blow-down panel and baffle, the conveying mechanism is arranged in the rack, the driving device for driving the conveying mechanism is provided in the rack, the electric room of note and cooling chamber are disposed with along the conveying mechanism conveying direction in the rack, it is provided between the electric room of the note and the cooling chamber for by the two partition spaced apart from each other, the utility model electrical pumping processing equipment is when in use, wind regime is inputted by blow-down panel one end input terminal, it is exported by the through-hole of the blow-down panel other end, swung is controlled by swing mechanism again, to realize the control to wind direction, wind preferably cools down cell piece, the fan of the cooling chamber other side will have heat Cooling chamber is discharged in air, so that silicon wafer cooling is more uniform, improves cooling efficiency.
Description
Technical field
The utility model relates to silicon wafer production equipment technologies, more particularly, to a kind of electrical pumping processing equipment.
Background technique
Solar energy refers to the infrared radiant energy of the sun, and main performance is exactly the sunray often said, is typically used as sending out in the modern times
Electricity provides the energy for water heater, and solar panel is that solar radiant energy is passed through photoelectric effect by absorbing sunlight
Or photochemical effect is converted directly or indirectly into the device of electric energy, the production of solar battery sheet be unable to do without silicon wafer, is producing
The art production process for needing to grow very much when silicon wafer could complete the processing to silicon wafer, by note point technique silicon wafer is heated to
Hundred degrees Celsius, then cooled down, and existing cooling blow by fan above equipment it is cold, in this way can be to last time silicon wafer
Play cooling effect, and next time is cooling less than reducing working efficiency.
Utility model content
Technical problem to be solved by the utility model is: in order to solve and existing cooling is blown by fan above equipment
It is cold, it can play cooling effect to last time silicon wafer in this way, and next time is cooling less than the problem of reducing working efficiency, now providing
A kind of electrical pumping processing equipment.
The technical scheme adopted by the utility model to solve the technical problem is as follows: a kind of electrical pumping processing equipment, packet
Including rack, conveying mechanism, fan, blow-down panel and baffle, the conveying mechanism are arranged in the rack, are arranged in the rack
There is a driving device for driving the conveying mechanism, is disposed with note along the conveying mechanism conveying direction in the rack
Electric room and cooling chamber are provided with for by the two partition spaced apart from each other, the wind between the electric room of the note and the cooling chamber
Fan is arranged in the side of the cooling chamber, and the blow-down panel is arranged in the other side of the cooling chamber, the blow-down panel and described
Fan is oppositely arranged, and has air duct in the blow-down panel, and the one end in the air duct is input terminal, and the other end in the air duct is defeated
Outlet, the input terminal extend outwardly and are arranged in outside the rack, and the output end is located in the cooling chamber, the blowing
Plate is located on its output end offers several through-holes along the vertical direction, and the through-hole is connected to the air duct, the panel hinge
In the blow-down panel, the swing mechanism for controlling swung is provided in the rack.It is inputted by blow-down panel one end
End input wind regime, is exported, then control swung by swing mechanism by the through-hole of the blow-down panel other end, to realize to wind direction
Control, wind is preferably cooled down to cell piece, the fan of the cooling water other side arranges the air with heat
Cooling chamber out.
In order to realize swung, further, the swing mechanism includes connecting rod and motor, and the baffle is separate
One end of the blow-down panel is rotatably arranged on the connecting rod, and the cooling chamber, the motor are extended in one end of the connecting rod
It is arranged in the rack, the output end of the motor has spacer pin, offers waist-shaped hole, the spacer pin on the connecting rod
It is arranged in the waist-shaped hole.It is rotated by motor output end, drives connecting rod, so that connecting rod drives swung, thus
Realize the wind direction in control blow-down panel output end through-hole.
The beneficial effects of the utility model are: the utility model electrical pumping processing equipment is when in use, pass through blowing
Plate one end input terminal inputs wind regime, is exported by the through-hole of the blow-down panel other end, then control swung by swing mechanism, thus
It realizes the control to wind direction, wind preferably cools down cell piece, the fan of the cooling chamber other side will be with warm
Cooling chamber is discharged in the air of amount, so that silicon wafer cooling is more uniform, improves cooling efficiency, avoids existing cooling and pass through equipment
Top fan blow cold, can play cooling effect to last time silicon wafer in this way, and next time is cooling less than reducing working efficiency
The problem of.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the main view of the utility model；
Left view when Fig. 2 is cooling in the utility model；
In figure: 1, rack, 101, the electric room of note, 102, cooling chamber, 2, conveying mechanism, 3, fan, 4, blow-down panel, 401, wind
Road, 402, through-hole, 5, baffle, 6, partition, 7, connecting rod, 8, motor.
Specific embodiment
Presently in connection with attached drawing, the utility model is described in more detail.These attached drawings are simplified schematic diagram,
Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows composition related with the utility model.
Embodiment
As shown in Figs. 1-2, a kind of electrical pumping processing equipment, including rack 1, conveying mechanism 2, fan 3, blow-down panel 4
With baffle 5, the conveying mechanism 2 is arranged in the rack 1, is provided in the rack 1 for driving the conveying mechanism 2
Driving device, be disposed with the electric room 101 of note and cooling chamber 102 along 2 conveying direction of conveying mechanism in the rack 1,
It is provided between the electric room 101 of the note and the cooling chamber 102 for by the two partition 6 spaced apart from each other, the fan 3 to be set
It sets in the side of the cooling chamber 102, the other side of the cooling chamber 102,4 He of blow-down panel is arranged in the blow-down panel 4
The fan 3 is oppositely arranged, and has air duct 401 in the blow-down panel 4, and the one end in the air duct 401 is input terminal, the air duct
401 other end is output end, and the input terminal extends outwardly and is arranged in outside the rack 1, and the output end is located at described
In cooling chamber 102, the blow-down panel 4 is located on its output end offers several through-holes 402 along the vertical direction, the through-hole 402
It is connected to the air duct 401, the baffle 5 is hinged in the blow-down panel 4, is provided in the rack 1 for controlling baffle 5
The swing mechanism of swing.The top for infusing electric room 101 is provided with top electrode block, and the top for infusing electric room 101 is provided with lower electrode block, on
Electrode block and lower electrode block are oppositely arranged, while being infused and being provided with heating component in electric room 101, and heating component carries out silicon wafer pre-
Heat.
The swing mechanism includes connecting rod 7 and motor 8, and the baffle 5 is rotatably arranged on far from one end of the blow-down panel 4
On the connecting rod 7, the cooling chamber 102 is extended in one end of the connecting rod 7, and the motor 8 is arranged in the rack 1, institute
The output end for stating motor 8 has spacer pin, and waist-shaped hole is offered on the connecting rod 7, and the spacer pin is arranged in the waist-shaped hole
It is interior.The input terminal of blow-down panel 4 is provided with external gas source.
Silicon wafer when using, is fixed by carrying basket first by above-mentioned electrical pumping processing equipment, while slide glass
Basket, which is input to infuse by conveying mechanism 2, carries out heating note electricity in electric room 101, after silicon wafer completion note electricity is enough, open partition 6, then lead to
It crosses conveying mechanism 2 carrying basket is transported in cooling chamber 102, turns off partition 6, open external air source, cooling air passes through defeated
Enter end and enter air duct 401, then the through-hole 402 on output end is reached by air duct 401, while starting motor 8 and fan 3, motor 8 is defeated
The spacer pin of outlet slides in the waist-shaped hole of connecting rod 7, so that connecting rod 7 be driven to be displaced, connecting rod 7 drives baffle 5 to swing, to make
The cooling air for obtaining the control through-hole 402 of baffle 5 is swung, to cool down to the silicon wafer in carrying basket, cooling chamber 102
Cooling chamber 102 will be discharged by fan 3 with heat air in the fan 3 of the other side, until silicon wafer is cooling, pass through cooling chamber
The baffle 5 of 102 sides swings cooling air, so that silicon wafer is cooling, so that silicon wafer cooling is more uniform, improves the cold of silicon wafer
But efficiency, while fan 3 will be taken out of with heat gas, will not make heat build-up, it helps the cooling of silicon wafer.
The above-mentioned desirable embodiment according to the utility model is enlightenment, through the above description, relevant staff
Completely various changes and amendments can be carried out in the range of without departing from this item utility model technical idea.This item is practical
Novel technical scope is not limited to the contents of the specification, it is necessary to determine that its is technical according to scope of the claims
Range.
Claims (2)
1. a kind of electrical pumping processing equipment, it is characterised in that: including rack (1), conveying mechanism (2), fan (3), blowing
Plate (4) and baffle (5), the conveying mechanism (2) are arranged on the rack (1), are provided on the rack (1) for driving
The driving device of the conveying mechanism (2) is disposed with note along the conveying mechanism (2) conveying direction on the rack (1)
Electric room (101) and cooling chamber (102) are provided with for by the two phase between the electric room (101) of the note and the cooling chamber (102)
The partition (6) mutually separated, in the side of the cooling chamber (102), the blow-down panel (4) is arranged in institute for fan (3) setting
The other side of cooling chamber (102) is stated, the blow-down panel (4) and the fan (3) are oppositely arranged, and are had in the blow-down panel (4)
Air duct (401), one end of the air duct (401) are input terminal, and the other end of the air duct (401) is output end, the input
End extends outwardly and the rack (1) is arranged in outside, and the output end is located in the cooling chamber (102), the blow-down panel (4)
It being offered along the vertical direction on its output end several through-holes (402), the through-hole (402) is connected to the air duct (401),
The baffle (5) is hinged on the blow-down panel (4), and the swing for controlling baffle (5) swing is provided on the rack (1)
Mechanism.
2. electrical pumping processing equipment according to claim 1, it is characterised in that: the swing mechanism includes connecting rod
(7) it is rotatably arranged on the connecting rod (7) with motor (8), the baffle (5) far from the one end of the blow-down panel (4), the company
One end of bar (7) is extended the cooling chamber (102), and the motor (8) is arranged on the rack (1), the motor (8)
Output end has spacer pin, and waist-shaped hole is offered on the connecting rod (7), and the spacer pin is arranged in the waist-shaped hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820964738.3U CN208284464U (en) | 2018-06-20 | 2018-06-20 | Electrical pumping processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820964738.3U CN208284464U (en) | 2018-06-20 | 2018-06-20 | Electrical pumping processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208284464U true CN208284464U (en) | 2018-12-25 |
Family
ID=64699294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820964738.3U Active CN208284464U (en) | 2018-06-20 | 2018-06-20 | Electrical pumping processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208284464U (en) |
-
2018
- 2018-06-20 CN CN201820964738.3U patent/CN208284464U/en active Active
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