CN208279312U - A kind of getter hydrogen purification system protective device - Google Patents
A kind of getter hydrogen purification system protective device Download PDFInfo
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- CN208279312U CN208279312U CN201820831668.4U CN201820831668U CN208279312U CN 208279312 U CN208279312 U CN 208279312U CN 201820831668 U CN201820831668 U CN 201820831668U CN 208279312 U CN208279312 U CN 208279312U
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- pipeline
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- diaphragm valve
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Abstract
The utility model discloses a kind of getter hydrogen purification system protective devices, belong to getter hydrogen purification technical field.It includes multiple bottom plates, pipeline is equipped at the top of multiple bottom plates, pipeline is equipped with multiple fixed plates, multiple bottom plates, frame is collectively formed in a plurality of pipeline and multiple fixed plates, the top of one of bottom plate is equipped with purification unit ontology, the top center position of two of them fixed plate is equipped with gas storage unit ontology jointly, the bottom of gas storage unit ontology is connected by pipeline with purification unit ontology, wherein one end of a pipeline is equipped with suspended body flowmeter, the input end of suspended body flowmeter is communicated with air inlet pipe, the outlet end of suspended body flowmeter is connected with pipeline, the inner top of frame is equipped with manual diaphragm valve, the bottom of manual diaphragm valve is communicated with bellows metering valve.Purpose is that the surrounding production environment risk of purification unit ontology reduces, it is ensured that the personal safety of technical staff.
Description
Technical field
The utility model relates to a kind of getter hydrogen purification system protective devices, belong to getter hydrogen purification technology neck
Domain.
Background technique
Getter, also referred to as getter, be for obtaining, maintaining vacuum and purified gases etc., can effectively sorption it is certain
The general designation of the material of gas molecule has the various shapes such as powdery, disk like, band-like, tubulose, ring-type and cup-shaped.Getter can lead to
It crosses physically or chemically effect to be reacted or adsorbed with active gases molecule, to effectively improve the vacuum in device
Degree.Getter is widely used in vacuum electron device, is created good working environment for device, is stabilized the characteristic of device
Parameter, performance and service life to device have important influence: first is that getter can improve vacuum device in the short time
Vacuum degree (up to more than 10 pas) eliminates gas that is remaining and discharging again after the exhaust sealed-off of device and during ageing,
Be conducive to shorten evacuation time；Furthermore getter is able to maintain that certain vacuum degree during the storage and work of device；In addition
Sudden deflation of the device in starting and unusual work is absorbed, the sensing elements such as cathode are effectively protected.Getter is to improve
One of effective means of vacuum degree.
When getter works in an environment of high temperature in the prior art, if be passed through in purification unit hydrogen when, hydrogen
Impurity content in gas is excessively high or has been mixed into other gases, will cause the raising of purification unit internal temperature.Add even if being disconnected
Hot device, still can because of impurity and reacting for material in purification unit and heat release, so that high temperature is generated, to the life around purification unit
It produces environment and generates huge threat, there is serious security risks.
Summary of the invention
Technical problem to be solved by the utility model is to provide a kind of getter hydrogen purification system protective device,
It solves the problems, such as high temperature in purification unit and has an impact safely to surrounding production environment.
Technical problem to be solved in the utility model takes following technical scheme to realize:
A kind of getter hydrogen purification system protective device, including multiple bottom plates are equipped at the top of multiple bottom plates
Pipeline, the pipeline are equipped with multiple fixed plates, and frame is collectively formed in multiple bottom plates, a plurality of pipeline and multiple fixed plates,
The top of one of bottom plate is equipped with purification unit ontology, and the top center position of two of them fixed plate is equipped with gas storage list jointly
The bottom of meta-ontology, the gas storage unit ontology is connected by pipeline with purification unit ontology, wherein one end of a pipeline
Equipped with suspended body flowmeter, the input end of the suspended body flowmeter is communicated with air inlet pipe, the outlet end of the suspended body flowmeter and pipe
Road is connected, and the inner top of the frame is equipped with manual diaphragm valve, and the bottom of the manual diaphragm valve is communicated with bellows metering
Valve, the bottom of the bellows metering valve are communicated with check valve, and the bottom of the check valve side is communicated with pneumatic diaphragm valve, institute
The side of pneumatic diaphragm valve is stated by being connected at the top of pipeline and gas storage unit ontology.
As preferred embodiment, each fixed plate is the porous fixed plate of L shape.
As preferred embodiment, the gas being passed through in air inlet pipe is argon gas.
The beneficial effects of the utility model are: the utility model structure is simple, purification unit ontology is in debugging, first by hand
It moves diaphragm valve to open, argon gas is entered in the pipeline in frame by air inlet pipe, then again by adjusting bellows metering valve and floating
Argon gas is controlled to suitable flow, argon gas is made to enter the inside of gas storage unit ontology by pipeline by subflow meter, when purifying is single
When the temperature is excessively high, the pneumatic diaphragm valve on pipeline can automatically open hydrogen in meta-ontology, make the intrinsic argon gas of gas storage unit
The inside for entering purification unit ontology by pipeline, the argon gas for being passed through purification unit body interior help purification unit intrinsic
Hydrogen cools down, and drops to temperature in safe range.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the utility model part A
Fig. 3 is the structural schematic diagram of the utility model part B.
In figure: bottom plate 1, fixed plate 2, purification unit ontology 3, gas storage unit ontology 4, suspended body flowmeter 5, air inlet pipe 6, gas
Dynamic diaphragm valve 7, manual diaphragm valve 8, bellows metering valve 9, check valve 10.
Specific embodiment
In order to which the technical means, creative features, achievable purpose and effectiveness to the utility model are easy to understand, tie below
Conjunction is specifically illustrating, and the utility model is further described.
As shown in Figure 1-3, a kind of getter hydrogen purification system protective device, including multiple bottom plates 1, multiple bottom plates 1
Top is equipped with pipeline, and pipeline is equipped with multiple fixed plates 2, and multiple bottom plates 1, a plurality of pipeline and multiple fixed plates 2 are collectively formed
The top of frame, one of bottom plate 1 is equipped with purification unit ontology 3, and the top center position of two of them fixed plate 2 is set jointly
There is gas storage unit ontology 4, the bottom of gas storage unit ontology 4 is connected by pipeline with purification unit ontology 3, wherein a pipeline
One end be equipped with suspended body flowmeter 5, the input end of suspended body flowmeter 5 is communicated with air inlet pipe 6, the outlet end of suspended body flowmeter 5 with
Pipeline is connected, and the inner top of frame is equipped with manual diaphragm valve 8, and the bottom of manual diaphragm valve 8 is communicated with bellows metering valve 9,
The bottom of bellows metering valve 9 is communicated with check valve 10, and the bottom of 10 side of check valve is communicated with pneumatic diaphragm valve 7, pneumatically every
The side of film valve 7 is connected by pipeline with the top of gas storage unit ontology 4.
Each fixed plate 2 is the porous fixed plate of L shape, it is therefore an objective to can adjust the position of gas storage unit ontology 4, and can
Using hole of the pipeline on fixed block, purification unit ontology 3 and gas storage unit ontology 4 are fixed on the specific bit in frame
It sets.
The gas being passed through in air inlet pipe 6 is argon gas.
The purification unit ontology 3 and gas storage unit ontology 4 are reactor tank.
Working principle: when in use, purification unit ontology 3 is first opened manual diaphragm valve 8, argon gas passes through in debugging
Air inlet pipe 6 enters in the pipeline in frame, is then again controlled argon gas by adjusting bellows metering valve 8 and suspended body flowmeter 5
To suitable flow, argon gas is made to enter the inside of gas storage unit ontology 4 by pipeline, when the temperature of hydrogen in purification unit ontology 3
When spending high, the pneumatic diaphragm valve 7 on pipeline can be automatically opened, and enter the argon gas in gas storage unit ontology 4 by pipeline pure
The inside for changing cell body 3 is passed through the argon gas inside purification unit ontology 3 and the hydrogen in purification unit ontology 3 is helped to be dropped
Temperature drops to the temperature inside purification unit ontology 3 in safe range, so that the surrounding production environment of purification unit ontology 3 is endangered
Dangerous reduction, it is ensured that the personal safety of technical staff.
The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above.Current row
The technical staff of industry it should be appreciated that the present utility model is not limited to the above embodiments, do not depart from the spirit of the present invention and
Under the premise of range, the utility model also has various changes and improvements, these changes and improvements both fall within claimed
Within the scope of utility model.The protection scope of the present invention is defined by the appended claims and their equivalents.
Claims (3)
1. a kind of getter hydrogen purification system protective device, including multiple bottom plates (1), it is characterised in that: multiple bottom plates
(1) it is equipped with pipeline at the top of, the pipeline is equipped with multiple fixed plates (2), multiple bottom plates (1), a plurality of pipeline and more
Frame is collectively formed in a fixed plate (2), and the top of one of bottom plate (1) is equipped with purification unit ontology (3), and two of them are fixed
The top center position of plate (2) is equipped with gas storage unit ontology (4) jointly, and the bottom of the gas storage unit ontology (4) passes through pipeline
It is connected with purification unit ontology (3), wherein one end of a pipeline is equipped with suspended body flowmeter (5), the suspended body flowmeter (5)
Input end be communicated with air inlet pipe (6), the outlet end of the suspended body flowmeter (5) is connected with pipeline, the interior top of the frame
Portion is equipped with manual diaphragm valve (8), and the bottom of the manual diaphragm valve (8) is communicated with bellows metering valve (9), the bellows meter
The bottom of amount valve (9) is communicated with check valve (10), and the bottom of check valve (10) side is communicated with pneumatic diaphragm valve (7), institute
The side of pneumatic diaphragm valve (7) is stated by being connected at the top of pipeline and gas storage unit ontology (4).
2. a kind of getter hydrogen purification system protective device according to claim 1, it is characterised in that: each fixation
Plate (2) is the porous fixed plate of L shape.
3. a kind of getter hydrogen purification system protective device according to claim 1, it is characterised in that: toward air inlet pipe (6)
The gas being inside passed through is argon gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820831668.4U CN208279312U (en) | 2018-05-31 | 2018-05-31 | A kind of getter hydrogen purification system protective device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820831668.4U CN208279312U (en) | 2018-05-31 | 2018-05-31 | A kind of getter hydrogen purification system protective device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208279312U true CN208279312U (en) | 2018-12-25 |
Family
ID=64706415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820831668.4U Active CN208279312U (en) | 2018-05-31 | 2018-05-31 | A kind of getter hydrogen purification system protective device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208279312U (en) |
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2018
- 2018-05-31 CN CN201820831668.4U patent/CN208279312U/en active Active
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Legal Events
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210721 Address after: 201109 building 17, 1288 Zhongchun Road, Minhang District, Shanghai Patentee after: Shanghai Xianpu Gas Technology Co.,Ltd. Address before: 201108 room 6224, building 6, No. 4299, Jindu Road, Minhang District, Shanghai Patentee before: SIMPURE TECHNOLOGY (SHANGHAI) Co.,Ltd. |