CN208272873U - A kind of driving structure of traveling wave micro motor - Google Patents
A kind of driving structure of traveling wave micro motor Download PDFInfo
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- CN208272873U CN208272873U CN201820505795.5U CN201820505795U CN208272873U CN 208272873 U CN208272873 U CN 208272873U CN 201820505795 U CN201820505795 U CN 201820505795U CN 208272873 U CN208272873 U CN 208272873U
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- traveling wave
- micro motor
- driving structure
- annular
- wave micro
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Abstract
The utility model discloses a kind of driving structure of traveling wave micro motor, and including annular brace frame and the torus being placed in annular brace frame, annular brace frame is connect with torus by several supporting beams；Torus is respectively first electrode layer and matrix from top to bottom, and first electrode layer includes several fan annular electrodes arranged in a ring, has interval between two neighboring fan annular electrode, and the outer diameter for fanning annular electrode is less than the outer diameter of matrix；The side wall of matrix is provided with several grooves, and the opening of groove is located on the middle line of fan annular electrode and the boundary line of two neighboring fan annular electrode, and supporting beam is uniformly distributed in groove.The energy limit that the driving structure of the utility model traveling wave micro motor is vibrated driving structure by supporting beam and annular brace frame is in frame energy, supporting beam is fixed at the pitch circle of traveling wave micro motor, vibrational energy is further avoided to external diffusion, the loss for considerably reducing energy improves the Q value of driving structure.
Description
Technical field
The utility model relates to Piezo-Micromotor technical fields, more particularly to a kind of driving structure of traveling wave micro motor.
Background technique
Traveling wave micro motor is a kind of novel microactrator element, has huge application potential in the field MEMS.At present
Common traveling wave micro motor can be divided into electrostatic micro motor, electromagnetic micromotor, Piezo-Micromotor etc. by driving material category.And
Wherein again with Piezo-Micromotor most application prospect, have benefited from the inverse piezoelectricity matter of piezoelectric material, Piezo-Micromotor can 10V with
Biggish driving capability is realized under interior operating voltage.Piezo-Micromotor common at present uses disc structure, by disk
Different fan annular surface timesharing generate the standing waves of same frequencys, to inspire the traveling wave continuously transmitted in disc surfaces.In recent years
The micro motor based on piezoelectric membrane risen, by preparing piezoelectric film material on plate-like elastic supporting layer, followed by figure
Shape chemical industry skill obtains multiple fan annular electrodes, finally realizes the timesharing vibration of each fan annular surface.
However, the device performance of existing traveling wave micro motor is unable to satisfy the expection of people always, main cause have with
Lower several points: firstly, to improve the output of traveling wave micro motor, needing to make it have lesser rigidity and biggish elasticity modulus, this
Require that driving structure is less, relatively thin with substrate junction, this undoubtedly increases the preparation difficulty of driving structure, can also to drive
Dynamic structure is easily broken off；Secondly, the property of piezoelectric material is always an important factor for restricting the development of traveling wave micro motor, to be limited by pressure
Conductive film performance issue, Piezoelectric Traveling Wave micro motor relatively mostly use piezoelectric ceramics as functional material, this makes the size of device difficult
It is small to do, seriously affect the integrated of micro motor；In addition, needing to evoke on driving structure surface in the traveling wave micro motor course of work
The transmitting of continuous traveling wave, traveling wave means the transmitting of energy, however, it is limited to the structure and working method of traveling wave micro motor,
The vibration that driving structure part generates is easy to spread in the form of wave to surrounding, dissipates eventually by substrate, this makes traveling wave
The power consumption of micro motor is generally larger, and quality factor-Q value is lower.
Utility model content
The purpose of the utility model is to provide a kind of driving structures of traveling wave micro motor, exist to solve the above-mentioned prior art
The problem of, the power consumption of traveling wave micro motor is reduced, the output of traveling wave micro motor is improved.
To achieve the above object, the utility model provides following scheme: the utility model provides a kind of traveling wave micro motor
Driving structure, including annular brace frame and the torus that is placed in the annular brace frame, the annular brace frame and institute
Torus is stated to connect by several supporting beams；The torus is respectively first electrode layer and matrix from top to bottom, and described the
One electrode layer includes several fan annular electrodes arranged in a ring, has interval, institute between the two neighboring fan annular electrode
The outer diameter for stating fan annular electrode is less than the outer diameter of described matrix；The side wall of described matrix is provided with several grooves, the groove
Opening be located at it is described fan annular electrode middle line and it is two neighboring it is described fan annular electrode boundary line on, the support
Beam is uniformly distributed in the groove.
Preferably, annular brace outer frame side is also connected with the substrate of traveling wave micro motor.
Preferably, described matrix is respectively pzt thin film, the second electrode lay and silicon layer from top to bottom.
Preferably, the supporting beam is 6, and the fan annular electrode is 12, and the groove is 24.
Preferably, the supporting beam is of a straight line type or bending type.
Preferably, the annular brace frame is respectively pzt thin film, the second electrode lay and silicon layer from top to bottom.
Preferably, the torus is concordant with the bottom of the annular brace frame.
Preferably, the height of the annular brace frame is equal with the height of described matrix.
Preferably, described supporting beam one end is connected to the opening of the groove, and the other end is connected to the annular brace
On frame.
The driving structure of the utility model traveling wave micro motor achieves following technical effect compared with the existing technology:
The driving structure of the utility model traveling wave micro motor is vibrated driving structure by supporting beam and annular brace frame
Energy limit stops the transmitting and dissipation of vibrational energy in frame energy, and supporting beam is fixed at the pitch circle of traveling wave micro motor, further
Vibrational energy is avoided to external diffusion, considerably reduces the loss of energy, improves the Q value of driving structure；Using supporting beam
With double transition layer structures of annular brace frame, and driving disc is connected with outside substrate, effectively reduces the rigid of non-sensitive part
Degree, be able to bear bigger face outer displacement, thereby also reduce preparation process difficulty, improve device architecture integrality and at
Product rate；It is greater than 1.5 μm of high quality P ZT film using thickness, has had both the advantage that piezoelectricity fan-out capability is strong and thickness is small, not only
It ensure that the performance of driving structure, it is also mutually compatible with filming, micromation, be conducive to the integrated application of traveling wave micro motor；
The driving structure structure of the utility model traveling wave micro motor is simple, fan-out capability is strong, and mechanical flexibility is good, is capable of providing 4.71 μm/V
Big displacement and be not susceptible to be broken；The integrality of the driving structure of the utility model traveling wave micro motor is good, to make yield rate
It is guaranteed, effectively increases preparation efficiency, reduce preparation cost.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without any creative labor, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram of the driving structure of the utility model traveling wave micro motor；
Fig. 2 is the sectional view of the driving structure of the utility model traveling wave micro motor；
Fig. 3 is the working method schematic diagram of the driving structure of the utility model traveling wave micro motor；
Displacement-frequency characteristic of the driving structure of the position Fig. 4 the utility model traveling wave micro motor；
Wherein, 1- fans annular electrode, 2- supporting beam, 3- annular brace frame, 4- groove, 5- torus, 6-PZT film, 7-
The second electrode lay, 8- silicon layer.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The purpose of the utility model is to provide a kind of driving structures of traveling wave micro motor, to solve of the existing technology ask
Topic reduces the power consumption of traveling wave micro motor, improves the output of traveling wave micro motor.
The utility model provides a kind of driving structure of traveling wave micro motor, including annular brace frame and is placed in the annular
Torus in support frame, the annular brace frame are connect with the torus by several supporting beams；The torus by
Top to bottm is respectively first electrode layer and matrix, and the first electrode layer includes several fan annular electrodes arranged in a ring,
There is interval, the outer diameter of the fan annular electrode is less than the outer diameter of described matrix between the two neighboring fan annular electrode；It is described
The side wall of matrix is provided with several grooves, and the opening of the groove is located at the middle line and adjacent two of the fan annular electrode
On the boundary line of a fan annular electrode, the supporting beam is uniformly distributed in the groove.
The driving structure of the utility model traveling wave micro motor is vibrated driving structure by supporting beam and annular brace frame
Energy limit stops the transmitting and dissipation of vibrational energy in frame energy, and supporting beam is fixed at the pitch circle of traveling wave micro motor, further
Vibrational energy is avoided to external diffusion, considerably reduces the loss of energy, improves the Q value of driving structure.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing and have
Body embodiment is described in further detail the utility model.
Fig. 1-2 is please referred to, the driving structure of the present embodiment traveling wave micro motor includes annular brace frame 3 and is placed in annular branch
Torus 5 in support frame 3.
Torus 5 is respectively first electrode layer, pzt thin film 6,7 layers of the second electrode lay and silicon layer 8 from top to bottom；Wherein
One electrode layer is 12 fan annular electrodes 1 arranged in a ring, has interval between two neighboring fan annular electrode 1；Pzt thin film 6,
7 layers of the second electrode lay and silicon layer 8 constitute matrix, and the side wall of matrix is evenly arranged with 24 grooves 4, and each groove 4 penetrates through PZT
Film 6,7 layers of the second electrode lay and silicon layer 8, groove 4 can cut off the caused energy damage when traveling wave is in the vibration of 5 edge of torus
Consumption, and the outer diameter for fanning annular electrode 1 is less than the outer diameter of matrix；The opening of 24 grooves 4 is located at 12 fan annular electrodes 1
Middle line and it is two neighboring fan annular electrode 1 boundary line on.
Annular brace frame 3 from top to bottom be respectively pzt thin film 6,7 layers of the second electrode lay and silicon layer 8, torus 5 and annular
The bottom of support frame 3 is concordant, and the height of annular brace frame 3 and the height of matrix are equal.
Annular brace frame 3 is connect with torus 5 by 6 equally distributed supporting beams 2 in the present embodiment, supporting beam 2
One end is located at 4 opening of groove, and the other end is connected with annular brace frame 3；Supporting beam 2 and annular brace frame 3 constitute double transition zones
Structure, annular brace frame 3 are also connected with the outside substrate of traveling wave micro motor, and energy of the stator, that is, torus 5 in vibration can quilt
Supporting beam 2 and annular brace frame 3 are limited in frame energy, stop the transmitting and dissipation of vibrational energy, and supporting beam 2 is fixed on the micro- horse of traveling wave
The pitch circle reached the i.e. opening of groove 4 can further avoid vibrational energy to external diffusion.
Supporting beam 2 is of a straight line type or bending type.
The driving structure of the present embodiment traveling wave micro motor is successively made first on SOI Substrate with magnetron sputtering method in production
Standby 7 layers of the second electrode lay, pzt thin film 6 and first electrode layer, first electrode layer and 7 layers of the second electrode lay of thickness are received 50
Then rice carries out ion beam etching to first electrode layer between 500 nanometers, realize preparation and the electrode cloth of fan annular electrode 1
Line then carries out wet etching to pzt thin film 6, removes the pzt thin film 6 of Fig. 1 further groove 4 and gap section, then further leads to
Cross deep reaction ion etching method etching SOI Substrate top layer silicon be after obtaining basic traveling wave device architecture by the above means
Raising traveling wave micro motor fan-out capability, needs to carry out structure release technique, i.e., will using deep reaction ion etching method etching method
The silicon and silica of annulus bottom remove.
As shown in figure 3, the specific work process of the driving structure of the present embodiment traveling wave micro motor are as follows: by 12 fan annular electros
It is four groups that pole 1, which is divided, and every group of fan annular electrode is 3, and four groups of fan annular electrodes are staggered, and is driven using the different exchange in four tunnels
Signal simultaneously drives four groups of electrodes, and four road signals are that frequency is identical, amplitude is identical but 90 ° of phase phase difference successively orthogonal
AC signal, frequency is the mechanical eigenfrequency of traveling wave micro motor, in the way of this power-up, each fan annular electrode 1 fan
The PZT material of face driving generates mechanical oscillation because of inverse piezoelectric effect, and it is identical with corresponding driving signal to form frequency, phase
Standing wave goes out continuous transmitting in 5 surface excitation of torus since the standing wave phase of adjacent fan annular region just differs 90 °
Traveling wave, which can provide certain torque, the i.e. driving force of traveling wave micro motor.
The preparation process of the driving structure of the present embodiment traveling wave micro motor is simple, using fully integrated MEMS processing technology；It is soft
Property is preferable, is not susceptible to be broken, therefore obtained device architecture is complete and consistency is preferable, yield rate is higher；The micro- horse of the traveling wave
Up to B13 resonance mode, it is able to observe that traveling wave is propagated in device surface after starting of oscillation.As shown in figure 4, the present embodiment traveling wave is micro-
The intrinsic frequency of the driving structure of motor is 101.6kHz, and there is the larger displacement of 4.71 μm/V to export near the Frequency point,
The system has 220 high q-factor simultaneously, shows that energy dissipation is smaller in the operating condition for the traveling wave micro motor.
In the description of the present invention, it should be noted that the orientation or positional relationship of the instructions such as term "inner", "outside"
To be based on the orientation or positional relationship shown in the drawings, it is merely for convenience of describing the present invention and simplifying the description, without referring to
Show or imply that signified device or element must have and deposit specific orientation, be constructed and operated in a specific orientation, therefore cannot manage
Solution is limitations of the present invention.In addition, term " first ", " mat woven of fine bamboo strips two " are used for description purposes only, and should not be understood as indicating
Or imply relative importance.
Specific case is applied in the utility model to be expounded the principles of the present invention and embodiment, it is above
The explanation of embodiment is merely used to help understand the method and its core concept of the utility model；Meanwhile for the one of this field
As technical staff, based on the idea of the present invention, there will be changes in the specific implementation manner and application range.To sum up
Described, the content of the present specification should not be construed as a limitation of the present invention.
Claims (9)
1. a kind of driving structure of traveling wave micro motor, it is characterised in that: including annular brace frame and be placed in the annular brace
Torus in frame, the annular brace frame are connect with the torus by several supporting beams；The torus is arrived from above
It is respectively down first electrode layer and matrix, the first electrode layer includes several fan annular electrodes arranged in a ring, adjacent
There is interval, the outer diameter of the fan annular electrode is less than the outer diameter of described matrix between two fan annular electrodes；Described matrix
Side wall be provided with several grooves, the opening of the groove be located at the fan annular electrode middle line and two neighboring institute
On the boundary line for stating fan annular electrode, several described supporting beams are uniformly distributed.
2. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: annular brace outer frame side is also
It is connected with the substrate of traveling wave micro motor.
3. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: described matrix is distinguished from top to bottom
For pzt thin film, the second electrode lay and silicon layer.
4. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: the supporting beam is 6, described
Fanning annular electrode is 12, and the groove is 24.
5. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: the supporting beam be of a straight line type or
Bending type.
6. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: the annular brace frame is arrived from above
It is down respectively pzt thin film, the second electrode lay and silicon layer.
7. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: the torus and the annular
The bottom of support frame is concordant.
8. the driving structure of traveling wave micro motor according to claim 7, it is characterised in that: the height of the annular brace frame
It is equal with the height of described matrix.
9. the driving structure of traveling wave micro motor according to claim 1, it is characterised in that: described supporting beam one end is connected to
The opening of the groove, the other end are connected on the annular brace frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820505795.5U CN208272873U (en) | 2018-04-11 | 2018-04-11 | A kind of driving structure of traveling wave micro motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820505795.5U CN208272873U (en) | 2018-04-11 | 2018-04-11 | A kind of driving structure of traveling wave micro motor |
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| CN208272873U true CN208272873U (en) | 2018-12-21 |
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| CN201820505795.5U Expired - Fee Related CN208272873U (en) | 2018-04-11 | 2018-04-11 | A kind of driving structure of traveling wave micro motor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108306548A (en) * | 2018-04-11 | 2018-07-20 | 中国工程物理研究院电子工程研究所 | A kind of driving structure of traveling wave micro motor |
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- 2018-04-11 CN CN201820505795.5U patent/CN208272873U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108306548A (en) * | 2018-04-11 | 2018-07-20 | 中国工程物理研究院电子工程研究所 | A kind of driving structure of traveling wave micro motor |
| CN108306548B (en) * | 2018-04-11 | 2023-07-25 | 中国工程物理研究院电子工程研究所 | Driving structure of traveling wave micromotor |
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Granted publication date: 20181221 Termination date: 20210411 |