CN208271858U - A kind of silicon test positioning device - Google Patents
A kind of silicon test positioning device Download PDFInfo
- Publication number
- CN208271858U CN208271858U CN201820747981.XU CN201820747981U CN208271858U CN 208271858 U CN208271858 U CN 208271858U CN 201820747981 U CN201820747981 U CN 201820747981U CN 208271858 U CN208271858 U CN 208271858U
- Authority
- CN
- China
- Prior art keywords
- sample tray
- sleeve
- lifting column
- probe
- positioning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
The utility model belongs to technical field of electronic components, and in particular to a kind of silicon test positioning device；Its structure includes pedestal, sample tray and probe fixing bracket；Sample tray is fixedly installed above pedestal；Probe fixing bracket is provided on pedestal；Probe fixing bracket is connect by bolt with cross beam support one end；The cross beam support other end is fixedly connected with sleeve；Cavity is equipped in sleeve；Cavity inside is equipped with the lifting column of hollow structure；Lifting column is slided up and down with sleeve and is connect, and lifting column bottom end is fixedly installed probe；Probe is located at right above sample tray central point；Step of threads hole and second level threaded hole are provided on sample tray；Step of threads hole and second level threaded hole are located on two different-diameter sizes and the center of circle circumference identical with sample tray center；It is threadedly coupled in step of threads hole and second level threaded hole with positioning pin；The various sizes of silicon wafer of device can be accurately positioned, improve silicon chip resistivity measuring accuracy.
Description
Technical field
The utility model belongs to technical field of electronic components, and in particular to a kind of silicon test positioning device.
Background technique
Silicon wafer is the important materials for making integrated circuit, by carrying out the means such as photoetching, ion implanting to silicon wafer, can be made
At various semiconductor devices, there is surprising operational capability using chip made of silicon wafer, scientific and technical development constantly pushes
The development of the technologies such as semiconductor, automation and computer, silicon wafer is very widely used, is related to aerospace, industry, agricultural
With the multiple fields such as national defence.The complex manufacturing technology of silicon wafer is higher to its quality requirement, wherein the resistivity of silicon wafer is judgement
One important indicator of conductive wafer performance superiority and inferiority generally passes through to guarantee that the resistivity of silicon wafer can satisfy technical indicator
Silicon chip resistivity tester detects it, but existing resistivity tester cannot carry out various sizes of silicon wafer accurately to determine
Position, causes resistivity measurement precision lower, inconvenient for use.
Utility model content
The goal of the invention of the utility model is to overcome disadvantage of the existing technology, and it is fixed that proposition designs a kind of silicon test
Position device, can be accurately positioned various sizes of silicon wafer, to improve the resistivity measurement precision of silicon wafer.
The utility model relates to silicon test positioning device, main structure includes that pedestal, sample tray and probe are solid
Determine frame；Sample tray is fixedly installed above the pedestal；Side on pedestal positioned at sample tray is fixedly installed probe
Fixed frame；Probe fixing bracket is connect by bolt with cross beam support one end；The cross beam support other end is fixedly connected with sleeve；Sleeve
It is interior to be equipped with cavity；Cavity inside is equipped with the lifting column of hollow structure；The overall diameter of lifting column and the diameter of cavity are identical, lifting column
It slides up and down and connect with sleeve, lifting column bottom end is fixedly installed probe；Probe is located at right above sample tray central point；Sample
Step of threads hole and second level threaded hole are provided on pallet；Step of threads hole and second level threaded hole are located at two different-diameters
On size and the center of circle circumference identical with sample tray center；Connect in step of threads hole and second level threaded hole with positioning pin screw thread
It connects.
Further, the step of threads hole is set as three, is evenly distributed in semi-circumference；In use, by three
Positioning pin is threaded in respectively in three step of threads holes, and three step of threads holes are evenly distributed in semi-circumference and are conducive to silicon
The positioning of piece improves the measuring accuracy of silicon chip resistivity to prevent silicon wafer from horizontally slipping.
Further, the second level threaded hole is set as three, is evenly distributed in semi-circumference；In use, by three
Positioning pin is threaded in respectively in three second level threaded holes, and three second level threaded holes are evenly distributed in semi-circumference and are conducive to silicon
The positioning of piece improves the measuring accuracy of silicon chip resistivity to prevent silicon wafer from horizontally slipping.
Further, it is threaded with rubber tabletting on the positioning pin, for further fixing silicon wafer, prevents silicon wafer
Mobile, rubber material can prevent from causing to squeeze to silicon chip surface or damaging, and threaded connection can prevent rubber tabletting from positioning
Any sliding on pin, with preferably fixed silicon wafer.
Further, the probe is by conducting wire and external industry control mechatronics, and the conducting wire is from the hollow of lifting column
Structure passes through, and industrial personal computer is used for the resistivity of test silicon wafer.
Further, rolling tooth is provided on the lifting column；The sleeve is provided with cross beam support junction
Opening, the sleeve and the ipsilateral position that is open are provided with the sliding slot slided up and down for rolling tooth；Cross beam support is close to sleeve
One end be provided with I-shaped regulation handle, the center of regulation handle is provided with and rolls tooth and matches the gear used；When use
By opening so that rolling tooth and gear intermeshing, by rotating regulation handle, upper downslide of the lifting column in sleeve is realized
It is dynamic.
The utility model compared with prior art, has the advantage that the threaded connection of multistage threaded hole and positioning pin, real
The accurate positioning to different size silicon wafers is showed, has improved the measuring accuracy of silicon chip resistivity, being connected through a screw thread can prevent
Positioning pin shakes in threaded hole；Rubber tabletting is threadedly coupled with positioning pin, can not only fix silicon wafer, and can be prevented pair
Silicon chip surface causes to damage；Its overall construction design is reasonable, and structure is simple, easily operated, has a wide range of application.
Detailed description of the invention
Fig. 1 is the overall structure schematic illustration of the utility model；
Fig. 2 is the tube-in-tube structure enlarged drawing of the utility model；
Fig. 3 is the lifting column schematic enlarged-scale view of the utility model；
Fig. 4 is the regulation handle schematic enlarged-scale view of the utility model；
Fig. 5 is the portion the A enlarged drawing of the utility model；
Wherein, 1 pedestal, 2 sample trays, 3 probe fixing brackets, 4 bolts, 5 cross beam supports, 6 sleeves, 7 cavitys, 8 lifting columns,
9 probes, 10 step of threads holes, 11 second level threaded holes, 12 positioning pins, 13 rubber tablettings, 14 conducting wires, 15 roll tooth, 16 openings, 17
Sliding slot, 18 handles, 19 gears.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.Therefore, below to attached
The detailed description of the embodiments of the present invention provided in figure is not intended to limit the range of claimed invention,
But it is merely representative of the selected embodiment of the utility model.Based on the embodiments of the present invention, ordinary skill people
Member's every other embodiment obtained without making creative work, belongs to the model of the utility model protection
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
Below by specific embodiment and in conjunction with attached drawing, the utility model is described in further detail.
Embodiment:
Silicon test positioning device described in the present embodiment, main structure include that pedestal 1, sample tray 2 and probe are solid
Determine frame 3；Sample tray 2 is fixedly installed above the pedestal 1；Side on pedestal 1 positioned at sample tray 2 is fixedly installed
Probe fixing bracket 3；Probe fixing bracket 3 is connect by bolt 4 with 5 one end of cross beam support；5 other end of cross beam support and sleeve 6 are solid
Fixed connection；Cavity 7 is equipped in sleeve 6；The lifting column 8 of hollow structure is equipped with inside cavity 7；The overall diameter and cavity 7 of lifting column 8
Diameter it is identical, lifting column 8 is slided up and down with sleeve 6 and is connect, and 8 bottom end of lifting column is fixedly installed probe 9；Probe 9 is located at sample
Right above 2 central point of product pallet；Step of threads hole 10 and second level threaded hole 11 are provided on sample tray 2；Step of threads hole 10
It is located on two different-diameter sizes and the center of circle circumference identical with 2 center of sample tray with second level threaded hole 11；Level-one
It is threadedly coupled in threaded hole 10 and second level threaded hole 11 with positioning pin 12.
Step of threads hole 10 described in the present embodiment is set as three, is evenly distributed in semi-circumference；In use, by three
Positioning pin 12 is threaded in respectively in three step of threads holes 10, and three step of threads holes 10, which are evenly distributed in semi-circumference, to be had
Conducive to the positioning of silicon wafer, to prevent silicon wafer from horizontally slipping, the measuring accuracy of silicon chip resistivity is improved.
Second level threaded hole 11 described in the present embodiment is set as three, is evenly distributed in semi-circumference；In use, by three
Positioning pin 12 is threaded in respectively in three second level threaded holes 11, and three second level threaded holes 11, which are evenly distributed in semi-circumference, to be had
Conducive to the positioning of silicon wafer, to prevent silicon wafer from horizontally slipping, the measuring accuracy of silicon chip resistivity is improved.
It is threaded with rubber tabletting 13 on positioning pin 12 described in the present embodiment, for further fixing silicon wafer, prevents
Silicon wafer is mobile, and rubber material can prevent from causing to squeeze to silicon chip surface or damaging, and threaded connection can prevent rubber tabletting 13
It is arbitrarily slided on positioning pin 12, with preferably fixed silicon wafer.
Probe 9 described in the present embodiment is by conducting wire 14 and external industry control mechatronics, and the conducting wire 14 is from lifting column 7
Hollow structure passes through, and industrial personal computer is used for the resistivity of test silicon wafer.
It is provided on lifting column 8 described in the present embodiment and rolls tooth 15；The sleeve 6 is set with 5 junction of cross beam support
It is equipped with opening 16, the sleeve 6 is provided with the sliding slot 17 slided up and down for rolling tooth 15 with 16 ipsilateral positions of opening；Crossbeam
Support 5 is provided with I-shaped regulation handle 18 close to one end of sleeve 6, and the center of regulation handle 18 is provided with and rolls 15, tooth
With the gear 19 used；To roll tooth 15 by opening 15 when using and gear 19 is intermeshed, by rotating regulation handle
18, realize the sliding up and down in sleeve 6 of lifting column 8.
When the present embodiment is in use, according to the size of die size, by 11 interpolation of step of threads hole 10 or second level threaded hole
Enter positioning pin 12, for example, when carrying out resistivity measurement to the silicon wafer having a size of three inches, by three positioning pins 12 respectively with three
A step of threads hole 10 is threadedly coupled, and then silicon wafer is placed on the sample tray 2 between three positioning pins 12, makes silicon wafer
Edge is contacted with three positioning pins 12, is positioned to silicon wafer, by rotation rubber tabletting 13, drops to rubber tabletting 13
Silicon wafer upper surface is contacted, silicon wafer is fixed, at this point, the central point of silicon wafer is on same vertical line with probe 9 just, so
Afterwards by rotation regulation handle 7, make the decline of lifting column 8 until 9 contact silicon wafer of probe, passes through probe 9 and industrial personal computer test silicon wafer
Resistivity；When to having a size of four inches silicon wafer carry out resistivity measurement when, by three positioning pins 12 respectively with three second levels
Threaded hole 11 is threadedly coupled, other operating procedures are identical as above-mentioned steps；Silicon test positioning device energy described in the present embodiment
It is enough that multistage threaded hole is set, it is not limited only to test the silicon wafer of three inches and four inches, additionally it is possible to be suitable for other sizes
Silicon wafer, be widely used.
Above-mentioned specific embodiment is only the specific case of the utility model, and the scope of patent protection of the utility model includes
But it is not limited to the product form and style of above-mentioned specific embodiment, it is any to meet the utility model claims book and any institute
Belong to the appropriate changes or modifications that the those of ordinary skill of technical field does it, should all fall into the patent protection of the utility model
Range.
Claims (6)
1. a kind of silicon test positioning device, main structure includes pedestal (1), sample tray (2) and probe fixing bracket (3)；
It is characterized by: being fixedly installed sample tray (2) above the pedestal (1)；Positioned at sample tray (2) on pedestal (1)
Side is fixedly installed probe fixing bracket (3)；Probe fixing bracket (3) is connect by bolt (4) with cross beam support (5) one end；It is horizontal
Beam support (5) other end is fixedly connected with sleeve (6)；Cavity (7) are equipped in sleeve (6)；Hollow structure is equipped with inside cavity (7)
Lifting column (8)；The overall diameter of lifting column (8) is identical as the diameter of cavity (7), lifting column (8) and sleeve (6) company of sliding up and down
It connects, lifting column (8) bottom end is fixedly installed probe (9)；Probe (9) is located at right above sample tray (2) central point；Sample tray
(2) step of threads hole (10) and second level threaded hole (11) are provided on；Step of threads hole (10) and second level threaded hole (11) are respectively
On two different-diameter sizes and the center of circle circumference identical with sample tray (2) center；Step of threads hole (10) and second level
It is threadedly coupled in threaded hole (11) with positioning pin (12).
2. silicon test positioning device according to claim 1, it is characterised in that: step of threads hole (10) setting
It is three, is evenly distributed in semi-circumference.
3. silicon test positioning device according to claim 1, it is characterised in that: second level threaded hole (11) setting
It is three, is evenly distributed in semi-circumference.
4. silicon test positioning device according to claim 1, it is characterised in that: screw thread connects on the positioning pin (12)
It is connected to rubber tabletting (13).
5. silicon test positioning device according to claim 1, it is characterised in that: the probe (9) passes through conducting wire
(14) it is passed through with external industry control mechatronics, the conducting wire (14) from the hollow structure of lifting column 7.
6. silicon test positioning device according to claim 1, it is characterised in that: be provided on the lifting column (8)
It rolls tooth (15)；The sleeve (6) and cross beam support (5) junction is provided with opening (16), the sleeve (6) and opening
(16) ipsilateral position is provided with the sliding slot (17) slided up and down for rolling tooth (15)；Cross beam support (5) is close to sleeve (6)
One end is provided with I-shaped regulation handle (18), and the center of regulation handle (18), which is provided with, matches the tooth used with rolling tooth (15)
It takes turns (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820747981.XU CN208271858U (en) | 2018-05-19 | 2018-05-19 | A kind of silicon test positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820747981.XU CN208271858U (en) | 2018-05-19 | 2018-05-19 | A kind of silicon test positioning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208271858U true CN208271858U (en) | 2018-12-21 |
Family
ID=64685289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820747981.XU Expired - Fee Related CN208271858U (en) | 2018-05-19 | 2018-05-19 | A kind of silicon test positioning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208271858U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111735928A (en) * | 2019-03-24 | 2020-10-02 | 尹翠哲 | Automatic lifting device for testing minority carrier lifetime of end face of polycrystal, monocrystal or cast monocrystal small square ingot |
-
2018
- 2018-05-19 CN CN201820747981.XU patent/CN208271858U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111735928A (en) * | 2019-03-24 | 2020-10-02 | 尹翠哲 | Automatic lifting device for testing minority carrier lifetime of end face of polycrystal, monocrystal or cast monocrystal small square ingot |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181221 Termination date: 20200519 |