CN208266302U - Guide shell and heat-preservation cylinder - Google Patents
Guide shell and heat-preservation cylinder Download PDFInfo
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- CN208266302U CN208266302U CN201820780984.3U CN201820780984U CN208266302U CN 208266302 U CN208266302 U CN 208266302U CN 201820780984 U CN201820780984 U CN 201820780984U CN 208266302 U CN208266302 U CN 208266302U
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Abstract
The utility model discloses a kind of guide shell and heat-preservation cylinders, are related to single crystal growing furnace field, have reached the extension guide shell service life, reduce the pollution of silicon rod carbon, improve product quality and qualification rate, reduce the purpose of production cost.The main technical schemes of the utility model are as follows: a kind of guide shell, comprising: outer gallbladder and liner；The outer gallbladder is annulated column, has opposite first end and second end, and the first end is bent to far from its axis direction, forms interconnecting piece, and the interconnecting piece forms chuck to close to its axis direction for connecting single crystal growing furnace heat-preservation cylinder, the second end；The liner is central column, and one end is connected in the chuck, and one end is overlapped in the first end；Nearly second end cross-sectional area of the liner is less than nearly first end cross-sectional area of the liner；The outer gallbladder is made of graphite material, and the liner is made using quartz material.
Description
Technical field
The utility model relates to single crystal growing furnace field more particularly to a kind of guide shells and heat-preservation cylinder.
Background technique
In the prior art, it in thermal field of single crystal furnace, needs to carry out water conservancy diversion to argon gas using guide shell, while also to prevent heat
Amount is scattered and disappeared.But since the operating temperature of single crystal growing furnace is up to 1400 DEG C, most of materials are all unable to reach due effect, therefore logical
Graphite material is often used to make guide shell.But the material is soft for graphite material, and the collision during gas flowing and crystal pulling all can
So that guide shell is collided with impaired, the service life of guide shell is greatly reduced, while broken graphite can be fallen into
In the silicon of fusing, so that silicon rod production is polluted by carbon, the quality for causing silicon rod to produce is reduced, while making quality unstable,
And the too low silicon rod of quality also needs to remake, so that production cost rises.
Utility model content
In view of this, the utility model embodiment provides a kind of guide shell and heat-preservation cylinder, main purpose is to extend guide shell
Service life reduces the pollution of silicon rod carbon, product quality and qualification rate is improved, to reduce production cost.
In order to achieve the above objectives, the utility model mainly provides the following technical solutions:
On the one hand, the utility model embodiment provides a kind of guide shell, comprising:
Outer gallbladder and liner；
The outer gallbladder is annulated column, has opposite first end and second end, and the first end is curved to its separate axis direction
Folding, forms interconnecting piece, and the interconnecting piece forms card to close to its axis direction for connecting single crystal growing furnace heat-preservation cylinder, the second end
Platform；The liner is central column, and one end is connected in the chuck, and one end is overlapped in the first end；The liner nearly described the
Two end cross-sectional areas are less than nearly first end cross-sectional area of the liner；The outer gallbladder is made of graphite material, and the liner uses
Quartz material is made.
Further, the chuck has supporting surface, and the supporting surface is contacted with the liner；The supporting surface has phase
Pair third end and the 4th end, the third end is relative to the 4th end closer to the outer gallbladder axis；4th end
Setting height is lower than the third end.
Further, there is cavity, for keeping the temperature between the outer gallbladder and the liner.
Further, filler is equipped in the cavity, the filler is for keeping the temperature；The filler is quartz sand.
It further, further include gland, the gland is removably connected to the first end and the liner, for fixing
The liner.
It further, further include insulating ring, the insulating ring is arranged between the gland and the tyre gallbladder.
On the other hand, the utility model embodiment also provides a kind of heat-preservation cylinder, comprising: cylinder and water conservancy diversion as described above
Cylinder；The interconnecting piece is removably connected to the cylinder top, and the guide shell is connected to inside and outside the cylinder.
Further, the cylinder has interlayer, and the interlayer is for keeping the temperature.
Further, the cylinder inboard wall is equipped with reflecting layer, for reflecting heat.
The utility model embodiment that the utility model embodiment proposes provides a kind of guide shell, comprising: outer gallbladder and interior
Gallbladder；Outer gallbladder is annulated column, has opposite first end and second end, and first end is bent to far from its axis direction, forms interconnecting piece,
Interconnecting piece forms chuck to close to its axis direction for connecting single crystal growing furnace heat-preservation cylinder, second end；Liner is central column, one end card
It is connected to chuck, one end is overlapped in first end；Nearly second end cross-sectional area of liner is less than nearly first end cross-sectional area of liner；Outer gallbladder is by graphite
Material is made, and liner is made using quartz material.In the prior art, it in thermal field of single crystal furnace, needs using guide shell to argon gas
Water conservancy diversion is carried out, while also to prevent heat loss.But since the operating temperature of single crystal growing furnace is up to 1400 DEG C, most of materials all without
Method reaches due effect, therefore makes guide shell usually using graphite material.But graphite material material hardness is low, gas stream
It is impaired that collision during dynamic and crystal pulling can all make guide shell be collided with, and drops the service life of guide shell substantially
It is low, while broken graphite can be fallen into the silicon of fusing, so that silicon rod production is polluted by carbon, the quality drop for causing silicon rod to produce
It is low, while making quality unstable, and the too low silicon rod of quality also needs to remake, so that production cost rises.The utility model
Using outer gallbladder and and inner-tube structure, liner use quartz material, can not only prevent outer gallbladder influenced by air-flow and stretching process and
It is impaired, while the wearability of quartzy liner is much higher than the outer gallbladder of graphite, so that its service life improves, additionally it is possible to carbon pollution is reduced,
So that the qualification rate of silicon rod production improves, and then reduce production cost.And the structure of quartzy liner also improves heat insulation effect, makes
It obtains the energy needed for equipment is run to reduce, to reduce operating cost.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of guide shell provided by the embodiment of the utility model；
Fig. 2 is enlarged drawing at A provided by the embodiment of the utility model.
Specific embodiment
Further to illustrate that the utility model is the technical means and efficacy for reaching predetermined purpose of utility model and being taken,
Below in conjunction with attached drawing and preferred embodiment, to according to the utility model proposes guide shell and heat-preservation cylinder specific embodiment, knot
Structure, feature and its effect, detailed description is as follows.
As shown in Figure 1, a kind of guide shell, comprising:
Outer gallbladder 1 and liner 2；
Above-mentioned outer gallbladder 1 is annulated column, and with opposite first end 11 and second end 12, above-mentioned first end 11 is to far from its axle center
Direction bending forms interconnecting piece 13, and above-mentioned interconnecting piece 13 is for connecting single crystal growing furnace heat-preservation cylinder, and above-mentioned second end 12 is to close to its axis
Heart direction forms chuck 14；Above-mentioned liner 2 is central column, and one end is connected in above-mentioned chuck 14, and one end is overlapped in above-mentioned first end
11；Nearly above-mentioned 12 sectional area of second end of above-mentioned liner 2 is less than nearly above-mentioned 11 sectional area of first end of above-mentioned liner 2；Above-mentioned outer gallbladder 1 by
Graphite material is made, and above-mentioned liner 2 is made using quartz material.Since the difficulty of processing of quartz material is big, in order to reduce
Its manufacturing cost need to rotate in the case where quartz material high temperature melting, by centrifugal force and mold plastic, and cooling solidification,
Therefore quartz material can not manufacture more complicated structure.And the easy plasticity of graphite material, therefore more complicated structure still makes
It is made, is used as above-mentioned outer gallbladder 1, and connect use in a manner of above-mentioned chuck 14 of graphite material.This is but also above-mentioned lead
The cost of manufacture of flow cartridge reduces 40%-50%, so that production cost reduces.And after using above-mentioned liner 2, it is effectively reduced above-mentioned
The contact of outer gallbladder 1 and air-flow and silicon rod is reduced and is polluted to the carbon of silicon rod, is detected crystal bar phosphorus content and reduces 0.5-1ppm, together
Shi Tigao heat insulation effect.And use the mode of above-mentioned chuck 14 that above-mentioned outer gallbladder 1 and listing liner 2 is also made to be easier to be safeguarded.
And the production of above-mentioned liner 2 easily reaches higher surface smoothness, not only can be reduced the friction with silicon rod, goes back easy to clean.On
Chuck 14 is stated either being integral type with above-mentioned outer gallbladder 1, be also possible to it is detachable, with specific reference to manufacture difficulty, using disappearing
The consideration of the combined factors such as consumption is selected.
The guide shell in the present embodiment is illustrated below by way of the working process and principle of guide shell in the present embodiment:
Above-mentioned liner 2 is put into above-mentioned outer gallbladder 1, and is connected in above-mentioned chuck 14, so that above-mentioned outer gallbladder 1 and above-mentioned liner
2 is fixed；Air-flow enters above-mentioned liner 2 with above-mentioned first end 11, and flows out from above-mentioned second end 12；Silicon rod production has above-mentioned second
End 12 enters above-mentioned liner 2, and pulls out from above-mentioned first end 11.
The utility model embodiment that the utility model embodiment proposes provides a kind of guide shell, comprising: outer gallbladder 1 and interior
Gallbladder 2；Outer gallbladder 1 is annulated column, and with opposite first end 11 and second end 12, first end 11 is bent to far from its axis direction, shape
At interconnecting piece 13, interconnecting piece 13 forms chuck 14 to close to its axis direction for connecting single crystal growing furnace heat-preservation cylinder, second end 12；It is interior
Gallbladder 2 is central column, and one end is connected in chuck 14, and one end is overlapped in first end 11；Nearly 12 sectional area of second end of liner 2 is less than liner
2 nearly 11 sectional areas of first end；Outer gallbladder 1 is made of graphite material, and liner 2 is made using quartz material.In the prior art, monocrystalline
In furnace thermal field, need to carry out water conservancy diversion to argon gas using guide shell, while also to prevent heat loss.But due to the work of single crystal growing furnace
Temperature is up to 1400 DEG C, and most of materials are all unable to reach due effect, therefore make water conservancy diversion usually using graphite material
Cylinder.But graphite material material hardness is low, and it is impaired that the collision during gas flowing and crystal pulling can all make guide shell be collided with,
The service life of guide shell is greatly reduced, while broken graphite can be fallen into the silicon of fusing, so that silicon rod produces
It being polluted by carbon, the quality for causing silicon rod to produce reduces, while making quality unstable, and the too low silicon rod of quality also needs weight
System, so that production cost rises.The utility model using outer gallbladder 1 and with 2 structure of liner, liner 2 use quartz material, can not only
Prevent outer gallbladder 1 from being influenced and being damaged by air-flow and stretching process, while the wearability of quartzy liner 2 makes much higher than the outer gallbladder 1 of graphite
It obtains its service life to improve, additionally it is possible to carbon pollution is reduced, so that the qualification rate of silicon rod production improves, and then reduction production cost.
And the structure of quartzy liner 2 also improves heat insulation effect, so that the energy needed for equipment is run is reduced, to reduce operating cost.
The utility model is described in further detail with reference to the accompanying drawings and examples.
As shown in Fig. 2, carbon pollutes in order to prevent, specifically, above-mentioned chuck 14 has a supporting surface 15, above-mentioned supporting surface 15 with
Above-mentioned liner 2 contacts；Above-mentioned supporting surface 15 has opposite third end 16 and the 4th end 17, and above-mentioned third end 16 is relative to above-mentioned
4th end 17 is closer to above-mentioned outer 1 axis of gallbladder；Above-mentioned 4th end 17 setting height is lower than above-mentioned third end 16.Due to above-mentioned interior
Gallbladder 2 is directly contacted with above-mentioned supporting surface 15, and crystal bar can rotate rising during the growth process, this makes above-mentioned liner 2 and crystal bar
There may be rotations when contact.And the rotation of above-mentioned liner 2 then can be softer to quality above-mentioned supporting surface 15 generate abrasion, and then produce
Raw carbon dust.And above-mentioned 4th end 17 setting height is lower than above-mentioned third end 16, so that carbon dust is accumulated on above-mentioned outer gallbladder 1, prevent
Blocking, which is considered to be worth doing in the silicon for falling into fusing, causes carbon to pollute.
As shown in Figure 1, the operating cost of saving is more since heat loss is fewer, specifically, above-mentioned outer gallbladder 1 with it is above-mentioned
There is cavity 4, for keeping the temperature between liner 2.It will state and be equipped with cavity 4 between outer gallbladder 1 and above-mentioned liner 2, above-mentioned lead can be improved
The thermal insulation property of flow cartridge, this reduces heat loss, to reach the requirement for saving operating cost.
In order to reduce heat loss, specifically, being equipped with filler in above-mentioned cavity 4, above-mentioned filler is for keeping the temperature；It is above-mentioned
Filler is quartz sand.Above-mentioned filler can be improved heat insulation effect, reduce thermal loss, and then reaches and save operating cost
Purpose.The advantages of quartz sand is small in size, so that for the more adaptable of above-mentioned 4 shape of cavity.
In order to fix above-mentioned liner 2, specifically, further including gland 5, above-mentioned gland 5 is removably connected to above-mentioned first end
11 and above-mentioned liner 2, for fixing above-mentioned liner 2.Above-mentioned gland 5 enables to above-mentioned liner 2, prevent above-mentioned liner 2 by
Gas flowing or silicon rod influence and deviate.Having simultaneously can prevent above-mentioned filler from falling off out of above-mentioned cavity 4.
For the ease of fixed and heat preservation, specifically, further include insulating ring, above-mentioned insulating ring setting is in above-mentioned gland and above-mentioned
Between tyre gallbladder.It is closer using enabling to combine between above-mentioned gland 5 and above-mentioned outer gallbladder 1 after above-mentioned insulating ring, in reduction
The gap of cavity 4 is stated, while convenient for parts such as assembly bolts, guaranteeing the stability of above-mentioned outer gallbladder 1 and above-mentioned gland 5.Above-mentioned guarantor
Solidification felt can be used in Wen Huan or graphite is made, and has certain hardness, and have lower heat transfer coefficient, reduces heat stream
It loses.
The utility model additionally provides a kind of heat-preservation cylinder, comprising: cylinder and guide shell as described above；Above-mentioned interconnecting piece can
Dismantling connection is connected to inside and outside above-mentioned cylinder in above-mentioned cylinder top, above-mentioned guide shell.Above-mentioned guide shell can not only be convenient for silicon rod
Stretch growth, additionally it is possible to so that gas is gathered orientation from above-mentioned first end and be delivered to above-mentioned second end, it is ensured that airflow direction reaches poly-
Hold together effect.
In order to reach better heat insulation effect, specifically, above-mentioned cylinder has interlayer, above-mentioned interlayer is for keeping the temperature.It is above-mentioned
Interlayer is air, quartz sand even vacuum state, comprehensively considers decision with specific reference to the selection of above-mentioned cylinder, cost, effect etc..
In order to reach better heat insulation effect, specifically, above-mentioned cylinder inboard wall is equipped with reflecting layer, for reflecting heat.Heat
Amount is a kind of wave, and scattering and disappearing for heat can be reduced by the method for reflection, so that heat keeps more lasting, being lost speed is reduced,
And then achieve the effect that reduce operating cost.
The utility model embodiment that the utility model embodiment proposes provides a kind of guide shell, comprising: outer gallbladder and interior
Gallbladder；Outer gallbladder is annulated column, has opposite first end and second end, and first end is bent to far from its axis direction, forms interconnecting piece,
Interconnecting piece forms chuck to close to its axis direction for connecting single crystal growing furnace heat-preservation cylinder, second end；Liner is central column, one end card
It is connected to chuck, one end is overlapped in first end；Nearly second end cross-sectional area of liner is less than nearly first end cross-sectional area of liner；Outer gallbladder is by graphite
Material is made, and liner is made using quartz material.In the prior art, it in thermal field of single crystal furnace, needs using guide shell to argon gas
Water conservancy diversion is carried out, while also to prevent heat loss.But since the operating temperature of single crystal growing furnace is up to 1400 DEG C, most of materials all without
Method reaches due effect, therefore makes guide shell usually using graphite material.But graphite material material hardness is low, gas stream
It is impaired that collision during dynamic and crystal pulling can all make guide shell be collided with, and drops the service life of guide shell substantially
It is low, while broken graphite can be fallen into the silicon of fusing, so that silicon rod production is polluted by carbon, the quality drop for causing silicon rod to produce
It is low, while making quality unstable, and the too low silicon rod of quality also needs to remake, so that production cost rises.The utility model
Using outer gallbladder and and inner-tube structure, liner use quartz material, can not only prevent outer gallbladder influenced by air-flow and stretching process and
It is impaired, while the wearability of quartzy liner is much higher than the outer gallbladder of graphite, so that its service life improves, additionally it is possible to carbon pollution is reduced,
So that the qualification rate of silicon rod production improves, and then reduce production cost.And the structure of quartzy liner also improves heat insulation effect, makes
It obtains the energy needed for equipment is run to reduce, to reduce operating cost.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with the power
Subject to the protection scope that benefit requires.
Claims (9)
1. a kind of guide shell characterized by comprising
Outer gallbladder and liner；
The outer gallbladder is annulated column, has opposite first end and second end, and the first end is bent to far from its axis direction, shape
At interconnecting piece, the interconnecting piece forms chuck to close to its axis direction for connecting single crystal growing furnace heat-preservation cylinder, the second end；Institute
Stating liner is central column, and one end is connected in the chuck, and one end is overlapped in the first end；The closely described second end of the liner is cut
Area is less than nearly first end cross-sectional area of the liner；The outer gallbladder is made of graphite material, and the liner uses quartzy material
Material is made.
2. guide shell according to claim 1, which is characterized in that the chuck has supporting surface, the supporting surface and institute
State liner contact；The supporting surface has opposite third end and the 4th end, and the third end more connects relative to the 4th end
It is bordering on the outer gallbladder axis；The 4th end setting height is lower than the third end.
3. guide shell according to claim 2, which is characterized in that there is cavity between the outer gallbladder and the liner, use
In heat preservation.
4. guide shell according to claim 3, which is characterized in that be equipped with filler in the cavity, the filler is used
In heat preservation；The filler is quartz sand.
5. guide shell described in any one of -4 according to claim 1, which is characterized in that further include gland, the gland is removable
It unloads and is connected to the first end and the liner, for fixing the liner.
6. guide shell according to claim 5, which is characterized in that further include insulating ring, the insulating ring is arranged described
Between gland and the tyre gallbladder.
7. a kind of heat-preservation cylinder characterized by comprising cylinder and such as guide shell of any of claims 1-6；It is described
Interconnecting piece is removably connected to the cylinder top, and the guide shell is connected to inside and outside the cylinder.
8. heat-preservation cylinder according to claim 7, which is characterized in that the cylinder has interlayer, and the interlayer is for keeping the temperature.
9. heat-preservation cylinder according to claim 8, which is characterized in that the cylinder inboard wall is equipped with reflecting layer, is used for reflective thermal
Amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820780984.3U CN208266302U (en) | 2018-05-24 | 2018-05-24 | Guide shell and heat-preservation cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820780984.3U CN208266302U (en) | 2018-05-24 | 2018-05-24 | Guide shell and heat-preservation cylinder |
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| Publication Number | Publication Date |
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| CN208266302U true CN208266302U (en) | 2018-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820780984.3U Active CN208266302U (en) | 2018-05-24 | 2018-05-24 | Guide shell and heat-preservation cylinder |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110144621A (en) * | 2019-06-25 | 2019-08-20 | 宁夏银和新能源科技有限公司 | Cope with the novel guide cylinder of different crystal pulling diameters |
| CN110438559A (en) * | 2019-08-28 | 2019-11-12 | 包头美科硅能源有限公司 | A kind of single crystal growing furnace reducing guide shell |
-
2018
- 2018-05-24 CN CN201820780984.3U patent/CN208266302U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110144621A (en) * | 2019-06-25 | 2019-08-20 | 宁夏银和新能源科技有限公司 | Cope with the novel guide cylinder of different crystal pulling diameters |
| CN110438559A (en) * | 2019-08-28 | 2019-11-12 | 包头美科硅能源有限公司 | A kind of single crystal growing furnace reducing guide shell |
| CN110438559B (en) * | 2019-08-28 | 2024-04-16 | 包头美科硅能源有限公司 | Diameter-variable guide cylinder for single crystal furnace |
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