CN208255081U - A kind of surface scratch imaging detection device of transparent medium - Google Patents
A kind of surface scratch imaging detection device of transparent medium Download PDFInfo
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- CN208255081U CN208255081U CN201820918194.7U CN201820918194U CN208255081U CN 208255081 U CN208255081 U CN 208255081U CN 201820918194 U CN201820918194 U CN 201820918194U CN 208255081 U CN208255081 U CN 208255081U
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- module
- fourier lense
- transparent medium
- surface scratch
- spatial filter
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Abstract
The utility model discloses a kind of surface scratch imaging detection devices of transparent medium, including source of parallel light module, the first fourier lense, spatial filter module, imaging lens, detector module and data processing module;The source of parallel light module exports collimated light beam, collimated light beam successively passes through sample and the first fourier lense forms converging beam, converging beam successively passes through spatial filter module and imaging lens reach detector module, the spatial filter module is placed on the focal plane of the first fourier lense, and the detector module output end and data processing module input terminal communicate to connect.The utility model by spatial filter module, the bias light strong jamming of removal acquisition image accomplishes that the surface scratch of transparent medium is individually imaged, scratch detection precision is high, simultaneously because data processing amount is low, effectively improves detection accuracy to the surface scratch of transparent medium independent imaging analysis.The utility model is used to detect the surface scratch of transparent medium.
Description
Technical field
The utility model relates to optical imaging device technical fields.
Background technique
With the rapid development of new and high technology, various glass products, such as the display screen of electronic product, high-precision camera lens is saturating
Mirror, wave plate, laser resonator etc. are widely used, and glass will be used wider and wider.Corresponding is to glass
The requirements at the higher level of quality, wherein carrying out scratch inspection to glass is particularly important, scratch detection is exactly wherein important one.
At present although external some equipment, which can be realized, detects glass scratch, but these instrument prevailing prices
High, detection range is small.And the image procossing in later period is mainly leaned in the glass scratch detecting instrument on domestic market, detection,
There is no the imaging system of early period is designed and is improved, this causes the collected original image of instrument to receive background light intensity
Interference, scratch information is simultaneously unintelligible, and just the image procossing of phase is also difficult glass scratch information extraction and shows rearward at last
Out.I.e. this kind of scratch detection instrument does not accomplish the interference of removal background light intensity due to the imaging system of instrument configuration, so
Cause scratch image quality not high.
The text of Publication No. CN 107024488 discloses a kind of glass defect detection method, and this method is to utilize conjugation
On a pair of of ring light billows filter the scattering light of glass defect, then judged whether there is and drawn according to the variation of detector gray value
Trace, the imaging mode are difficult tiny glass defect information to show, and it is very big to directly result in glass scratch detection accuracy
It reduces.
Utility model content
Technical problem to be solved by the utility model is: how to combine detection speed in the scratch detection of transparent medium
Degree and detection accuracy.
The solution that the utility model solves its technical problem is:
A kind of surface scratch imaging detection device of transparent medium, including source of parallel light module, the first fourier lense, sky
Between filter module, imaging lens, detector module and data processing module;The source of parallel light module exports collimated light beam,
Collimated light beam successively passes through sample and the first fourier lense forms converging beam, and converging beam is successively filtered by space
Wave module and imaging lens reach detector module, and the spatial filter module is placed in the focal plane of the first fourier lense
On, the imaging lens are mounted on detector module, and the detector module output end and data processing module input terminal are logical
Letter connection.
As a further improvement of the above technical scheme, the source of parallel light module includes that output wavelength swashs for 632.8nm
The He-Ne laser of light and the second fourier lense, the He-Ne laser are placed in the focal point of the second fourier lense, institute
The diffusion light beam for stating He-Ne laser output forms collimated light beam after the second fourier lense.
As a further improvement of the above technical scheme, the source of parallel light module further includes for adjusting collimated light beam function
The polarizer group of rate density, the polarizer group include two polarizing films, and the collimated light beam being emitted from the second fourier lense is first
Pass through two polarizing films afterwards.
As a further improvement of the above technical scheme, the spatial filter module includes interior media uniformly transparent glass
Glass substrate is coated with a black coating in the clear glass substrate, and the black coating is located at the focus of the first fourier lense
The geomery at place, the black coating is consistent in the focal point formation geomery of hot spot with converging beam.
As a further improvement of the above technical scheme, the spatial filter module includes reflecting mirror, on the reflecting mirror
It is provided with through-hole, the through-hole is located at the focal point of the first fourier lense, and the aperture of the through-hole and converging beam are in focus
The radius that place forms hot spot is consistent.
The beneficial effects of the utility model are: the utility model passes through spatial filter module, the background of removal acquisition image
Light intensity interference, accomplishes that the surface scratch of transparent medium is individually imaged, and detection accuracy is high, simultaneously because to the table of transparent medium
The independent imaging analysis of face scratch, data processing amount is low, effectively improves detection accuracy.The utility model is for detecting transparent medium
Surface scratch.
Detailed description of the invention
It, below will be to required in embodiment description in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing to be used is briefly described.Obviously, described attached drawing is a part of the embodiment of the utility model, rather than complete
Portion's embodiment, those skilled in the art without creative efforts, can also be obtained according to these attached drawings it
His design scheme and attached drawing.
Fig. 1 is that (sample to be tested is placed in one times of the first fourier lense for the schematic structural diagram of the first embodiment of the utility model
Other than focal length);
Fig. 2 is that (sample to be tested is placed in one times of the first fourier lense for the schematic structural diagram of the first embodiment of the utility model
Within focal length);
Fig. 3 is the schematic structural diagram of the second embodiment of the utility model;
Fig. 4 is the 3rd embodiment structural schematic diagram of the utility model;
Fig. 5 is the spatial filter module embodiment schematic diagram of the utility model;
Fig. 6 is collected testing image in situation shown in Fig. 1;
Fig. 7 is collected testing image in situation shown in Fig. 2;
Fig. 8 is collected testing image in situation shown in Fig. 3;
Fig. 9 is collected testing image in situation shown in Fig. 4;
Figure 10 is collected testing image in situation shown in Fig. 5.
Specific embodiment
It is carried out below with reference to technical effect of the embodiment and attached drawing to the design of the utility model, specific structure and generation
It clearly and completely describes, to be completely understood by the purpose of this utility model, feature and effect.Obviously, described embodiment
It is a part of the embodiment of the utility model, rather than whole embodiments, it is based on the embodiments of the present invention, the skill of this field
Art personnel other embodiments obtained without creative efforts belong to the model of the utility model protection
It encloses.In addition, all connection/connection relationships being previously mentioned in text, not singly refer to that component directly connects, and referring to can be according to specific reality
Situation is applied, by adding or reducing couple auxiliary, to form more preferably coupling structure.Each technology in the invention is special
Sign, can be with combination of interactions under the premise of not conflicting conflict.
Referring to Fig.1, the utility model discloses a kind of surface scratch imaging detection devices of transparent medium, including directional light
Source module 1, the first fourier lense 2, spatial filter module 3, imaging lens 4, detector module 5 and data processing module 6;
The source of parallel light module 1 exports collimated light beam, and collimated light beam successively passes through sample and the formation of the first fourier lense 2
Converging beam, converging beam successively passes through spatial filter module 3 and imaging lens 4 reach detector module 5, the space filter
Wave module 3 is placed on the focal plane of the first fourier lense 2, and the imaging lens 4 are mounted on detector module 5, the spy
It surveys 5 output end of device module and 6 input terminal of data processing module communicates to connect.Specifically, the utility model passes through space filtering mould
Block 3, the bias light strong jamming of removal acquisition image, accomplishes that the surface scratch of transparent medium is individually imaged, detection accuracy is high, together
When due to being to the independent imaging analysis of the surface scratch of transparent medium, data processing amount is low, effectively improves detection accuracy.
The specific testing principle of the utility model is as follows: source of parallel light module 1 exports collimated light beam first, works as directional light
When beam passes through sample to be tested, sample to be tested is equivalent to a diffraction grating, and collimated light beam can be in first Fu after passing through sample to be tested
In leaf lens 2 back focal plane on formed Fraunhofer diffraction pattern, this pattern be sample to be tested STRUCTURE DECOMPOSITION space frequency
Spectrum, different ingredients correspond to different frequency spectrums, and the position coordinates for corresponding to focal plane are also different.Assuming that the transmission of sample to be tested
Rate is g (x, y), and the frequency spectrum that pattern is formed on the focal plane of the first fourier lense 2 is as shown in Equation 1:
Wherein λ indicates that the wavelength of light source module output light, F indicate the focal length of the first fourier lense 2, and the first Fourier is saturating
Coordinate (u, v) and spatial frequency (f on the back focal plane of mirror 2x,fy) relationship be
Light distribution on 2 focal plane of the first fourier lense is [G (u, v)]2, each of which wavelet corresponds to sample to be tested
One basis of this body structure, and spatial filter module 3 is than more uniform substance, in addition to the scratch information of sample to be tested
Outside, the information of the uniform no marking of other in sample to be tested is all distributed near low frequency, and spatial filter module 3 can filter out husband's thinkling sound's standing grain
The information of low frequency in fraunhofer-diffraction pattern, non-low-frequency information can continue to propagate forward, finally be superimposed in image planes, by sample to be tested
Scratch information combine, formed sample to be tested scratch information image, finally by detector module 5 to sample to be tested draw
The image of trace information is acquired, and obtains testing image.
Referring to Figures 1 and 2, it can be seen that the present apparatus to the placement of sample to be tested there is no specific requirement from Fig. 1 and Fig. 2,
As long as guaranteeing that sample to be tested is placed between source of parallel light module 1 and the first fourier lense 2, although will be to test sample in Fig. 2
Product are placed within 2 one times of focal lengths of the first fourier lense, but have no effect on imaging effect;Referring to Fig. 3, it is shown in Fig. 3
The imaging pattern of reflection changes collimated light beam propagation path using image-forming module shown in Fig. 3 when actually detected;Reference Fig. 4,
It is added to half-reflecting half mirror 7 in Fig. 4, by the effect of half-reflecting half mirror 7, the half of collimated light beam is made to reach sample to be tested, then
It will reflect back into the light beam come to reach in spatial filter module 4 by half-reflecting half mirror 7.
It is further used as preferred embodiment, since the superiority and inferiority of collimated light beam quality drastically influences spatial filter module
3 filter effect, therefore be to obtain the collimated light beam of better quality, in specific embodiment of the present invention, the directional light
Source module 1 includes the He-Ne laser 11 and the second fourier lense 12 that output wavelength is 632.8nm laser, and the He-Ne swashs
Light device 11 is placed in the focal point of the second fourier lense 12, and the diffusion light beam that the He-Ne laser 11 exports is by second Fu
Collimated light beam is formed after leaf lens 12.
It is further used as preferred embodiment, parallel optical module described in the utility model is also configured with adjusting collimated light beam
The function of light intensity, to adapt to different application environments.Specifically, the source of parallel light module 1 further includes for adjusting directional light
The polarizer group of beam power density, the polarizer group include two polarizing films 13, and what is be emitted from the second fourier lense 12 is flat
Row light beam successively passes through two polarizing films 13.
Further, spatial filter module 3 described in the utility model is mainly used for filtering out low in Fraunhofer diffraction pattern
The information of frequency, while non-low-frequency information in Fraunhofer diffraction pattern being allow to continue to propagate forward.As the space filtering
The first embodiment of module 3, the spatial filter module 3 includes the uniform clear glass substrate 31 of interior media, described transparent
A black coating 32 is coated in substrate of glass 31, the black coating 32 is located at the focal point of the first fourier lense 2, described black
The geomery of color coating 32 is consistent in the focal point formation geomery of hot spot with converging beam.
Shown by Fig. 1 to Fig. 4 is all the first embodiment of spatial filter module 3, and referring to Fig. 5, shown in fig. 5 is institute
The second embodiment of spatial filter module 3 is stated, the spatial filter module 3 includes reflecting mirror 33, is arranged on the reflecting mirror 33
There is through-hole 34, the through-hole 34 is located at the focal point of the first fourier lense 2, and the aperture of the through-hole 34 and converging beam are in coke
The radius that hot spot is formed at point is consistent.
It respectively corresponds imaging detection device in situation shown in Fig. 1 to Fig. 5 referring to Fig. 6 to Figure 10, Fig. 6 to Figure 10 and is acquired
The testing image arrived, from Fig. 6 to Figure 10 in as can be seen that imaging detection device can be realized in situation shown in Fig. 1 to Fig. 5
Bright dielectric surface scratch detection, it was demonstrated that the feasibility of each embodiment of imaging detection device, wherein in Fig. 6 to Figure 10
On each testing image, what white strip region indicated is the surface scratch on transparent medium, and white dotted region indicates
Be impurity composition on transparent medium, what background parts indicated is that the bias light of transparent medium is considered to spatial filter module 3
The gray value of the effect removed, background parts is lower, and the background parts gray value of Fig. 6 to each testing image shown in Fig. 10 can be with
Difference is primarily to see the threshold parameter being arranged in specific detection process.
The better embodiment of the utility model is illustrated above, but the invention be not limited to it is described
Embodiment, those skilled in the art can also make various equivalent changes without departing from the spirit of the present invention
Type or replacement, these equivalent variation or replacement are all included in the scope defined by the claims of the present application.
Claims (5)
1. a kind of surface scratch imaging detection device of transparent medium, which is characterized in that including source of parallel light module (1), first
Fourier lense (2), spatial filter module (3), imaging lens (4), detector module (5) and data processing module (6);Institute
Source of parallel light module (1) output collimated light beam is stated, collimated light beam successively passes through sample and the first fourier lense (2) shape
At converging beam, converging beam successively passes through spatial filter module (3) and imaging lens (4) reach detector module (5), institute
It states spatial filter module (3) to be placed on the focal plane of the first fourier lense (2), the imaging lens (4) are mounted on detector
In module (5), detector module (5) output end and data processing module (6) input terminal are communicated to connect.
2. a kind of surface scratch imaging detection device of transparent medium according to claim 1, it is characterised in that: described flat
Line light source module (1) includes the He-Ne laser (11) and the second fourier lense (12) that output wavelength is 632.8nm laser,
The He-Ne laser (11) is placed in the focal point of the second fourier lense (12), the diffusion of He-Ne laser (11) output
Light beam forms collimated light beam after the second fourier lense (12).
3. a kind of surface scratch imaging detection device of transparent medium according to claim 2, it is characterised in that: described flat
Line light source module (1) further includes the polarizer group for adjusting collimated light beam power density, and the polarizer group includes two inclined
It shakes piece (13), the collimated light beam being emitted from the second fourier lense (12) successively passes through two polarizing films (13).
4. a kind of surface scratch imaging detection device of transparent medium according to claim 1, it is characterised in that: the sky
Between filter module (3) include the uniform clear glass substrate of interior media (31), be coated with one on the clear glass substrate (31)
Black coating (32), the black coating (32) are located at the focal point of the first fourier lense (2), the black coating (32)
Geomery is consistent in the focal point formation geomery of hot spot with converging beam.
5. a kind of surface scratch imaging detection device of transparent medium according to claim 1, it is characterised in that: the sky
Between filter module (3) include reflecting mirror (33), be provided with through-hole (34) on the reflecting mirror (33), the through-hole (34) is located at the
The focal point of one fourier lense (2), the aperture of the through-hole (34) and converging beam form the radius one of hot spot in focal point
It causes.
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Cited By (1)
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CN108918529A (en) * | 2018-06-13 | 2018-11-30 | 佛山科学技术学院 | A kind of the surface scratch imaging detection device and method of transparent medium |
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CN108918529A (en) * | 2018-06-13 | 2018-11-30 | 佛山科学技术学院 | A kind of the surface scratch imaging detection device and method of transparent medium |
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