CN205262410U - Multiple spot simultaneous measurement single face coated lens's coating film thickness device - Google Patents

Multiple spot simultaneous measurement single face coated lens's coating film thickness device Download PDF

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Publication number
CN205262410U
CN205262410U CN201520951061.6U CN201520951061U CN205262410U CN 205262410 U CN205262410 U CN 205262410U CN 201520951061 U CN201520951061 U CN 201520951061U CN 205262410 U CN205262410 U CN 205262410U
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China
Prior art keywords
semi
lens
reflecting lens
transparent
transparent semi
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Expired - Fee Related
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CN201520951061.6U
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Chinese (zh)
Inventor
姚红兵
范宁
丁勇
王成
张瑞军
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Jiangsu University
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Jiangsu University
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Abstract

The utility model provides a multiple spot simultaneous measurement single face coated lens's coating film thickness device, the device include light source, beam splitting device, lens, photoelectricity displacement sensor, signal amplifier, light signal processor and computer, light source, beam splitting device, lens and in the central same light path of photoelectricity displacement sensor's light receiving surface, and arrange in proper order, photoelectricity displacement sensor, signal amplifier, light signal processor and computer electricity are in proper order connected. The light source process beam splitting device falls into the multi -beam, projects through lens on the photoelectricity displacement sensor, photoelectricity displacement sensor pass through the light signal signal amplification device conveys after enlargeing light signal processor, light signal processor inputs after being the signal of telecommunication with light signal conversion the computer, the computer carries out film thickness's calculation, can realize multimetering single face coated lens's coating film thickness simultaneously, through the homogeneity of contrast coating film thickness analysis coating film.

Description

A kind of multiple spot is measured the coating film thickness device of coating single side lens simultaneously
Technical field
The utility model belongs to optical lens production field, is especially directed to convex lens production in enormous quantities, coating single side and recessedThe coating film thickness of lens is measured, and is specifically related to a kind of multiple spot and measures simultaneously the coating film thickness device of coating single side lens.
Background technology
No matter be in life or military upper, optical lens is essential. But no matter be resin lens or glass lens, itsThe light transmittance of body all only has 91% left and right, has part light and returns at two surface reflections. The reflection of eyeglass can make light see throughRate reduces and forms interference and affect image quality at retina. And coating technique is to utilize optical technology, by lens measureFace plates certain thickness individual layer or multilayer optical film makes eyeglass obtain some new original not available optical properties, withThe ability of improving lens reflecting light plays enhancing or reduces light penetration and makes the light transmittance of eyeglass be increased to 98%.
After plated film, lens surface reflection ray transmitance reduces, and solves the problem that eyeglass is difficult to imaging under high light, prevents ultravioletLine, infrared ray, the damage of x line to eyesight.
The current glasses lens plated two kinds of films that mainly contain: one is anti-reflective film. Another kind is to add dura mater. For lens, plated film is thickDegree is an important parameter, and the uniformity of plated film is determining whether lens can use, and therefore measured film thickness that lens plate becomesA requisite link in production.
Utility model content
The purpose of this utility model is to provide a kind of multiple spot measures the coating film thickness device of coating single side lens simultaneously, passes through laser instrumentThe light of output is divided into multi-beam through light-dividing device, can realize the coating film thickness of the coating single side of multimetering simultaneously lens, by rightAnalyze the uniformity of plated film than coating film thickness.
The technical solution of the utility model is: a kind of multiple spot is measured the coating film thickness device of coating single side lens simultaneously, comprise light source,Light-dividing device, lens, photoelectric displacement sensor, signal amplifier, OSP and computer;
Described light-dividing device comprises at least 1 semi-transparent semi-reflecting lens and 1 total reflective mirror; Described total reflective mirror is positioned at described semi-transparent semi-reflecting lensReflected light path on, the angle of the input path of described semi-transparent semi-reflecting lens and the reflected light path of described semi-transparent semi-reflecting lens is an angle of 90 degrees,The reflected light path of described semi-transparent semi-reflecting lens is the input path of described total reflective mirror, the input path of described total reflective mirror and described total reflective mirrorReflected light path angle be an angle of 90 degrees, the transmitted light path of described semi-transparent semi-reflecting lens parallels with the reflected light path of described total reflective mirror;
Being centered close in same light path of the light receiving surface of described light source, light-dividing device, lens and described photoelectric displacement sensor,And be arranged in order; Described photoelectric displacement sensor, signal amplifier, OSP and computer are electrically connected successively;
Described photoelectric displacement sensor is used for receiving optical signals, and optical signal is sent to described signal amplifier; Described signal is putLarge device is input to described computer for after optical signal is converted to the signal of telecommunication; Described computer is for calculating the coating film thickness of lens.
In such scheme, described light-dividing device comprises 6 semi-transparent semi-reflecting lens and 3 total reflective mirrors; 6 described semi-transparent semi-reflecting lens divideBe not the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, the 3rd semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, the 5th semi-transparent semi-reflectingMirror and the 6th semi-transparent semi-reflecting lens; 3 described total reflective mirrors are respectively the first total reflective mirror, the second total reflective mirror and the 3rd total reflective mirror;
Described the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens and the 3rd semi-transparent semi-reflecting lens are positioned in same light path successively;
Described the 5th semi-transparent semi-reflecting lens, the 6th semi-transparent semi-reflecting lens and the 3rd total reflective mirror are positioned at the anti-of described the first semi-transparent semi-reflecting lens successivelyPenetrate in light path;
Described the 4th semi-transparent semi-reflecting lens and the second total reflective mirror are positioned on the reflected light path of described the second semi-transparent semi-reflecting lens successively;
Described the first total reflective mirror is positioned on the reflected light path of described the 3rd semi-transparent semi-reflecting lens.
In such scheme, described semi-transparent semi-reflecting lens and total reflective mirror are in same level.
In such scheme, the high-energy light source that described light source provides for laser instrument.
The beneficial effects of the utility model are: the light that the utility model is exported by laser instrument is divided into multi beam through described light-dividing deviceLight, through lens projects, to described photoelectric displacement sensor, described photoelectric displacement sensor is put optical signal through described signalBigger device is sent to described OSP after amplifying, and described OSP is input to after optical signal is converted to the signal of telecommunicationDescribed computer, described computer carries out the calculating of film thickness, and the plated film that can realize the coating single side of multimetering simultaneously lens is thickDegree, by the uniformity of contrast coating film thickness analysis plated film. Need cause one to sample lens by specific apparatus than traditionalThe fixed method of testing of destroying, the utility model need not directly contact sample, can not cause damage to sample, measure complete can be straightConnect use; Than present other non-contact measurement methods, method of the present utility model is simpler, and handled easily, when savingBetween manpower, there is higher economic benefit high; The utility model, mainly for the detection of the lens in batch production, can be measuredThe convex lens of various coating single sides and concavees lens, use same set of equipment.
Brief description of the drawings
Fig. 1 is the concrete enforcement structural representation of the utility model one embodiment;
Fig. 2 is the light-dividing device detailed schematic of the utility model one embodiment;
Fig. 3 is that after the convex lens plated film of utility model one embodiment, skew schematic diagram occurs refracted ray;
Fig. 4 is that after the concavees lens plated film of utility model one embodiment, skew schematic diagram occurs refracted ray.
In figure: 1, light source; 2, light-dividing device; 3, lens; 4, photoelectric displacement sensor; 5, signal amplifier; 6, lightSignal processor; 7 and computer; 8, optical axis.
Detailed description of the invention
Below in conjunction with accompanying drawing detailed description of the invention, the utility model is described in further detail, but protection domain of the present utility modelBe not limited to this.
Figure 1 shows that multiple spot described in the utility model measures a kind of embodiment of the coating film thickness device of coating single side lens simultaneously,The coating film thickness device that described multiple spot is measured coating single side lens simultaneously comprises light source 1, light-dividing device 2, lens 3, photoelectric displacementSensor 4, signal amplifier 5, OSP 6 and computer 7.
The light receiving surface of described light source 1, light-dividing device 2, lens 3 and described photoelectric displacement sensor 4 be centered close to same lightLu Shang and being arranged in order; Described photoelectric displacement sensor 4, signal amplifier 5, OSP 6 and computer 7 are successivelyElectrical connection.
Described photoelectric displacement sensor 4 is for receiving optical signals, and optical signal is sent to described signal amplifier 5; Described letterNumber amplifier 5 is input to described computer 7 after optical signal being converted to the signal of telecommunication; Described computer 7 is for calculating lensCoating film thickness.
Described lens 3 comprise coating single side lens and not bloomed lens, the lens of described coating single side and uncoated lens specificationIdentical.
Described light-dividing device 2 comprises at least a semi-transparent semi-reflecting lens and total reflective mirror, and described semi-transparent semi-reflecting lens and a total reflective mirror are in sameHorizontal plane, described total reflective mirror is positioned on the reflected light path of described semi-transparent semi-reflecting lens, the input path of described semi-transparent semi-reflecting lens and described inThe angle of the reflected light path of semi-transparent semi-reflecting lens is an angle of 90 degrees, the incident light that the reflected light path of described semi-transparent semi-reflecting lens is described total reflective mirrorRoad, the reflected light path angle of the input path of described total reflective mirror and described total reflective mirror is an angle of 90 degrees, the transmission of described semi-transparent semi-reflecting lensLight path parallels with the reflected light path of described total reflective mirror. Preferably, described light-dividing device 2 comprises 6 semi-transparent semi-reflecting lens and 3Total reflective mirror, as shown in Figure 2,6 described semi-transparent semi-reflecting lens be respectively the first semi-transparent semi-reflecting lens 201, the second semi-transparent semi-reflecting lens 202,The 3rd semi-transparent semi-reflecting lens 203, the 4th semi-transparent semi-reflecting lens 204, the 5th semi-transparent semi-reflecting lens 205 and the 6th semi-transparent semi-reflecting lens 206; 3Individual described total reflective mirror is respectively the first total reflective mirror 207, the second total reflective mirror 208 and the 3rd total reflective mirror 209. Described first semi-transparent semi-reflectingMirror 201, the second semi-transparent semi-reflecting lens 202 and the 3rd semi-transparent semi-reflecting lens 203 are positioned in same light path successively; The described the 5th semi-transparent halfAnti-mirror 205, the 6th semi-transparent semi-reflecting lens 206 and the 3rd total reflective mirror 209 are positioned at the reflection of described the first semi-transparent semi-reflecting lens 201 successivelyIn light path; Described the 4th semi-transparent semi-reflecting lens 204 and the second total reflective mirror 208 are positioned at the anti-of described the second semi-transparent semi-reflecting lens 202 successivelyPenetrate in light path; Described the first total reflective mirror 207 is positioned on the reflected light path of described the 3rd semi-transparent semi-reflecting lens 203.
Preferably, the high-energy light source that described light source 1 provides for laser instrument.
Described light source 1 projects described the second half-reflecting half mirror 202 through the transmitted light of described the first half-reflecting half mirror 201, described inThe reverberation of the first semi-transparent semi-reflecting lens 201 projects the 5th semi-transparent semi-reflecting lens 205; The transmission of described the second semi-transparent semi-reflecting lens 202Light projects described the 3rd semi-transparent semi-reflecting lens 203, and the reverberation of described the second semi-transparent semi-reflecting lens 202 projects described the 4th semi-transparentSemi-reflective mirror 204; Transmitted light through described the 3rd semi-transparent semi-reflecting lens 203 forms first via incident beam, through the described the 3rd semi-transparent halfThe reverberation of anti-mirror 203 projects described the first total reflective mirror 207, forms the second tunnel through the reverberation of described the first total reflective mirror 207Incident beam; Reverberation through described the 4th semi-transparent semi-reflecting lens 204 forms three beams incident beam, through described the 4th semi-transparent semi-reflectingThe transmitted light of mirror 204 projects described the second total reflective mirror 208, and the reverberation of described the second total reflective mirror 208 forms the incident of Si roadLight beam; Project described the 6th semi-transparent semi-reflecting lens 206 through the transmitted light of described the 5th semi-transparent semi-reflecting lens 205, described the 5th semi-transparentThe reverberation of semi-reflective mirror 205 forms Wu road incident beam; Described in the transmitted light of described the 6th semi-transparent semi-reflecting lens 206 projectsThe 3rd total reflective mirror 209, the reverberation of described the 6th semi-transparent semi-reflecting lens 206 forms Liu road incident beam; Be all-trans through the described the 3rdThe reverberation of mirror 209 forms Qi road incident beam, and seven road incident beams are parallel to each other, and described semi-transparent semi-reflecting lens and individual being all-transMirror is in same level, and Shi Qi road incident beam projects on not bloomed lens to be measured with the height h identical apart from optical axis 8,H position on described photoelectric displacement sensor 4 is on same straight line.
A detection method of simultaneously measuring the coating film thickness device of coating single side lens according to described multiple spot, comprises the following steps:
In the one side radius r of known described lens 3, i.e. front radius or rear radius, the refractive index n of thin-film material0Condition under,Described light source 1 is divided into seven tunnels incident beam parallel to each other through described light-dividing device 2, taking first via incident beam wherein as example,Light beam is projecting apart from the height of optical axis 8h on not bloomed lens to be measured, light beam first through bloomed lens not refraction pass through again airRefraction, final beam projects the H position on described photoelectric displacement sensor 4, and described lens are to described photoelectric displacement sensor4 distance is g, and g can according to circumstances arrange voluntarily;
Bloomed lens does not change coating single side lens into, and light passes through air refraction, final beam again through coating single side lens reflectionProject the H' position on described photoelectric displacement sensor 4, the projection of seven road incident beams on described photoelectric displacement sensor 4Point in the same horizontal line, described photoelectric displacement sensor 4 by the signal of H and H' after described signal amplifying apparatus 5 amplifiesBe sent to described OSP 6, described OSP 6 is input to described calculating after optical signal is converted to the signal of telecommunicationMachine 7, described computer 7 carries out the calculating of coating film thickness.
Described computer 7 calculates the coating film thickness at seven road incident beam incident point places on lens 3 simultaneously according to said method, logicalCross the uniformity that contrasts coating film thickness analysis plated film.
The computing formula of described film thickness is:
d = - n 0 r 2 Δ s - g h + ghn 0 + r Δ s
Wherein, the coating film thickness that d is lens, the displacement s=OH-OH' that Δ s is light beam, the one side radius that r is lens, hFor the height of beam distance optical axis, g is the distances of lens to be measured to photoelectric displacement sensor light receiving surface, n0For film refractive index,Air refraction is the center of 1, O photoelectric displacement sensor light receiving surface.
Modal in production and processing is at present convex lens and concavees lens, utilizes the utility model respectively convex lens and concavees lens to be enteredRow is measured, and respectively as shown in Figure 3 and Figure 4, the principle of measurement is identical with method.
The light that compared with prior art the utility model is exported by laser instrument is divided into multi-beam through described light-dividing device, through saturatingMirror projects on described photoelectric displacement sensor, and described photoelectric displacement sensor amplifies optical signal through described signal amplifying apparatusAfter be sent to described OSP, described OSP is input to described computer after optical signal is converted to the signal of telecommunication,Described computer carries out the calculating of film thickness, can realize the coating film thickness of the coating single side of multimetering simultaneously lens, by contrastCoating film thickness is analyzed the uniformity of plated film.
Described embodiment is preferred embodiment of the present utility model, but the utility model is not limited to above-mentioned embodiment,Do not deviate from the situation of flesh and blood of the present utility model, any apparent improvement that those skilled in the art can make,Replacement or modification all belong to protection domain of the present utility model.

Claims (4)

1. multiple spot is measured a coating film thickness device for coating single side lens simultaneously, it is characterized in that, comprises light source (1), light splittingDevice (2), lens (3), photoelectric displacement sensor (4), signal amplifier (5), OSP (6) and computer(7);
Described light-dividing device (2) comprises at least 1 semi-transparent semi-reflecting lens and 1 total reflective mirror; Described total reflective mirror is positioned at described semi-transparent halfOn the reflected light path of anti-mirror, the angle of the input path of described semi-transparent semi-reflecting lens and the reflected light path of described semi-transparent semi-reflecting lens is 90 degreeAngle, the input path that the reflected light path of described semi-transparent semi-reflecting lens is described total reflective mirror, the input path of described total reflective mirror and described completeThe reflected light path angle of anti-mirror is an angle of 90 degrees, and the transmitted light path of described semi-transparent semi-reflecting lens parallels with the reflected light path of described total reflective mirror;
The centre bit of the light receiving surface of described light source (1), light-dividing device (2), lens (3) and described photoelectric displacement sensor (4)In same light path and be arranged in order; Described photoelectric displacement sensor (4), signal amplifier (5), OSP (6)And computer (7) is electrically connected successively;
Described photoelectric displacement sensor (4) is for receiving optical signals, and optical signal is sent to described signal amplifier (5); InstituteState signal amplifier (5) and be input to described computer (7) after optical signal being converted to the signal of telecommunication; Described computer (7)For calculating the coating film thickness of lens.
2. multiple spot according to claim 1 is measured the coating film thickness device of coating single side lens simultaneously, it is characterized in that instituteState light-dividing device (2) and comprise 6 semi-transparent semi-reflecting lens and 3 total reflective mirrors; 6 described semi-transparent semi-reflecting lens are respectively first semi-transparent halfAnti-mirror (201), the second semi-transparent semi-reflecting lens (202), the 3rd semi-transparent semi-reflecting lens (203), the 4th semi-transparent semi-reflecting lens (204), the 5 halfSemi-reflective mirror (205) and the 6th semi-transparent semi-reflecting lens (206) thoroughly; 3 described total reflective mirrors are respectively the first total reflective mirror (207), second and are all-transMirror (208) and the 3rd total reflective mirror (209);
Described the first semi-transparent semi-reflecting lens (201), the second semi-transparent semi-reflecting lens (202) and the 3rd semi-transparent semi-reflecting lens (203) be position successivelyIn same light path;
Described the 5th semi-transparent semi-reflecting lens (205), the 6th semi-transparent semi-reflecting lens (206) and the 3rd total reflective mirror (209) are positioned at described first successivelyOn the reflected light path of semi-transparent semi-reflecting lens (201);
Described the 4th semi-transparent semi-reflecting lens (204) and the second total reflective mirror (208) are positioned at the anti-of described the second semi-transparent semi-reflecting lens (202) successivelyPenetrate in light path;
Described the first total reflective mirror (207) is positioned on the reflected light path of described the 3rd semi-transparent semi-reflecting lens (203).
3. multiple spot according to claim 1 and 2 is measured the coating film thickness device of coating single side lens simultaneously, it is characterized in that,Described semi-transparent semi-reflecting lens and total reflective mirror are in same level.
4. multiple spot according to claim 1 is measured the coating film thickness device of coating single side lens simultaneously, it is characterized in that instituteState the high-energy light source that light source (1) provides for laser instrument.
CN201520951061.6U 2015-11-25 2015-11-25 Multiple spot simultaneous measurement single face coated lens's coating film thickness device Expired - Fee Related CN205262410U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105300300A (en) * 2015-11-25 2016-02-03 江苏大学 Coated film thickness device for simultaneously measuring single-sided coated lens at multiple points and method thereof
CN108445602A (en) * 2018-01-17 2018-08-24 江苏大学 A kind of confocal optical system for measuring bloomed lens center thickness

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105300300A (en) * 2015-11-25 2016-02-03 江苏大学 Coated film thickness device for simultaneously measuring single-sided coated lens at multiple points and method thereof
CN108445602A (en) * 2018-01-17 2018-08-24 江苏大学 A kind of confocal optical system for measuring bloomed lens center thickness

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160525

Termination date: 20181125

CF01 Termination of patent right due to non-payment of annual fee