CN208253189U - A kind of Pulse anti-blow device for high purity silane gas supply - Google Patents
A kind of Pulse anti-blow device for high purity silane gas supply Download PDFInfo
- Publication number
- CN208253189U CN208253189U CN201820833310.5U CN201820833310U CN208253189U CN 208253189 U CN208253189 U CN 208253189U CN 201820833310 U CN201820833310 U CN 201820833310U CN 208253189 U CN208253189 U CN 208253189U
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- China
- Prior art keywords
- valve
- shut
- gas supply
- high purity
- infundibulate
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Abstract
The utility model discloses a kind of Pulse anti-blow devices for high purity silane gas supply comprising gas source, supply air line, scavenging pipeline and pulse backblowing pipeline；Pulse backblowing pipeline, including it is sequentially connected blowback head and the 4th shut-off valve, the 4th shut-off valve connects pressure regulator valve front end；Blowback head includes shell, and shell is in infundibulate, and the end of infundibulate big end is fluted, chuck for installing in groove, while infundibulate big end installs end cap, and end cap blocks chuck and plays position-limiting action, and end cap is equipped with outlet and is used as the second connector；Chuck hub is provided with centre bore, and centre bore installs valve rod；Infundibulate small end is the first connector for connecting compressed gas；Enclosure interior has protrusion；Valve stem tip has stem head, and valve rod is equipped with spring, and stem head withstands protrusion under the action of the spring and is truncated into two spaces inside housings.The utility model has the beneficial effects that pulse backblowing prevents the destruction of silicon dioxide powder foot couple pipe valve.
Description
Technical field
The utility model relates to gases to supply field, fill more particularly, to a kind of pulse backblowing for high purity silane gas supply
It sets.
Background technique
Silane is that semiconductor generates common gas, its property is flammable explosive gas, it is reacted with the oxygen in air
Generate SiO 2 powder.For high-purity pipeline, SiO 2 powder delay can have a negative impact in the duct, especially
It is if SiO 2 powder can cause to wear, in formation to the sealing surface of precision valve on long terms in the sealing surface of valve
Leakage, that is, valve can not have cut-off effect；So periodically to carry out pulse backblowing, especially gas to high purity silane supply line
After the replacement of source, remains silane and be likely to form SiO 2 powder with the air for disconnecting gas source entrance, but common gas flow purging
It is that can not clean completely, because air-flow is than more gentle.
Utility model content
To solve the above-mentioned problems, the utility model proposes a kind of Pulse anti-blow devices for high purity silane gas supply.
To achieve the goals above, the utility model adopts the following technical solution: a kind of arteries and veins for high purity silane gas supply
Rush back-blowing device comprising:
Gas source, and
Supply air line, supply air line have two-way, and supply air line includes sequentially connected first shut-off valve, pressure regulator valve and second
Shut-off valve；Two-way supply air line converges into all the way as gas supply end；
Scavenging pipeline, including venturi, venturi side suction inlet divide two-way to install third shut-off valve respectively, and third shut-off valve connects
It is connected to pressure regulator valve rear end；
Pulse backblowing pipeline, including it is sequentially connected blowback head and the 4th shut-off valve, the 4th shut-off valve connects pressure regulator valve front end；
Blowback head includes shell, and shell is in infundibulate, and the end of infundibulate big end is fluted, chuck for installing in groove, together
When infundibulate big end install end cap, end cap block chuck rise position-limiting action, end cap be equipped with outlet be used as the second connector；Chuck hub
It is provided with centre bore, centre bore installs valve rod, and the disk of chuck is also provided with the stomata of vent flow；Infundibulate small end is for connecting pressure
First connector of contracting gas；Enclosure interior has protrusion；Valve stem tip has stem head, and valve rod is equipped with spring, and stem head is in spring
Protrusion is withstood under effect is truncated into two spaces inside housings.
Further, the end cap and shell are connected through a screw thread.
Further, the venturi inlet connects with blowback head and connects compression high pure nitrogen.
Further, the venturi outlet connects combustion tower.
Further, first connector and the second connector are VCR connectors.
Further, the valve rod, shell, chuck and end cap are concentric.
Further, the 5th shut-off valve is housed between the supply air line two-way.
Compared with prior art, the utility model has the beneficial effects that: the device may be implemented to silane supply line
Pulse backblowing is carried out, the destruction of silicon dioxide powder foot couple pipe valve is prevented.
Detailed description of the invention
Fig. 1 is the schematic diagram of the utility model；
Fig. 2 is the blowback head schematic diagram of the utility model；
Description of symbols: 1- gas source；2- main valve；The 5th shut-off valve of 3-；4, the first shut-off valve of 8-；5,11- pressure regulator valve；6,
16- third shut-off valve；7, the second shut-off valve of 17-；9,13- blowback head；The second connector of 901-；902- end cap；904- chuck；905-
Stomata；906- valve rod；907- stem head；908- spring；909- groove；910- shell；911- protrusion；The first connector of 912-；10,
The 4th shut-off valve of 12-；The 6th shut-off valve of 14-；15- venturi；18- supply air line；19- pulse backblowing pipeline；20- scavenging conduit
Road；21- supplies end.
Specific embodiment
For a clearer understanding of the technical features, objectives and effects of the utility model, now compareing Detailed description of the invention
Specific embodiment of the present utility model, but the protection scope of the utility model be not limited to it is as described below.
As depicted in figs. 1 and 2, the utility model provides a kind of Pulse anti-blow device for high purity silane gas supply,
Including gas source 1, supply air line 18, scavenging pipeline 20 and pulse backblowing pipeline 19, in which: there are main valve 2 in gas source 1, the outlet of gas source 1；
Supply air line 18, supply air line 18 have two-way, and supply air line 18 includes sequentially connected first shut-off valve 4,8, pressure regulator valve 5,11
With the second shut-off valve 7,17；Two-way supply air line 18 converges into all the way as gas supply end 21；Scavenging pipeline 20, including venturi 15,
15 side suction inlet of venturi divides two-way to install third shut-off valve 6,16 respectively, after third shut-off valve 6,16 is connected to pressure regulator valve 5,11
End；Pulse backblowing pipeline 19, including it is sequentially connected blowback head 9,13 and the 4th shut-off valve 10,12, the connection of the 4th shut-off valve 10,12
Pressure regulator valve 5,11 front ends；The 6th shut-off valve is installed between the high pure nitrogen pipeline of 20 parallel connection of pulse backblowing pipeline 19 and scavenging pipeline
14；Blowback head 9,13 includes shell 910, and shell 910 is in infundibulate, the end of infundibulate big end fluted 909, in groove 909
Chuck for installing 904, while infundibulate big end installs end cap 902, end cap 902 blocks chuck 904 and plays position-limiting action, and end cap 902 is set
There is outlet as the second connector 901；904 center of chuck is provided with centre bore, and centre bore installs valve rod 906, and the disk of chuck 904 is also
It is provided with the stomata 905 of vent flow；Infundibulate small end is the first connector 912 for connecting compressed gas；Have inside shell 910 convex
Play 911；There is stem head 907 on 906 top of valve rod, and valve rod 906 is equipped with spring 908, and stem head 907 withstands convex under the action of the spring
It plays 911 and is truncated into two spaces inside shell 910.
Preferably, the end cap 902 and shell 910 are connected through a screw thread, if necessary in order to which sealing effect also needs
End cap 902 and the shimming of 910 sealing surface of shell, gasket can choose nickel gasket.
Preferably, 15 entrance of venturi and blowback head 9,13 connect compression high pure nitrogen, the pressure of high pure nitrogen
Control is acted in 90psi.
Preferably, the outlet of the venturi 15 connection combustion tower, is to meet air spontaneous combustion according to silane property, so combustion tower
It is continuous outside air blast, dilution residual silicone hydride waste gas prevents concentrated combustion from exploding.
Preferably, first connector 912 and the second connector 901 are VCR connectors, and VCR connector is used for aerospace industry earliest,
It is generally used in semiconductor optoelectronic manufacturing at present；VCR connector cleanliness height, good airproof performance, especially suitable for requiring nothing to let out
The pure system of the superelevation of leakage, ultra-high vacuum system and high-pressure system；VCR connector is easily installed, and has minimum disassembly gap, can be with
Repeated disassembled and assembled need to only re-replace new gasket.
Preferably, the valve rod 906, shell 910, chuck 904 and end cap 902 are concentric.
Preferably, the 5th shut-off valve 3 is housed, in use, all the way as spare, in arteries and veins between 18 two-way of supply air line
Single channel can also be purged when rushing blowback.
Operating procedure: after scavenging pipeline 20 is purged to entire supply air line, the silane of pipeline has descended to very low
Concentration dismantles gas source 1, keeps blowback air, and main valve 2, the 5th shut-off valve 3, the first shut-off valve 4,8 are also open at this time, other
Valve is closed；The 4th shut-off valve 10,12 is opened, the compressed nitrogen impact formation of stem head 907 builds the pressure, and pressure to be built the pressure is more than spring
After 908 elastic force, builds the pressure and wash stem head 907 open, high pressure draught enters pipeline；After pressure release, stem head 907 is due to spring
Protrusion 911 is blocked in 908 effect playback；Such one stifled one puts, and forms the silica of air pulse cleaning pipeline after disconnection
Source outlet is gone out.
It can be concluded that the device may be implemented to carry out pulse backblowing to silane supply line, prevent silicon dioxide powder
The destruction of foot couple pipe valve.
Disclosed above be only the preferred embodiment of the utility model, cannot limit the utility model certainly with this
Interest field, therefore according to the utility model claims make ground equivalent variations, still fall within the scope of the utility model.
Claims (7)
1. a kind of Pulse anti-blow device for high purity silane gas supply comprising:
Gas source (1), and
Supply air line (18), supply air line (18) have a two-way, supply air line (18) include sequentially connected first shut-off valve (4,
8), pressure regulator valve (5,11) and the second shut-off valve (7,17)；Two-way supply air line (18) converges into all the way as gas supply end (21)；
Scavenging pipeline (20), including venturi (15), venturi (15) side suction inlet divide two-way install respectively third shut-off valve (6,
16), third shut-off valve (6,16) is connected to pressure regulator valve (5,11) rear end；
Pulse backblowing pipeline (19), including it is sequentially connected blowback head (9,13) and the 4th shut-off valve (10,12), the 4th shut-off valve
(10,12) pressure regulator valve (5,11) front end is connected；
It is characterized in that, blowback head (9,13) includes shell (910), shell (910) is in infundibulate, and the end of infundibulate big end has
Groove (909), groove (909) interior chuck for installing (904), while infundibulate big end installation end cap (902), end cap (902) block
Chuck (904) plays position-limiting action, and end cap (902) is equipped with outlet and is used as the second connector (901)；Chuck (904) center is provided with center
Hole, centre bore install valve rod (906), and the disk of chuck (904) is also provided with the stomata (905) of vent flow；Infundibulate small end is to use
In the first connector (912) of connection compressed gas；There are raised (911) inside shell (910)；There is stem head on valve rod (906) top
(907), valve rod (906) is equipped with spring (908), and stem head (907) withstands raised (911) in shell under the action of the spring
(910) internal to be truncated into two spaces.
2. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that: the end cap
(902) it is connected through a screw thread with shell (910).
3. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that: the text mound
In (15) entrance and blowback head (9,13) connect compression high pure nitrogen.
4. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that: the text mound
In (15) outlet connection combustion tower.
5. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that: described first
Connector (912) and the second connector (901) are VCR connectors.
6. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that: the valve rod
(906), shell (910), chuck (904) and end cap (902) are concentric.
7. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that: the gas supply
5th shut-off valve (3) is housed between pipeline (18) two-way.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820833310.5U CN208253189U (en) | 2018-05-31 | 2018-05-31 | A kind of Pulse anti-blow device for high purity silane gas supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820833310.5U CN208253189U (en) | 2018-05-31 | 2018-05-31 | A kind of Pulse anti-blow device for high purity silane gas supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208253189U true CN208253189U (en) | 2018-12-18 |
Family
ID=64652476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820833310.5U Expired - Fee Related CN208253189U (en) | 2018-05-31 | 2018-05-31 | A kind of Pulse anti-blow device for high purity silane gas supply |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208253189U (en) |
-
2018
- 2018-05-31 CN CN201820833310.5U patent/CN208253189U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181218 Termination date: 20210531 |
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| CF01 | Termination of patent right due to non-payment of annual fee |