CN108644611A - A kind of Pulse anti-blow device for high purity silane gas supply - Google Patents
A kind of Pulse anti-blow device for high purity silane gas supply Download PDFInfo
- Publication number
- CN108644611A CN108644611A CN201810548406.1A CN201810548406A CN108644611A CN 108644611 A CN108644611 A CN 108644611A CN 201810548406 A CN201810548406 A CN 201810548406A CN 108644611 A CN108644611 A CN 108644611A
- Authority
- CN
- China
- Prior art keywords
- valve
- shut
- gas supply
- high purity
- infundibulate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/12—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
- F16K1/126—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened actuated by fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The invention discloses a kind of Pulse anti-blow devices for high purity silane gas supply comprising air source, supply air line, scavenging pipeline and pulse backblowing pipeline；Pulse backblowing pipeline, including it is sequentially connected blowback head and the 4th shut-off valve, the 4th shut-off valve connects pressure regulator valve front end；Blowback head includes shell, and shell is in infundibulate, and the end of infundibulate big end is fluted, chuck for installing in groove, while infundibulate big end installs end cap, and end cap blocks chuck and plays position-limiting action, and end cap is equipped with outlet and is used as the second connector；Chuck hub is provided with centre bore, and centre bore installs valve rod；Infundibulate small end is the first connector for connecting compressed gas；Enclosure interior has protrusion；Valve stem tip has stem head, valve rod to be equipped with spring, and stem head withstands protrusion and is truncated into two spaces inside housings under the action of the spring.The invention has the advantages that pulse backblowing prevents the destruction of silicon dioxide powder foot couple pipe valve.
Description
Technical field
The present invention relates to gases to supply field, more particularly, to a kind of Pulse anti-blow device for high purity silane gas supply.
Background technology
Silane is that semiconductor generates common gas, its property is flammable explosive gas, it is reacted with the oxygen in air
Generate SiO 2 powder.For high-purity pipeline, SiO 2 powder delay will produce negative effect in the duct, especially
It is if SiO 2 powder can cause to wear, in formation to the sealing surface of precision valve on long terms in the sealing surface of valve
Leakage, that is, valve can not have cut-off effect；So periodically to carry out pulse backblowing, especially gas to high purity silane supply line
After source is replaced, remains silane and be likely to form SiO 2 powder with the air for disconnecting air source entrance, but common gas flow purging
It is that can not clean completely, because air-flow is than shallower.
Invention content
To solve the above-mentioned problems, the present invention proposes a kind of Pulse anti-blow device for high purity silane gas supply.
To achieve the goals above, the present invention adopts the following technical scheme that：A kind of pulse for high purity silane gas supply is anti-
Blowing apparatus comprising：
Air source, and
Supply air line, it includes sequentially connected first shut-off valve, pressure regulator valve and the second cut-off that supply air line, which has two-way, supply air line,
Valve；Two-way supply air line converges into all the way as gas supply end；
Scavenging pipeline, including venturi, venturi side suction inlet divide two-way to install third shut-off valve respectively, and third shut-off valve is connected to
Pressure regulator valve rear end；
Pulse backblowing pipeline, including it is sequentially connected blowback head and the 4th shut-off valve, the 4th shut-off valve connects pressure regulator valve front end；
Blowback head includes shell, and shell is in infundibulate, and the end of infundibulate big end is fluted, and chuck for installing in groove leaks simultaneously
Bucket shape big end installs end cap, and end cap blocks chuck and plays position-limiting action, and end cap is equipped with outlet and is used as the second connector；Chuck hub is provided with
Centre bore, centre bore install valve rod；Infundibulate small end is the first connector for connecting compressed gas；Enclosure interior has protrusion；
Valve stem tip has stem head, valve rod to be equipped with spring, and stem head withstands protrusion and is truncated into two inside housings under the action of the spring
A space.
Further, the end cap and shell are connected through a screw thread.
Further, the venturi inlet connects with blowback head and connects compression high pure nitrogen.
Further, the venturi outlet connects combustion tower.
Further, first connector and the second connector are VCR connectors.
Further, the valve rod, shell, chuck and end cap are concentric.
Further, the 5th shut-off valve is housed between the supply air line two-way.
Compared with prior art, the beneficial effects of the present invention are：The device may be implemented to carry out silane supply line
Pulse backblowing prevents the destruction of silicon dioxide powder foot couple pipe valve.
Description of the drawings
Fig. 1 is the schematic diagram of the present invention；
Fig. 2 is the blowback head schematic diagram of the present invention；
Reference sign：1- air sources；2- main valves；The 5th shut-off valves of 3-；4, the first shut-off valves of 8-；5,11- pressure regulator valves；6、16-
Third shut-off valve；7, the second shut-off valves of 17-；；9,13- blowbacks head；The second connectors of 901-；902- end caps；904- chucks；905- gas
Hole；906- valve rods；907- stem heads；908- springs；909- grooves；910- shells；911- protrusions；The first connectors of 912-；10、
The 4th shut-off valves of 12-；The 6th shut-off valves of 14-；15- venturi；18- supply air lines；19- pulse backblowing pipelines；20- scavenging conduits
Road；21- supplies end.
Specific implementation mode
For a clearer understanding of the technical characteristics, objects and effects of the present invention, now control illustrates this hair
Bright specific implementation mode, but protection scope of the present invention be not limited to it is as described below.
As depicted in figs. 1 and 2, the present invention provides a kind of Pulse anti-blow devices for high purity silane gas supply comprising
Air source 1, supply air line 18, scavenging pipeline 20 and pulse backblowing pipeline 19, wherein：There are main valve 2 in air source 1, the outlet of air source 1；Gas supply
Pipeline 18, supply air line 18 have a two-way, and supply air line 18 includes sequentially connected first shut-off valve 4,8, pressure regulator valve 5,11 and the
Two shut-off valves 7,17；Two-way supply air line 18 converges into all the way as gas supply end 21；Scavenging pipeline 20, including venturi 15, literary mound
In 15 side suction inlets divide two-way that third shut-off valve 6,16 is installed respectively, third shut-off valve 6,16 is connected to pressure regulator valve 5,11 rear ends；Arteries and veins
Blowback pipeline 19 is rushed, including is sequentially connected blowback head 9,13 and the 4th shut-off valve 10,12, the 4th shut-off valve 10,12 connects pressure regulation
Valve 5,11 front ends；Blowback head 9,13 includes shell 910, and shell 910 is in infundibulate, and the end fluted 909 of infundibulate big end is recessed
Chuck for installing 904 in slot 909, while infundibulate big end installs end cap 902, end cap 902 blocks chuck 904 and plays position-limiting action, holds
Lid 902 is equipped with outlet and is used as the second connector 901；904 center of chuck is provided with centre bore, and centre bore installs valve rod 906；Infundibulate is small
End is the first connector 912 for connecting compressed gas；There is protrusion 911 inside shell 910；There is stem head on 906 top of valve rod
907, valve rod 907 is equipped with spring 908, and stem head 907 withstands protrusion 911 and is truncated into inside shell 910 under the action of the spring
Two spaces.
Preferably, the end cap 902 and shell 910 are connected through a screw thread, if necessary in order to which sealing effect also needs to
End cap 902 and the shimming of 910 sealing surface of shell, gasket can select nickel gasket.
Preferably, 15 entrance of the venturi and blowback head 9,13 connect compression high pure nitrogen, the pressure of high pure nitrogen
Control is acted in 90psi.
Preferably, the outlet of the venturi 15 connection combustion tower is to meet air spontaneous combustion according to silane property, so combustion tower
It is continuous outside air blast, dilution residual silicone hydride waste gas prevents concentrated combustion from exploding.
Preferably, first connector, 912 and second connector 901 is VCR connectors, and VCR connectors are used for aerospace industry earliest,
It is generally used in semiconductor optoelectronic manufacturing at present；VCR connectors cleanliness factor height, good airproof performance, especially suitable for requiring nothing to let out
The pure system of superelevation, ultra-high vacuum system and the high-pressure system of leakage；VCR connectors are easily installed, and have minimum dismounting gap, can be with
Repeated disassembled and assembled only need to re-replace new gasket.
Preferably, the valve rod 906, shell 910, chuck 904 and end cap 902 are concentric.
Preferably, between 18 two-way of the supply air line be equipped with the 5th shut-off valve 3, in use, all the way be used as it is spare, in arteries and veins
Single channel can also be purged when rushing blowback.
Operating procedure：After scavenging pipeline 20 is purged to entire supply air line, the silane of pipeline has descended to very low
Concentration dismantles air source 1, keeps blowback air, and main valve 2, the 5th shut-off valve 3, the first shut-off valve 4,8 are also open at this time, other
Valve is closed；The 4th shut-off valve 10,12 is opened, the compressed nitrogen impact formation of stem head 907 builds the pressure, and pressure to be built the pressure is more than spring
After 908 elastic force, builds the pressure and wash stem head 907 open, high pressure draught enters pipeline；After pressure release, stem head 907 is due to spring
Protrusion 911 is blocked in 908 effect playback；Such one stifled one puts, and forms the silica of air pulse Cleaning pipes after disconnection
Source outlet is gone out.
It can obtain, which may be implemented to carry out pulse backblowing to silane supply line, prevent silicon dioxide powder
The destruction of foot couple pipe valve.
Disclosed above is only presently preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly
It encloses, therefore makees ground equivalent variations according to the claims in the present invention, be still within the scope of the present invention.
Claims (7)
1. a kind of Pulse anti-blow device for high purity silane gas supply comprising：
Air source（1）, and
Supply air line（18）, supply air line（18）There are two-way, supply air line（18）Including sequentially connected first shut-off valve（4、
8）, pressure regulator valve（5、11）With the second shut-off valve（7、17）；Two-way supply air line（18）It converges into all the way as gas supply end（21）；
Scavenging pipeline（20）, including venturi（15）, venturi（15）Side suction inlet divides two-way to install third shut-off valve respectively（6、
16）, third shut-off valve（6、16）It is connected to pressure regulator valve（5、11）Rear end；
Pulse backblowing pipeline（19）, including it is sequentially connected blowback head（9、13）With the 4th shut-off valve（10、12）, the 4th shut-off valve
（10、12）Connect pressure regulator valve（5、11）Front end；
It is characterized in that, blowback head（9、13）Including shell（910）, shell（910）In infundibulate, the end of infundibulate big end has
Groove（909）, groove（909）Interior chuck for installing（904）, while infundibulate big end installs end cap（902）, end cap（902）It blocks
Chuck（904）Play position-limiting action, end cap（902）It is used as the second connector equipped with outlet（901）；Chuck（904）Center is provided with center
Hole, centre bore install valve rod（906）；Infundibulate small end is the first connector for connecting compressed gas（912）；Shell（910）
There is protrusion in inside（911）；Valve rod（906）There is stem head on top（907）, valve rod（907）Spring is installed（908）, stem head
（907）Protrusion is withstood under the action of the spring（911）In shell（910）Inside is truncated into two spaces.
2. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that：The end cap
（902）And shell（910）It is connected through a screw thread.
3. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that：The text mound
In（15）Entrance and blowback head（9、13）Connect compression high pure nitrogen.
4. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that：The text mound
In（15）Outlet connection combustion tower.
5. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that：Described first
Connector（912）With the second connector（901）It is VCR connectors.
6. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that：The valve rod
（906）, shell（910）, chuck（904）And end cap（902）With one heart.
7. a kind of Pulse anti-blow device for high purity silane gas supply as described in claim 1, it is characterised in that：The gas supply
Pipeline（18）5th shut-off valve is housed between two-way（3）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810548406.1A CN108644611A (en) | 2018-05-31 | 2018-05-31 | A kind of Pulse anti-blow device for high purity silane gas supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810548406.1A CN108644611A (en) | 2018-05-31 | 2018-05-31 | A kind of Pulse anti-blow device for high purity silane gas supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108644611A true CN108644611A (en) | 2018-10-12 |
Family
ID=63759067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810548406.1A Withdrawn CN108644611A (en) | 2018-05-31 | 2018-05-31 | A kind of Pulse anti-blow device for high purity silane gas supply |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108644611A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629951A (en) * | 2020-12-14 | 2021-04-09 | 内蒙古兴洋科技有限公司 | High-purity silane metal ion detection sampling device |
-
2018
- 2018-05-31 CN CN201810548406.1A patent/CN108644611A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629951A (en) * | 2020-12-14 | 2021-04-09 | 内蒙古兴洋科技有限公司 | High-purity silane metal ion detection sampling device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181012 |
|
| WW01 | Invention patent application withdrawn after publication |