CN208250410U - A kind of hot type pedestal with sealing structure - Google Patents
A kind of hot type pedestal with sealing structure Download PDFInfo
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- CN208250410U CN208250410U CN201820755354.0U CN201820755354U CN208250410U CN 208250410 U CN208250410 U CN 208250410U CN 201820755354 U CN201820755354 U CN 201820755354U CN 208250410 U CN208250410 U CN 208250410U
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- shell cover
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- sealing
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Abstract
The utility model discloses a kind of hot type pedestal with sealing structure, including upper shell cover and lower cover, upper shell cover and lower cover fixing card are connected into base body, through-hole is offered among the top of upper shell cover, heater block is interspersed in the inner cavity of hollow stem, sealing ring is connected in the top inner cavity of hollow stem, the lower edge fixed bonding of upper shell cover has second word sealing strip one, the top edge fixed bonding of lower cover has second word sealing strip two, the utility model utilizes second word sealing strip one and second word sealing strip two, clamping can be sealed by facilitating between lower cover and upper shell cover, pass through sealant, the access section of lower cover and upper shell cover can be again sealed off, and then guarantee the sealing effect of this pedestal, the sealing effect of this device is splendid, and it is convenient for people to use, also ensure the service life of this pedestal, utilize thermal insulation board, reduce scattering and disappearing for heat, Improve the transformation efficiency of heat.
Description
Technical field
The utility model relates to the technical field of sealing technology of heating pedestal, in particular to a kind of hot type with sealing structure
Pedestal.
Background technique
Heating pedestal is can be heated for equipment or some vessel, is demand to meet equipment heating, however half
It will be by film vapor deposition, pattern decorative and etch process etc. need to heat for several times on semiconductor process panel and color filer panel.
Such case, vapor deposition engineering are carried out in CVD process cavity or PECVD, installation pedestal inside CVD process cavity.Impact faces are just
Plane plate, the embedded heater in inside, heats vapor deposition with suitable temperature.
But traditional vapor deposition heating pedestal sealing effect is very poor, therefore has a large amount of air moisture and enter pedestal
In inner cavity, some impurity can corrode the internal structure of pedestal, and then cannot be guaranteed the service life of heating pedestal, the sealing of pedestal
Property will affect the service life of pedestal, if the moisture in atmosphere cannot thoroughly be isolated, cannot guarantee this device use the longevity
Structure inside life or this device, in consideration of it, we provide a kind of hot type pedestal with sealing structure.
Utility model content
To solve the above-mentioned problems, the utility model provides a kind of hot type pedestal with sealing structure.
One of the utility model has a hot type pedestal of sealing structure, including upper shell cover and lower cover, it is described on
Cap and lower cover fixing card are connected into base body, and plenum chamber is wherein formed between upper shell cover and lower cover, the upper shell cover
Through-hole, the inner cavity of the inner cavity connection plenum chamber of the through-hole are offered among top, the upper shell cover is fixedly connected on through-hole
There is hollow stem, heater block is interspersed in the inner cavity of the hollow stem, is connected with sealing in the top inner cavity of the hollow stem
Circle, the lower edge fixed bonding of the upper shell cover have second word sealing strip one, and the top edge fixed bonding of the lower cover has second word
Sealing strip two, wherein fixed clamping, the surrounding of the plenum chamber are bonded between second word sealing strip one and second word sealing strip two
The bottom end of sealant, the plenum chamber is equipped with thermal insulation board, and wherein the upper end of thermal insulation board is equipped with heater strip, and heater strip extruding connects
Upper shell cover is touched, the heater strip connects heater block.
In above scheme, sucker circle is fixedly connected on the inner sidewall of the sealing ring, wherein sucker circle is adsorbed on heating
On the lateral wall of device component.
In above scheme, the upper shell cover and hollow stem are mutually perpendicular to, and wherein upper shell cover and hollow stem are seamless welding.
In above scheme, the upper end wall of the lower cover and the lower end wall of upper shell cover are fixedly connected to B-mode fixture block, institute
Stating fixed bonding on the B-mode fixture block on lower cover has second word sealing strip two, fixed bonding on the B-mode fixture block on the upper shell cover
There is second word sealing strip one.
In above scheme, shape, the size of the second word sealing strip one and second word sealing strip two are mutually matched.
In above scheme, the shape of the hollow stem is hollow cylindrical, wherein the outer ring of the diameter of through-hole and hollow stem
Diameter is identical.
Advantages and beneficial effects of the utility model lie in that the utility model novel in structural design, easy to operate, facilitate people
Use, using lower cover and upper shell cover clamping assembling, facilitate this device disassembly, assembling, utilize second word sealing strip one and second
Word sealing strip two, clamping can be sealed by facilitating between lower cover and upper shell cover, by sealant, can be again sealed off lower cover and
The access section of upper shell cover, and then guarantee the sealing effect of this pedestal, the inner cavity that the moisture in air enters pedestal can be reduced
In, the design of part of impurity corrosion base interior is also reduced, is carried out using sealing ring and the convenient inner cavity to hollow stem of sucker circle
Sealing, also seals the heating element in hollow stem, and then guarantee that this pedestal will not be contacted with air, and then ensure that this
The service life of pedestal.
The sealing effect of this device is splendid, and is convenient for people to use, and also ensures the service life of this pedestal, and utilization is heat-insulated
Plate reduces scattering and disappearing for heat, improves the transformation efficiency of heat, and then facilitate in semiconductor technology panel and color filer panel
Film vapor deposition, and will not there is the moisture in air to enter in the inner cavity of pedestal during vapor deposition.
When in use, lower cover and upper shell cover first seal clamping to this device, wherein second word sealing strip one and second word sealing strip
Two seal against each other bonding, and wherein sealant is again sealed off lower cover and upper shell cover access section, and the article with heating is placed on
On cap, when heater block heating, the heat of heater block can pass to heater strip, the heat that wherein heater strip generates
Upper shell cover can be passed to, therefore is heated with heating article, does not have the moisture in air to enter pedestal while heating
Inner cavity in, therefore ensure that the service life of pedestal.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the overall structure diagram of the utility model.
Fig. 2 is the schematic cross-sectional view of the utility model.
In figure: 1- lower cover, 2- upper shell cover, 20- second word sealing strip one, 21- through-hole, 3- plenum chamber, 4- heater strip, in 5-
Empty bar, 6- heater block, 7- sealant, 8- sealing ring, 9- sucker circle, 10- second word sealing strip two, 11- thermal insulation board.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is further described.Implement below
Example is only used for clearly illustrating the technical solution of the utility model, and cannot be used as a limitation the protection model of limitation the utility model
It encloses.
As shown in Figs. 1-2, a kind of hot type pedestal with sealing structure, including upper shell cover 2 and lower cover 1, upper shell cover 2
It is connected into base body with 1 fixing card of lower cover, wherein forms plenum chamber 3, the top of upper shell cover 2 between upper shell cover 2 and lower cover 1
Centre offers through-hole 21, the inner cavity of the inner cavity connection plenum chamber 3 of through-hole 21, during upper shell cover 2 is fixedly connected on through-hole 21
Empty bar 5, upper shell cover 2 and hollow stem 5 are mutually perpendicular to, and wherein upper shell cover 2 and hollow stem 5 are seamless welding, and the shape of hollow stem 5 is
Hollow cylindrical, wherein the diameter of through-hole 21 is identical as the race diameter of hollow stem 5, the utility model novel in structural design, behaviour
Make simply, to be convenient for people to use, using lower cover 1 and the clamping assembling of upper shell cover 2, facilitates disassembly, the assembling of this device.
It is interspersed with heater block 6 in the inner cavity of hollow stem 5, sealing ring 8 is connected in the top inner cavity of hollow stem 5, it is close
Sucker circle 9 is fixedly connected on the inner sidewall of seal 8, wherein sucker circle 9 is adsorbed on the lateral wall of heater block 6, is utilized
Sealing ring 8 and sucker circle 9 are conveniently sealed the inner cavity of hollow stem 5, also seal the heating element 6 in hollow stem 5, in turn
Guarantee that this pedestal will not be contacted with air, and then ensure that the service life of this pedestal, the lower edge of upper shell cover 2 is fixed viscous
It is connected to second word sealing strip 1, the top edge fixed bonding of lower cover 1 has second word sealing strip 2 10, wherein second word sealing strip 1
The fixed clamping between second word sealing strip 2 10, the surrounding of plenum chamber 3 are bonded with sealant 7, the bottom end of plenum chamber 3 be equipped with every
Hot plate 11, wherein the upper end of thermal insulation board 11 is equipped with heater strip 4, and wherein heater strip 4 squeezes contact upper shell cover 2, and heater strip 4 connects
The sealing effect of heater block 6, this device is splendid, and is convenient for people to use, and also ensures the service life of this pedestal, utilizes
Thermal insulation board 11 reduces scattering and disappearing for heat, improves the transformation efficiency of heat, and then facilitate semiconductor technology panel and colorized optical filtering face
Film vapor deposition on plate.
The upper end wall of lower cover 1 and the lower end wall of upper shell cover 2 are fixedly connected to B-mode fixture block, B-mode on lower cover 1
Fixed bonding has second word sealing strip 2 10 on fixture block, and fixed bonding has second word sealing strip 1 on the B-mode fixture block on upper shell cover 2,
The shape of second word sealing strip 1 and second word sealing strip 2 10, size mutually match, and utilize second word sealing strip 1 and second word
Sealing strip 2 10, clamping can be sealed by facilitating between lower cover 1 and upper shell cover 2, by sealant 7, can be again sealed off lower casing
The access section of lid 1 and upper shell cover 2, and then guarantee the sealing effect of this pedestal, the moisture that can be reduced in air enters pedestal
Inner cavity in, also reduce impurity corrosion base interior design of part.
Working principle of the utility model is: this device is when in use, lower cover 1 and upper shell cover 2 first seal clamping, wherein second
Word sealing strip 1 and second word sealing strip 2 10 seal against each other bonding, and wherein sealant 7 is again sealed off lower cover 1 and upper shell cover 2
Access section is placed on the article with heating on upper shell cover 1, when heater block 6 heats, the heat meeting of heater block 6
Heater strip 4 is passed to, the heat that wherein heater strip 4 generates can pass to upper shell cover 1, therefore be heated with heating article,
There is no the moisture in air to enter in the inner cavity of pedestal while heating, therefore ensure that the service life of pedestal.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (6)
1. a kind of hot type pedestal with sealing structure, including upper shell cover (2) and lower cover (1), the upper shell cover (2) and under
Cap (1) fixing card is connected into base body, wherein forms plenum chamber (3) between upper shell cover (2) and lower cover (1), feature exists
In: it is offered through-hole (21) among the top of the upper shell cover (2), the inner cavity of the through-hole (21) is connected to the interior of plenum chamber (3)
Chamber, the upper shell cover (2) are fixedly connected with hollow stem (5) on through-hole (21), are interspersed with and add in the inner cavity of the hollow stem (5)
Hot device component (6) is connected with sealing ring (8) in the top inner cavity of the hollow stem (5), and the lower edge of the upper shell cover (2) is solid
Surely it is bonded with second word sealing strip one (20), the top edge fixed bonding of the lower cover (1) has second word sealing strip two (10), wherein
Fixed clamping between second word sealing strip one (20) and second word sealing strip two (10), the surrounding of the plenum chamber (3) is bonded with close
The bottom end of sealing (7), the plenum chamber (3) is equipped with thermal insulation board (11), and wherein the upper end of thermal insulation board (11) is equipped with heater strip
(4), and heater strip (4) squeezes contact upper shell cover (2), and the heater strip (4) connects heater block (6).
2. a kind of hot type pedestal with sealing structure according to claim 1, which is characterized in that the sealing ring
(8) sucker circle (9) are fixedly connected on inner sidewall, wherein sucker circle (9) is adsorbed on the lateral wall of heater block (6).
3. a kind of hot type pedestal with sealing structure according to claim 1, which is characterized in that the upper shell cover
(2) it is mutually perpendicular to hollow stem (5), wherein upper shell cover (2) and hollow stem (5) are seamless welding.
4. a kind of hot type pedestal with sealing structure according to claim 1, which is characterized in that the lower cover
(1) lower end wall of upper end wall and upper shell cover (2) is fixedly connected to B-mode fixture block, the B-mode fixture block on the lower cover (1)
Upper fixed bonding has second word sealing strip two (10), and fixed bonding has second word sealing strip on the B-mode fixture block on the upper shell cover (2)
One (20).
5. a kind of hot type pedestal with sealing structure according to claim 1, which is characterized in that the second word sealing
The shape of item one (20) and second word sealing strip two (10), size mutually match.
6. a kind of hot type pedestal with sealing structure according to claim 1, which is characterized in that the hollow stem
(5) shape is hollow cylindrical, and wherein the diameter of through-hole (21) is identical as the race diameter of hollow stem (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820755354.0U CN208250410U (en) | 2018-05-21 | 2018-05-21 | A kind of hot type pedestal with sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820755354.0U CN208250410U (en) | 2018-05-21 | 2018-05-21 | A kind of hot type pedestal with sealing structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208250410U true CN208250410U (en) | 2018-12-18 |
Family
ID=66480935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820755354.0U Active CN208250410U (en) | 2018-05-21 | 2018-05-21 | A kind of hot type pedestal with sealing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208250410U (en) |
-
2018
- 2018-05-21 CN CN201820755354.0U patent/CN208250410U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 230000 No. 1766, Jiudingshan Road, Xinzhan District, Hefei City, Anhui Province Patentee after: Hefei Weirui Technology Co.,Ltd. Address before: 230000 east of Jiudingshan road and south of Zhucheng Road, Xinzhan District, Hefei City, Anhui Province Patentee before: HEFEI WEIRUI OPTOELECTRONIC TECHNOLOGY CO.,LTD. |
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| CP03 | Change of name, title or address |