CN208240609U - A kind of automatic lifting scanning electron microscope example base system - Google Patents
A kind of automatic lifting scanning electron microscope example base system Download PDFInfo
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- CN208240609U CN208240609U CN201820604710.9U CN201820604710U CN208240609U CN 208240609 U CN208240609 U CN 208240609U CN 201820604710 U CN201820604710 U CN 201820604710U CN 208240609 U CN208240609 U CN 208240609U
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- worm
- gear elevator
- electron microscope
- scanning electron
- laser
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- 230000003028 elevating effect Effects 0.000 claims abstract description 17
- 230000008878 coupling Effects 0.000 claims abstract description 11
- 238000010168 coupling process Methods 0.000 claims abstract description 11
- 238000005859 coupling reaction Methods 0.000 claims abstract description 11
- 230000001681 protective effect Effects 0.000 claims abstract description 7
- 241000237858 Gastropoda Species 0.000 claims 1
- 239000000523 sample Substances 0.000 description 48
- 238000000034 method Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
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Abstract
The utility model relates to a kind of automatic lifting scanning electron microscope example base systems, belong to precision instrument technical field.The system includes lifting device, protective device; lifting device includes sample stage, sample stage bearing (ball) cover, elevating screw, worm and gear elevator extension socket I, worm and gear elevator extension socket II, worm and gear elevator, turntable, electric machine support, speed-down servo motor, shaft coupling, input worm screw; protective device includes laser emitter, laser pickoff; laser emitter, laser pickoff are separately positioned in the left and right sidewall of scanning electron microscope example room, and the laser of laser transmitter projects passes through scanning electron microscope example chamber interior and is irradiated on laser pickoff.The automatic lifting and position limitation protection of scanning electron microscope example may be implemented in the automatic lifting scanning electron microscope example base system of the utility model.
Description
Technical field
The utility model relates to a kind of automatic lifting scanning electron microscope example base systems, belong to precision instrument technical field.
Background technique
Scanning electron microscope is that a kind of novel electronic optical instrument is generated various by the interaction of electron beam and sample
Physical signal is imaged to modulate, and has high resolution, times magnification SerComm, three-dimensional stereo effect is good, the simple feature of sample preparation.
Wherein specimen holder is a significant components in scanning electron microscope, for carrying sample stage, and by sample motion to specified observation
Position.By taking Zeiss type scanning electron microscope as an example, which is driven by stepper motor, and the lifting and rotation of sample stage may be implemented
Turn, in application process, this structure is excessively complicated, and since step angle is not reasonable, so that sample stage is moved with specimen holder
When be easy to appear creeping phenomenon, and run-off the straight or even incline since manual operation fault will lead to sample stage in uphill process
It covers, is unfavorable for being accurately positioned sample at a distance from probe, probe is caused directly to contact with sample, so that probe damages
It is bad, it repairs probe and needs a large amount of man power and materials.
Utility model content
The utility model aims at the problems existing in the prior art, and provides a kind of automatic lifting scanning electron microscope example base system,
Scanning electron microscope sample is realized using the cooperation of screw lift, speed-down servo motor, laser emitter, laser pickoff, single-chip microcontroller
The automatic lifting and limit of product, to solve the problem of that existing mechanism kinematic is inaccurate and unprotect probe apparatus.Automatic lifting
Scanning electron microscope example base system rises instead of sample stage is manually controlled, and avoids the inclination due to misoperation bring sample stage
It even topples, saves manpower and time；Laser emitter and laser receiver cooperating rise to best observation in sample
The reception of laser beam is blocked in position, will automatically control speed-down servo motor and stop working, and solves existing scanning electron microscope unprotect
The problem of probe apparatus.
The utility model be solve its technical problem and the technical solution adopted is that:
A kind of automatic lifting scanning electron microscope example base system, including lifting device, protective device, lifting device include sample
Platform 1, sample stage bearing (ball) cover 2, elevating screw 3, worm and gear elevator extension socket I 4, worm and gear elevator extension socket
II, worm and gear elevator 5, turntable 7, electric machine support 9, speed-down servo motor 10, shaft coupling 11, input worm screw 13, sample stage 1
The lower part of scanning electron microscope example room is set, and 1 lower end of sample stage is fixedly installed sample stage bearing (ball) cover 2, the top of elevating screw 3
End is fixedly installed lead screw bearing, and lead screw bearing is fixedly connected with sample stage bearing (ball) cover 2, worm and gear elevator extension socket
I 4 are fixed at 5 top of worm and gear elevator, and worm and gear elevator extension socket II is fixed at worm and gear liter
The bottom end of drop machine 5, worm and gear elevator extension socket I 4, the inner turbine of worm and gear elevator 5, worm and gear elevator
Extension socket II is coaxial, and the lower end of elevating screw 3 sequentially passes through worm and gear elevator extension socket I 4, worm and gear elevator
The bottom end fixation at 5 inner turbine center, worm and gear elevator extension socket II, worm and gear elevator extension socket II is set
It sets on turntable 7, the input worm screw 13 of worm and gear elevator 5 is connected by the output shaft of shaft coupling 11 and speed-down servo motor 10
It connecing, the side of worm and gear elevator 5 is arranged in by electric machine support 9 for speed-down servo motor 10,
Protective device includes laser emitter 16, laser pickoff 15, and laser emitter 16, laser pickoff 15 are set respectively
It sets in the left and right sidewall of scanning electron microscope example room, the laser beam that laser emitter 16 emits passes through scanning electron microscope example chamber interior
It is irradiated on laser pickoff 15；
The automatic lifting scanning electron microscope example base system further includes control device, and control device includes single-chip microcontroller 14, meter
Calculation machine 17, speed-down servo motor 10, laser emitter 16, laser pickoff 15 are connect by data line with single-chip microcontroller 14 respectively,
Single-chip microcontroller 14 is connect by data line with computer 17；
The bottom end of the worm and gear elevator extension socket II is fixed on turntable 7 by sleeve connection flange 6,
Electric machine support 9 is fixed at the side of worm and gear elevator 5 by bracket fastening bolt 8, inputs worm screw 13, speed-down servo
The output shaft of motor 10 passes through holding screw 12 and is fixedly connected with shaft coupling 11.
The course of work of the utility model automatic lifting scanning electron microscope example base system:
Staff powers on when operating scanning electron microscope, is sent and is instructed to single-chip microcontroller by computer, drives laser
Transmitter emits laser beam, and laser beam passes through scanning electron microscope example room and received by laser receiver, and laser receiver will receive
Laser beam signal handled and fed back to single-chip microcontroller, signal after processing is passed to computer, computer control by single-chip microcontroller
The work of speed-down servo motor, the output end of speed-down servo motor drives the input worm screw rotation of worm and gear elevator, to drive
Elevating screw nut in dynamic worm and gear elevator rotates so that elevating screw completes lifting, when sample with
Elevating screw rises to best observation position, and the laser beam signal that laser emitter issues at this time is observed sample and blocks, laser
Receiver cannot receive the laser beam of laser generator sending, and laser pickoff is handled and fed back to single-chip microcontroller, monolithic
Signal is passed to computer by machine, and the response instruction for stopping lifting being sent to speed-down servo motor, speed-down servo electricity by computer
Machine stops working, sample stage stop motion.It both ensure that test specimen was in best observation position in this way, and in turn ensured the peace of probe
Entirely.
The utility model has the beneficial effects that
(1) the utility model goes up and down principle using ball-screw, easily controllable, and movement precisely, is less prone to creeping phenomenon,
Manipulation is convenient, realizes the automatic lifting of specimen holder；
(2) the utility model uses the position of laser transmitting-receiving device monitoring sample, and response is fast, passes through installation instead of previous
Camera reduces error come the method for observing the position of sample and probe, rises to best observation position in sample, blocks sharp
The reception of light beam will automatically control speed-down servo motor and stop working, and solve existing scanning electron microscope unprotect probe apparatus
Problem；
(3) the utility model rises instead of sample stage is manually controlled, and avoids due to misoperation bring sample stage
Inclination is even toppled, and manpower and time are saved；It is compact-sized, it is easy to dismount maintenance, it is low in cost；
(4) the utility model realizes using single-chip microcontroller and computer and automatically controls that programming is simple, and the visualization of program
Effect is good.
Detailed description of the invention
Fig. 1 is the schematic diagram of embodiment automatic lifting scanning electron microscope example base system；
Fig. 2 is the schematic perspective view (being free of control device) of embodiment automatic lifting scanning electron microscope example base system；
Wherein: 1- sample stage, 2- sample stage bearing (ball) cover, 3- elevating screw, 4- worm and gear elevator extension socket I,
5- worm and gear elevator, 6- sleeve connection flange, 7- turntable, 8- bracket fastening bolt, 9- electric machine support, 10- speed-down servo
Motor, 11- shaft coupling, 12- holding screw, 13- input worm screw, 14- single-chip microcontroller, 15- laser pickoff, 16- laser emitter,
17- computer.
Specific embodiment
With reference to embodiment, the utility model is described in further detail.
Embodiment 1: as shown in Figure 1 and 2, a kind of automatic lifting scanning electron microscope example base system, including lifting device, protection
Device, lifting device include sample stage 1, sample stage bearing (ball) cover 2, elevating screw 3, worm and gear elevator extension socket I 4,
Worm and gear elevator extension socket II, worm and gear elevator 5, turntable 7, electric machine support 9, speed-down servo motor 10, shaft coupling
The lower part of scanning electron microscope example room is arranged in device 11, input worm screw 13, sample stage 1, and 1 lower end of sample stage is fixedly installed sample stage
Bearing (ball) cover 2, the top of elevating screw 3 are fixedly installed lead screw bearing, lead screw bearing and the fixed company of sample stage bearing (ball) cover 2
It connects, worm and gear elevator extension socket I 4 is fixed at 5 top of worm and gear elevator, worm and gear elevator extension set
Cylinder II is fixed at the bottom end of worm and gear elevator 5, worm and gear elevator extension socket I 4, worm and gear elevator 5
Inner turbine, worm and gear elevator extension socket II it is coaxial, the lower end of elevating screw 3 sequentially passes through worm and gear elevator
Extension socket I 4, the inner turbine center of worm and gear elevator 5, worm and gear elevator extension socket II, worm and gear liter
The bottom end of drop machine extension socket II is fixed on turntable 7, and the input worm screw 13 of worm and gear elevator 5 passes through shaft coupling 11
With the output axis connection of speed-down servo motor 10, speed-down servo motor 10 is arranged by electric machine support 9 in worm and gear elevator 5
Side,
Protective device includes laser emitter 16, laser pickoff 15, and laser emitter 16, laser pickoff 15 are set respectively
It sets in the left and right sidewall of scanning electron microscope example room, the laser beam that laser emitter 16 emits passes through scanning electron microscope example chamber interior
It is irradiated on laser pickoff 15.
Automatic lifting scanning electron microscope example base system further includes control device in the present embodiment, and control device includes single-chip microcontroller
14, computer 17, speed-down servo motor 10, laser emitter 16, laser pickoff 15 pass through data line and single-chip microcontroller 14 respectively
Connection, single-chip microcontroller 14 are connect by data line with computer 17.
The bottom end of worm and gear elevator extension socket II is fixed at by sleeve connection flange 6 and is turned in the present embodiment
On platform 7, electric machine support 9 is fixed at the side of worm and gear elevator 5 by bracket fastening bolt 8, and input worm screw 13 subtracts
The output shaft of fast servo motor 10 passes through holding screw 12 and is fixedly connected with shaft coupling 11.
The course of work of the present embodiment automatic lifting scanning electron microscope example base system:
Staff powers on when operating scanning electron microscope, is sent and is instructed to single-chip microcontroller by computer, drives laser
Transmitter emits laser beam, and laser beam passes through scanning electron microscope example room and received by laser receiver, and laser receiver will receive
Laser beam signal handled and fed back to single-chip microcontroller, signal after processing is passed to computer, computer control by single-chip microcontroller
The work of speed-down servo motor, the output end of speed-down servo motor drives the input worm screw rotation of worm and gear elevator, to drive
Elevating screw nut in dynamic worm and gear elevator rotates so that elevating screw completes lifting, when sample with
Elevating screw rises to best observation position, and the laser beam signal that laser emitter issues at this time is observed sample and blocks, laser
Receiver cannot receive the laser beam of laser generator sending, and laser pickoff is handled and fed back to single-chip microcontroller, monolithic
Signal is passed to computer by machine, and the response instruction for stopping lifting being sent to speed-down servo motor, speed-down servo electricity by computer
Machine stops working, sample stage stop motion.It both ensure that test specimen was in best observation position in this way, and in turn ensured the peace of probe
Entirely.
Specific embodiment of the utility model is explained in detail above in conjunction with attached drawing, but the utility model and unlimited
In above-described embodiment, within the knowledge of a person skilled in the art, the utility model can also not departed from
Various changes can be made under the premise of objective.
Claims (3)
1. a kind of automatic lifting scanning electron microscope example base system, it is characterised in that: including lifting device, protective device, lifting dress
It sets including sample stage (1), sample stage bearing (ball) cover (2), elevating screw (3), worm and gear elevator extension socket I (4), worm gear
Worm screw elevator extension socket II, worm and gear elevator (5), turntable (7), electric machine support (9), speed-down servo motor (10),
The lower part of scanning electron microscope example room is arranged in shaft coupling (11), input worm screw (13), sample stage (1), and sample stage (1) lower end is fixed
It is provided with sample stage bearing (ball) cover (2), the top of elevating screw (3) is fixedly installed lead screw bearing, lead screw bearing and sample stage
Bearing (ball) cover (2) is fixedly connected, and worm and gear elevator extension socket I (4) is fixed at worm and gear elevator (5) top
End, worm and gear elevator extension socket II are fixed at the bottom end of worm and gear elevator (5), and worm and gear elevator prolongs
It is coaxial to stretch sleeve I (4), the inner turbine of worm and gear elevator (5), worm and gear elevator extension socket II, elevating screw
(3) lower end sequentially pass through worm and gear elevator extension socket I (4), worm and gear elevator (5) inner turbine center,
Worm and gear elevator extension socket II, the bottom end of worm and gear elevator extension socket II are fixed on turntable (7), snail
The input worm screw (13) of worm and gear elevator (5) passes through the output axis connection of shaft coupling (11) and speed-down servo motor (10), subtracts
Fast servo motor (10) is arranged by electric machine support (9) in the side of worm and gear elevator (5),
Protective device includes laser emitter (16), laser pickoff (15), laser emitter (16), laser pickoff (15) point
It is not arranged in the left and right sidewall of scanning electron microscope example room, the laser beam of laser emitter (16) transmitting passes through scanning electron microscope example
Chamber interior is irradiated on laser pickoff (15).
2. automatic lifting scanning electron microscope example base system according to claim 1, it is characterised in that: it further include control device,
Control device includes single-chip microcontroller (14), computer (17), and laser emitter (16), laser pickoff (15) pass through data line respectively
It is connect with single-chip microcontroller (14), speed-down servo motor (10), single-chip microcontroller (14) are connect by data line with computer (17).
3. automatic lifting scanning electron microscope example base system according to claim 1, it is characterised in that: worm and gear elevator prolongs
The bottom end for stretching sleeve II is fixed on turntable (7) by sleeve connection flange (6), and electric machine support (9) is fastened by bracket
Bolt (8) is fixed at the side of worm and gear elevator (5), inputs the output of worm screw (13), speed-down servo motor (10)
Axis passes through holding screw (12) and is fixedly connected with shaft coupling (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820604710.9U CN208240609U (en) | 2018-04-26 | 2018-04-26 | A kind of automatic lifting scanning electron microscope example base system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820604710.9U CN208240609U (en) | 2018-04-26 | 2018-04-26 | A kind of automatic lifting scanning electron microscope example base system |
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| Publication Number | Publication Date |
|---|---|
| CN208240609U true CN208240609U (en) | 2018-12-14 |
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ID=64585555
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820604710.9U Expired - Fee Related CN208240609U (en) | 2018-04-26 | 2018-04-26 | A kind of automatic lifting scanning electron microscope example base system |
Country Status (1)
| Country | Link |
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| CN (1) | CN208240609U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114509462A (en) * | 2022-02-18 | 2022-05-17 | 中国核动力研究设计院 | Scanning electron microscope shielding sample holder and system for radioactive test sample |
-
2018
- 2018-04-26 CN CN201820604710.9U patent/CN208240609U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114509462A (en) * | 2022-02-18 | 2022-05-17 | 中国核动力研究设计院 | Scanning electron microscope shielding sample holder and system for radioactive test sample |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181214 Termination date: 20190426 |
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| CF01 | Termination of patent right due to non-payment of annual fee |