CN208225854U - A kind of silicon wafer rejecting mechanism - Google Patents

A kind of silicon wafer rejecting mechanism Download PDF

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Publication number
CN208225854U
CN208225854U CN201820917957.6U CN201820917957U CN208225854U CN 208225854 U CN208225854 U CN 208225854U CN 201820917957 U CN201820917957 U CN 201820917957U CN 208225854 U CN208225854 U CN 208225854U
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China
Prior art keywords
silicon wafer
transport unit
rejecting
conveyer belt
unqualified
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CN201820917957.6U
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Chinese (zh)
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潘加永
戴秋喜
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Suzhou Ying Zhen Intelligent Technology Co Ltd
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Suzhou Ying Zhen Intelligent Technology Co Ltd
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Abstract

The utility model discloses a kind of silicon wafer rejecting mechanisms, for rejecting to the unqualified silicon wafer transported on silicon wafer conveyer belt, which includes the rejecting component being set to below silicon wafer conveyer belt and the silicon wafer detection components for being set to the rejecting component front end.Whether the silicon wafer that the silicon wafer detection components are used to detect on the silicon wafer conveyer belt is qualified;The rejecting component includes rack, the transport unit being mounted on the rack and the pulp-collecting box for being set to described transport unit one end, and the unqualified silicon wafer that the silicon wafer detection components detect is transported in the pulp-collecting box by the transport unit.The silicon wafer rejecting mechanism can accurately detect silicon wafer and send the unqualified silicon wafer taken, and according to flexibly starting rejects operation or do not start rejecting operation the case where unqualified silicon wafer, high degree of automation, convenient for control;And it is applied widely, it is applicable to reject the unqualified silicon wafer under various different situations, improves the transport efficiency of unqualified silicon wafer rejecting rate and silicon wafer.

Description

A kind of silicon wafer rejecting mechanism
Technical field
The utility model relates to crystal silicon solar energy battery fields, and in particular to a kind of silicon wafer rejecting mechanism.
Background technique
In the processing of crystal silicon solar energy battery, turned by transmission line from a station in silicon chip of solar cell The discomforts such as during moving to another station, various uncontrollable factors will lead to silicon wafer and occur splitting, lamination or breakage In back segment process or use the case where, need to eliminate the unqualified silicon wafer from transmission line, so as not to influence back segment Processing uses, and improves production efficiency.
Currently, unqualified silicon wafer is rejected from transmission line, that generally use is manual sorting, and worker's naked eyes differentiate transmission Unqualified silicon wafer on line manually picks the unqualified silicon wafer, time-consuming and laborious, and unqualified silicon wafer rejecting rate is low, and needs to pass Line sending pause transmission, reduces silicon wafer and transports efficiency.Also part of the manufacturer rejects unqualified silicon wafer using sucker, and sucker pair Silicon wafer there are certain requirements, and sucker can only draw a piece of, inefficiency every time when such as there is lamination;Silicon wafer badly broken or silicon wafer position Set offset it is more when, easily occur sucker can not normal extraction silicon wafer the problem of.
Utility model content
The purpose of the utility model is to provide a kind of silicon wafer rejecting machines in crystal silicon solar energy battery processing Structure, to solve above-mentioned the shortcomings of the prior art.
In order to solve the above technical problems, the technical solution adopted in the utility model is: providing a kind of silicon wafer rejecting mechanism, use The unqualified silicon wafer transported on to silicon wafer conveyer belt is rejected, which includes being set under silicon wafer conveyer belt The rejecting component of side and the silicon wafer detection components for being set to the rejecting component front end;
Wherein, whether the silicon wafer that the silicon wafer detection components are used to detect on the silicon wafer conveyer belt is qualified;
The rejecting component includes rack, the transport unit being mounted on the rack and is set to described transport unit one end The unqualified silicon wafer that the silicon wafer detection components detect is transported in the pulp-collecting box by pulp-collecting box, the transport unit;
First motor and the cam by first motor driving rotation, the cam are provided with below the transport unit Wheel rim abut the bottom of the transport unit, the transport unit can be driven to rise or fall for the cam of rotation so that the transport unit Transmission plane be higher or lower than the silicon wafer conveyer belt transmission plane;When the transmission plane of the transport unit is transmitted higher than the silicon wafer When the transmission plane of band, the transport unit jacks up the unqualified silicon wafer on the silicon wafer conveyer belt;
The transport unit includes multiple transfer rollers and the endless belt that is wound around on the multiple transfer roller, the nothing End conveyer belt is jacked up by the second motor driven below the transport unit is arranged in around the revolution of the multiple transfer roller with transporting The unqualified silicon wafer to the pulp-collecting box in, the operation of the traffic direction of the endless belt and the silicon wafer conveyer belt Direction is vertical.
As the improvement to above scheme, the silicon wafer rejecting mechanism further includes controller, for being examined according to the silicon wafer The testing result for surveying component controls the start and stop of the first motor and the second motor.
As the improvement to above scheme, the silicon wafer detection components include CCD camera, for obtaining the silicon wafer transmission The image information of silicon wafer is taken, and the image information is sent to the controller.
As the improvement to above scheme, the rejecting component further includes the position sensing being set in the transport unit Device for whether in place to detect the unqualified silicon wafer, and will test result and be sent to the controller.
As the improvement to above scheme, the position sensor is fiber position sensor.
As the improvement to above scheme, the rejecting component further includes being arranged between the transport unit and the cam Raising plate, the wheel rim of the cam abuts the bottom of the raising plate.
As the improvement to above scheme, the pulp-collecting box includes the box body of bracket and installation on the bracket, described The bottom of box body is set as domatic, is higher than the opposite other end close to one end of the transport unit.
Silicon wafer rejecting mechanism provided by the utility model can accurately detect silicon wafer and send the unqualified silicon wafer taken, and root According to flexibly starting rejects operation or does not start rejecting operation the case where unqualified silicon wafer, high degree of automation, convenient for control;And it is suitable It is wide with range, it is applicable to reject the unqualified silicon wafer under various different situations, improves unqualified silicon wafer rejecting rate and silicon wafer Transport efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of silicon wafer rejecting mechanism in the utility model embodiment;
Fig. 2 is the structural schematic diagram that component is rejected in the utility model embodiment;
Fig. 3 is the side view of Fig. 2;
Fig. 4 is the control block diagram of silicon wafer rejecting mechanism in the utility model embodiment.
The components in the drawings are labeled as follows: 1- silicon wafer conveyer belt;101- silicon wafer conveyer belt transmission plane;10- rejects component; 11- rack;12- transport unit;1201- transport unit transmission plane;121- transfer roller;122- endless belt;123- position sensor; 13- pulp-collecting box;131- bracket;132- box body;14- first motor;15- cam;151- raising plate;The second motor of 16-;17- control Device processed;171- compares component;20- silicon wafer detection components;21-CCD camera.
Specific embodiment
In the description of the present invention, it should be understood that term " on ", "lower", "front", "rear", "top", "bottom" The orientation or positional relationship of equal instructions is to be based on the orientation or positional relationship shown in the drawings, and being merely for convenience of description, this is practical new Type and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation Construction and operation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second " etc. are only used for retouching Purpose is stated, relative importance is not understood to indicate or imply or implicitly indicates the quantity of indicated technical characteristic.By This, the feature for defining " first ", " second " etc. can explicitly or implicitly include one or more of the features.At this In the description of utility model, it should be noted that unless otherwise clearly defined and limited, term " installation ", " connects " connected " Connect " it shall be understood in a broad sense, for example, it may be being fixedly connected, it may be a detachable connection, or be integrally connected;It can be machine Tool connection, can be directly connected, can also can be the connection inside two elements indirectly connected through an intermediary.It is right For those skilled in the art, can be understood by concrete condition above-mentioned term in the present invention specifically contain Justice.
The preferred embodiment of the utility model is described in detail with reference to the accompanying drawing, so that the advantages of the utility model It can be easier to be readily appreciated by one skilled in the art with feature, to make the protection scope of the utility model apparent clear Define.
Referring to Fig. 1, the utility model provides a kind of silicon wafer rejecting mechanism, be set on silicon wafer transmission line, for pair The unqualified silicon wafer transported on silicon wafer conveyer belt 1 is rejected, and the transport efficiency of silicon wafer, unqualified silicon wafer rejecting rate are improved Height can effectively avoid unqualified silicon wafer and flow into back segment station.Fig. 1 shows silicon wafer rejecting machine described in the utility model embodiment The structure of structure, the silicon wafer rejecting mechanism include being set to the rejecting component 10 of 1 lower section of silicon wafer conveyer belt and being set to the rejecting The silicon wafer detection components 20 of 10 front end of component, " preceding " at this refer to the updrift side of 1 carriage direction of silicon wafer conveyer belt, In, whether the silicon wafer that the silicon wafer detection components 20 are used to detect on the silicon wafer conveyer belt 1 is qualified, and the rejecting component 10 is used In unqualified silicon wafer detected by the detection components 20 is rejected from the conveyer belt 2.
Fig. 2 and Fig. 3 are please referred to, Fig. 2 shows the structure that silicon wafer described in the utility model embodiment rejects component 10, figures 3 show the side view structure that the silicon wafer rejects component 10, and the rejecting component 10 includes rack 11, is mounted on the rack 11 On transport unit 12 and be set to the pulp-collecting box 13 of described 12 one end of transport unit, the pulp-collecting box 13 is for storing unqualified silicon Piece, the transport unit 12 are used to the unqualified silicon wafer that the silicon wafer detection components 20 detect being transported to the pulp-collecting box 13 It is interior.Wherein, the transport unit 12 is set to the lower section of the silicon wafer conveyer belt 1, and the transmission plane 1201 of the transport unit 12 is lower than The transmission plane 101 of the silicon wafer conveyer belt 1;The pulp-collecting box 13 is set to the side of the silicon wafer conveyer belt 1;The transport unit 12 traffic direction is vertical with the traffic direction of the silicon wafer conveyer belt 1.
Further, the pulp-collecting box 13 includes bracket 131 and the box body 132 being mounted on the bracket 131, the box The bottom of body 132 is set as domatic, is higher than the opposite other end close to one end of the transport unit 12, in order to the transmission It transports the unqualified silicon wafer come and smoothly slides into the box body 132 in portion 12.
The lower section of the transport unit 12 is provided with first motor 14 and by the cam of the first motor 14 driving rotation 15, the wheel rim of the cam 15 abuts the bottom of the transport unit 12, and the cam 15 of rotation can drive the transport unit 12 to rise Or decline so that the transmission plane 1201 of the transport unit 12 is higher or lower than the transmission plane 101 of the silicon wafer conveyer belt 1;When described When the transmission plane 1201 of transport unit 12 is higher than the transmission plane 101 of the silicon wafer conveyer belt 1, the transport unit 12 passes the silicon wafer The unqualified silicon wafer on band 1 is sent to jack up, when the transmission plane 1201 of the transport unit 12 is lower than the transmission plane of the silicon wafer conveyer belt 1 When 101, the transport unit 12 resets.
In one embodiment, the rejecting component 10 further include setting the transport unit 12 and the cam 15 it Between raising plate 151, the wheel rim of the cam 15 abuts the bottom of the raising plate 151, and the cam 15 of rotation can drive described Raising plate 151 rises or falls that the transport unit 12 is driven to rise or fall.
The transport unit 12 includes multiple transfer rollers 121 and the transmission for no reason being wound around on the multiple transfer roller 121 Band 122, the endless belt 122 are driven by the second motor 16 below the transport unit 10 is arranged in around the multiple transmission Roller 121 is turned round to transport in the unqualified silicon wafer jacked up to the box body 132 of the pulp-collecting box 13, the endless belt 122 traffic direction is vertical with the traffic direction of the silicon wafer conveyer belt 1, and the transport unit 12 will be on the silicon wafer conveyer belt 1 Unqualified silicon wafer be transported in the pulp-collecting box 13 for being placed in 1 side of silicon wafer conveyer belt.In the present embodiment, it is described for no reason Conveyer belt 122 is provided with two to run parallel.
Referring to Fig. 4, in one embodiment, the silicon wafer rejecting mechanism further includes controller 17, the silicon wafer inspection The output end for surveying component 20 connects the input terminal of the controller 17, and the output end of the controller 17 connects the first motor 14 and second motor 16, the silicon wafer information that the silicon wafer detection components 20 are detected occurs to the controller 17, described Controller 17 includes comparing component 171, the qualification that compares component 171 and will prestore in the silicon wafer information and the controller Silicon wafer standard information compares, when the silicon wafer information is not consistent with the qualified silicon wafer standard information, the controller 17 successively send enabling signal to the first motor 14 and the second motor 16, transport the first motor 14 and the second motor 16 Row, the first motor 14 drive the rotation of cam 15 to drive the transport unit 12 to rise, make the biography of the transport unit 12 Send face high 1201 in the transmission plane 101 of the silicon wafer conveyer belt 1, the transport unit 12 is not by conforming on the silicon wafer conveyer belt 1 Lattice silicon wafer jacks up, and second motor 16 drives the endless belt 122 to turn round around the multiple transfer roller 121 to transport quilt In the unqualified silicon wafer to the pulp-collecting box 13 jacked up, the cam 15 continues rotation to drive the transport unit 12 to decline It resets;When the silicon wafer information is consistent with the qualified silicon wafer standard information, the first motor 14 and the second motor 16 are not Starting operation.
Further, the silicon wafer detection components 20 include CCD camera 21, and the CCD camera 21 can obtain the silicon wafer The image of silicon wafer on conveyer belt 1, and the image information is sent to the controller 17, the comparison component 171 will be described The silicon wafer standard information prestored on image information and the controller 17 compares, when the image information and the qualified silicon When piece standard information is not consistent, the controller 17 successively sends enabling signal to the first motor 14 and the second motor 16, Make the first motor 14 drive the rotation of cam 50 to drive the transport unit 12 to rise, makes the transmission of the transport unit 12 In the transmission plane 101 of the silicon wafer conveyer belt 1, the transport unit 12 will be unqualified on the silicon wafer conveyer belt 1 in face high 1201 Silicon wafer jacks up, and second motor 16 drives the endless belt 122 to turn round around the multiple transfer roller 121 and pushed up with transporting In the unqualified silicon wafer to the pulp-collecting box 13 risen.
In one embodiment, the rejecting component 10 further includes the position sensor being set in the transport unit 12 123, the position sensor 123 connects described its 17 input terminal of control, for whether in place to detect the unqualified silicon wafer, And will test result and be sent to the controller 17, when the unqualified silicon wafer in place when, i.e., the described unqualified silicon wafer reaches institute When stating the surface of transport unit 12, the controller 17 successively sends enabling signal to the first motor 14 and the second electricity Machine 16 makes the first motor 14 drive the rotation of cam 50 to drive the transport unit 12 to rise, makes the transport unit 12 Transmission plane high 1201 in the transmission plane 101 of the silicon wafer conveyer belt 1, the transport unit 12 will be on the silicon wafer conveyer belt 1 Unqualified silicon wafer jacks up, and second motor 16 drives the endless belt 122 to turn round around the multiple transfer roller 121 to transport It send in the unqualified silicon wafer to the pulp-collecting box 13 jacked up.
Further, the controller 17 can be PLC(Programmable Logic Controller, programmable to patrol Volume controller), FPGA(Field Programmable Gate Array, element programmable logic gate array) or CPU One of (Central Processing Unit, central processing unit);The position sensor 123 is high-precision detection silicon The fiber position sensor of piece position.
Silicon wafer rejecting mechanism provided by the utility model, when original state, the transport unit 12 is set to the silicon wafer The lower section of conveyer belt 1, the transmission plane 1201 of the transport unit 12 is lower than the transmission plane 101 of the silicon wafer conveyer belt 1, when described When silicon wafer detection components 20 detect that the silicon wafer on the silicon wafer conveyer belt 1 is unqualified, the first motor 14 drives described convex 15 rotation of wheel makes the transmission plane high 1201 of the transport unit 12 in the silicon wafer conveyer belt 1 to drive the transport unit 12 to rise Transmission plane 101, the transport unit 12 jacks up the unqualified silicon wafer on the silicon wafer conveyer belt 1, and second motor 16 drives The endless belt 122 is moved to be turned round around the multiple transfer roller 121 to transport the unqualified silicon wafer jacked up to described In pulp-collecting box 13, the cam 15 continues rotation to drive the transport unit 12 decline to reset, and the silicon wafer conveyer belt 1 is after reforwarding Send silicon wafer;When the silicon wafer detection components 20 detect the silicon wafer qualification on the silicon wafer conveyer belt 1, the first motor 14, the second motor 16 does not start operation, and the transport unit 12 is placed in the lower section of the silicon wafer conveyer belt 1, the transport unit 12 Transmission plane 1201 is lower than the transmission plane 101 of the silicon wafer conveyer belt 1, and the silicon wafer conveyer belt 1 transports qualified silicon wafer to next work Position.
In conclusion silicon wafer rejecting mechanism provided by the utility model, can accurately detect the silicon wafer and send on band 1 not Qualified silicon wafer, it is applied widely, it is applicable to reject the unqualified silicon wafer under various different situations, and according to unqualified silicon wafer Situation flexibly starts rejecting operation or does not start rejecting operation, high degree of automation, convenient for control.
The above description is only the embodiments of the present invention, and therefore it does not limit the scope of the patent of the utility model, all Equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, is applied directly or indirectly in Other related technical areas are also included in the patent protection scope of the utility model.

Claims (7)

1. a kind of silicon wafer rejecting mechanism, for being rejected to the unqualified silicon wafer transported on silicon wafer conveyer belt, which is characterized in that The silicon wafer rejecting mechanism includes the rejecting component being set to below silicon wafer conveyer belt and the silicon for being set to the rejecting component front end Piece detection components;
Wherein, whether the silicon wafer that the silicon wafer detection components are used to detect on the silicon wafer conveyer belt is qualified;
The rejecting component includes rack, the transport unit being mounted on the rack and the splicing for being set to described transport unit one end The unqualified silicon wafer that the silicon wafer detection components detect is transported in the pulp-collecting box by box, the transport unit;
First motor and the cam by first motor driving rotation, the wheel of the cam are provided with below the transport unit Edge abuts the bottom of the transport unit, the cam of rotation the transport unit can be driven to rise or fall so that the transport unit biography The transmission plane for sending face to be higher or lower than the silicon wafer conveyer belt;When the transmission plane of the transport unit is higher than the silicon wafer conveyer belt When transmission plane, the transport unit jacks up the unqualified silicon wafer on the silicon wafer conveyer belt;
The transport unit includes multiple transfer rollers and the endless belt that is wound around on the multiple transfer roller, described to pass for no reason Band is sent to be turned round by the second motor driven below the transport unit is arranged in around the multiple transfer roller to transport the institute jacked up It states in unqualified silicon wafer to the pulp-collecting box, the traffic direction of the traffic direction of the endless belt and the silicon wafer conveyer belt Vertically.
2. silicon wafer rejecting mechanism according to claim 1, which is characterized in that the silicon wafer rejecting mechanism further includes control Device, for controlling the start and stop of the first motor and the second motor according to the testing result of the silicon wafer detection components.
3. silicon wafer rejecting mechanism according to claim 2, which is characterized in that the silicon wafer detection components include CCD camera, The controller is sent to for obtaining the image information of silicon wafer on the silicon wafer conveyer belt, and by the image information.
4. silicon wafer rejecting mechanism according to claim 2, which is characterized in that the rejecting component further include be set to it is described Position sensor in transport unit for whether in place to detect the unqualified silicon wafer, and will test result and be sent to the control Device processed.
5. silicon wafer rejecting mechanism according to claim 4, which is characterized in that the position sensor is fiber position sensing Device.
6. silicon wafer rejecting mechanism according to claim 1, which is characterized in that the rejecting component further includes being arranged described Raising plate between transport unit and the cam, the wheel rim of the cam abut the bottom of the raising plate.
7. silicon wafer rejecting mechanism according to claim 1, which is characterized in that the pulp-collecting box includes bracket and is mounted on institute The box body on bracket is stated, the bottom of the box body is set as domatic, is higher than close to one end of the transport unit opposite another End.
CN201820917957.6U 2018-06-14 2018-06-14 A kind of silicon wafer rejecting mechanism Active CN208225854U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109604542A (en) * 2019-01-31 2019-04-12 贵阳振兴铝镁科技产业发展有限公司 A kind of abnormity aluminium ingot screening system and method
CN109604541A (en) * 2019-01-31 2019-04-12 贵阳振兴铝镁科技产业发展有限公司 A kind of abnormity aluminium ingot lifting discharger and method
CN114675510A (en) * 2022-05-30 2022-06-28 上海图双精密装备有限公司 Wafer placing device of photoetching machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109604542A (en) * 2019-01-31 2019-04-12 贵阳振兴铝镁科技产业发展有限公司 A kind of abnormity aluminium ingot screening system and method
CN109604541A (en) * 2019-01-31 2019-04-12 贵阳振兴铝镁科技产业发展有限公司 A kind of abnormity aluminium ingot lifting discharger and method
CN114675510A (en) * 2022-05-30 2022-06-28 上海图双精密装备有限公司 Wafer placing device of photoetching machine

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