CN208223889U - A kind of fluid sample sampling apparatus suitable for production of polysilicon - Google Patents
A kind of fluid sample sampling apparatus suitable for production of polysilicon Download PDFInfo
- Publication number
- CN208223889U CN208223889U CN201820782209.1U CN201820782209U CN208223889U CN 208223889 U CN208223889 U CN 208223889U CN 201820782209 U CN201820782209 U CN 201820782209U CN 208223889 U CN208223889 U CN 208223889U
- Authority
- CN
- China
- Prior art keywords
- sampling
- valve
- needle
- pipeline
- polysilicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005070 sampling Methods 0.000 title claims abstract description 108
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 15
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 15
- 239000012530 fluid Substances 0.000 title claims abstract description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 11
- 238000000746 purification Methods 0.000 claims abstract description 10
- 239000002912 waste gas Substances 0.000 claims abstract description 10
- 230000008676 import Effects 0.000 claims abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000003610 charcoal Substances 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- QJGQUHMNIGDVPM-OUBTZVSYSA-N nitrogen-15 Chemical compound [15N] QJGQUHMNIGDVPM-OUBTZVSYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a kind of fluid sample sampling apparatuses suitable for production of polysilicon, including passing through the sequentially connected sampling media import of pipeline, imported valve, threeway sampling valve, outlet valve and sampling media outlet, cooler is provided on pipeline between the imported valve and threeway sampling valve, the Sampling Interface of threeway sampling valve lower part is connected with sampling needle by sample lines, the sampling needle is located in sampling bottle, sampling bottle top bottleneck is connected with exhaust needle, the exhaust needle air inlet is higher than the outlet of sampling needle, the exhaust needle is connected with exhaust valve and active carbon waste gas purification component in turn by pipeline, the sample lines also pass through pipeline and are sequentially connected there are two check-valves, isolating valve, and source nitrogen.Its structure is simple, easy to use, realizes the zero-emission of enclosed sampling and pollution, Environmental Safety.
Description
Technical field
The utility model relates to sampling apparatus technical field more particularly to a kind of fluid samples suitable for production of polysilicon
Sampling apparatus.
Background technique
In the production of polysilicon, it is often necessary to which the volatile or toxic liquid generated to it is sampled.It is existing
Sampler cannot much achieve the effect that enclosed sampling, be easy operator is damaged, also be easy pollution environment；And
Existing enclosed sampling apparatus structure is complicated, be easy to cause overflow, and the discharge of exhaust gas is easy pollution environment.
Utility model content
The utility model is intended to provide a kind of fluid sample sampling apparatus suitable for production of polysilicon, very good solution
The above problem, structure is simple, easy to use, realizes the zero-emission of enclosed sampling and pollution, Environmental Safety.
The technical solution of the utility model is a kind of fluid sample sampling apparatus suitable for production of polysilicon, including is passed through
The sequentially connected sampling media import of pipeline, imported valve, threeway sampling valve, outlet valve and sampling media outlet, it is described into
Cooler is provided on pipeline between mouth valve and threeway sampling valve, the Sampling Interface of threeway sampling valve lower part is by adopting
Sample piping connection has sampling needle, and the sampling needle is located in sampling bottle, and sampling bottle top bottleneck is connected with exhaust needle, described
Exhaust needle air inlet is higher than the outlet of sampling needle, and the exhaust needle is connected with exhaust valve in turn by pipeline and active carbon exhaust gas is net
Change component, the sample lines also pass through pipeline and are sequentially connected there are two check-valves, isolating valve, and source nitrogen.
Further, the threeway sampling valve is threeway aciculiform sampling valve.
Further, the cooler includes heat exchange box, and the pipeline between the imported valve and threeway sampling valve is changing
The arrangement of hot tank inside spin, the heat exchange box both ends are connected separately with recirculated water inlet pipe and recirculated water outlet pipe.
Further, protective cover, observation window on the protective cover are provided with outside the sampling bottle.
Further, the pipeline is 316L stainless steel material.
Further, the material of the sampling bottle is PFA plastics.
Further, the active carbon waste gas purification module back is provided with liquid absorption slot.
The beneficial effects of the utility model are:
1. its structure of the utility model is simple, easy to use, the zero-emission of enclosed sampling and pollution is realized；Sampling process
It is closed, the leakage of sample is avoided, sample effect is good, ensure that the safety of operator；It is net that active carbon exhaust gas is used simultaneously
Change two kinds of emission-control equipments of component and liquid absorption slot, effectively absorbs exhaust gas, it is therefore prevented that the pollution of environment；
2. be provided with protective cover outside sampling bottle, ensure that sampling bottle using safe, protective cover, which has, to be seen
Window is examined, can clearly be seen sampling quantity, sampling flow is controllable, avoids overflow.
Detailed description of the invention
Fig. 1 is the utility model Structure and Process schematic diagram；
In figure: 1. sampling media imports, 2. imported valves, 3. threeway sampling valves, 4. outlet valves, 5. sampling medias go out
Mouthful, 6. coolers, 61. recirculated water inlet pipes, 62. recirculated water outlet pipes, 7. sample lines, 8. sampling needles, 9. sampling bottles, 10. exhausts
Needle, 11. exhaust valves, 12. active carbon waste gas purification components, 13. check-valves, 14. isolating valve,s, 15. source nitrogens, 16. metal coatings
Cover, 17. observation windows, 18. liquid absorption slots.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing, to this reality
It is further elaborated with novel.
As shown in Figure 1, the utility model provides a kind of fluid sample sampling apparatus suitable for production of polysilicon, including
It is exported by the sequentially connected sampling media import 1 of pipeline, imported valve 2, threeway sampling valve 3, outlet valve 4 and sampling media
5, cooler 6 is provided on the pipeline between the imported valve 2 and threeway sampling valve 3, and 3 lower part of threeway sampling valve is adopted
Sample interface is connected with sampling needle 8 by sample lines 7, and the sampling needle 8 is located in sampling bottle 9, the 9 top bottleneck of sampling bottle
It is connected with exhaust needle 10,10 air inlet of exhaust needle is higher than the outlet of sampling needle 8, and the exhaust needle 10 is successively connected by pipeline
It is connected to exhaust valve 11 and active carbon waste gas purification component 12, the sample lines 7 are also sequentially connected that there are two non-returns by pipeline
Valve 13, isolating valve, 14 and source nitrogen 15.
The threeway sampling valve 3 is threeway aciculiform sampling valve, and connection is closed flexibly, long service life, good reliability.It is described
Cooler 6 includes heat exchange box, and the pipeline between the imported valve 2 and threeway sampling valve 3 is arranged in heat exchange box inside spin, described
Heat exchange box both ends are connected separately with recirculated water inlet pipe 61 and recirculated water outlet pipe 62, and exchange heat good cooling results.Outside the sampling bottle 9
It is provided with protective cover 16, observation window 17 on the protective cover 16.The pipeline is 316L stainless steel material, pressure-bearing
Effect is good.The material of the sampling bottle 9 is PFA plastics, and anticorrosion effect is good.12 rear portion of active carbon waste gas purification component is set
It is equipped with liquid absorption slot 18.Water is placed in liquid absorption slot 18 or other absorb exhaust gas or short grained liquid, reaches net
Change the effect of gas.
1. nitrogen purges, 3 sampling media pipeline of threeway sampling valve is closed, and nitrogen is entered by source nitrogen 15, passed sequentially through
Isolating valve, 14 and two check-valves 13, by sampling needle 8 enter sampling bottle 9, sampling bottle 9 is purged, then nitrogen again according to
It is secondary to be discharged by exhaust needle 10, exhaust valve 11, active carbon waste gas purification component 12 and liquid absorption slot 18.
2. when sampling, the isolating valve, 14 on 15 pipeline of source nitrogen is closed, the sampling media import 1 of threeway sampling valve 3 and adopt
Sample orifice, sampling media successively enter sampling bottle 9 through subcooler 6, sampling needle 8 from sampling media import 1, and extra is useless
Gas is successively discharged by exhaust needle 10, exhaust valve 11, active carbon waste gas purification component 12 and liquid absorption slot 18 again.
3. do not sample, the Sampling Interface of threeway sampling valve 3 is closed, and sampling media import 1 and sampling media outlet 5 are directly
Connection.
Its structure of the utility model is simple, easy to use, realizes the zero-emission of enclosed sampling and pollution；Sampling process is close
It closes, avoids the leakage of sample, sample effect is good, ensure that the safety of operator；Active carbon waste gas purification is used simultaneously
18 two kinds of emission-control equipments of component 12 and liquid absorption slot, effectively absorb exhaust gas, it is therefore prevented that the pollution of environment；Sampling bottle
Protective cover 16 is provided with outside 9, ensure that sampling bottle 9 using safe, protective cover 16 has observation window 17, can be clear
Sampling quantity is seen by Chu, and sampling flow is controllable, avoids overflow.
Certainly, the utility model can also have other various embodiments, without departing substantially from the spirit of the present invention and its essence
In the case of, those skilled in the art can make various corresponding changes and modifications, but these phases according to the utility model
The change and modification answered all should belong to the protection scope of the utility model the attached claims.
Claims (7)
1. a kind of fluid sample sampling apparatus suitable for production of polysilicon, it is characterised in that: including being sequentially connected by pipeline
Sampling media import, imported valve, threeway sampling valve, outlet valve and sampling media outlet, the imported valve and threeway
Cooler is provided on pipeline between sampling valve, the Sampling Interface of threeway sampling valve lower part is connected with by sample lines
Sampling needle, the sampling needle are located in sampling bottle, and sampling bottle top bottleneck is connected with exhaust needle, the exhaust needle air inlet
Higher than the outlet of sampling needle, the exhaust needle is connected with exhaust valve and active carbon waste gas purification component in turn by pipeline, described
Sample lines also pass through pipeline and are sequentially connected there are two check-valves, isolating valve, and source nitrogen.
2. the fluid sample sampling apparatus according to claim 1 suitable for production of polysilicon, it is characterised in that: described three
Logical sampling valve is threeway aciculiform sampling valve.
3. the fluid sample sampling apparatus according to claim 1 suitable for production of polysilicon, it is characterised in that: described cold
But device includes heat exchange box, and the pipeline between the imported valve and threeway sampling valve is arranged in heat exchange box inside spin, the heat exchange
Case both ends are connected separately with recirculated water inlet pipe and recirculated water outlet pipe.
4. the fluid sample sampling apparatus according to claim 1 suitable for production of polysilicon, it is characterised in that: described to adopt
Protective cover, observation window on the protective cover are provided with outside sample bottle.
5. the fluid sample sampling apparatus according to claim 1 suitable for production of polysilicon, it is characterised in that: the pipe
Road is 316L stainless steel material.
6. the fluid sample sampling apparatus according to claim 1 suitable for production of polysilicon, it is characterised in that: described to adopt
The material of sample bottle is PFA plastics.
7. the fluid sample sampling apparatus according to claim 1 suitable for production of polysilicon, it is characterised in that: the work
Property charcoal waste gas purification module back is provided with liquid absorption slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820782209.1U CN208223889U (en) | 2018-05-24 | 2018-05-24 | A kind of fluid sample sampling apparatus suitable for production of polysilicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820782209.1U CN208223889U (en) | 2018-05-24 | 2018-05-24 | A kind of fluid sample sampling apparatus suitable for production of polysilicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208223889U true CN208223889U (en) | 2018-12-11 |
Family
ID=64505788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820782209.1U Expired - Fee Related CN208223889U (en) | 2018-05-24 | 2018-05-24 | A kind of fluid sample sampling apparatus suitable for production of polysilicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208223889U (en) |
-
2018
- 2018-05-24 CN CN201820782209.1U patent/CN208223889U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181211 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |