CN208195042U - silicon chip cleaning device - Google Patents
silicon chip cleaning device Download PDFInfo
- Publication number
- CN208195042U CN208195042U CN201820092651.1U CN201820092651U CN208195042U CN 208195042 U CN208195042 U CN 208195042U CN 201820092651 U CN201820092651 U CN 201820092651U CN 208195042 U CN208195042 U CN 208195042U
- Authority
- CN
- China
- Prior art keywords
- base disk
- fixedly connected
- top plate
- rotation axis
- grip block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses a kind of silicon chip cleaning devices, including base disk, the bottom of the base disk is fixedly installed with recycling bins, there are two the support columns being vertically arranged for the top fixed installation of the base disk, top plate is welded at the top of the support column, the rotation axis being vertically arranged is rotatably equipped on the top plate, the bottom of the rotation axis, which extends to, is fixedly connected with U-shaped frame below top plate, motor is fixedly installed at the top of the top plate, belt pulley is arranged on the output shaft and rotation axis of motor, belt pulley is equipped with belt, multiple grip blocks are slidably fitted in U-shaped frame, multiple springs are arranged in the U-shaped frame, spring is between grip block, holding tank is offered on the grip block, load-bearing pillar is rotatably equipped at the top of base disk, the top of the load-bearing pillar is fixedly connected with grip block.The utility model realizes the batch cleaning of silicon wafer, and cleaning effect is good, and cleaning efficiency is high, while saving water resource, easy to use, easy to spread.
Description
Technical field
The utility model relates to silicon chip technology field more particularly to a kind of silicon chip cleaning devices.
Background technique
In silicon wafer process of manufacture, silicon wafer can be cleaned, since silicon wafer is sheet, be needed when cleaning
Artificial overturning silicon wafer, can just obtain comprehensive cleaning, and existing cleaning efficiency is low, at the same when cleaning to sleep because
This, needs a kind of silicon chip cleaning device to solve problem above.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of Wafer Cleaning dress proposed
It sets.
To achieve the goals above, the utility model adopts the technical scheme that
Silicon chip cleaning device, including base disk, the bottom of the base disk are fixedly installed with recycling bins, the base disk
Top is fixedly mounted there are two the support column that is vertically arranged, is welded with top plate at the top of the support column, rotates on the top plate
The rotation axis being vertically arranged is installed, the bottom of the rotation axis extends to and is fixedly connected with U-shaped frame below top plate, the top
It is fixedly installed with motor at the top of plate, belt pulley is arranged on the output shaft and rotation axis of motor, belt pulley is equipped with belt,
Be slidably fitted with multiple grip blocks in the U-shaped frame, multiple springs be arranged in the U-shaped frame, spring between grip block,
Offer holding tank on the grip block, be rotatably equipped with load-bearing pillar at the top of the base disk, the top of the load-bearing pillar with
Grip block is fixedly connected, and the support column is equipped with placed cavity, is fixedly installed with isocon in placed cavity, is set on the isocon
There is water injector, the U-shaped frame is equipped with cylinder, and the piston rod of cylinder is fixedly connected with grip block.
Preferably, it is equipped with horizontally disposed filter screen in the recycling bins, offers multiple recirculation holes on base disk, circulates
Hole is located at the surface of recycling bins, and the side of recycling bins is fixedly connected with outlet pipe, and the level height of outlet pipe is higher than filter screen
Level height.
Preferably, the water injector is fixedly connected by branch pipe and sprinkler composition, branch pipe with isocon, and one end of branch pipe is prolonged
The outside for extending to support column is fixedly connected with spray head, and the side of support column is equipped with water inlet pipe, is connected at the top of water inlet pipe and isocon
It is logical.
Preferably, be fixedly installed with bearing on the base disk and top plate, two bearings be sheathed on respectively rotation axis and
On load-bearing pillar.
Preferably, the holding tank is multiple, the equidistant top and bottom for being symmetrically disposed on grip block of multiple holding tanks.
The beneficial effects of the utility model are: silicon wafer is stuck in two by close to each other between cylinder promotion grip block
Between holding tank, gripping for silicon wafer is realized, silicon wafer is rinsed by water injector, during flushing, motor
U-shaped frame rotation is driven, silicon wafer rotation is driven, guarantees the comprehensive cleaning of silicon wafer, cleaning effect is good, and batch cleans, cleaning efficiency
Height, the water cleaned can be re-used, and save water resource.The utility model realizes the batch cleaning of silicon wafer, cleaning effect
Fruit is good, and cleaning efficiency is high, while saving water resource, easy to use, easy to spread.
Detailed description of the invention
Fig. 1 be the utility model proposes silicon chip cleaning device structural schematic diagram；
Fig. 2 is the schematic cross-sectional view of support column.
In figure: 1 base disk, 2 recycling bins, 3 support columns, 4 top plates, 5 rotation axis, 6 motors, 7 belt pulleys, 8 belts, 9U shape
Frame, 10 grip blocks, 11 springs, 12 holding tanks, 13 load-bearing pillars, 14 cylinders, 15 placed cavities, 16 isocons, 17 water injectors.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
Referring to Fig.1-2, silicon chip cleaning device, including base disk 1, the bottom of base disk 1 are fixedly installed with recycling bins 2, bottom
The top of attic base 1 is fixedly mounted there are two the support column 3 being vertically arranged, and the top of support column 3 is welded with top plate 4, turns on top plate 4
Dynamic to be equipped with the rotation axis 5 being vertically arranged, the lower section that the bottom of rotation axis 5 extends to top plate 4 is fixedly connected with U-shaped frame 9, top plate
4 top is fixedly installed with motor 6, is arranged with belt pulley 7 on the output shaft and rotation axis 5 of motor 6, belt pulley 7 is equipped with
Belt 8 is slidably fitted with multiple grip blocks 10 in U-shaped frame 9, and multiple springs 11 are arranged in U-shaped frame 9, and spring 11 is located at clamping
Between plate 10, holding tank 12 is offered on grip block 10, the top of base disk 1 is rotatably equipped with load-bearing pillar 13, load-bearing pillar 13
Top is fixedly connected with grip block 10, and support column 3 is equipped with placed cavity 15, is fixedly installed with isocon 16 in placed cavity 15, point
Flow tube 16 is equipped with water injector 17, and U-shaped frame 9 is equipped with cylinder 14, and the piston rod of cylinder 14 is fixedly connected with grip block 10.
In the present embodiment, it is equipped with horizontally disposed filter screen in recycling bins 2, offers multiple recirculation holes on base disk 1, flows
Through-hole is located at the surface of recycling bins 2, and the side of recycling bins 2 is fixedly connected with outlet pipe, and the level height of outlet pipe was higher than
The level height of strainer, water injector 17 are fixedly connected by branch pipe and sprinkler composition, branch pipe with isocon 16, and one end of branch pipe is prolonged
The outside for extending to support column 3 is fixedly connected with spray head, and the side of support column 3 is equipped with water inlet pipe, the top of water inlet pipe and isocon 16
Portion is connected to, and is fixedly installed with bearing on base disk 1 and top plate 4, two bearings are sheathed on rotation axis 5 and load-bearing pillar 13 respectively
On, holding tank 12 be it is multiple, multiple equidistant top and bottoms for being symmetrically disposed on grip block 10 of holding tank 12 pass through cylinder 14
It is close to each other between promotion grip block 10, silicon wafer is stuck between two holding tanks 12, realizes gripping for silicon wafer, passes through spray
Water installations 17 are rinsed silicon wafer, and during flushing, motor 6 drives U-shaped frame 9 to rotate, and drive silicon wafer rotation, guarantee silicon
The comprehensive cleaning of piece, cleaning effect is good, and batch cleans, and cleaning efficiency is high, and the water cleaned can be re-used, and saves water
Resource.The utility model realizes the batch cleaning of silicon wafer, and cleaning effect is good, and cleaning efficiency is high, while saving water resource, uses
It is convenient, it is easy to spread.
In the present embodiment, grip block 10 is pushed to move by cylinder 14, so that it is close to each other between grip block 10, silicon wafer
It is stuck between two holding tanks 12, realizes gripping for silicon wafer, spring 11 is in compressive state, by 16 note of isocon
Water is rinsed silicon wafer by water injector 17, and during flushing, motor 6 drives belt pulley 7 and rotation axis 5 to rotate,
Then it drives U-shaped frame 9 to rotate, drives silicon wafer rotation, guarantee the comprehensive cleaning of silicon wafer, cleaning effect is good, and batch cleans, cleaning
High-efficient, the water cleaned can be re-used by base disk 1 and the collection of recycling bins 2, filtration treatment, save water resource.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (5)
1. silicon chip cleaning device, including base disk (1), which is characterized in that the bottom of the base disk (1) is fixedly installed with recycling
Case (2), there are two the support column (3) being vertically arranged, the tops of the support column (3) for the top fixed installation of the base disk (1)
Portion is welded with top plate (4), and the rotation axis (5) being vertically arranged, the bottom of the rotation axis (5) are rotatably equipped on the top plate (4)
Portion, which extends to below top plate (4), to be fixedly connected with U-shaped frame (9), is fixedly installed with motor (6) at the top of the top plate (4), electricity
It is arranged with belt pulley (7) on the output shaft and rotation axis (5) of machine (6), belt pulley (7) is equipped with belt (8), the U-shaped frame
(9) it is slidably fitted on multiple grip blocks (10), is arranged with multiple springs (11) on the U-shaped frame (9), spring (11) is located at folder
It holds between plate (10), is offered holding tank (12) on the grip block (10), be rotatably equipped with and hold at the top of the base disk (1)
Weight column (13), the top of the load-bearing pillar (13) are fixedly connected with grip block (10), and the support column (3) is equipped with placed cavity
(15), it is fixedly installed with isocon (16) in placed cavity (15), the isocon (16) is equipped with water injector (17), the U
Shape frame (9) is equipped with cylinder (14), and the piston rod of cylinder (14) is fixedly connected with grip block (10).
2. silicon chip cleaning device according to claim 1, which is characterized in that be equipped in the recycling bins (2) horizontally disposed
Filter screen, offer multiple recirculation holes on base disk (1), recirculation hole is located at the surface of recycling bins (2), recycling bins (2)
Side is fixedly connected with outlet pipe, and the level height of outlet pipe is higher than the level height of filter screen.
3. silicon chip cleaning device according to claim 1, which is characterized in that the water injector (17) is by branch pipe and spray head
Composition, branch pipe are fixedly connected with isocon (16), and the outside that one end of branch pipe extends to support column (3) is fixedly connected with spray head,
The side of support column (3) is equipped with water inlet pipe, and water inlet pipe is connected to the top of isocon (16).
4. silicon chip cleaning device according to claim 1, which is characterized in that solid on the base disk (1) and top plate (4)
Dingan County is equipped with bearing, and two bearings are sheathed on respectively in rotation axis (5) and load-bearing pillar (13).
5. silicon chip cleaning device according to claim 1, which is characterized in that the holding tank (12) is multiple, multiple folders
Hold the equidistant top and bottom for being symmetrically disposed on grip block (10) of slot (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820092651.1U CN208195042U (en) | 2018-01-19 | 2018-01-19 | silicon chip cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820092651.1U CN208195042U (en) | 2018-01-19 | 2018-01-19 | silicon chip cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208195042U true CN208195042U (en) | 2018-12-07 |
Family
ID=64491935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820092651.1U Expired - Fee Related CN208195042U (en) | 2018-01-19 | 2018-01-19 | silicon chip cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208195042U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111906102A (en) * | 2019-05-08 | 2020-11-10 | 北京北方华创微电子装备有限公司 | Cleaning chamber and cleaning equipment |
| CN112555935A (en) * | 2020-10-16 | 2021-03-26 | 宁波方太厨具有限公司 | Range hood and control method thereof |
-
2018
- 2018-01-19 CN CN201820092651.1U patent/CN208195042U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111906102A (en) * | 2019-05-08 | 2020-11-10 | 北京北方华创微电子装备有限公司 | Cleaning chamber and cleaning equipment |
| CN111906102B (en) * | 2019-05-08 | 2023-02-14 | 北京北方华创微电子装备有限公司 | Cleaning cavity and cleaning equipment |
| CN112555935A (en) * | 2020-10-16 | 2021-03-26 | 宁波方太厨具有限公司 | Range hood and control method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181207 Termination date: 20200119 |