CN208177975U - A kind of novel water spray roller bearing - Google Patents
A kind of novel water spray roller bearing Download PDFInfo
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- CN208177975U CN208177975U CN201820330270.2U CN201820330270U CN208177975U CN 208177975 U CN208177975 U CN 208177975U CN 201820330270 U CN201820330270 U CN 201820330270U CN 208177975 U CN208177975 U CN 208177975U
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- roller bearing
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Abstract
The utility model discloses a kind of novel water spray roller bearings, the water spray roller bearing is interior outer double-layer structure, internal layer is water-filled pipe, outer layer is roller bearing main body, water-filled pipe left end is located within roller bearing main body and is connect between roller bearing main body by first bearing, and right end is located at outside roller bearing main body and connect with outer water-connecting valve；Water-filled pipe, which is located on the intracorporal pipeline of roller bearing master, is provided with interior spray apertures, and outer spray apertures are provided in roller bearing main body；Roller bearing main body right end is connected with gear, and left end is fixed with connecting shaft, and connecting shaft is also connect with rotating pulley by 3rd bearing, and second bearing is equipped between gear and water-filled pipe；When work, gear is connect with gear machine, and rotating pulley is placed in card slot.The water spray roller surface of the utility model is there are many places spray apertures, and roller bearing rotates as usual when work, and water is sprayed from spray apertures, achievees the purpose that while conveying silicon wafer and rinse silicon wafer lower surface, enhancing cleaning effect.
Description
Technical field
The utility model relates to photovoltaic manufacturing industry list polycrystalline chain type texturing etching procedure cleaning technique field, specifically
A kind of novel water spray roller bearing.
Background technique
At present in photovoltaic industry, it is single polycrystalline making herbs into wool etching procedure need to piece carry out multiple tracks cleaning, to remove piece sublist
The remaining various medical fluids in face, metal impurities etc., by taking washing as an example: conventional clean mode is to be impregnated using pure water, or install additional special
Different water knife carries out spray cleaning.Although pure soaking and washing effect is best, water consumption is big, and to equipment groove body require compared with
It is high；Water knife spray model is taken, silicon wafer upper surface with the water of aggregation sufficient amount in the short time because that can be met reluctantly cleaning and be wanted
It asks.Though being lauched knife can spray, because gravity and roller bearing squeeze double action, the pure water of adherency takes off quickly for piece lower surface
It falls, cleaning is insufficient, increases spray flow if cleaning effect is promoted, then can seriously affect piece direction of travel, cause piece
Walk askew, therefore cleaning effect is had a greatly reduced quality, and if there is lamination situation, lower surface cleaning effect is even worse.In short, being sprayed currently
Under cleaning model, the cleaning efficiency of every group of water knife is low, and in order to promote cleaning effect, water knife quantity can only be increased, increase cost.
Summary of the invention
The utility model be solve existing chain type texturing Wafer Cleaning is ineffective and at high cost in etching apparatus asks
Topic, provides a kind of novel water spray roller bearing, has carrying silicon wafer and the effect of two kinds of cleaning silicon chip lower surface, can assist currently being lauched
Knife (or lower soda acid knife) cleaning, or substitution is lauched knife completely.
It the purpose of this utility model and solves its technical problem and adopts the following technical solutions to realize.It is practical according to this
A kind of novel water spray roller bearing of novel proposition, the water spray roller bearing are interior outer double-layer structure, and internal layer is water-filled pipe, and outer layer is rolling
Shaft body, the left end of the water-filled pipe are located within roller bearing main body and are connected between the left end of roller bearing main body by first bearing
It connects, the right end of water-filled pipe is located at outside roller bearing main body and connect with outer water-connecting valve；Water-filled pipe is located at the intracorporal pipeline of roller bearing master
On be provided with interior spray apertures, outer spray apertures are provided in roller bearing main body；The left end of roller bearing main body and connecting shaft right end are affixed, right end
It is affixed with gear, it is connected between gear and water-filled pipe by second bearing；Connecting shaft left end and rotating pulley pass through third axis
Hold connection；
When work, the gear is connect with gear machine, and rotating pulley, which is placed in machine card slot, plays fixed work
With；The machine refers to other similar machines in polycrystalline etching cleaning machine or polycrystal etching cleaning machine or semicon industry；Machine passes
Dynamic device band moving gear rotation, gear drive roller bearing main body and connecting shaft rotation, and the is provided between connecting shaft and rotating pulley
Three bearings, therefore connecting shaft can rotate in pulley；In the course of work, water-filled pipe is motionless, and roller bearing main body drives in gear
Under can rotate.
It the purpose of this utility model and solves its technical problem also following technical measures can be used to further realize.
The spray flow size of a kind of novel water spray roller bearing above-mentioned, the water spray roller bearing passes through water valve aperture regulation.
A kind of novel water spray roller bearing above-mentioned, the apertures of outer spray apertures are 1-3mm, and the spacing of adjacent holes is 1-3mm, hole with
It is equidistantly arranged between hole.
A kind of novel water spray roller bearing above-mentioned, the aperture of the interior spray apertures are sequentially increased along the direction of water flowing, interior spray
The minimum-value aperture for drenching hole is 1-3mm, is equidistantly arranged between Kong Yukong, and the spacing of adjacent holes is 1-3mm.
A kind of novel water spray roller bearing above-mentioned, the aperture of the interior spray apertures are 1mm according to minimum-value aperture, and tolerance is
The progressive law of 0.2mm arithmetic progression is incremented by successively along the direction of water flowing, to reach voltage regulation result.
A kind of novel water spray roller bearing above-mentioned, the interior spray apertures are shifted to install with outer spray apertures.
Water spray roller bearing in the utility model is compared with conventional roller bearing, and surface is there are many places spray apertures, roller bearing when work
As usual it rotates, water (or soda acid liquid) is sprayed from spray apertures, achievees the purpose that rinse silicon wafer lower surface.In the prior art, making herbs into wool,
The silicon wafer of etching machine is transmitted by the rolling of up to a hundred roller bearings, and different slots match different roller bearings, as in single rinse bath
About 15-20 root roller bearing, the roller bearing of the prior art only play the role of transmission, the cleaning solution that various acid, alkali, water knife provide
Can only cleaning silicon chip upper surface (the namely not direct one side contacted with roller bearing), lower surface cleaning effect is relatively poor.
Roller bearing, is designed to the roller bearing of water outlet form by the design of the utility model, while playing transmission silicon wafer and cleaning silicon
The effect of piece lower surface.In the process of running, since roller bearing quantity is more, silicon wafer can be carried out a following table at each roller bearing
Face cleaning, greatly strengthens cleaning effect.In addition, when roller bearing rotates, water (or acid, lye body) by inertia follow roller bearing from
It is dynamic, after controlling inflow by valve, one is formed intensively between upper water knife (or upper acid, alkali knife) and lower water spray roller bearing
Region is sprayed, cleaning effect greatly enhances, since roller bearing quantity is enough, if there is part spray hole plug in individual roller bearings,
It will not influence overall cleaning effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the right view of Fig. 1.
[component symbol explanation]
1: water-filled pipe 2: roller bearing main body 3: interior spray apertures 4: outer spray apertures 5: gear
6: rotating pulley 7: first bearing 8: second bearing 9: connecting shaft 10: 3rd bearing
Specific embodiment
Further to illustrate that the utility model is the technical means and efficacy reaching predetermined goal of the invention and being taken, below
In conjunction with attached drawing and preferred embodiment, to according to the utility model proposes a kind of novel water spray roller bearing, specific embodiment, knot
Structure, feature and its effect, detailed description is as follows.
The novel water spray roller bearing of the utility model is interior outer double-layer structure, and internal layer is water-filled pipe 1, and outer layer is roller bearing main body
2, as shown in Figure 1, the left end of water-filled pipe is located within roller bearing main body and is connected between roller bearing main body left end by first bearing 7
It connects, the right end of water-filled pipe 1 is located at outside roller bearing main body and connect with outer water-connecting valve, and water-filled pipe 1 is located at the intracorporal pipe of roller bearing master
It is provided with interior spray apertures 3 on road, outer spray apertures 4 are provided in roller bearing main body.Roller bearing main body right end and gear 5 are affixed, roller bearing master
Body left end and connecting shaft 9 are affixed, and connecting shaft 9 is connect with rotating pulley 6 by 3rd bearing 10；Between gear 5 and water-filled pipe
It is connected by second bearing 8.
When work, gear 5 is connect with gear machine, and rotating pulley 6 is placed in machine card slot and plays fixed function,
At this point, gear machine band moving gear rotates, outer layer roller bearing main body starts to rotate under gear drive, and connecting shaft 9 is with roller bearing
Main body 2 rotates, and water-filled pipe 1 is motionless in work, and pure water enters water-filled pipe, and is sprayed by pressure itself by interior hole for water spraying
Then silicon wafer lower surface is cleaned by the ejection of outer hole for water spraying, spray flow can pass through water valve aperture regulation.The roller bearing of outer layer
Body edge rotates side water spray, plays the role of conveying silicon wafer and clean to silicon wafer lower surface.Silicon wafer upper surface is yet by traditional
The cleaning of water knife spray model.
Preferably, interior spray apertures should be shifted to install with outer spray apertures, the aperture of outer spray apertures is 1mm, the center of adjacent holes
Spacing is 1.5-2mm, is equidistantly arranged between Kong Yukong；The aperture of interior spray apertures is sequentially increased along the direction of water flowing, minimum
Aperture can be 1-3mm, equidistantly arrange between Kong Yukong, and the spacing of adjacent holes is 1.5-2mm.The aperture of interior spray apertures can be with
It is 1mm according to first lap, the second circle is 1.2mm, and (i.e. minimum-value aperture is 1mm, tolerance 0.2mm to the rule that third circle is 1.4mm
The progressive law of arithmetic progression) it is incremented by successively along the direction of water flowing.
The water spray roller bearing of the utility model can uninterruptedly clean silicon wafer, especially while smooth transport silicon wafer
It is lower surface, partially or completely substitutes acid, alkali, the water knife of fixed position.In the process of running, since roller bearing quantity is more, silicon wafer
It can be carried out a lower surface cleaning at each roller bearing, greatly strengthen cleaning effect.Upper water knife (or upper acid, alkali knife) and
An intensive spray region is formed between lower water spray roller bearing, cleaning effect greatly enhances, individual to roll since roller bearing quantity is enough
If part spray hole plug occurs in axis, overall cleaning effect will not be influenced.
The above descriptions are merely preferred embodiments of the present invention, not does in any form to the utility model
Limitation, any person skilled in the art do not departing within the scope of technical solutions of the utility model, utilizes above-mentioned technology
The embodiment that content is modified or modifies, is still within the scope of the technical solutions of the present invention.
Claims (6)
1. a kind of novel water spray roller bearing, it is characterised in that the water spray roller bearing is interior outer double-layer structure, and internal layer is water-filled pipe
(1), outer layer is roller bearing main body (2), and the left end of the water-filled pipe (1) is located within roller bearing main body and the left end with roller bearing main body
Between connected by first bearing (7), the right end of water-filled pipe (1) is located at roller bearing main body outside and connect with outer water-connecting valve；Water flowing
Pipeline (1), which is located on the intracorporal pipeline of roller bearing master, is provided with interior spray apertures (3), and outer spray apertures (4) are provided in roller bearing main body；Rolling
The left end of shaft body (2) and connecting shaft (9) right end are affixed, and right end and gear (5) are affixed, between gear (5) and water-filled pipe (1)
It is connected by second bearing (8)；Connecting shaft (9) left end is connect with rotating pulley (6) by 3rd bearing (10)；
When work, the gear (5) connect with gear machine, and rotating pulley (6) is placed in machine card slot；The machine
Refer to polycrystalline etching cleaning machine or polycrystal etching cleaning machine.
2. novel water spray roller bearing as described in claim 1, it is characterised in that the spray flow size of the water spray roller bearing passes through water
Valve opening is adjusted.
3. novel water spray roller bearing as described in claim 1, it is characterised in that the aperture of the outer spray apertures (4) is 1-3mm, phase
The spacing in adjacent hole is 1-3mm, is equidistantly arranged between Kong Yukong.
4. novel water spray roller bearing as described in claim 1, it is characterised in that the aperture of the interior spray apertures (3) is along water flowing
Direction is sequentially increased, and the minimum-value aperture of interior spray apertures is 1-3mm, is equidistantly arranged between Kong Yukong, and the spacing of adjacent holes is 1-
3mm。
5. novel water spray roller bearing as claimed in claim 4, it is characterised in that the aperture of interior spray apertures is according to minimum-value aperture
1mm, tolerance are that the progressive law of 0.2mm arithmetic progression is incremented by successively along the direction of water flowing.
6. novel water spray roller bearing as described in claim 1, it is characterised in that the interior spray apertures (3) and outer spray apertures (4) are wrong
Position setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820330270.2U CN208177975U (en) | 2018-03-09 | 2018-03-09 | A kind of novel water spray roller bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820330270.2U CN208177975U (en) | 2018-03-09 | 2018-03-09 | A kind of novel water spray roller bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208177975U true CN208177975U (en) | 2018-12-04 |
Family
ID=64439273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820330270.2U Active CN208177975U (en) | 2018-03-09 | 2018-03-09 | A kind of novel water spray roller bearing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208177975U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111524829A (en) * | 2019-02-04 | 2020-08-11 | 株式会社荏原制作所 | Cleaning component mounting part, cleaning component assembly and substrate cleaning device |
| CN115445429A (en) * | 2022-10-08 | 2022-12-09 | 湖北正茂机械设备制造有限公司 | Desulfurizing tower device |
-
2018
- 2018-03-09 CN CN201820330270.2U patent/CN208177975U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111524829A (en) * | 2019-02-04 | 2020-08-11 | 株式会社荏原制作所 | Cleaning component mounting part, cleaning component assembly and substrate cleaning device |
| JP2020127009A (en) * | 2019-02-04 | 2020-08-20 | 株式会社荏原製作所 | Cleaning member mounting part, cleaning member assembly and substrate cleaning device |
| US20200276619A1 (en) * | 2019-02-04 | 2020-09-03 | Ebara Corporation | Cleaning member attaching part, cleaning member assembly and substrate cleaning apparatus |
| CN115445429A (en) * | 2022-10-08 | 2022-12-09 | 湖北正茂机械设备制造有限公司 | Desulfurizing tower device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201012 Address after: 214028 No.9 and 16, Xinhua Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: WUXI SUNTECH POWER Co.,Ltd. Address before: 471000 China (Henan) Free Trade Pilot Zone, Luoyang District, Henan Province, Huaxia Road, High-tech Industrial Development Zone, Luoyang District Patentee before: LUOYANG SUNTECH POWER Co.,Ltd. |