CN208136354U - Electroplanting device - Google Patents
Electroplanting device Download PDFInfo
- Publication number
- CN208136354U CN208136354U CN201721923761.XU CN201721923761U CN208136354U CN 208136354 U CN208136354 U CN 208136354U CN 201721923761 U CN201721923761 U CN 201721923761U CN 208136354 U CN208136354 U CN 208136354U
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Abstract
The utility model discloses a kind of electroplanting devices, which is characterized in that including：Groove body, plating screening arrangement, galvanic anode and electroplating cathode, wherein, cavity is equipped with inside groove body, electroplate liquid is accommodated in cavity, galvanic anode and electroplating cathode are set in cavity, anode shield shield plate is set between galvanic anode and cathode screen shield plate, and cathode screen shield plate is set between electroplating cathode and anode shield shield plate.
Description
Technical field
The utility model relates to a kind of electroplanting devices.
Background technique
Wafer plating uses electroplanting device, and electroplanting device generates power line using cathode anode and is electroplated, cathode anode
After energization, the power line between cathode and anode will disperse distribution, and the surface that only some power line reaches wafer carries out electricity
Plating, which produces the waste of power line, the inefficiency of plating；Meanwhile structure is complicated for anode generation part.
Utility model content
The utility model is in order to solve the above technical problems, provide a kind of plating screening arrangement and electroplanting device.
In order to achieve the above object, the utility model is achieved through the following technical solutions：
A kind of electroplanting device, including：Groove body, aforementioned plating screening arrangement, galvanic anode and electroplating cathode, wherein slot
Internal portion is equipped with cavity, accommodates electroplate liquid in cavity, galvanic anode and electroplating cathode are set in cavity, and anode shield shield plate is set
It is placed between galvanic anode and cathode screen shield plate, cathode screen shield plate is set between electroplating cathode and anode shield shield plate.
An embodiment according to the present utility model, the plating screening arrangement, including：Cathode screen shield plate and sun
Pole barricade, cathode screen shield plate and the setting of anode shield shield plate interval, anode shield shield plate are equipped with several first through hole, cathode screen
Plate is equipped with several second through-holes, and the first through hole is oppositely arranged with second through-hole, so that power line can be from described the
One through-hole passes through and passes through second through-hole.
An embodiment according to the present utility model, further includes shield assembly, and shield assembly is set to anode shield shield plate
Between cathode screen shield plate, third through-hole, the third through-hole and the first through hole and described second are set on shield assembly
Lead to the hole site is opposite, after power line can be passed through from the first through hole, is then passed through the third through-hole, is then then passed through described
Two through-holes.
An embodiment according to the present utility model, the shield assembly are connect with the anode shield shield plate；Described
Three through-holes are opposite with the first through hole and second lead to the hole site.
An embodiment according to the present utility model, the shield assembly are connect with the cathode screen shield plate.
An embodiment according to the present utility model, the shield assembly include shielding pinboard component and shading ring,
The barricade adapter assembly is provided with fourth hole；The shading ring is arranged fifth hole, the fourth hole and described the
Five through-holes form the third through-hole；Described shading ring one end is connect with the shielding pinboard component, the other end and the yin
The connection of pole barricade.
An embodiment according to the present utility model, the shielding pinboard component include the first barricade and the second screen
Shield plate；First barricade is provided with cavity；The 6th through-hole is provided on first barricade；The secondary shielding plate with
First barricade connects and covers the cavity；The 7th through-hole is provided on the secondary shielding plate；6th through-hole
Opposite with the 7th lead to the hole site, the 6th through-hole and the 7th through-hole form the fourth hole.
The cavity is inserted into from the 7th through-hole in an embodiment according to the present utility model, described shading ring one end
Interior, the other end is connect by flange with the cathode screen shield plate.
An embodiment according to the present utility model, the shading ring are tubular structure, and described shading ring one end passes through
The cathode screen shield plate, the flange are located at shading ring end, and the shading ring is connected to the cathode screen by the flange
On plate.
An embodiment according to the present utility model, further includes braced frame, and the anode shield shield plate is arranged described
In braced frame；The shield assembly is connect with the braced frame.
An embodiment according to the present utility model, the galvanic anode include：Several anode plates and conduct piece, respectively
A anode plate is set to the face position of each first through hole of anode shield shield plate, and conduct piece is connected with anode plate, conduct piece and
Electroplating cathode conduction makes anode plate and electroplating cathode that generation power line be connected.
An embodiment according to the present utility model, further includes anode fixed plate, and anode fixed plate is equipped with several the
Eight through-holes accommodate an anode plate in each 8th through-hole, with fixed anode plate.
An embodiment according to the present utility model further includes braced frame, anode shield shield plate, anode plate, conduct piece
Be all set in braced frame with anode fixed plate, braced frame be used to support fixed anode barricade, anode plate, conduct piece and
Anode fixed plate.
An embodiment according to the present utility model, the braced frame include：First side plate, the second side plate, two
A first column, several second columns and foundation, wherein the first side plate is set to the side of conduct piece, and the second side plate is set to
The side of anode shield shield plate, the both ends of foundation are separately connected the ends of two the first columns to form a frame, frame
The first side plate and the second side plate is respectively set to constitute an accommodation space in two sides, and setting several second is vertical in accommodation space
Column, by accommodation space even partition at several subspaces, be respectively set in each sub-spaces one group of anode shield shield plate, anode plate,
Conduct piece and anode fixed plate.
An embodiment according to the present utility model, second side plate be equipped with several 9th through-holes, each 9th
Through-hole respectively corresponds a sub-spaces, and each first through hole of anode shield shield plate exposes to the open air from corresponding 9th through-hole.
An embodiment according to the present utility model, the conduct piece include titanium item.
An embodiment according to the present utility model, further includes fluid reservoir and liquid input power device, in fluid reservoir
Electroplate liquid is stored, fluid reservoir is connected to cavity, and liquid input power device is used for will be in the liquid input cavity in fluid reservoir.
An embodiment according to the present utility model, the electroplating cathode includes hanger, wafer setting to be electroplated
In on hanger.
Cathode screen shield plate and anode shield shield plate, cathode screen shield plate and anode is respectively set in cathode and anode in the utility model
Barricade shields power line, and first through hole and the second through-hole pass through power line, thus can control the trend of power line, make
Crystal column surface can be acted on by obtaining all power lines, will not be wasted.Shield assembly is set, is further power line guiding, makes
The power line obtained between cathode screen shield plate and anode shield shield plate will not dissipate；It is provided with the first barricade and secondary shielding plate,
Facilitate installation；Shading ring is set, secondary shielding plate and cathode screen shield plate are connected, so that power line between the two will not dissipate；
Anode plate and conduct piece are set, galvanic anode is constituted；Braced frame is set, it being capable of the components such as supporting anodes plate.
Detailed description of the invention
Fig. 1 is the perspective view of the utility model；
Fig. 2 is the perspective view of plating screening arrangement；
Fig. 3 is the side view of Fig. 2；
Fig. 4 is the structural schematic diagram that Fig. 2 removes cathode screen shield plate；
Fig. 5 is the structural schematic diagram of cathode screen shield plate；
Fig. 6 is the structural schematic diagram of anode shield shield plate；
Fig. 7 is the structural schematic diagram of shading ring and flange；
Fig. 8 is the structural schematic diagram of the first shielding part；
Fig. 9 is the structural schematic diagram of secondary shielding part；
Figure 10 is the side view of Fig. 2；
Figure 11 is the structural representation that Fig. 2 removes cathode screen shield plate, shading ring, flange, the first barricade and secondary shielding plate
Figure；
Figure 12 is the structural schematic diagram of anode fixed plate；
Figure 13 is the structural schematic diagram of braced frame；
Figure 14 is the top view of Figure 13；
Figure 15 is the structural schematic diagram of the second side plate；
Figure 16 is the structural schematic diagram that Figure 11 removes the second side plate；
Figure 17 is the structural schematic diagram that Figure 16 removes anode shield shield plate；
Figure 18 is the structural schematic diagram at another visual angle of Figure 17.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawing：
As shown in Figure 1, the present embodiment electroplanting device, including：Groove body 36, plating screening arrangement 37, galvanic anode and electricity
Plate cathode, wherein be equipped with cavity inside groove body 36, accommodate electroplate liquid in cavity, galvanic anode and electroplating cathode are set to appearance
Intracavitary, anode shield shield plate 29 is set between galvanic anode and cathode screen shield plate 30, and cathode screen shield plate 30 is set to electroplating cathode
Between anode shield shield plate 29.
As shown in Figures 2 to 4, plating screening arrangement 37 includes：Cathode screen shield plate 29 and anode shield shield plate 30, cathode screen
Shield plate 29 and the setting of the interval of anode shield shield plate 30, as shown in figure 5, cathode screen shield plate 29 is equipped with several second through-holes 291, such as
Shown in Fig. 6, anode shield shield plate 30 is equipped with several first through hole 301, the first through hole 301 and 291 phase of the second through-hole
To setting, so that power line can pass through from the first through hole 301 and pass through second through-hole 291.
The present embodiment further includes shield assembly, and shield assembly is set between anode shield shield plate 30 and cathode screen shield plate 29,
Third through-hole, the third through-hole and 291 position phase of the first through hole 301 and second through-hole are set on shield assembly
It is right, after power line can be passed through from the first through hole 301, it is then passed through the third through-hole, is then then passed through second through-hole
291.The shield assembly is connect with the anode shield shield plate 30；The third through-hole and the first through hole 301 and described the
Two through-holes, 291 position is opposite.The shield assembly is connect with the cathode screen shield plate 29.
The shield assembly includes that shielding pinboard component and shading ring 31, the barricade adapter assembly are provided with the 4th
Through-hole；As shown in fig. 7, fifth hole 311 is arranged in the shading ring 31, the fourth hole and the fifth hole 311 are formed
The third through-hole；Described 31 one end of shading ring is connect with the shielding pinboard component, the other end and the cathode screen shield plate
29 connections.
As shown in Figure 8 and Figure 9, the shielding pinboard component includes the first barricade 32 and secondary shielding plate 33；It is described
First barricade 32 is provided with cavity 321；The 6th through-hole 322 is provided on first barricade 32；The secondary shielding plate
33 connect with first barricade 32 and cover the cavity 321；The 7th through-hole is provided on the secondary shielding plate 33
331；6th through-hole 322 is opposite with 331 position of the 7th through-hole, the 6th through-hole 322 and the 7th through-hole 331
Form the fourth hole.
As shown in Fig. 3, Fig. 4 and Fig. 7, the cavity 321 is inserted into from the 7th through-hole 331 in described 31 one end of shading ring
Interior, the other end is connect by flange 34 with the cathode screen shield plate 29.The shading ring 31 is tubular structure, the shading ring 31
One end passes through the cathode screen shield plate 29, and the flange 34 is located at 31 end of shading ring, and the flange 34 is by the shading ring 31
It is connected in the cathode screen shield plate 29.It further include braced frame 35, the anode shield shield plate 30 is arranged in the braced frame
On 35；The shield assembly is connect with the braced frame 35.
As shown in Figure 10, Figure 11, Figure 16, Figure 17 and Figure 18, the galvanic anode includes：Several anode plates 38 and conduction
Part 39, each anode plate 38 are set to the face position of each first through hole 301 of anode shield shield plate 29, conduct piece 39 and anode
Plate 38 is connected, and conduct piece 39 and electroplating cathode conduction make anode plate 38 and electroplating cathode that generation power line be connected.Such as Figure 12 institute
Show, the present embodiment further includes anode fixed plate 40, and anode fixed plate 40 is equipped with several 8th through-holes 401, each 8th through-hole
An anode plate 38 is accommodated in 401, with fixed anode plate 38.
As shown in Figure 13, Figure 14 and Figure 15, the present embodiment further includes braced frame 35, anode shield shield plate 29, anode plate 38,
Conduct piece 39 and anode fixed plate 40 are all set in braced frame 35, and braced frame 35 is used to support fixed anode barricade
29, anode plate 38, conduct piece 39 and anode fixed plate 40.The braced frame 35 includes：First side plate 41, the second side plate
42, two the first columns 43, several second columns 44 and foundation 45, wherein the first side plate 41 is set to the side of conduct piece 39,
Second side plate 42 is set to the side of anode shield shield plate 29, the both ends of foundation 45 be separately connected the ends of two the first columns 43 from
And a frame is formed, the first side plate 41 and the second side plate 42 is respectively set to constitute an accommodation space in the two sides of frame,
Several second columns 44 of setting in accommodation space, by accommodation space even partition at several subspaces 46, in each sub-spaces 46
One group of anode shield shield plate 29, anode plate 38, conduct piece 39 and anode fixed plate 40 is respectively set.As shown in figure 15, described
Two side plates 42 are equipped with several 9th through-holes 421, and each 9th through-hole 421 respectively corresponds a sub-spaces 46, anode shield shield plate 29
Each first through hole 301 exposed to the open air from corresponding 9th through-hole 421.The conduct piece 39 includes titanium item.
As shown in Figure 1, the present embodiment further includes fluid reservoir 47 and liquid input power device 48, storage electricity in fluid reservoir 47
Plating solution, fluid reservoir 47 are connected to cavity, and liquid input power device 48 is used for will be in the liquid input cavity in fluid reservoir 47.Institute
The electroplating cathode stated includes hanger 49, and wafer to be electroplated is set on hanger 49.
In use, cathode screen shield plate 30 is set between electroplating cathode and anode shield shield plate 29, anode shield shield plate 29 is arranged
Between galvanic anode and cathode screen shield plate 30, after energization, conduct piece 39 is conductive, and anode plate 38 is used as galvanic anode, generates electricity
The line of force, power line sequentially pass through first through hole 301, the 6th through-hole 322, the 7th through-hole 331, fifth hole 311 and the second through-hole
291, it then acts on wafer, controls the trend of power line in this way, so that power line may act on wafer.
Cathode screen shield plate 29 and anode shield shield plate 30, cathode screen shield plate 29 is respectively set in cathode and anode in the utility model
Power line is shielded with anode shield shield plate 30, and first through hole 301 and the second through-hole 291 pass through power line, thus can control
The trend of power line will not waste so that all power lines can act on crystal column surface.Shield assembly is set, further
It is oriented to for power line, so that the power line between cathode screen shield plate 29 and anode shield shield plate 30 will not dissipate；It is provided with first
Barricade 32 and secondary shielding plate 33, facilitate installation；Shading ring 31 is set, secondary shielding plate 33 and cathode screen shield plate 29 are connected,
So that power line between the two will not dissipate；Anode plate 38 and conduct piece 39 are set, galvanic anode is constituted；Braced frame is set
35, it being capable of the equal components of supporting anodes plate 38.
The embodiments of the present invention are only used for being illustrated the utility model, do not constitute to scope of the claims
Limitation, other substantially equivalent substitutions that those skilled in that art are contemplated that, in scope of protection of the utility model
It is interior.
Claims (18)
1. a kind of electroplanting device, which is characterized in that including：Groove body, plating screening arrangement, galvanic anode and electroplating cathode,
In, it is equipped with cavity inside groove body, accommodates electroplate liquid in cavity, galvanic anode and electroplating cathode are set in cavity, anode shield
Shield plate is set between galvanic anode and cathode screen shield plate, and cathode screen shield plate is set between electroplating cathode and anode shield shield plate.
2. electroplanting device according to claim 1, which is characterized in that the plating includes with screening arrangement：Cathode screen
Shield plate and anode shield shield plate, cathode screen shield plate and the setting of anode shield shield plate interval, anode shield shield plate are equipped with several first through hole,
Cathode screen shield plate is equipped with several second through-holes, and the first through hole is oppositely arranged with second through-hole, so that power line can
It is passed through from the first through hole and passes through second through-hole.
3. electroplanting device according to claim 2, which is characterized in that further include shield assembly, shield assembly is set to sun
Between pole barricade and cathode screen shield plate, third through-hole is set on shield assembly, the third through-hole and the first through hole and
Second lead to the hole site is opposite, after power line can be passed through from the first through hole, is then passed through the third through-hole, then wears again
Cross second through-hole.
4. electroplanting device according to claim 3, which is characterized in that the shield assembly and the anode shield shield plate connect
It connects；The third through-hole is opposite with the first through hole and second lead to the hole site.
5. electroplanting device according to claim 3, which is characterized in that the shield assembly and the cathode screen shield plate connect
It connects.
6. electroplanting device according to claim 3, which is characterized in that the shield assembly include shielding pinboard component and
Shading ring, the shielding pinboard component are provided with fourth hole；The shading ring is arranged fifth hole, the fourth hole and
The fifth hole forms the third through-hole；Described shading ring one end is connect with the shielding pinboard component, the other end with
The cathode screen shield plate connection.
7. electroplanting device according to claim 6, which is characterized in that the shielding pinboard component includes the first barricade
With secondary shielding plate；First barricade is provided with cavity；The 6th through-hole is provided on first barricade；Described second
Barricade connect with first barricade and covers the cavity；The 7th through-hole is provided on the secondary shielding plate；It is described
6th through-hole is opposite with the 7th lead to the hole site, and the 6th through-hole and the 7th through-hole form the fourth hole.
8. electroplanting device according to claim 7, which is characterized in that described shading ring one end is inserted into from the 7th through-hole
In the cavity, the other end is connect by flange with the cathode screen shield plate.
9. electroplanting device according to claim 8, which is characterized in that the shading ring is tubular structure, the shading ring
One end passes through the cathode screen shield plate, and the flange is located at shading ring end, and the shading ring is connected to described by the flange
In cathode screen shield plate.
10. electroplanting device according to claim 3, which is characterized in that further include braced frame, the anode shield shield plate is set
It sets in the braced frame；The shield assembly is connect with the braced frame.
11. electroplanting device according to claim 2, which is characterized in that the galvanic anode includes：Several anode plates and
Conduct piece, each anode plate are set to the face position of each first through hole of anode shield shield plate, and conduct piece is connected with anode plate,
Conduct piece and electroplating cathode conduction make anode plate and electroplating cathode that generation power line be connected.
12. electroplanting device according to claim 11, which is characterized in that further include anode fixed plate, in anode fixed plate
Equipped with several 8th through-holes, an anode plate is accommodated in each 8th through-hole, with fixed anode plate.
13. electroplanting device according to claim 11, which is characterized in that further include braced frame, anode shield shield plate, anode
Plate, conduct piece and anode fixed plate are all set in braced frame, and braced frame is used to support fixed anode barricade, anode
Plate, conduct piece and anode fixed plate.
14. electroplanting device according to claim 13, which is characterized in that the braced frame includes：First side plate,
Two side plates, two the first columns, several second columns and foundation, wherein the first side plate is set to the side of conduct piece, second side
Plate is set to the side of anode shield shield plate, and the both ends of foundation are separately connected the end of two the first columns to form a frame
The first side plate and the second side plate is respectively set to constitute an accommodation space in frame, the two sides of frame, if setting in accommodation space
Dry second column, by accommodation space even partition at several subspaces, be respectively set in each sub-spaces one group of anode shield shield plate,
Anode plate, conduct piece and anode fixed plate.
15. electroplanting device according to claim 14, which is characterized in that it is logical that second side plate is equipped with several nine
Hole, each 9th through-hole respectively correspond a sub-spaces, and each first through hole of anode shield shield plate is from corresponding 9th through-hole
It exposes to the open air.
16. the described in any item electroplanting devices of 1-14 according to claim 1, which is characterized in that the conduct piece includes titanium item.
17. electroplanting device according to claim 16, which is characterized in that further include fluid reservoir and liquid input power dress
It sets, electroplate liquid is stored in fluid reservoir, fluid reservoir is connected to cavity, and liquid input power device is used for the liquid in fluid reservoir is defeated
Enter in cavity.
18. electroplanting device according to claim 16, which is characterized in that the electroplating cathode includes hanger, to be electroplated
Wafer be set on hanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721923761.XU CN208136354U (en) | 2017-12-29 | 2017-12-29 | Electroplanting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721923761.XU CN208136354U (en) | 2017-12-29 | 2017-12-29 | Electroplanting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208136354U true CN208136354U (en) | 2018-11-23 |
Family
ID=64284949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721923761.XU Active CN208136354U (en) | 2017-12-29 | 2017-12-29 | Electroplanting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208136354U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111996573A (en) * | 2020-08-11 | 2020-11-27 | 孙即胡 | Integral electroplating equipment for manufacturing flexible circuit board and operation method thereof |
-
2017
- 2017-12-29 CN CN201721923761.XU patent/CN208136354U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111996573A (en) * | 2020-08-11 | 2020-11-27 | 孙即胡 | Integral electroplating equipment for manufacturing flexible circuit board and operation method thereof |
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