CN208123881U - A kind of laboratory automatic switching control equipment - Google Patents

A kind of laboratory automatic switching control equipment Download PDF

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Publication number
CN208123881U
CN208123881U CN201820312057.9U CN201820312057U CN208123881U CN 208123881 U CN208123881 U CN 208123881U CN 201820312057 U CN201820312057 U CN 201820312057U CN 208123881 U CN208123881 U CN 208123881U
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CN
China
Prior art keywords
connecting tube
valve
decompressor
switching control
automatic switching
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Application number
CN201820312057.9U
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Chinese (zh)
Inventor
周礼誉
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Shanghai Brother Microelectronics Technology Co Ltd
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Shanghai Brother Microelectronics Technology Co Ltd
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Priority to CN201820312057.9U priority Critical patent/CN208123881U/en
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Abstract

The utility model discloses a kind of laboratory automatic switching control equipments,A kind of laboratory automatic switching control equipment,Including shell,The housing lower side-wall left and right ends, which are run through, is connected with the 5th connecting tube,The laboratory automatic switching control equipment is closed by the opening and closing of variation the first decompressor of control and the second decompressor according to pressure value,First gas cylinder passes through the first air inlet isolating valve,First decompressor,First check-valve,First outlet isolating valve,Second gas cylinder passes through the second air inlet isolating valve,Second decompressor,Second check-valve,Second outlet isolating valve supplies outward,The pressure difference of the second decompressor according to the first decompressor of the first gas cylinder connection and the connection of the second gas cylinder is played to judge the effect of which branch gas supply,Realize the purpose of intelligence switching gas supply,Solve the problems, such as that traditional feeder structure is excessively cumbersome,And production cost is saved,Be conducive to meet more gradient customer demands.

Description

A kind of laboratory automatic switching control equipment
Technical field
The utility model relates to scientific experiment field, specially a kind of laboratory automatic switching control equipment.
Background technique
Electronic gas is to develop integrated circuit, photoelectron, microelectronics, especially super large-scale integration, liquid crystal display Indispensable basic support source material in device, light emitting semiconductor device and semiconductor material manufacturing process, it is referred to as " blood " and " grain " of electronics industry, its purity and cleanliness directly influence photoelectron, microelectronic component quality, Integrated level, particular technology index and yield rate, and the exactness and accuracy of circuit and device are fundamentally restrict, it is inevitable , electronic gas is widely used in microelectronics and laboratory, is frequently necessary to when using electronic gas to electronic gas Ventilation operation is carried out, traditional air feed equipment gas source switching is realized using pneumatic operated valve at this stage, results in air feed equipment to need in this way Ups power and mating corresponding displacement purge gas device are accessed, production cost is higher, and structure is complicated, is unable to satisfy multilayer The demand of secondary client, we provide a kind of laboratory automatic switching control equipment thus.
Utility model content
The purpose of this utility model is to provide a kind of laboratory automatic switching control equipments, to solve to mention in above-mentioned background technique Out the problem of.
To achieve the above object, the utility model provides the following technical solutions:A kind of laboratory automatic switching control equipment, including Shell, the housing lower side-wall left and right ends, which are run through, is connected with the 5th connecting tube, tube body at left and right sides of the 5th connecting tube Lower end is connected separately with the first gas cylinder and the second gas cylinder, and the 5th upper end of connecting tube is communicated with the 4th connecting tube, and the described 4th Connecting tube upper tube wall is sequentially installed with first instrument, first pressure sensing unit, the first air inlet isolating valve, left and right disk from left to right Face switching valve, the second air inlet isolating valve, second pressure sensing unit and second instrument, the 4th connecting tube left upper end are communicated with 6th connecting tube, the left tube wall lower end of the 6th connecting tube are equipped with first emptying valve, and the 6th upper end of connecting tube is communicated with First row stomata, the 4th connecting tube upper right side are communicated with the 7th connecting tube, and the 7th connecting tube upper tube wall is equipped with Two exhaust-valves, shell inner cavity middle part upper end are equipped with second row stomata, and second row stomata lower end is communicated with the first company Adapter tube, first connecting tube bottom end left and right sides have been respectively communicated with the second connecting tube and third connecting tube, second connection The left tube wall upper middle lower part of pipe is sequentially installed with first outlet isolating valve, first check-valve and the first decompressor, and the third connects It takes over right tube wall upper middle lower part and is sequentially installed with second outlet isolating valve, second check-valve and the second decompressor, the shell Left upper end is provided with third gas vent.
Preferably, it is connected in the middle part of the 7th connecting tube left end and the 6th connecting tube, the first emptying valve is located at the 7th Connecting tube and the 6th connecting tube connectivity part downside.
Preferably, the left and right disk switching valve is installed in the middle part of the 4th connecting tube upper tube wall.
Preferably, the 6th connecting tube is located on the left of the second connecting tube.
Preferably, second connecting tube is connected to the 4th connecting tube with third connecting tube.
Compared with prior art, the utility model has the beneficial effects that:The laboratory automatic switching control equipment passes through according to pressure Force value variation control the first decompressor and the second decompressor opening and closing close, the first gas cylinder by the first air inlet isolating valve, First decompressor, first check-valve, first outlet isolating valve, the second gas cylinder pass through the second air inlet isolating valve, the second decompression dress Set, second check-valve, second outlet isolating valve supply outward, play the first decompressor and the according to the connection of the first gas cylinder The pressure difference of second decompressor of two gas cylinders connection judges the effect of which branch gas supply, realizes intelligence switching gas supply Purpose, solve the problems, such as that traditional feeder structure is excessively cumbersome, and greatly saved production cost, be conducive to meet More gradient customer demands;By being provided with first instrument, second instrument, first pressure sensing unit and second pressure sensing unit Structure, play using machinery instrument and the mutually matched effect of electronic instrument, to solve instrument drift phenomenon Caused by measure inaccurate problem.
Detailed description of the invention
Fig. 1 is utility model diagram.
In figure:1 shell, 2 first gas cylinders, 3 second gas cylinders, 4 first instruments, 5 first pressure sensing units, 6 first air inlets Isolating valve, 7 first decompressors, 8 first check-valves, 9 first outlet isolating valves, 10 second instruments, 11 second pressures sensing are single Member, 12 second air inlet isolating valves, 13 second decompressors, 14 second check-valves, 15 second outlet isolating valves, 16 or so disks are cut Change valve, 17 first emptying valves, 18 first row stomatas, 19 second row stomatas, 20 third gas vents, 21 first connecting tubes, 22 second Connecting tube, 23 third connecting tubes, 24 the 4th connecting tubes, 25 the 5th connecting tubes, 26 the 6th connecting tubes, 27 the 7th connecting tubes, 28 Two exhaust-valves.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to Fig. 1, the utility model provides a kind of technical solution:A kind of laboratory automatic switching control equipment, including shell 1, the 1 lower wall left and right ends of shell, which are run through, is connected with the 5th connecting tube 25, manages at left and right sides of the 5th connecting tube 25 Body lower end is connected separately with the first gas cylinder 2 and the second gas cylinder 3, and 25 upper end of the 5th connecting tube is communicated with the 4th connecting tube 24, 4th connecting tube, 24 upper tube wall is sequentially installed with first instrument 4, first pressure sensing unit 5, the first air inlet from left to right Isolating valve 6, left and right disk switching valve 16, the second air inlet isolating valve 12, second pressure sensing unit 11 and second instrument 10, it is described First instrument 4, first pressure sensing unit 5, second pressure sensing unit 11 and second instrument 10 have monitoring pressure data, and And the effect being compared, the left and right disk switching valve 16 are installed in the middle part of 24 upper tube wall of the 4th connecting tube, the described 4th connects 24 left upper end of adapter tube is communicated with the 6th connecting tube 26, and the left tube wall lower end of the 6th connecting tube 26 is equipped with first emptying valve 17, 6th connecting tube, 26 upper end is communicated with first row stomata 18, and 24 upper right side of the 4th connecting tube is communicated with the 7th connecting tube 27, it is connected in the middle part of 27 left end of the 7th connecting tube and the 6th connecting tube 26, the first emptying valve 17 is located at the 7th connecting tube 27 and the 6th connecting tube 26 connectivity part on the downside of, 27 upper tube wall of the 7th connecting tube is equipped with second emptying valve 28, the shell 1 Upper end is equipped with second row stomata 19 in the middle part of inner cavity, and the second row stomata 19 has the function of output gas, the second row 19 lower end of stomata is communicated with the first connecting tube 21, has been respectively communicated with the second connecting tube at left and right sides of 21 bottom end of the first connecting tube 22 and third connecting tube 23, second connecting tube 22 be connected to the 4th connecting tube 24 with third connecting tube 23, the described 6th Connecting tube 26 is located at 22 left side of the second connecting tube, and the left tube wall upper middle lower part of second connecting tube 22 is sequentially installed with first outlet Isolating valve 9, first check-valve 8 and the first decompressor 7, the right tube wall upper middle lower part of the third connecting tube 23 are sequentially installed with Two outlet isolating valves 15, second check-valve 14 and the second decompressor 13, first decompressor 7 and the second decompressor 13 Have the function of judging which branch gas supply, 1 left upper end of shell are provided with third gas vent 20 according to pressure difference.
Working principle:Left and right disk switching valve 16, first emptying valve 17 and second emptying valve 28 are in close state, remaining Valve is in the open state, after opening the first gas cylinder 2 and the second gas cylinder 3, is sentenced according to the first gas cylinder 2 and 3 pressure difference of the second gas cylinder Fixed first decompressor 7 or the second decompressor 13 gas supply, when the pressure of the first gas cylinder 2 is larger, at the first decompressor 7 In for gaseity, the second decompressor 13 is not supplied, and gas passes sequentially through the first air inlet isolating valve 6, the first decompressor 7, One check-valves 8 and first outlet isolating valve 9 supply outward, and after the first gas cylinder 2 supplies, pressure reduces, at this time the second gas cylinder 3 The first air inlet isolating valve 12, the first decompressor 13, first check-valve 14 and first outlet isolating valve 15 is passed sequentially through to supply outward Gas.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (5)

1. a kind of laboratory automatic switching control equipment, including shell (1), it is characterised in that:Shell (1) the lower wall left and right ends Through the 5th connecting tube (25) is connected with, bottom of the pipe is connected separately with the first gas at left and right sides of the 5th connecting tube (25) Bottle (2) and the second gas cylinder (3), the 5th connecting tube (25) upper end are communicated with the 4th connecting tube (24), the 4th connecting tube (24) upper tube wall is sequentially installed with first instrument (4), first pressure sensing unit (5), the first air inlet isolating valve from left to right (6), left and right disk switching valve (16), the second air inlet isolating valve (12), second pressure sensing unit (11) and second instrument (10), 4th connecting tube (24) left upper end is communicated with the 6th connecting tube (26), the left tube wall lower end installation of the 6th connecting tube (26) Have first emptying valve (17), the 6th connecting tube (26) upper end is communicated with first row stomata (18), the 4th connecting tube (24) upper right side is communicated with the 7th connecting tube (27), and the 7th connecting tube (27) upper tube wall is equipped with second emptying valve (28), Upper end is equipped with second row stomata (19) in the middle part of shell (1) inner cavity, and second row stomata (19) lower end is communicated with first Connecting tube (21), the first connecting tube (21) bottom end left and right sides have been respectively communicated with the second connecting tube (22) and third connecting tube (23), the left tube wall upper middle lower part of the second connecting tube (22) is sequentially installed with first outlet isolating valve (9), first check-valve (8) and the first decompressor (7), the right tube wall upper middle lower part of third connecting tube (23) are sequentially installed with second outlet isolating valve (15), second check-valve (14) and the second decompressor (13), shell (1) left upper end are provided with third gas vent (20).
2. a kind of laboratory automatic switching control equipment according to claim 1, it is characterised in that:7th connecting tube (27) It is connected in the middle part of left end and the 6th connecting tube (26), the first emptying valve (17) is located at the 7th connecting tube (27) and the 6th connecting tube (26) on the downside of connectivity part.
3. a kind of laboratory automatic switching control equipment according to claim 1, it is characterised in that:The left and right disk switching valve (16) it is installed in the middle part of the 4th connecting tube (24) upper tube wall.
4. a kind of laboratory automatic switching control equipment according to claim 1, it is characterised in that:6th connecting tube (26) On the left of the second connecting tube (22).
5. a kind of laboratory automatic switching control equipment according to claim 1, it is characterised in that:Second connecting tube (22) It is connected to the 4th connecting tube (24) with third connecting tube (23).
CN201820312057.9U 2018-03-07 2018-03-07 A kind of laboratory automatic switching control equipment Active CN208123881U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820312057.9U CN208123881U (en) 2018-03-07 2018-03-07 A kind of laboratory automatic switching control equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820312057.9U CN208123881U (en) 2018-03-07 2018-03-07 A kind of laboratory automatic switching control equipment

Publications (1)

Publication Number Publication Date
CN208123881U true CN208123881U (en) 2018-11-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820312057.9U Active CN208123881U (en) 2018-03-07 2018-03-07 A kind of laboratory automatic switching control equipment

Country Status (1)

Country Link
CN (1) CN208123881U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111810320A (en) * 2020-07-22 2020-10-23 北京星际荣耀空间科技有限公司 Control and blowing system, liquid rocket engine and rocket

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111810320A (en) * 2020-07-22 2020-10-23 北京星际荣耀空间科技有限公司 Control and blowing system, liquid rocket engine and rocket

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