CN208109331U - A kind of vacuum intelligent on-line detecting system - Google Patents
A kind of vacuum intelligent on-line detecting system Download PDFInfo
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- CN208109331U CN208109331U CN201820531737.XU CN201820531737U CN208109331U CN 208109331 U CN208109331 U CN 208109331U CN 201820531737 U CN201820531737 U CN 201820531737U CN 208109331 U CN208109331 U CN 208109331U
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Abstract
The utility model discloses a kind of vacuum intelligent on-line detecting systems, including on-line measuring device, data acquisition unit, data processing unit and central server；On-line measuring device is mounted on vacuum pipe；On-line measuring device connect with data acquisition unit and transmits vacuum degree signal to data acquisition unit；Data acquisition unit is connected to central server by Data Data processing unit；Vacuum transducing part in on-line measuring device includes sensory package and glass seal, and sensory package is connect by glass seal with on-line measuring device shell；It is designed by the detection system to the utility model, realize the intelligence of vacuum detecting, its stable structure, it is convenient to install and use, and can effectively improve glomus mosseae, real-time monitoring vacuum degree and state of temperature, and it is quasi- in leakage and find leakage position, guarantee that vacuum equipment can be handled timely, avoid the generation of peril, there is good use value.
Description
Technical field
The utility model relates to vacuum sensing technology field, especially a kind of vacuum intelligent on-line detecting system.
Background technique
High vacuum multiple layer heat insulation product in use, due to own material deflate or many factors such as vacuum leak all
It may cause the decline of its vacuum degree, heat-insulating property reduces, and thermal leakage ratio increases, to cause the energy consumption of medium and possibility in pipe
Bring security risk.
The high vacuum multiple layer heat insulation product in industry judges product essentially by superficial phenomenon is visually observed by rule of thumb at present
Whether vacuum state condenses as observed pipe surface face and (is commonly called as sweating), frosting.But appearance can observe by the naked eye existing
As when, vacuum heat insulating low-temperature pipe road is of serious failure already, it is necessary to handled or replaced immediately, no matter using scene exhaust or more
Mode handling failure is changed, the longer period is required, the normal operation for the client to be influenced that is bound to during this period even needs when serious
It stops maintenance, it will cause biggish economic loss to client.Existing vacuum on-line measuring device has using ceramic component
, but its there is a problem of welding process requirement it is high, there are soft seal unstable structure and glomus mosseae are bad, work as appearance
When leakage, it can not find simultaneously to handle maintenance in time in time.
Summary of the invention
The goal of the invention of the utility model is：In view of the above problems, a kind of vacuum intelligent on-line checking is provided
System is set by the ingehious design to on-line measuring device internal structure and the systematizations such as combined data acquisition and data processing
It is standby, the intelligence of entire vacuum on-line measuring device is realized, so that its stable structure, production and producing efficiency are high, and its energy
It is enough effective to improve glomus mosseae, real-time monitoring vacuum degree and state of temperature, and can it is quasi- in leakage and find and let out
Reveal position, guarantees that the equipment such as vacuum pipe or storage tank can be handled timely, avoid the generation of peril, structure
Simply, practical, there is good use value, be suitble to promote and apply.
The technical solution adopted in the utility model is as follows：
A kind of vacuum intelligent on-line detecting system of the utility model, including on-line measuring device, data acquisition unit, number
According to processing unit and central server；The on-line measuring device is mounted on vacuum pipe, for detecting the true of pipe sandwich
Reciprocal of duty cycle；The on-line measuring device connect with data acquisition unit and transmits vacuum degree signal to data acquisition unit；The number
Central server is connected to by Data Data processing unit according to acquisition unit, central processing unit is used for the vacuum degree obtained
Data are compared with predetermined vacuum degree and monitoring vacuum state；The on-line measuring device include shell, mounting seat and
Vacuum transducing part；The mounting seat is connected to the lower end of shell, in the mounting seat of vacuum transducing part setting, the peace
Dress pedestal with vacuum pipe or tank body for connecting；The vacuum transducing part includes sensory package and glass seal, sensing
Component is connect by glass seal with mounting seat；The sensory package is used to use vacuum degree data and be sent to data to adopt
Storage.
Due to using the above structure, firstly, the vacuum intelligent on-line detecting system of the utility model passes through ad hoc vacuum
On-line measuring device real-time detection product vacuum degree, after acquisition product vacuum degree by transmission link be transmitted to central server or
Person's cloud center provides Digital Display for user, and the product vacuum degree data and acquisition time of on-line measuring device acquisition are
System is also provided with the prediction for carrying out product vacuum life immediately according to product data, allows user is more intuitive clearly to know
The service life of road product enables to it to carry out relevant replacement or emergency in advance before service life/end-of-life in advance
Case preparation；Secondly, to vacuum degree monitoring process in can also realize when vacuum products occur can not be one it is urgent
In the case of, system can carry out security warning prompt automatically, and provide relevant interface and station control system progress safety interaction, pass through
Control system emergency of standing closes relevant control mechanism, it is ensured that equipment personnel operate with safety；Finally, by on-line measuring device
The ingehious design of internal structure realizes the intelligence of vacuum on-line measuring device, so that its stable structure, production and production effect
Rate is high, and it can effectively improve glomus mosseae, real-time monitoring vacuum degree and state of temperature, has good use
Performance.
The vacuum intelligent on-line detecting system of the utility model, the data acquisition unit include data collector and hold
Collector, data collector and portable collector pass through wireless transmission connection with on-line measuring device；The data collector
Data processing unit is transmitted signals to by PLC/ configuration software, portable collector and data processing unit wireless transmission connect
It connects.
Further, the central server by cloud platform by vacuum degree measurement data in web page display, wireless or have
Line terminal display.
Product Status is handled since a variety of data acquisition platforms using the above structure, are arranged, by will be from online
The vacuum degree data that detection device obtains are transmitted on dedicated portable collector or data collector by communication link, real
The remote transmission function of vacuum degree is showed, the person of being convenient to use grasps the use of the utility model vacuum intelligent on-line detecting system
Make；PLC/ configuration software realizes the acquisition and logic control of data, and on computers by data run, completes picture and shows, looks into
The function that inquiry, alarm etc. are intuitively checked for user.
The vacuum intelligent on-line detecting system of the utility model, the top of the glass seal and the upper end of mounting seat
Face is tightly connected, and is connected with sensory package and the protection cap for protecting sensory package on the bottom of glass seal；The guarantor
Protecting cover is coupled with glass seal bottom.
Further, the glass seal be annular cylinder structure, between side wall and mounting seat at it is certain every
Temperature gap installation；Junction between the glass seal and mounting seat and protection cap is all made of metal material and is made,
Junction between sensory package is made of glass material；It has been evenly arranged at least on the periphery wall of the protection cap
One measured hole.
Since using the above structure, sensory package can be effectively protected in protection cap, avoid directly making in a vacuum for a long time
With damage, the above-mentioned setting measurement of protection cap is empty, and sensor module is connect with vacuum interlayer to be detected and is led to, and allows vacuum measurement
Sensory package can directly measure vacuum interlayer, while component can also be protected not to be damaged, and guarantee the use of sensory package out
Service life；By the way that glass seal and mounting seat at certain heat-insulated line gap and are sealed installation, which is made
Guarantee vacuum measurement validity for the ventilation space of vacuum, and provide an insulated space for glass seal and pedestal into
Row welding, the phenomenon that avoiding high temperature to the damage of glass seal, glass seal is caused to fail or reduce its using effect
Occur, smart structural design, although simply, its function and effect is good；In addition, glass seal uses metal material and glass
The order of material combines, so that glass seal can not only reach one smaller more preferably in the use of detection process
Glomus mosseae, additionally it is possible to easily be welded with mounting seat, low metal material can be required to be pacified using welding condition
Dress, can greatly improve production efficiency, and since the insulating properties of glass material can be avoided effectively on glass seal
Influence of the metal material to sensory package.
The vacuum intelligent on-line detecting system of the utility model, the sensory package include draw pin, circuit board and transmitter；
The draw pin is equipped with several, is uniformly mounted on glass seal bottom, and draw pin upper end and circuit board are electrically connected, lower end
Portion passes through glass seal and protrudes into protection cap；The circuit board is connect by connecting plug-in unit with transmitter, and transmitter can
Read signal is transferred to data acquisition unit.
Further, RFID coil and ferrite are additionally provided in the shell, the RFID coil loop is set outside ferrite
Side is arranged in parallel with ferrite.
Further, the top of the shell is equipped with removable top, the sealed connection of the top cover and shell；It is described
RFID coil is arranged on top cover.
Further, the junction of the top cover and shell is equipped with sealing ring, passes through sealing pressure between top cover and shell
Lid connection；The internal screw thread for being equipped in the sealing gland and cooperating on shell and top cover lateral wall；It is additionally provided on the top cover aobvious
Display screen and control button, the display screen are electrically connected with corresponding sensory package with control button.
Due to using the above structure, the shell of sensory package and glass seal and mounting seat, on-line measuring device
Orderly installation, ensure that the mounting structure compact of entire on-line measuring device, the validity and accuracy of signal transmission；Very
Empty on-line measuring device is built into RFID, so that there is the utility model vacuum on-line measuring device the unique ID identity in the whole world to know
Not, it provides vacuum products Life cycle to trace to the source inquiry, allows security control Whole Process Control；Pass through the display being arranged on top cover
The observation detection case for shielding straight tube, is capable of the data information of the acquisition vacuum detecting of straight tube, very convenient and practical.
In conclusion by adopting the above-described technical solution, the utility model has the beneficial effects that：
1, the vacuum intelligent on-line detecting system structure of the utility model is simple, easy to install and use；
2, the intelligence of on-line checking vacuum is realized, it being capable of real time on-line monitoring vacuum state and state of temperature；
3, the data such as product vacuum degree, temperature can be acquired in real time, carry out dynamic analysis, perceive Product Status, and prediction is true
The empty service life；
4, the manufacture craft of on-line measuring device is simple, and process conditions require low；
5, on-line measuring device will sense electric elements installation connection using glass seal, so that on-line measuring device is true
Empty slip can be less than equal to 1*10-12Pa·m3/s;
6, it can be accurately positioned by the setting of RFID, it, can be quickly at capturing position if discovery leakage
Reason, ensure that the safety of equipment.
Detailed description of the invention
Fig. 1 is the schematic diagram of vacuum intelligent on-line detecting system；
Fig. 2 is the perspective view of vacuum intelligent on-line measuring device；
Fig. 3 is the schematic diagram of internal structure of vacuum intelligent on-line measuring device；
Fig. 4 is the mounting structure schematic diagram of vacuum intelligent on-line measuring device sensory package and seal assembly；
It is marked in figure：1- shell, 2- top cover, 3- mounting seat, 4- glass seal, 5- draw pin, 6- protection cap, 7- measurement
Hole, the heat-insulated gap 8-, 9- locking lid, 10- sealing ring, 11- transparent silicone pad, 12- sealing gland, 13- lead sheath body, 14- draw
Line adapter, 15- button, 16-RFID coil, 17- ferrite, 18- transmitter, 19- circuit board.
Specific embodiment
The utility model is described in detail below with reference to embodiment.
It is with reference to embodiments, practical new to this in order to which the objects, technical solutions and advantages of invention are more clearly understood
Type is further elaborated.It should be appreciated that specific embodiment described herein is only used to explain the utility model,
It is not used to limit the utility model.
As shown in each attached drawing of specification, a kind of vacuum intelligent on-line detecting system, including the acquisition of on-line measuring device, data
Unit, data processing unit and central server；The on-line measuring device is mounted on vacuum pipe, for detecting pipeline folder
The vacuum degree of layer；The on-line measuring device connect with data acquisition unit and transmits vacuum degree signal to data acquisition unit；
The data acquisition unit is connected to central server by Data Data processing unit, what central processing unit was used to be obtained
Vacuum degree data are compared with predetermined vacuum degree and monitoring vacuum state；Central server is examined vacuum degree by cloud platform
Measured data is in web page display, wirelessly or non-wirelessly terminal display.
Data acquisition unit includes data collector and portable collector, and data collector and portable collector are and online
Detection device passes through wireless transmission connection；The data collector transmits signals to data processing list by PLC/ configuration software
Member, portable collector and data processing unit wireless transmission connect.
On-line measuring device includes shell 1, mounting seat 3 and vacuum transducing part；The mounting seat 3 is connected to shell
1 lower end, in the mounting seat 3 of vacuum transducing part setting, the mounting seat 3 with vacuum pipe or tank body for connecting；
The vacuum transducing part includes sensory package and glass seal 4, and sensory package passes through glass seal 4 and mounting seat 3
Connection；The sensory package is used for using vacuum degree data and is sent to data collector.The connection of mounting seat 3 and shell 1
Place is equipped with sealing ring 10, which is O-ring seal, and mounting seat 3 is tightly connected with shell 1 by locking lid 9；Locking
Lid 9 is equipped with and the internal screw thread that is threadedly engaged on shell 1 and mounting seat 3；In locking lid 9 close to connection vacuum pipe or tank body
One end is also equipped with shaft block ring in mounting seat 3, the vacuum equipment for mounting seat 3 and to be detected/measurement（Vacuum tube
Road, storage tank, LNG tank body etc.）It is stably connected with.
The top of glass seal 4 and the upper surface of mounting seat 3 are tightly connected, and are connected on the bottom of glass seal 4
There are sensory package and the protection cap 6 for protecting sensory package；The protection cap 6 is coupled with 4 bottom of glass seal.Glass
Glass sealing element 4 is annular cylinder structure, is installed between side wall and mounting seat 3 at certain heat-insulated gap 8；The glass is close
Junction between sealing 4 and mounting seat 3 and protection cap 4 is all made of metal material and is made, the company between sensory package
The place of connecing is made of glass material；In above structure, the link position of glass seal 4 and sensory package uses glass material,
Glass seal 4 uses stainless steel material with mounting seat 3 and with the connection structure position of protection cap, and such structure is set
It sets, glass seal 4 is directly connected to by special welding with components such as mounting seat 3, protection caps 6, guarantees peace
The leakproofness of dress, and glass material can further seal sensory package and glass seal, and make glomus mosseae more
It is low, at the same also avoid stainless steel material partially due to its electric conductivity the round influence to signal transmission, in the present embodiment,
It is preferred that be specifically described with the glass seal that glass and stainless steel material form, it is all above-mentioned using easy based on the application
Principle in welded structure part and the structure material combination that can be insulated, and reach the similar technology effect of the application
And the directly replacement of the effects equivalent/function and same material used is within the scope of protection of this application.The circle of protection cap 6
At least one measured hole 7 has been evenly arranged on all lateral walls.By protection cap four measured holes 7 of above-mentioned setting in the present embodiment, four
A measured hole 7 is evenly arranged on the side wall of protection cap 6, by protection cap 6 with outside protection cap 6 heat-insulated gap 8 and vacuum tube
The perforation of the detection space of road or tank body.
Sensory package includes draw pin 5, circuit board 19 and transmitter 18；Draw pin 5 is equipped with several, the quantity of draw pin 5 according to
Depending on use demand, the quantity of draw pin 5 is equipped at least provided with the six roots of sensation, when six roots of sensation draw pin 5 is arranged, wherein four in the present embodiment
Root is used for vacuum degree measurement, and two are used for the detection of temperature；Draw pin 5 is uniformly mounted on the glass material of 4 bottom of glass seal
On, 5 upper end of draw pin and circuit board 19 are electrically connected, and lower end passes through glass seal 4 and protrudes into protection cap 6, the portion
Divide in production, draw pin is correspondingly placed at corresponding hole on glass seal 4（It is label in figure）It is interior, then glass is poured into
The position of draw pin 5 is fixed by glass, and is sealed against by the hole center, while effective using the insulating properties of glass
Avoid influence of the stainless steel material part to the electric signal in the detection process of draw pin 5；Circuit board 19 is by connection plug-in unit and becomes
Device 18 is sent to connect, readable signal is transferred to data acquisition unit by transmitter.Lead sheath body is also connected on the lateral wall of shell 1
13 and the lead adapter 14 that is arranged in the lead sheath body 13, for enclosure interior transducing signal to be transmitted.
Be additionally provided with RFID coil 16 and ferrite 17 in shell 1,16 ring of RFID coil set 17 outside of ferrite or with
Ferrite 17 is arranged in parallel, and RFID makes on-line measuring device have unique identities ID, can Life cycle trace to the source inquiry.It adopts
The product traceability that every vacuum products can be fundamentally solved with RFID coil reaches user from product manufacturing, product warehouse-out
Scene can carry out product traceability, obtain each process of product in detail.The top of shell 1 is equipped with removable top 2, top
The sealed connection of lid 2 and shell 1；RFID coil 16 is arranged on top cover 2.The junction of top cover 2 and shell 1 is equipped with O-shaped close
Seal 10 is equipped with transparent silicone pad 11 between top cover 2 and shell 1, transparent silicone pad 11 is isolated by shell 1 with 2 space of top cover, O
Top cover 2 and shell 1 are further tightly connected by type sealing ring, are connected between top cover 2 and shell 1 by sealing gland 12；It is close
The internal screw thread for being equipped in sealed cover 12 and cooperating on 2 lateral wall of shell 1 and top cover；Display screen is additionally provided on top cover 2（Do not show in figure
Out）With control button 15, display screen is electrically connected with corresponding sensory package with control button 15, and display screen can be shown in real time
Show detection data, display screen, control button are connect with transmitter, are related in above-mentioned all sensory package and the present embodiment
And the electric elements arrived are connect with power supply unit, for its normal use, power supply unit can be to exist with entire vacuum intelligent
Line detection system integrally connected is external by electrical route, the present embodiment preferably with entirely connect it and be wholely set, i.e.,
Power supply unit is arranged in connector.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (9)
1. a kind of vacuum intelligent on-line detecting system, which is characterized in that including on-line measuring device, data acquisition unit, data
Processing unit and central server；The on-line measuring device is mounted on vacuum pipe, for detecting the vacuum of pipe sandwich
Degree；The on-line measuring device connect with data acquisition unit and transmits vacuum degree signal to data acquisition unit；The data
Acquisition unit is connected to central server by Data Data processing unit, and central processing unit is used for the vacuum degree obtained
According to being compared with predetermined vacuum degree and monitoring vacuum state；The on-line measuring device includes shell（1）, mounting seat
（3）With vacuum transducing part；The mounting seat（3）It is connected to shell（1）Lower end, vacuum transducing part setting installation bottom
Seat（3）It is interior, the mounting seat（3）For being connect with vacuum pipe or tank body；The vacuum transducing part includes sensory package
And glass seal（4）, sensory package passes through glass seal（4）With mounting seat（3）Connection；The sensory package is for adopting
With vacuum degree data and it is sent to data collector.
2. vacuum intelligent on-line detecting system according to claim 1, which is characterized in that the data acquisition unit includes
Data collector and portable collector, data collector and portable collector are connected with on-line measuring device by wireless transmission
It connects；The data collector transmits signals to data processing unit by PLC/ configuration software, at portable collector and data
Manage unit wireless transmission connection.
3. vacuum intelligent on-line detecting system according to claim 1, which is characterized in that the central server passes through cloud
Platform is by vacuum degree measurement data in web page display, wirelessly or non-wirelessly terminal display.
4. vacuum intelligent on-line detecting system according to claim 1, which is characterized in that the glass seal（4）'s
Top and mounting seat（3）Upper surface be tightly connected, glass seal（4）Bottom on be connected with sensory package and for protecting
Protect the protection cap of sensory package（6）；The protection cap（6）With glass seal（4）Bottom is coupled.
5. vacuum intelligent on-line detecting system according to claim 4, which is characterized in that the glass seal（4）For
Annular cylinder structure, side wall and mounting seat（3）Between at certain heat-insulated gap（8）Installation；The glass seal（4）
With mounting seat（3）And protection cap（6）Between junction be all made of metal material and be made, the connection between sensory package
Place is made of glass material；The protection cap（6）Periphery wall on be evenly arranged at least one measured hole（7）.
6. vacuum intelligent on-line detecting system according to any one of claims 1-5, which is characterized in that the sensing group
Part includes draw pin（5）, circuit board（19）And transmitter（18）；The draw pin（5）Equipped with several, it is uniformly mounted on glass capsulation
Part（4）Bottom, draw pin（5）Upper end and circuit board（19）It is electrically connected, lower end passes through glass seal（4）And protrude into guarantor
Protecting cover（6）It is interior；The circuit board（19）Pass through connection plug-in unit and transmitter（18）Readable signal is transferred to number by connection, transmitter
According to acquisition unit.
7. vacuum intelligent on-line detecting system according to claim 6, which is characterized in that the shell（1）Inside it is additionally provided with
RFID coil（16）And ferrite（17）, the RFID coil（16）Ring is set in ferrite（17）Outside or and ferrite（17）
It is arranged in parallel.
8. vacuum intelligent on-line detecting system according to claim 7, which is characterized in that the shell（1）Top on
Equipped with removable top（2）, the top cover（2）With shell（1）Sealed connection；The RFID coil（16）It is arranged in top cover
（2）On.
9. vacuum intelligent on-line detecting system according to claim 8, which is characterized in that the top cover（2）With shell（1）
Junction be equipped with sealing ring（10）, top cover（2）With shell（1）Between pass through sealing gland（12）Connection；The sealing gland
（12）It is inside equipped with and shell（1）And top cover（2）The internal screw thread cooperated on lateral wall；The top cover（2）On be additionally provided with display screen and
Control button（15）, the display screen and control button（15）It is electrically connected with corresponding sensory package.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820531737.XU CN208109331U (en) | 2018-04-16 | 2018-04-16 | A kind of vacuum intelligent on-line detecting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820531737.XU CN208109331U (en) | 2018-04-16 | 2018-04-16 | A kind of vacuum intelligent on-line detecting system |
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| CN208109331U true CN208109331U (en) | 2018-11-16 |
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ID=64118659
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| CN201820531737.XU Active CN208109331U (en) | 2018-04-16 | 2018-04-16 | A kind of vacuum intelligent on-line detecting system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109341947A (en) * | 2018-12-06 | 2019-02-15 | 北京东方计量测试研究所 | A kind of vacuum system field calibration method based on wireless transmission |
| CN109847200A (en) * | 2019-01-31 | 2019-06-07 | 中国科学院近代物理研究所 | A kind of vacuum monitoring system for medical heavy ion avcceleration |
| CN110534376A (en) * | 2019-10-09 | 2019-12-03 | 保定市鑫通电器设备有限公司 | Vacuum tube vacuum-degree monitoring device method and monitoring method in load ratio bridging switch |
| CN111222796A (en) * | 2020-01-09 | 2020-06-02 | 西安交通大学 | Method and device for measuring vacuum degree of LNG pipeline based on temperature field principle, storage medium and terminal equipment |
| CN111766013A (en) * | 2020-07-09 | 2020-10-13 | 苏州大观信息技术有限公司 | Intelligent vacuum meter, vacuum pressure intelligent monitoring system and monitoring method |
| CN111928996A (en) * | 2020-05-28 | 2020-11-13 | 上海利方达真空技术有限公司 | Laser space filter using non-evaporable getter pump |
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2018
- 2018-04-16 CN CN201820531737.XU patent/CN208109331U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109341947A (en) * | 2018-12-06 | 2019-02-15 | 北京东方计量测试研究所 | A kind of vacuum system field calibration method based on wireless transmission |
| CN109847200A (en) * | 2019-01-31 | 2019-06-07 | 中国科学院近代物理研究所 | A kind of vacuum monitoring system for medical heavy ion avcceleration |
| CN109847200B (en) * | 2019-01-31 | 2021-03-05 | 中国科学院近代物理研究所 | Vacuum monitoring system for medical heavy ion accelerator |
| CN110534376A (en) * | 2019-10-09 | 2019-12-03 | 保定市鑫通电器设备有限公司 | Vacuum tube vacuum-degree monitoring device method and monitoring method in load ratio bridging switch |
| CN111222796A (en) * | 2020-01-09 | 2020-06-02 | 西安交通大学 | Method and device for measuring vacuum degree of LNG pipeline based on temperature field principle, storage medium and terminal equipment |
| CN111928996A (en) * | 2020-05-28 | 2020-11-13 | 上海利方达真空技术有限公司 | Laser space filter using non-evaporable getter pump |
| CN111766013A (en) * | 2020-07-09 | 2020-10-13 | 苏州大观信息技术有限公司 | Intelligent vacuum meter, vacuum pressure intelligent monitoring system and monitoring method |
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