CN208109322U - A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus - Google Patents
A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus Download PDFInfo
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- CN208109322U CN208109322U CN201820545333.6U CN201820545333U CN208109322U CN 208109322 U CN208109322 U CN 208109322U CN 201820545333 U CN201820545333 U CN 201820545333U CN 208109322 U CN208109322 U CN 208109322U
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- baroceptor
- compound range
- air pressure
- measuring apparatus
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Abstract
The utility model discloses a kind of compound range baroceptors, including glass substrate layers, silicon bottom, insulating silicon oxide layer and the glass cavity successively stacked from bottom to top, silicon bottom layer bottom has set up two-stage groove, interior diaphragm and outer membrane are equipped with above groove, outer membrane is thicker than the thickness of interior diaphragm, interior diaphragm is the stress strain film of internal atmospheric sensor, and outer membrane is the stress strain film of external pressure sensor；Insulating silicon oxide layer upper surface placed the inside and outside two groups Wheatstone bridges being made of 4 silicon nanowires varistors being nested.The invention also discloses a kind of high-precision sounding air pressure measuring apparatus, what the utility model improved sensor bears maximum pressure, due to having used thicker outer membrane, therefore thinner interior diaphragm can be used, to realize higher sensitivity, DATA REASONING error is effectively reduced, the demand of high-precision air pressure measuring apparatus is met.
Description
Technical field
The utility model relates to minute mechanical and electrical system sensor technical field, especially a kind of compound range baroceptor
With high-precision sounding air pressure measuring apparatus.
Background technique
Meteorological variation is closely related with human lives, directly affects the mankind and is engaged in productive labor, communications and transportation, aviation
The activities such as space flight, in order to predict and grasp the rule of aerological, the mankind have done unremitting effort thus.Aerological
Detection is a pith of climatic study, is to carry out weather warning forecast, carry out meteorological research and scientific experiment, research gas
Wait an important channel of variation and global meteorologic information.Air pressure is the one of aerological sounding as one of atmosphere elements
A key factor, the range and precision of barometric surveying directly affect the quality of aerological sounding, therefore as in sonde
The optimization design of air pressure sensing element, baroceptor is particularly important.Traditional sounding sensor is within the scope of wide-range
It is difficult to reach highly sensitive simultaneously and the good linearity, measurement accuracy disunity is unable to satisfy the reality that market is more improved
It is required that hence it is imperative that meeting the wide sounding baroceptor surveying pressure range, high sensitivity, high-acruracy survey and requiring.
Summary of the invention
Technical problem to be solved in the utility model is overcome the deficiencies in the prior art and provides a kind of compound range gas
Pressure sensor and high-precision sounding air pressure measuring apparatus carry out low-to-medium altitude and high air using the compound range baroceptor of monolithic
The detection of pressure so that measuring device both can achieve high sensitivity within the scope of wide-range, while have the good linearity and
High measurement accuracy.
The utility model uses following technical scheme to solve above-mentioned technical problem：
According to the utility model proposes a kind of compound range baroceptor, including the glass successively stacked from bottom to top
Basal layer, silicon bottom, insulating silicon oxide layer and glass cavity, silicon bottom layer bottom have set up two-stage groove, groove top
Equipped with interior diaphragm and outer membrane, outer membrane is thicker than the thickness of interior diaphragm, and interior diaphragm is the thin by stress-strain of internal atmospheric sensor
Film, outer membrane are the stress strain film of external pressure sensor；Insulating silicon oxide layer upper surface placed inside and outside two groups of sets
The embedding Wheatstone bridge being made of 4 silicon nanowires varistors, wherein the silicon nanowires in one group of Wheatstone bridge is pressure-sensitive
The symmetrically placed silicon nanowires varistor in interior diaphragm surrounding, another group of Wheatstone bridge is symmetrically placed two-by-two two-by-two for resistance
In the surrounding of outer membrane.
Scheme is advanced optimized as a kind of compound range baroceptor described in the utility model, glass cavity is logical
Anode linkage is crossed in conjunction with the insulating silicon oxide layer of compound range baroceptor, forms a reference pressure chamber, and
Glass cavity inner surface covers thermostat, drills on glass cavity and is filled with nonconducting conduction resin, passes through gold
Belong to contact and lead is drawn into realization electrical connection by drilling.
Scheme, the thermostat are advanced optimized as a kind of compound range baroceptor described in the utility model
Material therefor is polyimides Electric radiant Heating Film.
A kind of high-precision sounding air pressure measuring apparatus, including above-mentioned compound range baroceptor, hydrostatic head device, perseverance
Stream source mock standard pressure circuit and thermostat；The hydrostatic head device inner surface secures thermostat, and gas enters
Hydrostatic head device, hydrostatic head device is for filtering out influence of the wind speed and direction to compound range baroceptor；Constant-current source simulation
Normal pressure circuit is used to carry out the real-time self-correcting of compound range baroceptor, and thermostat masks environment for handling
The influence that temperature change generates.
Scheme, the static pressure are advanced optimized as a kind of high-precision sounding air pressure measuring apparatus described in the utility model
Head device is made of the oval hemisphere of two drillings symmetrical above and below and air duct, the placement symmetrical above and below of two of them hemisphere
Air inlet is formed, the air duct one end being located above connects the hemisphere of top, the other end and compound range baroceptor
It is connected, underlying air duct one end is connected with the hemisphere of lower section, and the other end is hanging.
Scheme, the constant temperature are advanced optimized as a kind of high-precision sounding air pressure measuring apparatus described in the utility model
Device material therefor is polyimides Electric radiant Heating Film.
Scheme, the constant current are advanced optimized as a kind of high-precision sounding air pressure measuring apparatus described in the utility model
Source mock standard pressure circuit is connected and composed by constant current source chip and sensor Wheatstone bridge, and wherein constant current source chip uses
The programmable current source pio chip AD5410 of ADI company production.
Scheme is advanced optimized as a kind of high-precision sounding air pressure measuring apparatus described in the utility model, further includes letter
Number conditioning circuit, A/D converter, single-chip microcontroller, wireless communication module and HID, compound range baroceptor and signal condition electricity
Road, A/D converter, single-chip microcontroller are successively linked in sequence, single-chip microcontroller and constant-current source mock standard pressure circuit, thermostat, wireless
Communication module, HID are separately connected.
The utility model compared with the prior art by using the above technical solution, has the following technical effects：
(1) system initialization simulates the atmospheric pressure value of standard using high-precision tabilized current power supply, to compound range air pressure
Sensor carries out real-time calibration self-correcting, and error bring is floated when eliminating to be influenced；
(2) single-chip microcontroller exports adjustable PWM wave using pid algorithm, and then controls polyimides electric heating film temperature and remain permanent
Fixed, wherein sensor maintains 50 DEG C, and hydrostatic head device is maintained at 70 DEG C, since temperature aloft is lower and easily freezes, maintains
Sensor can be made not haze at 50 DEG C to freeze and can work normally, eliminate the influence and extend equipment that temperature change is brought
Working life, hydrostatic head device can properly increase temperature due to being directly exposed to air；
(3) output signal for acquiring external pressure sensor, is transferred to ground control centre using wireless module, and judge
Whether air pressure is less than 500hPa, if it is, the output signal of acquisition internal atmospheric sensor, and be transferred to using wireless module
Ground control centre；
(4) ground control centre carries out signal processing, provides the barometric surveying knot in entire range (3-1100hPa) range
Fruit.
Detailed description of the invention
Fig. 1 is hydrostatic head device and sensor and thermostat scheme of installation；
Fig. 2 is the top view of compound range baroceptor internal structure in the utility model；
Fig. 3 is the sectional view of A-A in Fig. 2 in the utility model；
Fig. 4 is that A-A adds the sectional view of glass cavity devices in Fig. 2 in the utility model；
Fig. 5 is that constant-current source is loaded into Wheatstone bridge schematic diagram；
Fig. 6 is constant-temperature circuit schematic diagram；
Fig. 7 is sounding working sensor flow chart；
Fig. 8 is the module frame chart of an embodiment of the present invention.
Appended drawing reference in figure is construed to：The compound range baroceptor of 1-, the overhead 2- cavities conduit pipe, 3- hydrostatic head, 4- are poly-
Acid imide Electric radiant Heating Film, air duct under 5-, 6- silicon dioxide layer, 7- outer membrane stress strain film, 8- aluminium, 9- silicon nanowires pressure
Quick resistance, 10- metal terminal, 11- lead, 12- interior diaphragm stress strain film, 13- silicon bottom, 14- glass substrate layers, 15-
Glass cavity, 16- conduction resin, 17- hard contact, 18- polyimides Electric radiant Heating Film, 19- temperature sensor.
Specific embodiment
The technical solution of the utility model is described in further detail with reference to the accompanying drawing：
A kind of high-precision sounding air pressure measuring apparatus includes compound range baroceptor 1, hydrostatic head device, constant temperature
Device, each compound range baroceptor 1 include the glass substrate layers 14 successively stacked from bottom to top, silicon bottom 13 and insulation
Two groups of silicon nanowires varistors 9 are respectively set in silicon dioxide layer 6, the surrounding of 6 upper surface of insulating silicon oxide layer, pass through
Series of process process, 9 both ends of silicon nanowires varistor have sputtered metallic aluminium 8, and metallic aluminium 8 passes through lead 11 and metal terminal
10 are connected.
As shown in Figure 1, the compound range baroceptor of monolithic is mounted on inside the overhead cavities conduit pipe 2 above hydrostatic head, lead
The pipe other end is connected with hydrostatic head 3, and two oval hemisphere hydrostatic heads 3 are symmetrically placed, and the hydrostatic head of lower section is connected to lower cavity
The other end of conduit 5, lower air duct 5 is hanging, and the water droplet that rain and snow weather enters accidentally can be discharged, wherein fixing in 3 inner surfaces
Polyimides Electric radiant Heating Film 4 is used as heating equipment, secures temperature sensor 19 on the surface of polyimides Electric radiant Heating Film 4 and surveys in real time
Amount electric heating film temperature simultaneously sends temperature information to single-chip microcontroller, and single-chip microcontroller is using pid algorithm regulation output PWM wave, so that polyamides
Imines Electric radiant Heating Film 4 maintains 70 DEG C always, realizes temperature incubation function, eliminates the influence of ice rain icing.
As shown in Figure 2,3, the silicon nanowires varistor in 7 range of outer membrane stress strain film constitutes one group
Wheatstone bridge, the silicon nanowires varistor 9 in 12 range of interior diaphragm stress strain film constitute second group of favour this
Energization bridge.As shown in figure 4, being combined silicon dioxide layer 6 with glass cavity 15 using anode linkage technology, a reference can be formed
Pressure chamber, wherein the inner surface in glass cavity 15 covers one layer of constant-temp material polyimides Electric radiant Heating Film 18, glass cavity 15
Outside placed temperature sensor 19 and be used to measure the temperature of compound range baroceptor, it is made in conjunction with heating sheet always
50 DEG C are maintained at, drill on glass cavity 15 and is filled with nonconducting conduction resin 16, can will be drawn by hard contact 17
Line realizes conductive interconnection by drilling.
After being used due to sensor or placed a period of time, output characteristics easily changes, and the utility model devises
Constant-current source device mock standard pressure carries out real-time calibration self-correcting.Wherein constant-current source circuit uses the production of ADI company
Constant current source chip is connected by programmable current source pio chip AD5410 with MCU single-chip microcontroller, and programming Control exports adjustable current,
Constant current source output current is loaded on the Wheatstone bridge of silicon nanowires varistor composition, electric bridge is as shown in figure 5, by circuit
Principle of stacking can obtain,
Then output voltage
When sensor is not loaded with, at this time
R1=R2=R3=R4=R,
Then
As can be seen from the above equation, output voltage VoIt is directly proportional to silicon nanowires varistor resistance value R, then VoWith sensor institute
It is linear by pressure, and output voltage VoWith the constant-current source I of loadiIt is directly proportional, therefore additional constant-current source I can be usediSimulation
Standard pressure generator, the utility model are adjustable using the high-precision that the programmable current source chip that ADI company produces exports 0~24mA
Electric current, relative accuracy can reach 0.024%, and can by the precision resistance of external 15K Ω by measurement accuracy improve to
0.012%.
Before carrying out automatic Calibration, need first to use standard pressure generator PiSensor is demarcated to obtain output characteristics
Curve, if Pi(Pi=0 is the situation of sensor zero load) voltage value that measures is Vi(i=1,2,3,4..., n), available pass
In PiAnd ViMultinomial
Coefficient matrix C=(V can be obtained by fitting of a polynomialTV)-1VTP, wherein V is ViThe matrix that power at different levels are constituted, P
For PiThe column vector of composition.Then to the voltage output signal V arbitrarily measured, corresponding pressure value P=c can be obtained0+c1V+c2V2
+…+cnVn, constant-current source I is normally connected when measurementi, bring the voltage value that sensor exports into P=c0+c1V+c2V2+…+cnVn
In, I can be calculatediCorresponding mock standard pressure value.
As shown in fig. 6, since single-chip microcontroller output signal is usually smaller, thermostat can not be driven, therefore by polyimides
Electric radiant Heating Film is connected by power amplification circuit with single-chip microcontroller, and in addition Electric radiant Heating Film is connected with temperature sensor, real-time measurement electricity
Hotting mask temperature simultaneously sends single-chip microcontroller to and is handled.This circuit has used TB6612FNG chip to carry out signal amplification, to realize
Single-chip microcontroller output PWM wave control heated by electrothermal film simultaneously maintains steady temperature.
It is illustrated in figure 7 sounding working sensor flow chart, single-chip microcontroller hardware system is first turned on and is initialized, is used
After constant-current source mock standard pressure circuit carries out real time correction, single-chip microcontroller can using pid algorithm output after sounder lift-off
The PWM wave of tune, and then control polyimides electric heating film temperature and remain constant, wherein compound range baroceptor maintains 50
DEG C, hydrostatic head device is maintained at 70 DEG C, and since temperature aloft is lower and easily freezes, maintaining 50 DEG C can make sensor not haze
Freeze and can work normally, eliminate influence that temperature change is brought and extend service life of structure, hydrostatic head device by
In being directly exposed to air, temperature can be properly increased.The output signal for acquiring external pressure sensor, is passed using wireless module
It is defeated to arrive ground control centre, and judge whether air pressure is less than 500hPa, internal sensor is converted to if being lower than 500hPa to carry out
Measurement, while signal is sent to ground by wireless module, otherwise continue to the next step, and signal is exported to signal processing circuit
It is exported after being handled.Last ground control centre carries out signal processing, provides the gas in entire range (3-1100hPa) range
Press measurement result.
As shown in figure 8, a kind of high-precision sounding air pressure measuring apparatus, further includes power supply, signal conditioning circuit, A/D conversion
Device, wireless communication module and HID, wherein signal conditioning circuit includes operational amplifier and filter, and shown operational amplifier is
Differential amplifier circuit is the prior art, and the power supply is separately connected compound range baroceptor, constant-current source mock standard pressure
Circuit, thermostat, signal conditioning circuit, A/D converter, single-chip microcontroller, and power for it；The compound range baroceptor
Connect operational amplifier, then be transferred to single-chip microcontroller through filter and A/D converter, the single-chip microcontroller connection wireless communication module and
HID。
Then the signal of compound range baroceptor wireless communication module is transferred to by single-chip microcontroller to lead to ground
Letter, the single-chip microcontroller are MCU, and model STM32, the wireless communication module uses Beidou wireless communication module, described
Whether HID is LED light, as device display lamp, work normally for display device.
In order to realize broader survey pressure range and higher sensitivity, the utility model uses compound range air pressure sensing
Device, with the different strain film of inside and outside two thickness, compared to sin-gle membrane sensor, double film sensors have used thicker outer membrane
As reinforcement structure, it can improve the maximum of sensor to avoid the spike stress of inner membrane edge edge and bear pressure.Due to using
Thicker outer membrane, therefore thinner interior diaphragm can be used, to realize higher sensitivity.Therefore compound range gas is used
Pressure sensor not only increases to measure high-altitude air pressure and surveys pressure range, also improve measurement sensitivity.In order to guarantee measurement data
Accuracy, the utility model combines hydrostatic head device, thermostat and constant-current source mock standard pressure circuit, eliminates
External environment changes the variation that bring influences and the generation drift of sensor self performance generates, and effectively reduces measurement
Error meets the demand of high-precision sounding pneumatic shuttle.
The utility model devises a kind of compound range baroceptor, and it is thin to be compounded with two different pressure-strains of thickness
Film, compared to traditional sin-gle membrane sensor, double film sensors have used thicker outer membrane as reinforcement structure, can be to avoid inner membrance
The spike stress at edge, improve sensor bears maximum pressure, due to having used thicker outer membrane, can be used
Thinner interior diaphragm, to realize higher sensitivity.In the present invention, it is 3-500hPa that interior diaphragm, which surveys pressure range,
The survey pressure range of outer membrane is 500hPa-1100hPa, meets the measurement air pressure range of sounding sensor requirements.Gas is first
Into hydrostatic head device, influence of the wind speed and direction to measuring system around is filtered out；In hydrostatic head inner surface and baroceptor
Thermostat is secured, the influence of sounding variation of ambient temperature generation is shielded；Using constant-current source device mock standard pressure,
Realize the real-time self-correcting function of sensor；Compound range sensors are mounted in the air duct above hydrostatic head, by what is measured
Data transmission effectively reduces DATA REASONING error, meets the need of high-precision air pressure measuring apparatus to signal processing circuit
It asks.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvement and deformations can also be made, these change
It also should be regarded as the protection scope of the utility model into deformation.
Claims (8)
1. a kind of compound range baroceptor, which is characterized in that including successively stack from bottom to top glass substrate layers, silicon bottom
Layer, insulating silicon oxide layer and glass cavity, silicon bottom layer bottom have set up two-stage groove, be equipped with above groove interior diaphragm and
Outer membrane, outer membrane are thicker than the thickness of interior diaphragm, and interior diaphragm is the stress strain film of internal atmospheric sensor, and outer membrane is outer
The stress strain film of portion's baroceptor；Insulating silicon oxide layer upper surface placed inside and outside two groups be nested received by 4 silicon
The Wheatstone bridge that rice noodles varistor is constituted, wherein the silicon nanowires varistor in one group of Wheatstone bridge is symmetrically put two-by-two
It is placed in interior diaphragm surrounding, the silicon nanowires varistor in another group of Wheatstone bridge is symmetrically placed in the four of outer membrane two-by-two
Week.
2. a kind of compound range baroceptor according to claim 1, which is characterized in that glass cavity is to pass through anode
Bonding forms a reference pressure chamber in conjunction with the insulating silicon oxide layer of compound range baroceptor, and in glass sky
Inner cavity surface covers thermostat, drills on glass cavity and is filled with nonconducting conduction resin, passes through hard contact
Lead is drawn by drilling and realizes electrical connection.
3. a kind of compound range baroceptor according to claim 2, which is characterized in that material used in the thermostat
Material is polyimides Electric radiant Heating Film.
4. a kind of high-precision sounding air pressure measuring apparatus, which is characterized in that including compound range described in claims 1 or 2 or 3
Baroceptor, hydrostatic head device, constant-current source mock standard pressure circuit and thermostat；The hydrostatic head device inner surface
Thermostat is secured, gas enters hydrostatic head device, and hydrostatic head device is for filtering out wind speed and direction to compound range air pressure
The influence of sensor；Constant-current source mock standard pressure circuit is used to carry out the real-time self-correcting of compound range baroceptor, permanent
Warm device is used to handle the influence for masking variation of ambient temperature generation.
5. a kind of high-precision sounding air pressure measuring apparatus according to claim 4, which is characterized in that the hydrostatic head device
Be made of the oval hemisphere of two drillings symmetrical above and below and air duct, the placement symmetrical above and below of two of them hemisphere formed into
Air port, the hemisphere for the air duct one end connection top being located above, the other end are connected with compound range baroceptor, position
It is connected in air duct one end of lower section with the hemisphere of lower section, the other end is hanging.
6. a kind of high-precision sounding air pressure measuring apparatus according to claim 4, which is characterized in that the thermostat institute
It is polyimides Electric radiant Heating Film with material.
7. a kind of high-precision sounding air pressure measuring apparatus according to claim 4, which is characterized in that the constant-current source simulation
Normal pressure circuit is connected and composed by constant current source chip and sensor Wheatstone bridge, and wherein it is public to use ADI for constant current source chip
Take charge of the programmable current source pio chip AD5410 of production.
8. a kind of high-precision sounding air pressure measuring apparatus according to claim 4, which is characterized in that further include signal condition
Circuit, A/D converter, single-chip microcontroller, wireless communication module and HID, compound range baroceptor and signal conditioning circuit, A/D
Converter, single-chip microcontroller are successively linked in sequence, single-chip microcontroller and constant-current source mock standard pressure circuit, thermostat, radio communication mold
Block, HID are separately connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820545333.6U CN208109322U (en) | 2018-04-17 | 2018-04-17 | A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820545333.6U CN208109322U (en) | 2018-04-17 | 2018-04-17 | A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus |
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|---|---|
| CN208109322U true CN208109322U (en) | 2018-11-16 |
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ID=64117929
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| CN201820545333.6U Expired - Fee Related CN208109322U (en) | 2018-04-17 | 2018-04-17 | A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108332898A (en) * | 2018-04-17 | 2018-07-27 | 南京信息工程大学 | A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus |
| CN115628840A (en) * | 2022-12-20 | 2023-01-20 | 深圳市新凯来技术有限公司 | Pressure sensor and electronic equipment |
-
2018
- 2018-04-17 CN CN201820545333.6U patent/CN208109322U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108332898A (en) * | 2018-04-17 | 2018-07-27 | 南京信息工程大学 | A kind of compound range baroceptor and high-precision sounding air pressure measuring apparatus |
| CN108332898B (en) * | 2018-04-17 | 2023-05-09 | 南京信息工程大学 | Composite range air pressure sensor and high-precision air pressure detecting and measuring device |
| CN115628840A (en) * | 2022-12-20 | 2023-01-20 | 深圳市新凯来技术有限公司 | Pressure sensor and electronic equipment |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181116 Termination date: 20200417 |