CN208104232U - Alternating electric field auxiliary optical component surface etching treatment device - Google Patents
Alternating electric field auxiliary optical component surface etching treatment device Download PDFInfo
- Publication number
- CN208104232U CN208104232U CN201820536465.2U CN201820536465U CN208104232U CN 208104232 U CN208104232 U CN 208104232U CN 201820536465 U CN201820536465 U CN 201820536465U CN 208104232 U CN208104232 U CN 208104232U
- Authority
- CN
- China
- Prior art keywords
- optical component
- reservoir
- arm
- electric field
- electrode plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The utility model discloses a kind of alternating electric field auxiliary optical component surface etching treatment devices, including：Support frame, bottom are connected with bottom plate；Base plate rail is provided on bottom plate；Beam arm is connected to the top of support frame；It is provided with guide groove on beam arm, the first screw rod is provided in guide groove；Arm is lifted, one end connects optical element to be processed, and the other end is connected on the first sliding block of the first lead screw by lifting unit, connects first servo motor on the first lead screw；Reservoir, it is interior to place etching liquid；The bottom of reservoir is provided with universal wheel；Universal wheel is connected on base plate rail；Parallel electrode plate is placed in reservoir by position control unit；Alternating source is connect by power switch and conducting wire with parallel electrode plate；The device of the utility model can control effectively to the chemical reaction course in fused quartz optical component etching treatment procedure, and apparatus structure is simple, cheap, noise-less pollution when operation.
Description
Technical field
The utility model belongs to optical element surface processing technology field, and in particular to a kind of alternating electric field auxiliary optical member
Part surface etching treatment device.
Background technique
In optical industry application, a large amount of optical element is the underlying carrier for constituting optical delivery channel.Optical element
Surface quality directly affect its conduct light beam beam quality.The poor optical element of surface quality, optical scattering is more,
Optical transmittance is low, and causes to generate phase difference between conduction light beam, thus greatly reduces the beam quality of conduction light beam.Especially
It is for large scale laser instrument, internal optical element is mostly the large scale fused quartz optical component of meter level.These are molten
The surface quality of silica optical element not only influences the beam quality of conducts high energy laser, also determines optical element itself
Resist the ability of superlaser induced damage.
In order to improve the ability of itself resisting laser damage of the surface quality of fused quartz optical component, especially lift elements,
It has been had been developed at present using ultrasound or million sound auxiliary buffered hydrofluoric acid solution (or hydrochloric acid, nitric acid mixed solution etc.) to fused quartz light
Learn method and relevant device that element carries out surface etching process.The country has also been developed to be lost for fused quartz optical component surface
The improved method for carving processing, ultrasound or million several fields are to be excited by the vibration source of high-frequency vibration, and vibration source surrounding medium is caused to vibrate
And formed.The vibrational energy of vibration source is transmitted to optical element surface through medium and then generates shadow to surface etching reaction process
It rings.The method for introducing ultrasound or million sound progress assisted etch, can enhance the activity of chemical etching reaction, promote reaction product
Diffusion, effectively avoids reaction product from being deposited on optical element surface again.Existing research shows that using ultrasonic wave added acid etching
Method is surface-treated fused quartz optical component, can improve the surface quality of element, and being capable of significantly improving optical
The ability of element itself resisting laser damage.But current ultrasonic auxiliary acid engraving method lacks anti-to the chemistry in etching treatment procedure
The measure that process control effectively is answered, ultrasonic wave added acid etching equipment price is expensive, and equipment is also easy to produce in start and stop or operation
Biggish noise pollution.
Utility model content
In order to overcome the problems, such as that ultrasound or million sound assisted etch methods exist, the utility model provides a kind of completely new application
Alternating electric field auxiliary carries out the device of surface etching process to fused quartz optical component, which is directly affected using alternating electric field
The motion mode of all kinds of ions regulates and controls chemical etching process during acid etching, with conventional ultrasound or million sound assisted etch
Method has essential distinction in principle.
In order to realize these purposes and other advantages according to the present utility model, a kind of alternating electric field auxiliary optical is provided
Element surface etching processing device, including：
Support frame, bottom are connected with bottom plate；Base plate rail is provided on the bottom plate；
Beam arm is connected to the top of support frame and vertical with support frame；Guide groove is provided on the beam arm, it is described
The first screw rod is provided in guide groove；
Lift arm, one end connects optical element to be processed, and the other end is connected to the of the first lead screw by lifting unit
On one sliding block, the first lead screw connection first servo motor is to drive the first screw rod to rotate and then control lifting arm along beam arm
It is mobile；
Reservoir, it is interior to place etching liquid；The bottom of the reservoir is provided with lockable universal wheel；The universal wheel
Slidable connection is on base plate rail；
Parallel electrode plate is placed in reservoir by position control unit, and makes fused quartz optical component to be processed
Between parallel electrode plate；
Alternating source is connect by power switch and conducting wire with parallel electrode plate；
Wherein, optical element to be processed is connected on lifting arm, by control first servo motor that optics to be processed is first
Part is moved to above reservoir, the parallel electrode plate being then moved to optical element to be processed by lifting unit in reservoir
Between.
Preferably, the lifting arm is hard hollow connecting rod, and the lifting unit includes being connected on the first sliding block
Second servo motor and the second screw rod connecting with the second servo motor, one end of the hard hollow connecting rod are connected to second
On second sliding block of bar.
Preferably, the lifting arm is flexible connection rope, and the lifting unit includes the be connected on the first sliding block
Two servo motors and the reel being connected on the motor shaft of the second servo motor, one end of the flexible connection rope be connected to around
In line wheel.
Preferably, the end of the lifting arm is provided with the clamping piece for connecting fused quartz optical component to be processed；
The retainer surface coats the coating of antiacid caustic corrosion.
Preferably, the outer wall lower end of the reservoir configures the check-valves that shuts off；It is coated on the inner wall of the reservoir anti-
The coating of acid and alkali corrosion.
Preferably, the structure of the position control unit includes：U-shaped frame is arranged parallel electricity by fixture on support arm
Pole plate；The support arm of the U-shaped frame is threaded rod, nut of the setting for parallel electrode plate limit on the threaded rod；The folder
Tool surface coats the coating of antiacid caustic corrosion.
Preferably, the coating of antiacid caustic corrosion is coated on the parallel electrode plate.
The utility model is include at least the following beneficial effects：It can be convenient by the device and be effectively placed in optical element
Between parallel electrode plate, while the motion mode of all kinds of ions during acid etching is directly affected to regulate and control using alternating electric field
Chemical etching process, the processing of realization that can be more convenient to optical element surface, and the device of the utility model can be right
Chemical reaction course in fused quartz optical component etching treatment procedure control effectively, and apparatus structure is simple, cheap,
Noise-less pollution when operation.
The further advantage, target and feature of the utility model will be partially reflected by the following instructions, and part will also pass through
Research and practice to the utility model and be understood by the person skilled in the art.
Detailed description of the invention：
Fig. 1 is the structural schematic diagram of the utility model alternating electric field auxiliary optical component surface etching treatment device；
Fig. 2 is the structural schematic diagram of the utility model lifting unit；
Fig. 3 is the structural schematic diagram of the utility model another kind lifting unit；
Fig. 4 is the structural schematic diagram of the utility model position control unit；
Fig. 5 is another structural schematic diagram of the utility model position control unit.
Specific embodiment：
The following describes the utility model in further detail with reference to the accompanying drawings, to enable those skilled in the art referring to explanation
Book text can be implemented accordingly.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein do not allot one or more
The presence or addition of a other elements or combinations thereof.
Fig. 1~3 show a kind of alternating electric field auxiliary optical component surface etching treatment device of the utility model, packet
It includes：
Support frame 1, bottom are connected with bottom plate 101；Base plate rail 12 is provided on the bottom plate 101；
Beam arm 2 is connected to the top of support frame 1 and vertical with support frame 1；It is provided with guide groove on the beam arm 2,
The first screw rod 21 is provided in the guide groove；
Arm 5 is lifted, one end connects optical element 8 to be processed, and the other end is connected to the first lead screw 21 by lifting unit 4
The first sliding block 22 on, first lead screw 21 connects first servo motor 3 to drive the first screw rod 21 to rotate and then control the
Lifting arm 5 on one sliding block 22 is moved along beam arm 2；
Reservoir 6, it is interior to place etching liquid；The bottom of the reservoir 6 is provided with lockable universal wheel 11；Described ten thousand
To 11 slidable connections of wheel on base plate rail 12；
Parallel electrode plate 7 is placed in reservoir 6 by position control unit 9, and makes fused quartz optics member to be processed
Part 8 is between parallel electrode plate 7；
Alternating source 13 is connect by power switch 14 and conducting wire 15 with parallel electrode plate 7；
Wherein, optical element 8 to be processed is connected on lifting arm 5, by controlling first servo motor 3 for optics to be processed
Element 8 is moved to 6 top of reservoir, is then moved to optical element 8 to be processed by lifting unit 4 flat in reservoir 6
Between row electrode plate 7, wherein the area of parallel electrode plate wants the optical element that processing to be etched can be completely covered；Parallel pole
Plate connects alternating source, opens alternating source switch, makes to generate alternating electric field between parallel electrode plate, carries out optical element table immediately
Facet etch processing, processing to be etched after a certain period of time, close alternating source switch, take out optical element, complete at the etching of surface
Reason process.
In the above-mentioned technical solutions, as shown in Fig. 2, the lifting arm 5 is hard hollow connecting rod 51, the lifting unit 4
Second including the second servo motor 23 being connected on the first sliding block 22 and with the motor axis connection of the second servo motor 23
Bar 24, one end of the hard hollow connecting rod 51 are connected on the second sliding block 25 of the second screw rod 24；In the structure, the second servo
The motor shaft of motor 23 is arranged in parallel with support frame；In this way, turned by controlling the motor shaft of the second servo motor 23
It is dynamic, the rotation of the second screw rod 24 is driven, and the second sliding block 25 being threaded on the second screw rod 24 then moves up and down, to drive
Hard hollow connecting rod 51 moves up and down.
In the above-mentioned technical solutions, as shown in figure 3, the lifting arm 5 is flexible connection rope 52, the lifting unit 4 is wrapped
Include the reel that second be connected on the first sliding block 22 servo motor 23 He be connected on the motor shaft of the second servo motor 23
26, one end of the flexible connection rope 52 is connected on reel 26；In the structure, the motor shaft and branch of the second servo motor 23
Support is vertically arranged；In this way, it is rotated by controlling the motor shaft of the second servo motor 23, drives reel rotation,
To drive flexible connection rope 52 to be wrapped on reel, and then realize moving up and down for optical element.
In the above-mentioned technical solutions, the end of the lifting arm 5 is provided with for connecting fused quartz optical component to be processed
Clamping piece 53；In this way, the connection to optical element can be conveniently realized；The retainer surface coating
The coating of antiacid caustic corrosion.
In the above-mentioned technical solutions, the outer wall lower end of the reservoir 6 configures the check-valves 10 that shuts off；The reservoir it is interior
The coating of antiacid caustic corrosion is coated on wall.In this way, etching liquid is discharged by the check-valves that shuts off.
In the above-mentioned technical solutions, as shown in Figures 4 and 5, the structure of the position control unit 9 includes：U-shaped frame 91,
Parallel electrode plate 7 is arranged by fixture 912 on support arm 911；The support arm 911 of the U-shaped frame 91 is threaded rod, on the threaded rod
Nut 913 for parallel electrode plate limit is set；In this way, it may be convenient to which parallel electrode plate is fixed on liquid storage
In slot, and the fixation that can be convenient by threaded rod and nut and the position for adjusting parallel electrode plate；912 surface of fixture
The coating for coating antiacid caustic corrosion is used since etching solution is acid (such as hydrofluoric acid) or alkaline solution (such as sodium hydroxide)
This mode can chemically react between etching solution to avoid it.
In the above-mentioned technical solutions, Teflon painting can be used in the coating that antiacid caustic corrosion is coated on the parallel electrode plate
Layer, since etching solution is that acid (such as hydrofluoric acid) or alkaline solution (such as sodium hydroxide) in this way can be to avoid them
It is chemically reacted between etching solution.
The method for performing etching processing using the etching processing device of the utility model, includes the following steps：
Step 1: reservoir is placed on base plate rail；Parallel electrode plate is placed on storage by position control unit
In liquid bath, and make 5~15cm of spacing between parallel electrode plate；
Step 2: the one end for lifting arm is connected on the first sliding block of the first lead screw by lifting unit, pass through control
First servo motor drives the first screw rod to rotate and then controls lifting arm and is moved to above reservoir along beam arm, will connect optics
Element is connected to the other end of lifting arm, is then moved to optical element to be processed by lifting unit parallel in reservoir
Between electrode plate；The left-right position of fused quartz optical component to be processed is adjusted by controlling first servo motor；Then
Etching liquid is injected in reservoir；
Step 3: powering on switch, makes to generate alternating electric field between parallel electrode plate by alternating source, start simultaneously at light
Learn element surface etching treatment procedure；After surface etching treatment procedure carries out to a certain extent, disconnecting power switch passes through liter
It drops unit and optical element is promoted to reservoir ullage, sign-off table facet etch treatment process；
In the step 3, the alternating current frequency of the alternating source is 1000Hz~1MHz, and electric current is 1~20A, electricity
Pressure is 220~360V；The time of surface etching treatment procedure be 0.5~for 24 hours；The etching solution is hydrofluoric acid solution or hydrogen-oxygen
Change sodium solution.
It is not only in the description and the implementation although the embodiments of the present invention have been disclosed as above
Listed utilization, it can be applied to various fields suitable for the present invention completely, for those skilled in the art,
Other modifications may be easily implemented, therefore without departing from the general concept defined in the claims and the equivalent scope, this reality
It is not limited to specific details and legend shown and described herein with novel.
Claims (7)
1. a kind of alternating electric field auxiliary optical component surface etching treatment device, which is characterized in that including：
Support frame, bottom are connected with bottom plate；Base plate rail is provided on the bottom plate；
Beam arm is connected to the top of support frame and vertical with support frame；Guide groove, the guide groove are provided on the beam arm
Inside it is provided with the first screw rod；
Arm is lifted, one end connects optical element to be processed, and the other end is slided by first that lifting unit is connected to the first lead screw
On block, the first lead screw connection first servo motor is moved with driving the first screw rod to rotate and then controlling lifting arm along beam arm
It is dynamic；
Reservoir, it is interior to place etching liquid；The bottom of the reservoir is provided with lockable universal wheel；The universal wheel can be slided
It is dynamic to be connected on base plate rail；
Parallel electrode plate is placed in reservoir by position control unit, and is located at fused quartz optical component to be processed
Between parallel electrode plate；
Alternating source is connect by power switch and conducting wire with parallel electrode plate；
Wherein, optical element to be processed is connected on lifting arm, is moved optical element to be processed by control first servo motor
Move to above reservoir, then by lifting unit by optical element to be processed be moved to the parallel electrode plate in reservoir it
Between.
2. alternating electric field auxiliary optical component surface etching treatment device as described in claim 1, which is characterized in that described to mention
Torque arm be hard hollow connecting rod, the lifting unit include the second servo motor being connected on the first sliding block and with the second servo
Second screw rod of motor connection, one end of the hard hollow connecting rod is connected on the second sliding block of the second screw rod.
3. alternating electric field auxiliary optical component surface etching treatment device as described in claim 1, which is characterized in that described to mention
Torque arm is flexible connection rope, and the lifting unit includes the second servo motor being connected on the first sliding block and is connected to second and watches
The reel on the motor shaft of motor is taken, one end of the flexible connection rope is connected on reel.
4. alternating electric field auxiliary optical component surface etching treatment device as described in claim 1, which is characterized in that described to mention
The end of torque arm is provided with the clamping piece for connecting fused quartz optical component to be processed；The retainer surface coats antiacid alkali
The coating of corrosion.
5. alternating electric field auxiliary optical component surface etching treatment device as described in claim 1, which is characterized in that the storage
The outer wall lower end of liquid bath configures the check-valves that shuts off；The coating of antiacid caustic corrosion is coated on the inner wall of the reservoir.
6. alternating electric field auxiliary optical component surface etching treatment device as described in claim 1, which is characterized in that institute's rheme
The structure for setting control unit includes：U-shaped frame is arranged parallel electrode plate by fixture on support arm；The support arm of the U-shaped frame is spiral shell
Rasp bar, nut of the setting for parallel electrode plate limit on the threaded rod；The chucking surface coats the painting of antiacid caustic corrosion
Layer.
7. alternating electric field auxiliary optical component surface etching treatment device as described in claim 1, which is characterized in that described flat
The coating of antiacid caustic corrosion is coated on row electrode plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820536465.2U CN208104232U (en) | 2018-04-16 | 2018-04-16 | Alternating electric field auxiliary optical component surface etching treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820536465.2U CN208104232U (en) | 2018-04-16 | 2018-04-16 | Alternating electric field auxiliary optical component surface etching treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208104232U true CN208104232U (en) | 2018-11-16 |
Family
ID=64117880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820536465.2U Active CN208104232U (en) | 2018-04-16 | 2018-04-16 | Alternating electric field auxiliary optical component surface etching treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208104232U (en) |
-
2018
- 2018-04-16 CN CN201820536465.2U patent/CN208104232U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20200164411A1 (en) | Vibration cleaning device, method and system | |
| CN110197789B (en) | Ultrasonic-assisted electrochemical mechanical polishing device and method for SiC single crystal wafer | |
| TW201114702A (en) | Breaking apparatus and breaking method | |
| CN208104232U (en) | Alternating electric field auxiliary optical component surface etching treatment device | |
| CN1218521A (en) | Method for removal of film from metal surfaces using electrolysis and cavitation action | |
| CN102586855B (en) | Electrochemical and mechanical composite polishing device | |
| CN108746943B (en) | Manufacturing method of H-shaped steel beam | |
| CN108328935A (en) | Alternating electric field auxiliary optical component surface etching treatment device and processing method | |
| US5180469A (en) | Method for slicing a semiconductor silicon single crystal | |
| CN110756997A (en) | Surface treatment method for improving bonding strength of aluminum foil | |
| CN110004484A (en) | A kind of SiC single crystal plasma electrochemical polish apparatus and its polishing method | |
| CN216838224U (en) | Auxiliary fine electroforming device with intermittent vibration | |
| CN210879128U (en) | Two-sided synchronous polishing equipment for machining machine blades | |
| CN103147078A (en) | Etched swing pool | |
| CN1912185A (en) | Lifting device and method for processing alloy wire with continuous or step taper at end | |
| CN202155881U (en) | Hydrophobic mechanical arm for carbon paper material of membrane electrode of fuel cell | |
| CN109570664B (en) | Preparation method of micro tool electrode | |
| CN113618603A (en) | 3D printing part polishing device and method based on acoustic lens | |
| CN111267254A (en) | Crystal bar slicing method | |
| CN216622264U (en) | Water immersion type ultrasonic phased array flaw detection equipment | |
| CN217314872U (en) | Heating roller cleaning device | |
| CN220724243U (en) | High-frequency quenching device | |
| CN220896219U (en) | Device for synchronous peeling of wires in multiple directions | |
| CN114348957B (en) | Equipment for preparing silicon nanostructure by combining alternating electric field with ultrasound | |
| CN212977658U (en) | High-precision magnetorheological polishing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |