CN208014654U - A kind of Wafer notch detecting device under the vacuum environment of view-based access control model system - Google Patents
A kind of Wafer notch detecting device under the vacuum environment of view-based access control model system Download PDFInfo
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- CN208014654U CN208014654U CN201820509973.1U CN201820509973U CN208014654U CN 208014654 U CN208014654 U CN 208014654U CN 201820509973 U CN201820509973 U CN 201820509973U CN 208014654 U CN208014654 U CN 208014654U
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Abstract
A kind of Wafer notch detecting device under the vacuum environment of view-based access control model system, it includes cavity, wafer tray, wafer snap ring, high-speed camera.The quartz glass cover board of groove type shell and top covering that the cavity is made by a metal material forms, and cavity side is equipped with wafer transfer mouth, and is internally provided with wafer tray and wafer snap ring；The wafer tray is disc, if rotating horizontally driving device；The wafer snap ring is arc-shaped, if lifting drive；The high-speed camera is mounted on cavity top, and close to the side of wafer transfer mouth, camera lens is located at the surface of the setting alignment position of notched wafer；The rotation that the high-speed camera passes through wafer, continuously acquire crystal round fringes pattern data, the angle-data for obtaining notched wafer relative to the wafer center of circle is analyzed by controller, and control wafer tray rotation respective angles, make notched wafer alignment settings position, the utility model is simple in structure, the notched wafer detection being suitable under vacuum environment.
Description
Technical field
The utility model is related to invent to be related to a kind of detection device in wafer handling process, more particularly, to a kind of crystalline substance
The alignment detection means of discount vibram outlet mouth.
Background technology
A large amount of processes, which need wafer is obtained ahead of time, in the production process of wafer accurately positions, and wafer accurately positions,
Working performance directly affects the precision and efficiency of entire manufacturing process.Wafer alignment generally includes mainly notched wafer and wafer
The determination in the center of circle, and big multi-process is under vacuum environment in procedure for producing, and the detection positioning of traditional notched wafer fills
Set is by the way that in the wafer alignment method of line array CCD, the method needs the surface in notched wafer setting position to install laser
Emitter installs CCD linear array photoelectric devices in the underface of notched wafer setting position, and CCD is received across notched wafer
Laser judges the gap position of wafer, since CCD needs the laser for receiving specific wavelength, in the actual production process, be easy
It is interfered by other light sources and laser beam emitting device reliability, so that being impacted to notch detection precision.For this purpose, this reality
One kind is provided with novel under vacuum conditions, the Wafer notch detecting device of view-based access control model system, can accurately detect crystalline substance
Round notch, the present apparatus need not install CCD linear array photoelectric devices in the underface of notched wafer setting position, be not easily susceptible to outer
Portion's environmental disturbances and influence, structure is simpler, reduces cavity trepanning, also improves the vacuum reliability of cavity.
Invention content
To achieve the above object, technical solution provided by the utility model is：A kind of vacuum ring of view-based access control model system
Wafer notch detecting device under border, it includes cavity, wafer tray, wafer snap ring, high-speed camera.The cavity is by one
The quartz glass cover board composition of groove type shell and top covering that metal material makes, the side of cavity are equipped with wafer transfer
Mouthful, and it is internally provided with wafer tray and wafer snap ring；The wafer tray is disc, if rotating horizontally driving device；It is described
Wafer snap ring is arc-shaped, if lifting drive；The high-speed camera is mounted on cavity top, close to wafer transfer mouth
Side, the camera lens of video camera are located at the surface of the setting alignment position of notched wafer；
The wafer tray and the driving device of wafer snap ring are respectively mounted on the bottom for being fixed on cavity, and relative to wafer
The position of mouth is transmitted, the lifting drive of wafer snap ring is mounted on the rear of the horizontal drive apparatus of wafer tray, wafer support
Disk is located at centre；
The wafer snap ring is horizontally mounted with wafer tray, and the center of circle of wafer snap ring and the center of circle of wafer tray are same
The heart；
The quartz glass cover board on the cavity top is made of cavity cover board and circular quartz sheet glass, quartz glass plate
Should have high light transmittance, quartz glass plate to be fixed on the cover board of cavity, cavity cover board is fixed on shell；
The side equipped with wafer transfer mouth of the cavity is mounted on device Host platform equipment transmission cushion chamber, peace
After installing, then inside cavity and equipment transmission cushion chamber can form airtight chamber with shape, under the pumping action of vacuum pump,
Obtain vacuum environment；
The high-speed camera is mounted on the top of cavity by holder, is equipped with the side of wafer transfer mouth, is in cavity
Center line on, the camera lens of high-speed camera is in the front upper of quartz glass plate, the surface of the setting position of notched wafer,
High-speed camera utilizes the high light transmittance of quartz glass, is continuously shot the edge pattern of wafer at a high speed；
The high-speed camera by shooting, collecting to crystal round fringes pattern be transferred to controller, controller analysis obtains brilliant
Angle-data of the discount vibram outlet mouth relative to the wafer center of circle, and wafer tray rotation respective angles are controlled, make notched wafer alignment settings
The detection positioning of notched wafer is completed in position；
The utility model has the advantages that：It is not easily susceptible to external environment interference and influences, structure is simpler, reduces cavity and opens
Hole also improves the vacuum reliability of cavity, the notched wafer detection being suitable under vacuum environment.
Description of the drawings
Fig. 1 is the general structure schematic diagram of the utility model；
The schematic elevation view of the positions Fig. 2 the utility model；
Shell；2. quartz glass cover board；3. wafer transfer mouth；4. high-speed camera；5. camera mount；6. wafer card
Ring；7. wafer snap ring drives；8. wafer tray；9. wafer tray drives.
Specific implementation mode
The utility model is described further with reference to the accompanying drawings and examples, the utility model preferred embodiment is：
Referring to attached drawing 1 and attached drawing 2.Wafer notch detecting device under a kind of vacuum environment of view-based access control model system described in this example,
It includes shell 1, quartz glass cover board 2, wafer transfers mouth 3, high-speed camera 4, camera mount 5, wafer snap ring 6, wafer
Snap ring driving 7, wafer tray 8, wafer trays driving 9 etc..The shell 1 is the groove made by a metal material, generally by
Aluminium alloy or stainless steel material are made, and shell 1 and top cover fixed quartz glass cover board 2 and forms a cavity, cavity
Side is equipped with wafer transfer mouth 3, and wafer snap ring 6 and wafer tray 8 are internally provided in shell 1；The wafer tray 8 is disk
Shape, if rotating horizontally driving device 9, wafer tray 8 is used for carrying absorption wafer, and horizontal rotation driving device 9 is used in combination to drive crystalline substance
Circle rotation；The wafer snap ring 6 is arc-shaped, if lifting drive 7, wafer snap ring 6 is acted on as wafer transfer switching, is used
Come wafer of transferring between wafer tray 8 and the end effector of wafer transfer arm；The high-speed camera 4 passes through video camera
Holder 5 is mounted on 1 top of shell, and close to the side of wafer transfer mouth 3, the camera lens of video camera 4 is located at the setting pair of notched wafer
The surface that level is set, and on the center line in shell 1；
The driving device 7 of the wafer snap ring 6 and the driving device 9 of wafer tray 8 are respectively mounted the bottom for being fixed on shell 1
On, and a row are formed relative to the position of wafer transfer mouth 3, wafer snap ring 6 is mounted on 8 rear of wafer tray, wafer tray 8
Between wafer transfer mouth 3 and wafer snap ring；
The wafer snap ring 6 is horizontally mounted with wafer tray 8, and the center of circle in the center of circle of wafer snap ring 6 and wafer tray 8
It is concentric；
1 top of the shell is installed fixed quartz glass cover board 2 and is made of cover board and circular quartz sheet glass, quartz
Sheet glass should have high light transmittance, quartz glass plate to be fixed on the cover board of cavity, and cover board is fixed on shell 1, composition
One cavity；
The side equipped with wafer transfer mouth 3 of the cavity is mounted on device Host platform equipment transmission cushion chamber, peace
After installing, then inside cavity and equipment transmission cushion chamber can form airtight chamber with shape, under the pumping action of vacuum pump,
Obtain vacuum environment；
The high-speed camera 4 is mounted on the top of shell 1 by holder 5, is equipped with the side of wafer transfer mouth 3, is in
On the center line of shell 1, the camera lens of high-speed camera 1 is in the top of quartz glass plate, the setting position of notched wafer just on
Side, high-speed camera 4 are continuously shot at a high speed the edge pattern of wafer using the high light transmittance of quartz glass；
The high-speed camera 4 by shooting, collecting to crystal round fringes pattern be transferred to controller, controller analysis obtains
Angle-data of the notched wafer relative to the wafer center of circle, and 9 rotation respective angles of wafer tray driving are controlled, make notched wafer pair
The detection positioning of notched wafer is completed in quasi- setting position；
Example described above is only the preferred embodiments of the utility model, and the implementation model of the utility model is not limited with this
It encloses.Therefore the variation that all shape, principles according to the utility model are done, it should all cover in scope of protection of the utility model.
Claims (3)
1. the Wafer notch detecting device under a kind of vacuum environment of view-based access control model system, it includes cavity, wafer tray, wafer
Snap ring, high-speed camera；The cavity is the quartz glass lid of the groove type shell and top covering that are made by a metal material
Board group is at the side of cavity is equipped with wafer transfer mouth, and is internally provided with wafer tray and wafer snap ring；The wafer tray is circle
Dish type, if rotating horizontally driving device；The wafer snap ring is arc-shaped, if lifting drive；The high-speed camera peace
Above cavity, close to the side of wafer transfer mouth, the camera lens of video camera is being located at the setting alignment position of notched wafer just
Top.
2. the Wafer notch detecting device under a kind of vacuum environment of view-based access control model system according to claim 1, special
Sign is：Wafer tray and the driving device of wafer snap ring are respectively mounted on the bottom for being fixed on shell, are equivalent to wafer transfer mouth
Position, the lifting drive of wafer snap ring is mounted in the rear of the horizontal drive apparatus of wafer tray.
3. the Wafer notch detecting device under a kind of vacuum environment of view-based access control model system according to claim 1, special
Sign is：Wafer snap ring is horizontally mounted with wafer tray, and the center of circle of wafer snap ring and the center of circle of wafer tray are concentric.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820509973.1U CN208014654U (en) | 2018-04-11 | 2018-04-11 | A kind of Wafer notch detecting device under the vacuum environment of view-based access control model system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820509973.1U CN208014654U (en) | 2018-04-11 | 2018-04-11 | A kind of Wafer notch detecting device under the vacuum environment of view-based access control model system |
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| CN208014654U true CN208014654U (en) | 2018-10-26 |
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| CN201820509973.1U Active CN208014654U (en) | 2018-04-11 | 2018-04-11 | A kind of Wafer notch detecting device under the vacuum environment of view-based access control model system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117012689A (en) * | 2023-09-26 | 2023-11-07 | 天津中科晶禾电子科技有限责任公司 | Wafer alignment device and method |
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2018
- 2018-04-11 CN CN201820509973.1U patent/CN208014654U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117012689A (en) * | 2023-09-26 | 2023-11-07 | 天津中科晶禾电子科技有限责任公司 | Wafer alignment device and method |
| CN117012689B (en) * | 2023-09-26 | 2023-12-15 | 天津中科晶禾电子科技有限责任公司 | Wafer alignment device and method |
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