CN208005330U - A kind of sander of aluminum nitride ceramic substrate - Google Patents
A kind of sander of aluminum nitride ceramic substrate Download PDFInfo
- Publication number
- CN208005330U CN208005330U CN201820213395.7U CN201820213395U CN208005330U CN 208005330 U CN208005330 U CN 208005330U CN 201820213395 U CN201820213395 U CN 201820213395U CN 208005330 U CN208005330 U CN 208005330U
- Authority
- CN
- China
- Prior art keywords
- workpiece
- plummer
- workbench
- sleeve
- ceramic substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of sanders of aluminum nitride ceramic substrate, including workbench and set fuselage on the table, fuselage is equipped with workpiece polishing mechanism, plummer is fixed on the workbench with workpiece polishing mechanism corresponding position, the size of the plummer upper surface is less than the size on workpiece surface to be polished；The both sides of plummer are respectively equipped with the groove perpendicular to plummer on the workbench；The sliding block being slidably connected with groove is equipped in groove；The telescopic rod perpendicular to workbench and energy automatic telescopic is fixedly connected on the sliding block；The workpiece fixing seat of L-type is fixedly connected at the top of the telescopic rod；The workpiece fixing seat includes transverse plate and vertical plate, and the length of the vertical plate is less than thickness of workpiece, vacuum cup is equipped in the transverse plate and vertical plate；The vacuum cup is connected with vacuum generator.The utility model is simple in structure, easy to use, substantially increases polishing precision.
Description
Technical field
The utility model belongs to ceramic substrate material processing technique field, and in particular to a kind of aluminum nitride ceramic substrate is beaten
Grinding machine.
Background technology
Aluminum nitride ceramic substrate needs to carry out grinding process to its surface with sander in production.Sander is to aluminium nitride
The grinding precision requirement of ceramic base plate surface is very high, and working method is to keep flat workpiece on the table, then make sander
On polishing pad contacted with workpiece surface, then control polishing is faced left high speed rotary motion, to make polishing pad polish workpiece table
Face.Since aluminium nitride itself is a kind of superhard substance, also have lubricity, anti abrasive characteristic, during High-speed machining,
Workpiece is due to the characteristic of itself, and along with being acted on by from polishing pad eccentric force and extruding force, workpiece is easy sideslip, to
Seriously affect the polishing precision of aluminum nitride ceramic substrate.In addition, after workpiece is polished, workpiece is not easy from plummer up
Under, increase the labor intensity of worker.
China Patent No. CN104476382A discloses a kind of grinder of novel processing disc type work, holds on the table
The both sides of microscope carrier are provided with pressing device, and the push plate that can push up out workpiece is provided in the cavity in plummer.
Using this grinder grinding work-piece, cannot be ground by the workpiece portion that pressing plate is pushed down, it is necessary to be additionally carried out at processing
Reason.
Invention content
To solve above-mentioned existing technical problem, the utility model provides a kind of sander of aluminum nitride ceramic substrate,
Including workbench and fuselage on the table is set, fuselage is equipped with workpiece polishing mechanism, corresponding with workpiece polishing mechanism on the workbench
Place is fixed with plummer, and the size of the plummer upper surface is less than the size on workpiece surface to be polished；On the workbench
The both sides of plummer are respectively equipped with the groove perpendicular to plummer；The sliding block being slidably connected with groove is equipped in groove；The cunning
The telescopic rod perpendicular to workbench and energy automatic telescopic is fixedly connected on block；It is fixedly connected with L-type at the top of the telescopic rod
Workpiece fixing seat；The workpiece fixing seat includes transverse plate and vertical plate, and the length of the vertical plate is less than thickness of workpiece, described
It is equipped with vacuum cup in transverse plate and vertical plate；The vacuum cup is connected with vacuum generator.
Preferably, the telescopic rod includes sleeve and the retracting cylinder coaxially connected with sleeve；The retracting cylinder diameter is less than
Sleeve diameter；Rotation axis is equipped in the sleeve, the sleeve bottom is equipped with rotation axis connection for driving rotation axis to revolve
The motor turned, the rotation axis are threadedly coupled retracting cylinder.
Preferably, it is equipped with interior limiting section at the top of the retracting cylinder inner wall, outer limiting section is equipped at the top of the flexible drum outer wall.
Realize that vacuum cup consolidates aluminum nitride ceramic substrate workpiece in the utility model by adjusting sliding block and telescopic rod
It is fixed, and workpiece does not contact plummer in bruting process, the problem of being not easy to remove from plummer so as to avoid workpiece.Separately
Outside, the vertical plate length of workpiece fixing seat is less than the thickness of workpiece, workpiece polishing mechanism not contact workpiece fixed seat when polishing, can
To realize the polishing to workpiece whole surface.The utility model is simple in structure, easy to use, substantially increases polishing precision.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the structural schematic diagram of the contraction pole of the utility model.
In figure：1 workbench, 2 fuselages, 3 workpiece polishing mechanisms, 4 plummers, 5 workpiece, 6 grooves, 7 telescopic rods, 8 workpiece fixing seats,
9 motors, 10 rotation axis, 11 retracting cylinders, 12 outer positioning regions, positioning region, 14 sliding blocks, 15 sleeves in 13.
Specific implementation mode
The embodiments of the present invention are further illustrated below in conjunction with the accompanying drawings.
Referring to Fig. 1-2, a kind of sander of aluminum nitride ceramic substrate, including workbench 1 and the fuselage that is located on workbench 1
2, fuselage 2 is equipped with workpiece polishing mechanism 3, is fixed with plummer 4, the carrying with 3 corresponding position of workpiece polishing mechanism on the workbench 1
The size of 4 upper surface of platform is less than the size on 5 surface to be polished of workpiece；The both sides of plummer 4 are respectively equipped with vertical on the workbench 1
Directly in the groove 6 of plummer 4；The sliding block 14 being slidably connected with groove 6 is equipped in groove 6；It is fixedly connected on the sliding block 14
Perpendicular to workbench 1 and the telescopic rod 7 of energy automatic telescopic；7 top of the telescopic rod is fixedly connected with the workpiece fixing seat 8 of L-type；
The workpiece fixing seat 8 includes transverse plate and vertical plate, and the length of the vertical plate is less than 5 thickness of workpiece, the transverse plate and
Vacuum cup is equipped in vertical plate；The vacuum cup is connected with vacuum generator.
The telescopic rod 7 includes sleeve 15 and the retracting cylinder 11 coaxially connected with sleeve 15；11 diameter of the retracting cylinder is small
In 15 diameter of sleeve；Rotation axis 10 is equipped in the sleeve 15,15 bottom of the sleeve is equipped with and is used for what rotation axis 10 was connect
The motor 9 for driving rotation axis 10 to rotate, the rotation axis 10 are threadedly coupled retracting cylinder 11.
It is equipped with interior limiting section 13 at the top of 11 inner wall of the retracting cylinder, outer limiting section is equipped at the top of 11 outer wall of the retracting cylinder
12。
Motor 9 in the present embodiment can drive rotation axis 10 along rotating clockwise or counterclockwise, when rotation axis 10 is suitable
When hour hands rotate, retracting cylinder 11 is relative to sleeve collapses；When rotation axis 10 rotates counterclockwise, retracting cylinder 11 is relative to sleeve 15
It stretches out.
The operation principle of the utility model is：Aluminum nitride ceramic substrate workpiece 5 to be polished is positioned on plummer 4,
And side corresponding with 4 both sides groove 6 of plummer is stretched out outside plummer 4.Start motor 9, motor 9 is made to drive 10 up time of rotation axis
Needle rotates, and retracting cylinder 11 is shunk.The sliding block 14 of mobile 4 both sides of plummer, adjusts the position of workpiece fixing seat 8, makes workpiece 5 can be with
It is clipped among two workpiece fixing seats 8.When workpiece 5 be clipped in two workpiece fixing seats 8 it is intermediate when, the position of mobile sliding block 14 makes
Workpiece fixing seat 8 can clamp workpiece 5.At this time rotate counterclockwise rotation axis 10, the stretching of telescopic rod 11 makes workpiece 5 and plummer
4 keep certain distance.Vacuum generator is opened, workpiece polishing mechanism 3 starts to polish.After the completion of polishing, vacuum generator, workpiece are closed
5 can easily remove.
Claims (3)
1. a kind of sander of aluminum nitride ceramic substrate, including workbench and fuselage on the table is set, fuselage is equipped with and beats
Grinding machine structure, it is characterised in that：Plummer, the plummer upper surface are fixed on the workbench with workpiece polishing mechanism corresponding position
Size be less than workpiece surface to be polished size；The both sides of plummer are respectively equipped with perpendicular to plummer on the workbench
Groove；The sliding block being slidably connected with groove is equipped in groove；It is fixedly connected on the sliding block perpendicular to workbench and can be automatic
Flexible telescopic rod；The workpiece fixing seat of L-type is fixedly connected at the top of the telescopic rod；The workpiece fixing seat includes transverse plate
And vertical plate, the length of the vertical plate are less than thickness of workpiece, vacuum cup are equipped in the transverse plate and vertical plate；It is described
Vacuum cup is connected with vacuum generator.
2. a kind of sander of aluminum nitride ceramic substrate according to claim 1, it is characterised in that：The telescopic rod includes
Sleeve and the retracting cylinder coaxially connected with sleeve；The retracting cylinder diameter is less than sleeve diameter；Rotation axis is equipped in the sleeve,
The sleeve bottom is equipped with the motor for driving rotation axis to rotate with rotation axis connection, and the rotation axis is threadedly coupled flexible
Cylinder.
3. a kind of sander of aluminum nitride ceramic substrate according to claim 2, it is characterised in that：The retracting cylinder inner wall
Top is equipped with interior limiting section, and outer limiting section is equipped at the top of the flexible drum outer wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820213395.7U CN208005330U (en) | 2018-02-07 | 2018-02-07 | A kind of sander of aluminum nitride ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820213395.7U CN208005330U (en) | 2018-02-07 | 2018-02-07 | A kind of sander of aluminum nitride ceramic substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208005330U true CN208005330U (en) | 2018-10-26 |
Family
ID=63886301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820213395.7U Expired - Fee Related CN208005330U (en) | 2018-02-07 | 2018-02-07 | A kind of sander of aluminum nitride ceramic substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208005330U (en) |
-
2018
- 2018-02-07 CN CN201820213395.7U patent/CN208005330U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181026 Termination date: 20200207 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |