CN207981685U - A kind of base plate cleaning device - Google Patents
A kind of base plate cleaning device Download PDFInfo
- Publication number
- CN207981685U CN207981685U CN201721713235.0U CN201721713235U CN207981685U CN 207981685 U CN207981685 U CN 207981685U CN 201721713235 U CN201721713235 U CN 201721713235U CN 207981685 U CN207981685 U CN 207981685U
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- CN
- China
- Prior art keywords
- connector
- casing
- base plate
- motor
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 44
- 239000000696 magnetic material Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 6
- 239000012780 transparent material Substances 0.000 claims description 4
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 27
- 230000009351 contact transmission Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 7
- 239000003595 mist Substances 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- 239000012535 impurity Substances 0.000 abstract description 5
- 238000001035 drying Methods 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000004078 waterproofing Methods 0.000 description 1
Landscapes
- Brushes (AREA)
Abstract
The utility model discloses a kind of base plate cleaning device, is related to cleaning device technical field.The device includes casing and the motor being set to outside casing and the wiper mechanism for cleaning base plate being set in casing, it is provided with attachment device between the driving shaft and driven shaft of motor, attachment device includes the first connector and the second connector, the fixation of the driving shaft of first connector and motor is placed in outside casing, second connector is placed in driven shaft fixation in casing, non-contact transmission between the first connector and the second connector.Base plate cleaning device disclosed by the utility model avoids casing from opening up hole in junction, solves water mist in the prior art or the technical issues of drop is flowed out out of casing, ensure the drying of motor local environment, improve the reliability of motor, it solves the problems, such as that external micronic dust or impurity enter casing simultaneously, avoids the cleaning environment of pollution substrate.
Description
Technical field
The utility model is related to cleaning device technical field more particularly to a kind of base plate cleaning devices.
Background technology
The cleaning step of substrate be often connected to plated film, photoetching and etching and etc. before, during and after waiting time, to tie up
Hold the surface cleanliness of substrate in process of production.
The cleaning way of substrate surface includes chemically and physical cleaning way.Utilize the hairbrush wheel surface in rotation
Bristle scrub substrate surface to reach cleaning purpose, belong to physical cleaning way.Hairbrush scrub is usually applied to just
The cleaning of metacoxal plate is sealed off, and is widely used in current Wet-type cleaning equipment.Since the size of substrate is continuously increased, because
This, the cleaning step of large-size substrate mostly uses greatly the method that hairbrush is scrubbed.
Fig. 1 is the overall schematic of base plate cleaning device in the prior art.As shown in Figure 1, motor 1' is set to casing 6'
Outside, driven shaft 2' is set to inside casing 6' and the end of driven shaft 2' is stretched out after casing 6' through shaft coupling 10' and motor
1' connections, driven shaft 2''s inside casing 6' is provided at both ends with the bearing block 9' for being used to support driven shaft 2', hairbrush 3'
It is sheathed on driven shaft 2' and drives rotation, hairbrush 3' to be located at the bottoms substrate 4' and abutted with substrate 4', base by driven shaft 2'
It is provided with nozzle 5' above plate 4', nozzle 5' sprays water mist or liquid to substrate 4', by the cooperation of hairbrush 3' and nozzle 5',
The dirty of the surfaces substrate 4', micronic dust are removed and are discharged along flow.Its driven shaft 2' stretches out casing 6' to connect shaft coupling
10' causes the hole that the casing 6' at the positions shaft coupling 10' is opened up that can not be fully sealed, and the hairbrush 3' inside casing 6'
Working environment water mist diffuses, and water mist or drop can flow out from the hole of casing 6', and shaft coupling 10' is caused to be given birth to motor 1'
Rust, or even damage；Meanwhile external micronic dust or impurity is externally entering inside casing 6', is made to the cleaning inside casing 6'
At secondary pollution.
Utility model content
In view of the above-mentioned problems, the utility model proposes a kind of base plate cleaning device, casing is avoided to open up hole in junction,
It solves water mist in the prior art or the technical issues of drop is flowed out out of casing, ensures the drying of motor local environment, improve
The reliability of motor, while solving the problems, such as that external micronic dust or impurity enter casing, avoid the cleaning ring of pollution substrate
Border.
The utility model uses following technical scheme：
A kind of base plate cleaning device, including casing and the motor that is set to outside casing and be set in casing for cleaning
The wiper mechanism of substrate, is provided with attachment device between the driving shaft and driven shaft of motor, attachment device includes the first connector
With the second connector, the driving shaft fixation of the first connector and motor is placed in outside casing, and the second connector is fixed with driven shaft
It is placed in casing, non-contact transmission between the first connector and the second connector.
As a kind of preferred embodiment of the utility model, attachment device is magnetic coupling device, the first connector and second
Connector transmits torque by magnetic force.
As a kind of preferred embodiment of the utility model, the first connector and the coaxial arrangement of the second connector.
A kind of preferred embodiment as the utility model, which is characterized in that the first connector and the second connecting-piece structure phase
Together, the first connector is circumferentially evenly spaced on N grades of magnetic materials and S grades of magnetic materials.
As a kind of preferred embodiment of the utility model, N grades of magnetic materials and S grades of magnetic materials are viscous by cohesive material
It connects.
As a kind of preferred embodiment of the utility model, casing is non-ferrous material.
As a kind of preferred embodiment of the utility model, casing is transparent material, and internal side of shell or outside are provided with sensing
Device, sensor are fixed by fixed frame and casing, and sensor is used to detect the rotating speed of the second connector.
As a kind of preferred embodiment of the utility model, sensor is photoelectric sensor.
The beneficial effects of the utility model are：
The base plate cleaning device of the utility model, by the way that attachment device is arranged, the first connector and the second connector are realized
Non-contact transmission solves existing to which driven shaft need not open up the hole passed through for driven shaft without casing, casing is needed guiding through
Have in technology because water mist or drop outflow in the endless hermetically sealed caused casing of casing cause motor to get rusty, Yi Jiji
Micronic dust or impurity outside shell enter the secondary pollution problem that casing causes substrate, protect the normal operation of motor, while again can
The normal operation of holding meanss, compact-sized, the reliability of system greatly improves.
Description of the drawings
Fig. 1 is the overall schematic of base plate cleaning device in the prior art；
Fig. 2 is a kind of structural schematic diagram of base plate cleaning device provided by the utility model；
Fig. 3 is the structural schematic diagram of attachment device in a kind of base plate cleaning device provided by the utility model.
In figure：1, motor；11, driving shaft；2, driven shaft；3, hairbrush；4, substrate；5, nozzle；6, casing；61, fixed frame
7, attachment device；71, the first connector；711, N grades of magnetic materials；712, S grades of magnetic materials；72, the second connector；8, it senses
Device；9, bearing block；
1', motor；2', driven shaft；3', hairbrush；4', substrate；5', nozzle；6', casing；9', bearing block；10', shaft coupling
Device.
Specific implementation mode
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than the restriction to the utility model.It further needs exist for
It is bright, it illustrates only for ease of description, in attached drawing and the relevant part of the utility model rather than entire infrastructure.
Fig. 2 is a kind of structural schematic diagram of base plate cleaning device provided by the utility model.As shown in Fig. 2, this practicality is new
Type provide a kind of base plate cleaning device, including motor 1, driven shaft 2, hairbrush 3, substrate 4, nozzle 5, casing 6, attachment device 7,
Sensor 8 and bearing block 9.
Wherein, driven shaft 2, hairbrush 3, substrate 4, nozzle 5, bearing block 9 are placed in casing 6, belong to the wiper mechanism of system.
Motor 1 and sensor 8 are placed in outside casing 6, belong to the driving mechanism of system.It is arranged between the driving shaft 11 and driven shaft 2 of motor 1
There are attachment device 7, attachment device 7 that the power of motor 1 can be passed to driven shaft 2 to drive driven shaft 2 to rotate.
Attachment device 7 is magnetic coupling device, and structural schematic diagram is as shown in figure 3, mainly by the first connector 71 and the
Two connectors 72 form, and the first connector 71 is identical with 72 structure of the second connector.The driving shaft of first connector 71 and motor 1
11 fixations are placed in outside casing 6, and the second connector 72 is placed in the fixation of driven shaft 2 in casing 6, is realized by attachment device 7
The connection of wiper mechanism and driving mechanism.
Orthogonal way setting may be used in first connector 71 and the second connector 72, and parallel mode setting may be used,
Preferably coaxial manner is used to be arranged in the present invention, to optimize the space of whole device.It is with the first connector 71
Example, the first connector 71 are circumferentially evenly spaced on N grades of magnetic materials 711 and S grades of magnetic materials 712, N grades of magnetic materials
711 and S grades of magnetic material 712 is bonded by cohesive material, and the first connector 71 and the second connector 72 realize power by magnetic force
The non-contact transmission of square.Therefore, the driving force that motor 1 provides drives the rotation of the first connector 71, the second connector 72 to pass through magnetic
Power realizes the non-contact transmission of torque, passes torque to the second connector 72, and then drive the rotation of driven shaft 2.Connection dress
It sets the torque that 7 had both realized non-contact transmission to transmit, to which driven shaft 2 need not be opened up and be used for without casing 6, casing 6 is needed guiding through
The hole that driven shaft 2 passes through, ensure that being fully sealed for casing 6, at the same again can holding meanss normal operation, it is compact-sized.
Casing 6 is non-ferrous material, and casing 6 can be metal material, can also be non-metallic material, as long as not influencing
Magnetic drives between first connector 71 and the second connector 72, it is within the protection scope of the present utility model.
However, after being fully sealed due to casing 6, when occurring the situations such as clamping stagnation inside casing 6,2 rotating speed of driven shaft reduces
Or do not rotate, it can not be observed from the outside of casing 6, if motor 1 is rotated further, the safety failure of system can be caused, therefore,
In the present embodiment, casing 6 is preferably transparent material, and 6 inner or outer side of casing is provided with sensor 8, and sensor 8 passes through fixed frame
61 fix with casing 6, and sensor 8 is used to detect the rotating speed of the second connector 72.8 generally use photoelectric sensor of sensor.When
Sensor 8 is arranged at the outside of casing 6, and sensor 8 can pass through the casing 6 of transparent material, the second connector 72 of detection
Rotating speed；When sensor 8 is arranged in the inside of casing 6, sensor 8 needs to carry out water-proofing treatment.
The rotating speed of the second connector 72 is detected by the way that sensor 8 is arranged, and is compared with the rotating speed of motor 1,
When the two occurs abnormal, is stopped and repaired by control system control motor 1, to ensure that the safety of whole system
Property.
In the inside of casing 6, driven shaft 2 is coaxially disposed with motor 1, and the axial both ends of driven shaft 2 are respectively arranged with bearing block
9, bearing block 9 is being supported driven shaft 2.Hairbrush 3 is barrel-like structure, and 3 periphery of hairbrush is provided with bristle, and hairbrush 3 is arranged
On driven shaft 2, hairbrush 3 is set to the bottom of substrate 4, and 3 axial length of hairbrush is more than the length of substrate 4, can improve hairbrush 3
The scope of application of cleaning base plate 4.
Nozzle 5 is arranged in 4 both sides of substrate, and multiple, 5 cleaning showers liquid of nozzle is evenly arranged with along the length direction of substrate 4
Or liquid, substrate 4 is cleaned with the cooperation of hairbrush 3.
In actual work, starting motor 1, driving force is provided by motor 1, driving shaft 11 drives the rotation of the first connector 71,
Second connector 72 realizes the non-contact transmission of torque by magnetic force, and the driving force of motor 1 is passed to driven shaft 2, driven shaft 2
Band electric brush 3 rotates, and substrate 4 passes through from 3 surface of hairbrush, to be cleaned to substrate 4；In cleaning process, nozzle 5 sprays
Cleaning solution, cleaning solution subsidiary brush 3 realize the further cleaning to substrate 4；Clean the dirty of metacoxal plate 4 surface, micronic dust along
Flow is discharged.Since the first connector 71 and the second connector 72 realize non-contact transmission, to which driven shaft 2 is without needing guiding through casing
6, casing 6 need not open up the hole passed through for driven shaft 2, solve in the prior art because of the endless hermetically sealed of casing 2
Water mist or drop outflow in caused casing 2 cause motor 1 to get rusty, or even damage, and the micronic dust or impurity outside casing 6 can not
The secondary pollution that substrate 4 is caused into casing 6, protects the normal operation of motor 1, at the same again can holding meanss normal fortune
Row, compact-sized, the reliability of system greatly improves.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment here, can carry out for a person skilled in the art various apparent
Change, readjust and substitutes without departing from the scope of protection of the utility model.Therefore, although by above example to this
Utility model is described in further detail, but the utility model is not limited only to above example, is not departing from this reality
Can also include other more equivalent embodiments in the case of with novel design, and the scope of the utility model is by appended power
Sharp claimed range determines.
Claims (8)
1. a kind of base plate cleaning device, including casing (6) and it is set to the outer motor (1) of the casing (6) and is set to casing
(6) wiper mechanism for cleaning base plate (4) in, which is characterized in that the driving shaft (11) and driven shaft of the motor (1)
(2) attachment device (7) is provided between, the attachment device (7) includes the first connector (71) and the second connector (72), institute
It states the first connector (71) and driving shaft (11) fixation of the motor (1) is placed in the casing (6) outside, second connection
Part (72) and the fixed casing (6) that is placed in of the driven shaft (2) are interior, and first connector (71) connect with described second
Non-contact transmission between part (72).
2. base plate cleaning device according to claim 1, which is characterized in that the attachment device (7) is that magnetic connecting shaft fills
It sets, first connector (71) and second connector (72) transmit torque by magnetic force.
3. base plate cleaning device according to claim 2, which is characterized in that first connector (71) and described second
Connector (72) is coaxially disposed.
4. base plate cleaning device according to claim 3, which is characterized in that first connector (71) and described second
Connector (72) structure is identical, and first connector (71) is circumferentially evenly spaced on N grades of magnetic materials (711) and S grades
Magnetic material (712).
5. base plate cleaning device according to claim 4, which is characterized in that the N grades of magnetic material (711) and the S
Grade magnetic material (712) is bonded by cohesive material.
6. base plate cleaning device according to claim 1, which is characterized in that the casing (6) is non-ferrous material.
7. base plate cleaning device according to claim 6, which is characterized in that the casing (6) is transparent material, the machine
Sensor (8) is provided on the inside or outside of shell (6), the sensor (8) is fixed by fixed frame (61) and the casing (6),
The sensor (8) is used to detect the rotating speed of second connector (72).
8. base plate cleaning device according to claim 7, which is characterized in that the sensor (8) is photoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721713235.0U CN207981685U (en) | 2017-12-11 | 2017-12-11 | A kind of base plate cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721713235.0U CN207981685U (en) | 2017-12-11 | 2017-12-11 | A kind of base plate cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207981685U true CN207981685U (en) | 2018-10-19 |
Family
ID=63817579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721713235.0U Active CN207981685U (en) | 2017-12-11 | 2017-12-11 | A kind of base plate cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207981685U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020160231A1 (en) * | 2019-01-31 | 2020-08-06 | Applied Materials, Inc. | Substrate cleaning devices and methods thereof |
-
2017
- 2017-12-11 CN CN201721713235.0U patent/CN207981685U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020160231A1 (en) * | 2019-01-31 | 2020-08-06 | Applied Materials, Inc. | Substrate cleaning devices and methods thereof |
| US20200246841A1 (en) * | 2019-01-31 | 2020-08-06 | Steven M. Zuniga | Substrate Cleaning Devices and Methods Thereof |
| US11745227B2 (en) | 2019-01-31 | 2023-09-05 | Applied Materials, Inc. | Substrate cleaning devices and methods thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215301 No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou Patentee after: InfoVision Optoelectronics(Kunshan)Co.,Ltd. Address before: 215301 No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou Patentee before: INFOVISION OPTOELECTRONICS (KUNSHAN) Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |