CN207963779U - A kind of laser displacement sensor calibrating installation - Google Patents
A kind of laser displacement sensor calibrating installation Download PDFInfo
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- CN207963779U CN207963779U CN201820250299.XU CN201820250299U CN207963779U CN 207963779 U CN207963779 U CN 207963779U CN 201820250299 U CN201820250299 U CN 201820250299U CN 207963779 U CN207963779 U CN 207963779U
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Abstract
The utility model provides a kind of laser displacement sensor calibrating installation, including measuring mechanism, transmission mechanism and micro-adjusting mechanism, and measuring mechanism includes length gauge, and one end of length gauge is equipped with measuring rod, and one end of measuring rod is equipped with gauge head；Transmission mechanism includes bilinear guide rail, ball-screw, transmission platform, drive link and driving handle, ball-screw is set between bilinear guide rail, transmission platform is set on the ball-screw, drive link is set in transmission platform, transmission platform is connect by drive link with measuring rod, and driving handle is set to one end of drive link；Micro-adjusting mechanism includes X to displacement platform, Y-direction displacement platform, Z-direction displacement platform and turntable, and Y-direction displacement platform is equipped with Y-direction differential head, and X is equipped with X to differential head to displacement platform, and Z-direction displacement platform is equipped with Z-direction differential head, and turntable is equipped with turntable differential head.The utility model combines measuring mechanism, transmission mechanism and micro-adjusting mechanism, and operation is more convenient, and measurement accuracy higher.
Description
Technical field
The utility model is related to examine and determine and collimation technique field, and in particular to a kind of laser displacement sensor calibrating installation.
Background technology
Laser displacement sensor is the sensor measured using laser technology.It by laser, laser detector and
Measuring circuit forms, and is capable of the variations such as position, the displacement of accurate non-cpntact measurement testee.Its advantages of, is that by nothing
Contact measurement, speed is fast, and precision is high, anti-light, electrical interference ability is strong.Based on the above advantage, laser displacement sensor is in many fields
Conjunction is applied.
In order to ensure the measurement accuracy and reliability of laser displacement sensor, need to do regular school to laser displacement sensor
It is accurate.Standard displacement mainly is provided by standard for the calibration of laser displacement sensor, by laser displacement sensor to this
Standard displacement is detected, and obtains the relationship of laser displacement sensor output and input, to realize that laser displacement senses
The calibration of device.Currently, usually using gauge blocks, amesdial, dial gauge, gauging machine and the indicator table verification instruments such as third gauge block, four etc.
Standard measurement standard displacement.Domestic few calibrating installations for calibrating laser displacement sensor at the scene, can only be in laser position
The gauge block for moving pad different height on the workbench of device measures, and laser displacement is verified by calculating the gauge block of different height
Whether the displacement of sensor is accurate.
It is measured using gauge block, amesdial, dial gauge, gauging machine and indicator table verification instrument, is passed in calibration laser displacement
It operates very inconvenient when sensor, mainly there is the following aspects reason：
A) when calibrating laser displacement sensor, it is desirable that measuring accuracy is higher, good reliability, but is easy when gauge block placement
Generate error, it is necessary to assure absolute good of planarity requirements for placing the faceplate of gauge block cannot have inclination, pit to draw
The reference plane of wound, requirements, the especially gauge block such as vibrations and platform cannot have gap, otherwise when measuring, the reference plane shape of platform
The accuracy of measurement can be largely effected on by becoming；
B) there is the alignment requirements reflecting surface of laser displacement sensor certain roughness, roughness cannot greatly can not very much
It is too small, it just can guarantee with preferable diffusing reflection effect, but the working face of gauge block is all exigent minute surface, it can direct shadow
The diffusing reflection effect for ringing laser displacement sensor is very inaccurate so as to cause measuring；
Although c) using amesdial and dial gauge that can also realize the calibration of laser displacement sensor, due to laser position
The type of displacement sensor is more, and external form is different, needs the auxiliary rack and fixture of design specialist, and rack fixture is needed to make position
Displacement sensor measures line and the measuring rod of gauge outfit is kept point-blank, it is desirable that the gauge head of measuring rod must be tack, cannot
It is round end, otherwise laser can not focus on gauge head.
Although d) use gauging machine and indicator table verification instrument can also laser displacement sensor calibration, be the absence of special
Replacer, the position of laser displacement sensor can not be finely adjusted, the concentricity for measuring line is not easy to ensure, easy tos produce
Larger Abbe error.
Utility model content
For the defects in the prior art, the utility model provides a kind of laser displacement sensor calibrating installation, will survey
Measuring mechanism, transmission mechanism and micro-adjusting mechanism combine, and operation is more convenient, and measurement accuracy higher.
To achieve the goals above, the technical solution adopted in the utility model is：
A kind of laser displacement sensor calibrating installation, including measuring mechanism, transmission mechanism and micro-adjusting mechanism,
The measuring mechanism includes length gauge, and one end of the length gauge is provided with measuring rod, one end of the measuring rod
It is provided with gauge head, the measuring rod is scalable relative to the length gauge；
The transmission mechanism includes transmission platform and drive link, and the transmission platform is connected by the drive link and the measuring rod
It connects, the driving handle is set to one end of the drive link；
The micro-adjusting mechanism includes X to displacement platform, Y-direction displacement platform, Z-direction displacement platform and for installing laser displacement sensor
Turntable, be provided with Y-direction differential head on the Y-direction displacement platform, the X is provided with X on displacement platform to differential head, the Z
It is provided with Z-direction differential head on displacement platform, turntable differential head is provided on the turntable.
Further, the laser displacement sensor calibrating installation further includes pedestal, the measuring mechanism, the driver
Structure and the micro-adjusting mechanism may be contained on the pedestal.
Further, the measuring mechanism further includes supporting rack, and support frame as described above includes supporting rod and support plate, the branch
One end of strut is connect with the support plate, and the other end of the supporting rod is connect with the pedestal.
Further, the length gauge is set to by fastening bolt in the support plate.
Preferably, the gauge head is made of ceramic material.
Further, the transmission mechanism further includes erecting bed, bilinear guide rail, ball-screw and driving handle, described
Bilinear guide rail is set on the erecting bed, and the ball-screw is set between the bilinear guide rail, and with it is described double
The linear guide is mutually parallel；The transmission platform is set on the ball-screw, and is mutually perpendicular to the ball-screw, described
Transmission platform can be slided along the length direction of the bilinear guide rail；The drive link is set in the transmission platform, and with
The transmission platform is mutually perpendicular to.
Further, two tops of the ball-screw are provided with fixed block, and the driving handle is set to the ball
Leading screw stretches out one end of the fixed block.
Preferably, the ball-screw and the bilinear guide rail are all made of stainless steel and are made.
Further, the turntable, the Z-direction displacement platform, the X to displacement platform and the Y-direction displacement platform on to
Under be set in turn on the pedestal.
Further, the turntable, the Z-direction displacement platform, the X are between displacement platform and the Y-direction displacement platform points
It is not fixedly connected by fastening screw.
The utility model has the advantages that：
1, the utility model and uses amesdial, dial gauge and refers to using Heidenhain length gauge as the standard calibrated
Show that table calibrating instrument etc. measures displacement and compares, precision is high, and stability is good；
2, the gauge head of the measuring rod of the utility model uses the whiteware with certain diffusing reflection effect, and is tack
, it efficiently solves the problems, such as working face minute surface diffusing reflection when gauge block calibration, substantially increases measurement accuracy；
3, the utility model combines measuring mechanism, transmission mechanism and micro-adjusting mechanism, and operation is more convenient, effectively
It solves and is measured using gauge block or amesdial, dial gauge, gauging machine, indicator table verification instrument etc., passed in calibration laser displacement
Without special replacer when sensor, the position of laser displacement sensor can not be finely adjusted, the concentricity for measuring line is not easy to protect
The problem of demonstrate,proving, easy ting produce larger Abbe error.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described.
Fig. 1 is the structural schematic diagram of laser displacement sensor calibrating installation provided by the utility model；
Fig. 2 is the error curve schematic diagram of laser displacement sensor provided by the utility model.
In figure：1- pedestals, 2- support plates, 3- supporting rods, 4- length gauges, 5- measuring rods, 6- gauge heads, 7- erecting beds, 8- are bis-
The linear guide, 9- ball-screws, 10- transmission platforms, 11- drive links, 12- driving handles, 13- fixed blocks, 14-Y to displacement platform,
15-X is to displacement platform, and 16-Z is to displacement platform, 17- turntables, 18-Y to differential head, 19-X to differential head, 20-Z to differential head,
21- turntable differential heads.
Specific implementation mode
For allow the utility model features described above and advantage can be clearer and more comprehensible, special embodiment below, and in conjunction with attached drawing
It is described in detail below.
As shown in Figure 1, the present embodiment provides a kind of laser displacement sensor calibrating installation, including pedestal 1 and setting are in institute
State measuring mechanism, transmission mechanism and the micro-adjusting mechanism on pedestal 1.The measuring mechanism includes supporting rack and length gauge 4, the branch
Support includes support plate 2 and supporting rod 3, and the supporting rod 3 is fixed on one end of the pedestal 1, and the support plate 2 is fixed on institute
It states on supporting rod 3, the length gauge 4 is fixed on by fastening bolt in the support plate 2.One end of the length gauge 4 is arranged
There are measuring rod 5, one end of the measuring rod 5 to be provided with gauge head 6, the measuring rod 5 and the gauge head 6 are relative to the length gauge
4 is scalable.
The transmission mechanism includes erecting bed 7, bilinear guide rail 8, ball-screw 9, transmission platform 10, drive link 11 and transmission
Handle 12, the bilinear guide rail 8 are fixed on the erecting bed 7, and are arranged in parallel with the erecting bed 7；The ball wire
The setting of thick stick 9 is arranged in parallel between the bilinear guide rail 8, and with the bilinear guide rail 8, two tops of the ball-screw 9
End is provided with fixed block 13；9 nut of ball-screw is socketed on the ball-screw 9, the transmission platform 10 passes through the ball
9 nut of leading screw is vertically set on the ball-screw 9, and the transmission platform 10 can be along the length direction of the bilinear guide rail 8
It is slided；The drive link 11 is vertically set in the transmission platform 10；The driving handle 12 is arranged in the ball wire
Thick stick 9 stretches out one end of the fixed block 13.The displacement platform is fixedly connected by the drive link 11 with the measuring rod 5.When
When rotating the driving handle 12, the ball-screw 9 is driven to be rotated, to drive the displacement platform along the bilinear
8 length direction of guide rail is moved, and then the measuring rod 5 is driven to stretch.The displacement variable of the measuring rod 5 is by institute
It states length gauge 4 to measure, and is shown in displacement display.
The micro-adjusting mechanism includes Y-direction displacement platform 14, X to displacement platform 15, Z-direction displacement platform 16 and for installing laser displacement
The turntable 17 of sensor.The other end in the pedestal 1 is arranged in the Y-direction displacement platform 14, and the X is arranged to displacement platform 15
The top of the Y-direction displacement platform 14, the Z-direction displacement platform 16 are arranged in the X to the top of displacement platform 15, the turntable 17
It is arranged in the top of the Z-direction displacement platform 16.The X is to displacement platform 15, the Y-direction displacement platform 14,16 and of Z-direction displacement platform
It is fixed respectively by hexagon socket head cap screw between the turntable 17.The side of the turntable 17 is fixedly connected with turntable differential
First 21, the turntable differential head 21 is adjusted, the turntable 17 can be made to rotate a certain angle.The X is to displacement platform 15
Side be fixedly connected with X to differential head 19, adjust the X to differential head 19, the turntable 17 can be made to carry out X to fortune
It is dynamic.The side of the Y-direction displacement platform 14 is fixedly connected with Y-direction differential head 18, adjusts the Y-direction differential head 18, can make described
Turntable 17 carries out Y-direction movement.The side of the Z-direction displacement platform 16 is fixedly connected with Z-direction differential head 20, and it is micro- to adjust the Z-direction
Separately 20, the turntable 17 can be made to carry out Z-direction movement.
In the present embodiment, it is contemplated that the convenience of carrying, weight cannot be too heavy, most of to remove 8 He of bilinear guide rail
Aluminum alloy materials are all made of outside the ball-screw 9 to be process, the ball-screw 9 and the bilinear guide rail 8 are due to warp
Displacement movement is often carried out, therefore is process using stainless steel with high hardness, it is not easy to wear.
The course of work of the present embodiment is as follows：
When measurement, laser displacement sensing is mounted on the turntable 17 first, by adjusting the X to differential
First 19, the Y-direction differential head 18 and the Z-direction differential head 20 keep the Laser emission focus point of the laser displacement sensor poly-
Coke is on 6 ceramic material of gauge head of the measuring rod 5, if angle shifts, can adjust the turntable differential head 21, leads to
The laser displacement sensor is placed on institute by the adjusting for crossing the above four direction, the axis on the basis of 5 axis of the measuring rod
On the extended line for stating 5 axis of measuring rod so that measure axis and datum axis point-blank, meet the original of Abbe error
Then.Then the driving handle 12 is rotated, the measuring rod 5 is driven to carry out displacement, the displacement of the measuring rod 5 will cause described
The data of laser displacement sensor change, by the comparing of the two, to be carried out to the laser displacement sensor
Calibration.
The major parameter (being shown in Table 1) of the laser displacement sensor to be calibrated used in the present embodiment.
The major parameter of the laser displacement sensor to be calibrated of table 1
| Measurement range | Resolution ratio | The limits of error | Temperature |
| (0-30)mm | 0.1μm | ±2μm | (20±5)℃ |
The length gauge major parameter (being shown in Table 2) used in the present embodiment.
The major parameter of length gauge 4 described in table 2
| Model | Range | The limits of error | Operating temperature |
| Heidenhain CT6002 | 60mm | ±0.1μm | 10 DEG C~40 DEG C |
Before experiment starts, the setting of " measurement point " is carried out to the length gauge first, is as measurement by " measurement point "
The input value of system.By 7 decile of range of the laser displacement sensor, in the measure interface of the measuring system described in input
7 decile data of laser displacement sensor.After experiment starts, while acquiring the length gauge and the laser displacement sensor
Real time data, and by the real time data of the laser displacement sensor successively reality with 7 " measurement point " of the length gauge 4
When data compared, when the real time data of the length gauge is matched with the value that 7 " measurement points " are set, record phase in real time
The real time data (being shown in Table 3) for the laser displacement sensor answered, and obtain the laser displacement sensor error curve (see
Fig. 2).
The real time data of length gauge (4) and the laser displacement sensor described in table 3
As shown in Fig. 2, the error of indication of the laser displacement sensor in measurement point 20mm is maximum, which is
0.8 μm, it is not above the requirement of its maximum allowable error ± 2 μm, it can be seen that, by calibrating installation provided in this embodiment
The measurement accuracy of the laser displacement sensor after calibration meets its manufacture and requires.
The advantageous effect of the present embodiment is：
1, the present embodiment and uses amesdial, dial gauge and instruction using Heidenhain length gauge as the standard calibrated
Table calibrating instrument etc. measures displacement and compares, and precision is high, and stability is good；
2, the gauge head of the measuring rod of the present embodiment uses the whiteware with certain diffusing reflection effect, and is tack
, it efficiently solves the problems, such as working face minute surface diffusing reflection when gauge block calibration, substantially increases measurement accuracy；
3, the present embodiment combines measuring mechanism, transmission mechanism and micro-adjusting mechanism, and operation is more convenient, effectively solves
It has determined and has been measured using gauge block or amesdial, dial gauge, gauging machine, indicator table verification instrument etc., in calibration laser displacement sensing
Without special replacer when device, the position of laser displacement sensor can not be finely adjusted, the concentricity for measuring line is not easy to ensure,
The problem of easy ting produce larger Abbe error.
It should be understood that the above-mentioned specific implementation mode of the utility model is used only for exemplary illustration or explains this reality
With novel principle, without constituting limitations of the present invention.Therefore, in the spirit and scope without departing from the utility model
In the case of any modification, equivalent substitution, improvement and etc. done, should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of laser displacement sensor calibrating installation, which is characterized in that including measuring mechanism, transmission mechanism and micro-adjusting mechanism,
The measuring mechanism includes length gauge (4), and one end of the length gauge (4) is provided with measuring rod (5), the measuring rod
(5) one end is provided with gauge head (6), and the measuring rod (5) is scalable relative to the length gauge (4)；
The transmission mechanism includes transmission platform (10) and drive link (11), the transmission platform (10) by the drive link (11) with
Measuring rod (5) connection, the driving handle (12) are set to one end of the drive link (11)；
The micro-adjusting mechanism includes X to displacement platform (15), Y-direction displacement platform (14), Z-direction displacement platform (16) and for installing laser position
The turntable (17) of displacement sensor, is provided with Y-direction differential head (18) on the Y-direction displacement platform (14), and the X is to displacement platform (15)
On be provided with X to differential head (19), Z-direction differential head (20) is provided on the Z-direction displacement platform (16), on the turntable (17)
It is provided with turntable differential head (21).
2. laser displacement sensor calibrating installation according to claim 1, which is characterized in that the laser displacement sensor
Calibrating installation further includes pedestal (1), and the measuring mechanism, the transmission mechanism and the micro-adjusting mechanism may be contained within the pedestal
(1) on.
3. laser displacement sensor calibrating installation according to claim 2, which is characterized in that the measuring mechanism further includes
Supporting rack, support frame as described above include supporting rod (3) and support plate (2), one end and the support plate (2) of the supporting rod (3)
Connection, the other end of the supporting rod (3) are connect with the pedestal (1).
4. laser displacement sensor calibrating installation according to claim 3, which is characterized in that the length gauge (4) passes through
Fastening bolt is set in the support plate (2).
5. laser displacement sensor calibrating installation according to claim 1, which is characterized in that the gauge head (6) is using pottery
Ceramic material is made.
6. laser displacement sensor calibrating installation according to claim 1, which is characterized in that the transmission mechanism further includes
Erecting bed (7), bilinear guide rail (8), ball-screw (9) and driving handle (12),
The bilinear guide rail (8) is set on the erecting bed (7), and the ball-screw (9) is set to the bilinear and leads
Between rail (8), and it is mutually parallel with the bilinear guide rail (8)；
The transmission platform (10) is set on the ball-screw (9), and is mutually perpendicular to the ball-screw (9), the biography
Dynamic platform (10) can be slided along the length direction of the bilinear guide rail (8)；
The drive link (11) is set in the transmission platform (10), and is mutually perpendicular to the transmission platform (10).
7. laser displacement sensor calibrating installation according to claim 6, which is characterized in that the ball-screw (9)
Two tops are provided with fixed block (13), and the driving handle (12) is set to the ball-screw (9) and stretches out the fixed block
(13) one end.
8. laser displacement sensor calibrating installation according to claim 6, which is characterized in that the ball-screw (9) and
The bilinear guide rail (8) is all made of stainless steel and is made.
9. laser displacement sensor calibrating installation according to claim 2, which is characterized in that the turntable (17), institute
State Z-direction displacement platform (16), the X is set in turn in the base from top to bottom to displacement platform (15) and the Y-direction displacement platform (14)
On seat (1).
10. laser displacement sensor calibrating installation according to claim 9, which is characterized in that the turntable (17), institute
State Z-direction displacement platform (16), the X is fixed by fastening screw respectively between displacement platform (15) and the Y-direction displacement platform (14)
Connection.
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| CN201820250299.XU CN207963779U (en) | 2018-02-12 | 2018-02-12 | A kind of laser displacement sensor calibrating installation |
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| CN109341743A (en) * | 2018-12-03 | 2019-02-15 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of multipurpose ballistic motion generating device |
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| CN109719618A (en) * | 2018-12-24 | 2019-05-07 | 东旭科技集团有限公司 | Glass substrate rotating device |
| CN110542397A (en) * | 2019-09-03 | 2019-12-06 | 龙岩市计量所 | Comprehensive calibration device for linear displacement sensor |
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| CN112066889A (en) * | 2020-09-14 | 2020-12-11 | 西安邮电大学 | Thermal error measuring system and thermal error measuring method for laser displacement sensor |
| CN112496864A (en) * | 2020-11-16 | 2021-03-16 | 襄阳华中科技大学先进制造工程研究院 | Micro-adjustment platform for verifying machine tool precision |
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| CN109596036A (en) * | 2018-11-30 | 2019-04-09 | 湖北新华光信息材料有限公司 | A kind of glass sample right angle test device and its test method |
| CN109341743A (en) * | 2018-12-03 | 2019-02-15 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of multipurpose ballistic motion generating device |
| CN109719618A (en) * | 2018-12-24 | 2019-05-07 | 东旭科技集团有限公司 | Glass substrate rotating device |
| CN110542397A (en) * | 2019-09-03 | 2019-12-06 | 龙岩市计量所 | Comprehensive calibration device for linear displacement sensor |
| CN111053561A (en) * | 2019-12-31 | 2020-04-24 | 湖南省计量检测研究院 | Height measurer calibrating device and method |
| CN111053561B (en) * | 2019-12-31 | 2023-02-28 | 湖南省计量检测研究院 | Height measurer calibrating device and method |
| CN111536875A (en) * | 2020-05-22 | 2020-08-14 | 西安飞机工业（集团）有限责任公司 | Rapid detection system and detection method for form and position tolerance at edge of airplane floor beam |
| CN111780687A (en) * | 2020-08-05 | 2020-10-16 | 中国铁道科学研究院集团有限公司 | Calibrating device of profile detection system and working method thereof |
| CN111780687B (en) * | 2020-08-05 | 2022-02-22 | 中国铁道科学研究院集团有限公司 | Calibrating device of profile detection system and working method thereof |
| CN112066889A (en) * | 2020-09-14 | 2020-12-11 | 西安邮电大学 | Thermal error measuring system and thermal error measuring method for laser displacement sensor |
| CN112066889B (en) * | 2020-09-14 | 2022-07-22 | 西安邮电大学 | Thermal error measuring system and thermal error measuring method for laser displacement sensor |
| CN112496864A (en) * | 2020-11-16 | 2021-03-16 | 襄阳华中科技大学先进制造工程研究院 | Micro-adjustment platform for verifying machine tool precision |
| CN113790690A (en) * | 2021-11-17 | 2021-12-14 | 陕西省计量科学研究院 | Clamping attitude adjusting system and method for linear displacement sensor for calibration |
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Address after: 215128 No. 69 Wenqu Road, Wuzhong District, Suzhou City, Jiangsu Province Patentee after: Suzhou metrology and Testing Institute Address before: No. 69 Wenqu Road, Wuzhong District, Suzhou City, Jiangsu Province Patentee before: Suzhou Institute of Measurement and Testing |