CN207957849U - A kind of ultrapure water system concentration valve plate - Google Patents
A kind of ultrapure water system concentration valve plate Download PDFInfo
- Publication number
- CN207957849U CN207957849U CN201820045371.5U CN201820045371U CN207957849U CN 207957849 U CN207957849 U CN 207957849U CN 201820045371 U CN201820045371 U CN 201820045371U CN 207957849 U CN207957849 U CN 207957849U
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- water
- valve
- ultrapure water
- ultrapure
- solenoid valves
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Abstract
The utility model discloses a kind of ultrapure water systems to concentrate valve plate, including valve plate fixed plate and ultrapure water solenoid valve, it is provided with RO water outlet As on plate body on the left of the valve plate fixed plate, RO water solenoid valves and RO water outlet Bs, the edge of the upper end of the valve plate fixed plate is provided with purifying water out, long-range intake and UP intakes, and long-range intake setting is between purifying water out and UP intakes, the edge of valve plate fixed plate lower end is provided with cycle pump interface and ultrapure water out, it is provided with entering water electromagnetic valve and remote solenoid valves between the RO water solenoid valves and ultrapure water out, it is provided with immediately below the entering water electromagnetic valve into Water Conductance Instrument, and the lower right of Water Conductance Instrument is provided with circulating electromagnetic valve, the ultrapure water solenoid valve is arranged in the underface of UP intakes.The utility model installs numerous devices in valve plate fixed plate concentratedly, greatly reduces the structure of device.
Description
Technical field
The utility model is related to purification technology field, specially a kind of ultrapure water system concentrates valve plate.
Background technology
Ultra-pure water, also known as UP water, resistivity reach 18.2M Ω * cm（25℃）Water.It is usually used in using in integrated circuit industry
In the source vapor etc. of the cleaning of semiconductor source material and vessel used, the preparation of lay photoetching mask plate and silicon chip.In addition, its
The making of his solid electronic device, thick film and thin film circuit, printed circuit, vacuum tube etc. will also use ultra-pure water, have wide
General purposes, and valve plate is also the important component of ultrapure water system, but similar product is all made of connector currently on the market,
Pipeline, the connections such as raw material band seal to realize ultrapure water system pipeline and sensor connection.Defect is that connector is excessive, is often gone out
Existing drainage.And connect a large amount of connector and the big equal shortcomings of pipe fitting occupied space.
Invention content
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of ultrapure water system concentration
Valve plate.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution：A kind of ultrapure water system collection
Middle valve plate, including valve plate fixed plate and ultrapure water solenoid valve are provided with RO water outlets on the plate body on the left of the valve plate fixed plate
A, RO water solenoid valves and RO water outlet Bs, and RO water solenoid valves are arranged between RO water outlet As and RO water outlet Bs, the valve
The edge of the upper end of plate fixed plate is provided with purifying water out, long-range intake and UP intakes, and long-range intake setting
Between purifying water out and UP intakes, the edge of valve plate fixed plate lower end is provided with cycle pump interface and ultra-pure water
Outlet, and recycle pump interface and be arranged between RO water outs B and ultrapure water out, the RO water solenoid valves and ultrapure water out
Between be provided with entering water electromagnetic valve and remote solenoid valves, and entering water electromagnetic valve is arranged in the left side of remote solenoid valves, the water inlet
It is provided with into Water Conductance Instrument immediately below solenoid valve, and the lower right of Water Conductance Instrument is provided with circulating electromagnetic valve, it is described
Ultrapure water solenoid valve is arranged in the underface of UP intakes, and ultra-pure water resistivity monitoring instrument be arranged ultrapure water solenoid valve just
Lower end.
Preferably, described to there is RO water outlet As, RO water solenoid valves and RO water outlet Bs to be arranged on same vertical axis.
Preferably, the RO water solenoid valves, entering water electromagnetic valve, remote solenoid valves and ultrapure water solenoid valve are arranged same
On horizontal axis, and purifies water out, entering water electromagnetic valve, is arranged into Water Conductance Instrument and cycle pump interface in same vertical axis
On.
Preferably, the UP intakes, ultrapure water solenoid valve, ultra-pure water resistivity monitoring instrument and the setting of ultrapure water out exist
On same vertical axis.
Preferably, the valve plate fixed plate is arranged in the upper end of bottom plate, and the both ends of bottom plate are both provided with fixed feet.
The advantageous effect that the utility model is reached is：Numerous devices are installed concentratedly in valve plate fixed plate, greatly
Reduce the structure of device so that when device to be placed into inside ultrapure water machine, it is only necessary to which connecting several connectors can be with
Water pump, purification column realize connection inside machine and external, reduce the difficulty of installation, at the same this also reduces device inside
The number of connecting tube, it is excessive to solve ultrapure water machine connector, the problem of leak often occurs.
Description of the drawings
Attached drawing is used to provide a further understanding of the present invention, and a part for constitution instruction, with this practicality
Novel embodiment for explaining the utility model, does not constitute limitations of the present invention together.In the accompanying drawings：
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the utility model reverse side.
1, RO water outlet As；2, RO water solenoid valves；3, into Water Conductance Instrument；4, valve plate fixed plate；5, RO water outlet Bs；6、
Recycle pump interface；7, circulating electromagnetic valve；8, bottom plate；9, ultra-pure water resistivity monitoring instrument；10, ultrapure water out；11, water inlet electromagnetism
Valve；12, water out is purified；13, remote solenoid valves；14, long-range intake；15, ultrapure water solenoid valve；16, UP intakes；17、
Fixed feet.
Specific implementation mode
The preferred embodiment of the utility model is illustrated below in conjunction with attached drawing, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment 1
As shown in Figs. 1-2, a kind of ultrapure water system concentrates valve plate, including valve plate fixed plate 4 and ultrapure water solenoid valve 15, valve
It is provided with RO water outlet As 1, RO water solenoid valves 2 and RO water outlet Bs 5 on the plate body in 4 left side of plate fixed plate, and RO is discharged electromagnetism
Valve 2 is arranged between RO water outlet As 1 and RO water outlet Bs 5, and the edge of the upper end of valve plate fixed plate 4 is provided with purifying water out
12, long-range intake 14 and UP intakes 16, and the long-range setting of intake 14 is purifying between water out 12 and UP intakes 16,
The edge of 4 lower end of valve plate fixed plate is provided with cycle pump interface 6 and ultrapure water out 10, and recycles pump interface 6 and be arranged in RO
Between water out B5 and ultrapure water out 10, entering water electromagnetic valve 11 is provided between RO water solenoid valves 2 and ultrapure water out 10
With remote solenoid valves 13, and entering water electromagnetic valve 11 is arranged in the left side of remote solenoid valves 13, and the underface of entering water electromagnetic valve 11 is set
It is equipped with into Water Conductance Instrument 3, and the lower right of Water Conductance Instrument 3 is provided with circulating electromagnetic valve 7, ultrapure water solenoid valve 15 is arranged
In the underface of UP intakes 16, and ultra-pure water resistivity monitoring instrument 9 is arranged in the positive lower end of ultrapure water solenoid valve 15, has RO to go out
Mouth of a river A1, RO water solenoid valve 2 and RO water outlet Bs 5 are arranged on same vertical axis, RO water solenoid valves 2, entering water electromagnetic valve
11, remote solenoid valves 13 and ultrapure water solenoid valve 15 are arranged on same level axis, and purify water out 10, entering water electromagnetic valve
11, into Water Conductance Instrument 3 and cycle pump interface 6 be arranged on same vertical axis, UP intakes 16, ultrapure water solenoid valve 15,
Ultra-pure water resistivity monitoring instrument 9 and ultrapure water out 12 are arranged on same vertical axis, and valve plate fixed plate 4 is arranged in bottom plate 8
Upper end, and the both ends of bottom plate 8 are both provided with fixed feet 17, facilitate the fixation and installation of device.
Operation principle：Valve plate fixed plate 4 and bottom plate 8 are welded together with hot plate welding machine, the inside flow passage chamber is formed, then
By accessory：Entering water electromagnetic valve 11 is fixed in valve plate fixed plate 4 into Water Conductance Instrument 3, mouth of a river buckle.Purified water is connected to
Water inlet is purified, entering water electromagnetic valve 11 controls purified water disengaging, monitors purifying water conductivity into Water Conductance Instrument 3, circulating pump connects
Mouth 6 connects circulating pump water inlets；The outlet of circulating pump connects threeway, connects RO water outlet As 1, RO water solenoid valves 2 and RO all the way
Water outlet B 5；The outlet of circulating pump connects threeway, and another way outlet connects final outflow water after the devices such as purification column and ultraviolet lamp
Connect ultrapure water out；Ultrapure water out connection ultra-pure water resistivity monitoring instrument 9, after ultra-pure water resistivity monitoring instrument 9
Three solenoid valves in parallel；The first via is circulating electromagnetic valve 7 in three tunnels, in the case that the external world does not fetch water, system automatic cycle, and this valve
Door is opened, and stops closing when cycle；The second tunnel is long-range intake 14 in three tunnels, when the external world needs a water intaking at a distance, this
Valve event is fetched water, and stops closing when water intaking；Third road is UP intakes 16 in three tunnels, when the external world needs to take ultra-pure water, this
Valve event is fetched water, and stops closing when water intaking.
Finally it should be noted that：The above descriptions are merely preferred embodiments of the present invention, is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it still can be with technical scheme described in the above embodiments is modified, or to which part technical characteristic
Carry out equivalent replacement.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of ultrapure water system concentrates valve plate, including valve plate fixed plate（4）With ultrapure water solenoid valve（15）, it is characterised in that：
The valve plate fixed plate（4）RO water outlet As are provided on the plate body in left side（1）, RO water solenoid valves（2）With RO water outlet Bs
（5）, and RO water solenoid valves（2）It is arranged in RO water outlet As（1）With RO water outlet Bs（5）Between, the valve plate fixed plate（4）'s
The edge of upper end is provided with purifying water out（12）, long-range intake（14）With UP intakes（16）, and long-range intake
（14）Setting is in purifying water out（12）With UP intakes（16）Between, the valve plate fixed plate（4）The edge of lower end is arranged
There is cycle pump interface（6）With ultrapure water out（10）, and recycle pump interface（6）It is arranged in RO water outs B（5）With ultrapure water out
（10）Between, the RO water solenoid valves（2）With ultrapure water out（10）Between be provided with entering water electromagnetic valve（11）With long-range electricity
Magnet valve（13）, and entering water electromagnetic valve（11）It is arranged in remote solenoid valves（13）Left side, the entering water electromagnetic valve（11）Just under
Side is provided with into Water Conductance Instrument（3）, and into Water Conductance Instrument（3）Lower right be provided with circulating electromagnetic valve（7）, described ultrapure
Water solenoid valve（15）It is arranged in UP intakes（16）Underface, and ultra-pure water resistivity monitoring instrument（9）It is arranged in ultrapure water power
Magnet valve（15）Positive lower end.
2. a kind of ultrapure water system according to claim 1 concentrates valve plate, it is characterised in that：It is described to have RO water outlet As
（1）, RO water solenoid valves（2）With RO water outlet Bs（5）It is arranged on same vertical axis.
3. a kind of ultrapure water system according to claim 1 concentrates valve plate, it is characterised in that：The RO water solenoid valves
（2）, entering water electromagnetic valve（11）, remote solenoid valves（13）With ultrapure water solenoid valve（15）It is arranged on same level axis, and pure
Change water out（12）, entering water electromagnetic valve（11）, into Water Conductance Instrument（3）With cycle pump interface（6）It is arranged in same vertical axis
On.
4. a kind of ultrapure water system according to claim 1 concentrates valve plate, it is characterised in that：The UP intakes（16）、
Ultrapure water solenoid valve（15）, ultra-pure water resistivity monitoring instrument（9）With ultrapure water out（10）It is arranged on same vertical axis.
5. a kind of ultrapure water system according to claim 1 concentrates valve plate, it is characterised in that：The valve plate fixed plate（4）
It is arranged in bottom plate（8）Upper end, and bottom plate（8）Both ends be both provided with fixed feet（17）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820045371.5U CN207957849U (en) | 2018-01-11 | 2018-01-11 | A kind of ultrapure water system concentration valve plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820045371.5U CN207957849U (en) | 2018-01-11 | 2018-01-11 | A kind of ultrapure water system concentration valve plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207957849U true CN207957849U (en) | 2018-10-12 |
Family
ID=63732707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820045371.5U Active CN207957849U (en) | 2018-01-11 | 2018-01-11 | A kind of ultrapure water system concentration valve plate |
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| Country | Link |
|---|---|
| CN (1) | CN207957849U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542270A (en) * | 2019-08-06 | 2019-12-06 | 扬州派斯特换热设备有限公司 | Special cooling unit of PCW system |
-
2018
- 2018-01-11 CN CN201820045371.5U patent/CN207957849U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542270A (en) * | 2019-08-06 | 2019-12-06 | 扬州派斯特换热设备有限公司 | Special cooling unit of PCW system |
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