CN207952637U - A kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle - Google Patents
A kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle Download PDFInfo
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- CN207952637U CN207952637U CN201820077388.9U CN201820077388U CN207952637U CN 207952637 U CN207952637 U CN 207952637U CN 201820077388 U CN201820077388 U CN 201820077388U CN 207952637 U CN207952637 U CN 207952637U
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Abstract
The utility model is related to the integrated apparatus of a kind of sensing heating and radio frequency plasma combined atomizing nozzle, including insulator seal tubulature, radio-frequency induction coil, encapsulating structure A, plasma lamp torch fixture, plasma lamp torch, radio frequency induction coil, atomizer and encapsulating structure B, the insulator seal tubulature is connected by encapsulating structure A with the plasma lamp torch fixture, the plasma lamp torch is connected by encapsulating structure B with the plasma lamp torch fixture, the atomizer is connected with the plasma lamp torch by the plasma lamp torch fixture, the insulator seal tubulature passes through the radio-frequency induction coil, the radio frequency induction coil encircling is on the tube wall of the plasma lamp torch.Sensing heating, radio frequency plasma melting and high pressure gas are atomized the integrated apparatus being combined by the utility model, by the high-frequency induction heating of silk material, radio frequency plasma melting, high pressure gas be atomized three independent operation stages it is compact it is coherent together, realize short route, integrated effect.
Description
Technical field
The utility model is related to power metallurgy equipment fields, and in particular to a kind of sensing heating combines mist with radio frequency plasma
Change the integrated apparatus of nozzle.
Background technology
With flourishing for the technologies such as increasing material manufacturing (3D printing), injection moulding, thermal spraying, the spherical infusibility of high quality
Metal powder and active metal powder are all important source material necessary to these fields, spherical infusibility and active metal powder production
It counts for much in entire product manufacturing process, the refractory metal and titanium and titanium for higher melts such as tungsten, molybdenum, tantalum, niobiums close
Golden etc. both active and dystectic metal or alloy, it is difficult to obtain the spherical shape of high quality with conventional melting and aerosolization method
Powder.
Currently, the technology of be produced on a large scale high quality spherical shape infusibility and active metal powder mainly has plasma electric rotating
Pole method (PREP), induction melting inert gas atomizer technology (PIGA, EIGA), plasma torch atomization (PA), radio frequency etc. from
Bulbec method (RF) etc..
Wherein induction melting aerosolization (PIGA, EIGA) has certain advantage also with radio frequency plasma nodularization method (RF) and has respectively
From technology the shortcomings that.Induction melting aerosolization technology is that the principle of sensing heating is utilized, by high-frequency induction magnetic field, in metal
" inductive loop " is generated in melting material material, metal generates fuel factor under the action of vortex, and then heating is until fusing, melt
Stream or drop by aerosolization nozzle atomization be more tiny drop.Radio frequency plasma spheronization techniques are produced using RF magnetic field
Raw high-temperature plasma heats until molten material.
For inert gas atomizer technology (PIGA), since extreme is presented in some rare metals during high melt
Activity, so fusion process is mostly in a vacuum or inert atmosphere, and using the induction melting mode of cold-crucible, or using gold
Belong to bar and the direct induction melting (EIGA) of silk material;At present using induction melting mode powder mostly as titanium or titanium alloy,
The relatively not high metal of the fusing points such as nickel-base alloy can not just carry out more dystectic tungsten, molybdenum, tantalum, niobium Base Metal and alloy
It melts and powder processed.In addition it will appear electrode not during using induction melting aerosolization technology smelting metal bar or silk material
It is completely melt and falls into diversion pipe, cause to block, thus it is a technological difficulties of EIGA to keep the continuous-stable of liquid stream.Separately
Outside, the drop after induction melting is detached from high-temperature region and is atomized immediately, thus the degree of superheat of the molten drop after general fusing compared with
It is low, there is no enough temperature and times to ensure that drop shrinks balling-up under surface tension effects during temperature reconstruction,
Therefore the sphericity of powder is bad, also will produce hollow ball.
Radio frequency plasma nodularization method (RF), generally use radio frequency plasma torch heat raw material, have other methods without
The advantages that plasma temperature of method analogy is high, electrodeless pollution;Usually using metal powder as raw material, by plasma high temperature melting
After change, drop shrinks balling-up under surface tension effects again, and then solidifies, and can obtain the good spherical powder of sphericity.It lacks
Point is that powder raw material purity, granularity are limited by raw material itself, and powder is very short by the time of plasma high-temperature region, powder output
And Oxygen potential is relatively low.
Invention content
It is integrated with radio frequency plasma combined atomizing nozzle that the purpose of this utility model is to provide a kind of sensing heatings
High-frequency induction heating, radio frequency plasma melting and high pressure gas three operation stages of atomization are merged by device, especially by
Following technical scheme is realized:
A kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle, including insulator seal tubulature, high frequency
Induction coil, encapsulating structure A, plasma lamp torch fixture, plasma lamp torch, radio frequency induction coil, atomizer and encapsulating structure
B is followed successively by insulator seal tubulature, plasma lamp torch and atomizer from top to bottom using Seal Design, and the insulator seal tubulature is logical
It crosses encapsulating structure A with the plasma lamp torch fixture to be connected, the plasma lamp torch passes through encapsulating structure B and the plasma lamp
Torch fixture is connected, and the atomizer is connected with the plasma lamp torch by the plasma lamp torch fixture, the insulator seal
Tubulature passes through the radio-frequency induction coil, the radio frequency induction coil encircling described to penetrate on the tube wall of the plasma lamp torch
Frequency induction coil is looped around on the tube wall of the plasma lamp torch, between the tube wall of the plasma lamp torch gap be 1~
5mm;
Further, the sensing heating and the resistance to positive pressure of radio frequency plasma combined atomizing nozzle integrated apparatus are more than
1MPa, inner cavity vacuum degree is up to 10-4Pa;
Further, the insulator seal tubulature is cylindrical-shaped structure, is made using silica glass material, convenient for observation
The preheating situation of metal wire material;
Further, the plasma lamp torch is cylindrical-shaped structure, is made using silica glass material, tube wall is water
Cold wall structure, the inlet and outlet of cooling water are arranged on the plasma lamp torch fixture, the main gas entrance of the plasma lamp torch and
Side gas entrance is arranged on the plasma lamp torch fixture, and the quantity of the main gas entrance is 2, tangent line air inlet or it is vertical etc. from
Sub- lamp torch air inlet forms plasma torch smelting metal silk material, the side gas under the magnetic fields that radio frequency induction coil generates
The quantity of entrance is 2~4, symmetrical, when side gas entrance is 2, mutually in 180 ° of arrangements, when side gas entrance is 3
When, mutually in 120 ° of arrangements, when side gas entrance is 4, mutually in 90 ° of arrangements, tangent line air inlet, in the plasma lamp torch pipe
The air-flow that eddy flow shape is formed on the inner wall of wall, protects the tube wall of plasma lamp torch, while can compress the flame of plasma lamp torch,
Realize the purpose of efficient smelting metal silk material;
Further, the tube wall water wall structure of the plasma lamp torch is three layer of two channel design, lower end closed, upper end
One wing passage goes out the water after heat exchange, the tube wall of plasma lamp torch is protected not damaged by high temperature into cooling water, another wing passage;
Further, it is 10~100L/min, side air-flow that the main gas and side gas, which use helium or argon gas, primary air amount,
Amount is 20~300L/min, and the helium or purity of argon are not less than 99.995%, and entire plasma melting environment is inertia ring
Border avoids that other reaction generation impurity occur;
Further, the atomizer is that high pressure atomizing nozzle protects atomizer not by high temperature using water-cooling structure
Metal liquid stream is damaged, and the quantity of atomization gas entrance is 2, is symmetrically arranged, and the atomization gas channel of the atomizer is ring
Shape is stitched, and width is 0.2~0.6mm, and annulus outlet is arranged obliquely, and the atomization gas of ejection forms 40~80 ° of atomization gas conings, right
Molten metal stream forms impact, smashes molten metal stream and forms small molten drop;
Further, the atomization gas is argon gas or helium, and pressure is 5~10MPa, and atomization gas flow is 2~20m3/
min;
Further, the material of the encapsulating structure A, plasma lamp torch fixture, atomizer and encapsulating structure B are stainless
Steel, high temperature resistant and non-corrosive;
Further, the main gas channel of the plasma lamp torch is columned quartz glass tube, be mounted on it is described it is equal from
In sub- lamp torch, the gap between the plasma lamp torch pipe wall and main gas channel is side gas channel.
The utility model has the following advantages that:
1, the utility model provides a kind of one for being atomized sensing heating, radio frequency plasma melting and high pressure gas and being combined
Makeup is set, and the high-frequency induction heating of silk material, radio frequency plasma melting, high pressure gas are atomized three independent compact companies of operation stage
It passes through together, realizes short route, integrated effect.
2, the plasma lamp torch of the utility model and insulator seal tubulature are made of quartz glass, it may be convenient to observation gold
Belonging to silk material preheating and melting situation, the tube wall of plasma lamp torch uses water wall structure, can be effectively protected plasma lamp torch,
High temperature is avoided to damage plasma lamp torch pipe wall, side gas uses tangent line air inlet, forms eddy flow shape on the inside of plasma lamp torch pipe wall
Air-flow, further protects the tube wall of plasma lamp torch, while can compress the flame of plasma lamp torch, realizes efficient smelting metal
The purpose of silk material, atomizer use water-cooling structure, and effective protection atomizer is not by high-temperature metal liquid stream or drop disturbances, mist
Changing gas channel uses annulus, the atomization gas of ejection to form gas coning, form local decompression at drop under molten metal stream, increase mist
Change gas and impact force when metal fluid-flow contact, strengthens atomizing effect.
Description of the drawings
The integrated apparatus structure chart of a kind of sensing heatings of Fig. 1 and radio frequency plasma combined atomizing nozzle.
The integrated apparatus sectional view figure of a kind of sensing heatings of Fig. 2 and radio frequency plasma combined atomizing nozzle.
Wherein, 1. insulator seal tubulatures, 2. radio-frequency induction coils, 3. encapsulating structure A, 4. plasma lamp torch fixtures, 5. etc. from
Sub- lamp torch, 6. radio frequency induction coils, 7. atomizers, 8. encapsulating structure B, 9. atomization gas entrances, 10. main gas channels.
Specific implementation mode
The following examples illustrate the utility model, but is not intended to limit the scope of the present invention.
Embodiment 1
As shown in Fig. 1~2, a kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle, including it is exhausted
Edge package tube 1, radio-frequency induction coil 2, encapsulating structure A3, plasma lamp torch fixture 4, plasma lamp torch 5, radio frequency induction coil 6,
Atomizer 7 and encapsulating structure B8, using Seal Design, the 1.5MPa of resistance to positive pressure, inner cavity vacuum degree is up to 10-4Pa, from top to bottom
It is followed successively by insulator seal tubulature 1, plasma lamp torch 5 and atomizer 7, the encapsulating structure A3, plasma lamp torch fixture 4, atomization
The material of nozzle 7 and encapsulating structure B8 are stainless steel, and the insulator seal tubulature 1 passes through encapsulating structure A3 and the plasma lamp torch
Fixture 4 is connected, and the plasma lamp torch 5 is connected by encapsulating structure B8 with the plasma lamp torch fixture 4, the atomizer
7 are connected with the plasma lamp torch 5 by the plasma lamp torch fixture 4, and the insulator seal tubulature 1 is cylindrical-shaped structure, is adopted
It is made with silica glass material, it is cylindrical-shaped structure to pass through the radio-frequency induction coil 2, the plasma lamp torch 5, is used
Silica glass material is made, tube wall be three layer of two channel water wall structure, lower end closed, one wing passage of upper end water inlet,
Another wing passage water outlet, the inlet and outlet of cooling water are arranged on the plasma lamp torch fixture 4, the master of the plasma lamp torch 5
Gas and side gas entrance are arranged on the plasma lamp torch fixture 4, and the quantity of the main gas entrance is 2, using straight line air inlet,
The quantity of the side gas entrance is 2, and each other in 180 ° of arrangements, tangent line air inlet, main gas channel 9 is columned quartz glass
Pipe, the gap between 5 tube wall of plasma lamp torch and main gas channel 9 are side gas channel, and main gas and side gas use helium, main gas
Flow is 10~50L/min, and side throughput is 50~200L/min, and the helium purity is not less than 99.995%, the radio frequency
Induction coil 6 is looped around on the tube wall of the plasma lamp torch 5, and the gap between 5 tube wall of plasma lamp torch is 2mm,
The atomizer is the high pressure atomizing nozzle of water-cooling structure, and the quantity of atomization gas entrance 9 is 2, is symmetrically arranged, described
The atomization gas channel of atomizer 7 is annulus, width 0.2mm, the atomization for 40 ° of the atomization air flow formation that annulus sprays
Angle, the atomization gas are helium, and pressure 8MPa, atomization gas flow is 5~15m3/min。
Embodiment 2
As shown in Fig. 1~2, a kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle, including it is exhausted
Edge package tube 1, radio-frequency induction coil 2, encapsulating structure A3, plasma lamp torch fixture 4, plasma lamp torch 5, radio frequency induction coil 6,
Atomizer 7 and encapsulating structure B8, using Seal Design, the 2MPa of resistance to positive pressure, inner cavity vacuum degree is up to 10-4Pa, from top to bottom according to
Secondary is insulator seal tubulature 1, plasma lamp torch 5 and atomizer 7, the encapsulating structure A3, plasma lamp torch fixture 4, atomization spray
The material of mouth 7 and encapsulating structure B8 are stainless steel, and the insulator seal tubulature 1 passes through encapsulating structure A3 and the plasma lamp torch card
Tool 4 is connected, and the plasma lamp torch 5 is connected by encapsulating structure B8 with the plasma lamp torch fixture 4, the atomizer 7
It is connected by the plasma lamp torch fixture 4 with the plasma lamp torch 5, the insulator seal tubulature 1 is cylindrical-shaped structure, is used
Silica glass material is made, and passes through the radio-frequency induction coil 2, the plasma lamp torch 5 is cylindrical-shaped structure, using stone
English glass material is made, tube wall be three layer of two channel water wall structure, lower end closed, one wing passage of upper end water inlet, separately
One wing passage is discharged, and the inlet and outlet of cooling water are arranged on the plasma lamp torch fixture 4, the main gas of the plasma lamp torch 5
It is arranged on the plasma lamp torch fixture 4 with side gas entrance, the quantity of the main gas entrance is 2, using tangent line air inlet, institute
The quantity for stating side gas entrance is 3, and each other in 120 ° of arrangements, tangent line air inlet, main gas channel 9 is columned quartz glass
Pipe, the gap between 5 tube wall of plasma lamp torch and main gas channel 9 are side gas channel, and the main gas and side gas use argon gas,
Primary air amount is 10~100L/min, and side throughput is 20~100L/min, and the purity of argon is described not less than 99.995%
Radio frequency induction coil 6 is looped around on the tube wall of the plasma lamp torch 5, and the gap between 5 tube wall of plasma lamp torch is
5mm, the atomizer are the high pressure atomizing nozzle of water-cooling structure, and the quantity of atomization gas entrance 9 is 2, is symmetrically arranged,
The atomization gas channel of the atomizer 7 is annulus, width 0.4mm, the mist for 80 ° of the atomization air flow formation that annulus sprays
Change angle, the atomization gas is argon gas, and pressure 6MPa, atomization gas flow is 2~10m3/min。
Embodiment 3
As shown in Fig. 1~2, a kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle, including it is exhausted
Edge package tube 1, radio-frequency induction coil 2, encapsulating structure A3, plasma lamp torch fixture 4, plasma lamp torch 5, radio frequency induction coil 6,
Atomizer 7 and encapsulating structure B8, using Seal Design, the 1.2MPa of resistance to positive pressure, inner cavity vacuum degree is up to 10-4Pa, from top to bottom
It is followed successively by insulator seal tubulature 1, plasma lamp torch 5 and atomizer 7, the encapsulating structure A3, plasma lamp torch fixture 4, atomization
The material of nozzle 7 and encapsulating structure B8 are stainless steel, and the insulator seal tubulature 1 passes through encapsulating structure A3 and the plasma lamp torch
Fixture 4 is connected, and the plasma lamp torch 5 is connected by encapsulating structure B8 with the plasma lamp torch fixture 4, the atomizer
7 are connected with the plasma lamp torch 5 by the plasma lamp torch fixture 4, and the insulator seal tubulature 1 is cylindrical-shaped structure, is adopted
It is made with silica glass material, it is cylindrical-shaped structure to pass through the radio-frequency induction coil 2, the plasma lamp torch 5, is used
Silica glass material is made, tube wall be three layer of two channel water wall structure, lower end closed, one wing passage of upper end water inlet,
Another wing passage water outlet, the inlet and outlet of cooling water are arranged on the plasma lamp torch fixture 4, the master of the plasma lamp torch 5
Gas and side gas entrance are arranged on the plasma lamp torch fixture 4, and the quantity of the main gas entrance is 2, the side gas entrance
Quantity be 4, each other in 90 ° distribution, tangent line air inlet, main gas channel 9 be columned quartz glass tube, the plasma
Gap between 5 tube wall of lamp torch and main gas channel 9 is side gas channel, and it is 10 that the main gas and side gas, which use helium, primary air amount,
~80L/min, side throughput are 100~300L/min, and the helium purity is not less than 99.995%, the radio frequency induction coil
6 are looped around on the tube wall of the plasma lamp torch 5, and the gap between 5 tube wall of plasma lamp torch is 3mm, the atomization
Nozzle is the high pressure atomizing nozzle of water-cooling structure, and the quantity of atomization gas entrance 9 is 2, is symmetrically arranged, the atomizer
7 atomization gas channel is annulus, width 0.6mm, the atomizing angle for 60 ° of the atomization air flow formation that annulus sprays, the mist
Change gas is helium, and pressure 10MPa, atomization gas flow is 8~20m3/min。
Although above having made detailed description to the utility model with generality explanation and specific embodiment,
On the basis of the utility model, it can be made some modifications or improvements, this is apparent to those skilled in the art
's.Therefore, these modifications or improvements on the basis of without departing from the spirit of the present invention, belong to the utility model and want
Seek the range of protection.
Claims (10)
1. the integrated apparatus of a kind of sensing heating and radio frequency plasma combined atomizing nozzle, it is characterised in that:The induction adds
Heat with radio frequency plasma combined atomizing nozzle include insulator seal tubulature (1), radio-frequency induction coil (2), encapsulating structure A (3), etc. from
Sub- lamp torch fixture (4), plasma lamp torch (5), radio frequency induction coil (6), atomizer (7) and encapsulating structure B (8), use is close
Envelope design, is followed successively by insulator seal tubulature (1), plasma lamp torch (5) and atomizer (7), the insulator seal tubulature from top to bottom
(1) it is connected with the plasma lamp torch fixture (4) by encapsulating structure A (3), the plasma lamp torch (5) passes through encapsulating structure B
(8) be connected with the plasma lamp torch fixture (4), the atomizer (7) and the plasma lamp torch (5) by it is described it is equal from
Sub- lamp torch fixture (4) is connected, and the insulator seal tubulature (1) passes through the radio-frequency induction coil (2), the radio frequency induction coil
(6) it is looped around on the tube wall of the plasma lamp torch (5), gap is 1~5mm between the tube wall of the plasma lamp torch (5).
2. the integrated apparatus of sensing heating according to claim 1 and radio frequency plasma combined atomizing nozzle, feature
It is:The sensing heating and the resistance to positive pressure of radio frequency plasma combined atomizing nozzle integrated apparatus are more than 1MPa, inner cavity vacuum
Degree is up to 10-4Pa。
3. the integrated apparatus of sensing heating according to claim 1 and radio frequency plasma combined atomizing nozzle, feature
It is:The insulator seal tubulature (1) is cylindrical-shaped structure, is made using silica glass material.
4. the integrated apparatus of sensing heating according to claim 1 and radio frequency plasma combined atomizing nozzle, feature
It is:The plasma lamp torch (5) is cylindrical-shaped structure, is made using silica glass material, and tube wall is water wall structure,
The inlet and outlet of cooling water are arranged on the plasma lamp torch fixture (4), the main gas entrance and side gas of the plasma lamp torch (5)
Entrance is arranged on the plasma lamp torch fixture (4), and the quantity of the main gas entrance is 2, the quantity of the side gas entrance
It is 2~4, symmetrical, tangent line air inlet.
5. the integrated apparatus of sensing heating according to claim 4 and radio frequency plasma combined atomizing nozzle, feature
It is:The tube wall water wall structure of the plasma lamp torch (5) is three layer of two channel design, lower end closed, one wing passage of upper end
Water inlet, another wing passage water outlet.
6. the integrated apparatus of sensing heating according to claim 4 and radio frequency plasma combined atomizing nozzle, feature
It is:The main gas and side gas use helium or argon gas, primary air amount be 10~100L/min, side throughput be 20~
300L/min, the helium or purity of argon are not less than 99.995%.
7. the integrated apparatus of sensing heating according to claim 1 and radio frequency plasma combined atomizing nozzle, feature
It is:The atomizer (7) is high pressure atomizing nozzle, and using water-cooling structure, atomization gas entrance (9) quantity is 2, left and right pair
Claim arrangement, the atomization gas channel of the atomizer (7) is annulus, and width is 0.2~0.6mm, the atomization that annulus sprays
Air-flow forms 40~80 ° of atomizing angle.
8. the integrated apparatus of sensing heating according to claim 6 and radio frequency plasma combined atomizing nozzle, feature
It is:The atomization gas is argon gas or helium, and pressure is 5~10MPa, and atomization gas flow is 2~20m3/min。
9. the integrated apparatus of sensing heating according to claim 1 and radio frequency plasma combined atomizing nozzle, feature
It is:The encapsulating structure A (3), plasma lamp torch fixture (4), atomizer (7) and encapsulating structure B (8) material be stainless
Steel.
10. the integrated apparatus of sensing heating according to claim 4 and radio frequency plasma combined atomizing nozzle, feature
It is:The main gas channel (10) of the plasma lamp torch (5) is columned quartz glass tube, is mounted on the plasma lamp torch
(5) in, the gap between plasma lamp torch (5) tube wall and main gas channel (10) is side gas channel.
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CN201820077388.9U CN207952637U (en) | 2018-01-17 | 2018-01-17 | A kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109304473A (en) * | 2018-11-29 | 2019-02-05 | 中天智能装备有限公司 | ICP plasma straight-line heating device |
CN114727464A (en) * | 2022-03-29 | 2022-07-08 | 电子科技大学 | Method for prolonging service life of plasma spheroidization radio frequency torch and radio frequency torch |
-
2018
- 2018-01-17 CN CN201820077388.9U patent/CN207952637U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109304473A (en) * | 2018-11-29 | 2019-02-05 | 中天智能装备有限公司 | ICP plasma straight-line heating device |
CN114727464A (en) * | 2022-03-29 | 2022-07-08 | 电子科技大学 | Method for prolonging service life of plasma spheroidization radio frequency torch and radio frequency torch |
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