CN207937854U - A kind of Workpiece leveling device based on laser displacement sensor - Google Patents

A kind of Workpiece leveling device based on laser displacement sensor Download PDF

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Publication number
CN207937854U
CN207937854U CN201820203617.7U CN201820203617U CN207937854U CN 207937854 U CN207937854 U CN 207937854U CN 201820203617 U CN201820203617 U CN 201820203617U CN 207937854 U CN207937854 U CN 207937854U
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China
Prior art keywords
feed mechanism
displacement sensor
rotary disk
laser displacement
pinboard
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CN201820203617.7U
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Chinese (zh)
Inventor
张丽彬
张涛
查旭明
郭必成
徐佳禄
尹纪博
王珂
曹亮
姜峰
徐西鹏
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Huaqiao University
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Huaqiao University
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Abstract

The utility model discloses a kind of Workpiece leveling device based on laser displacement sensor, including lathe bed, X to, Z-direction feed mechanism, pinboard, angle fine-adjustment mechanism, fixture, sample, tool, laser displacement sensor, rotary disk and motor;The X is installed in feed mechanism between lathe bed and Z-direction feed mechanism so that Z-direction feed mechanism can be along X to feeding, the Z-direction feed mechanism be installed in X between feed mechanism and pinboard so that pinboard can be fed along Z-direction, the angle fine-adjustment mechanism be installed between pinboard and fixture so that fixture can opposite Y-direction rotation, the fixture clamping connection sample;Rotary disk rotation is installed on lathe bed and motor drive connection rotary disk, the tool are installed on the rotary disk peripheral wall, which is installed in the revolution side surface.It has the following advantages that:Can guarantee entire test plane to knife precision, can guarantee the Workpiece leveling precision of entire test plane.

Description

A kind of Workpiece leveling device based on laser displacement sensor
Technical field
The utility model is related to a kind of Workpiece leveling device more particularly to a kind of workpiece tune based on laser displacement sensor Leveling device.
Background technology
When single abrasive grain scratching plane, single-point plane machining etc. are tested or are processed with point in the plane, Workpiece leveling Precision tends to determine the precision of the accuracy and processing of test.The presetting cutter method being commonly used is mostly on tool and sample A point to knife, and ensure by other benchmark other points and the relative position of tool on sample plane indirectly.It is this Presetting cutter method can not ensure the leveling precision of workpiece, high precision measurement with can only ensure that workpiece is attached to knife point in Ultra-precision Turning The test of near field or cutting depth meet required precision, can not then ensure the region of knife point farther out from workpiece.
Utility model content
The utility model provides a kind of Workpiece leveling device based on laser displacement sensor, and which overcome background technologies Deficiency present in middle Workpiece leveling.
The used technical solution that the utility model solves its technical problem is:
A kind of Workpiece leveling device based on laser displacement sensor, including lathe bed (1), X to feed mechanism (2), Z-direction into To mechanism (3), pinboard (5), angle fine-adjustment mechanism (6), fixture (7), sample (8), tool (9), laser displacement sensor (10), rotary disk (11) and motor (12);The X to feed mechanism (2) be installed between lathe bed (1) and Z-direction feed mechanism (3) with Make Z-direction feed mechanism (3) can along X to feeding, the Z-direction feed mechanism (3) be installed in X to feed mechanism (2) and pinboard (5) it Between so that pinboard (5) can be fed along Z-direction, the angle fine-adjustment mechanism (6) be installed between pinboard (5) and fixture (7) so that Fixture (7) can opposite Y-direction rotation, fixture (7) clamping connection sample (8);The rotary disk (11) rotation be installed on lathe bed (1) and Motor (12) drive connection rotary disk (11), the tool (9) are installed on rotary disk (11) peripheral wall, the laser displacement sensor (10) it is installed on rotary disk (11) end face.
Further include dynamometer (4), which is installed between Z-direction feed mechanism (3) and pinboard (5).
Further include main shaft, which connects rotary disk (11) by spindle drive, and rotary disk (11) axis is along Z-direction It arranges and on motor (12).
Further include control system, which connects X to feed mechanism (2), Z-direction feed mechanism (3), angle adjustment machine Structure (6), laser displacement sensor (10) and motor (12).
Compared with the background art, it has the following advantages that the technical program:
Laser displacement sensor measures in real time, while Z-direction feed mechanism drives sample movement, according on sample at a distance of L3 The magnitude relationship of two sampled points and laser displacement sensor distance L1, L2, adjusting the angle micromatic setting makes L1-L2 reduce, Repeat aforesaid operations and arrive prescribed limit until L1-L2 is small, then carry out workpiece and sample to knife, to ensure entire test plane To knife precision, to ensure the Workpiece leveling precision of entire test plane.
Description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
Fig. 1 is the stereoscopic schematic diagram of the Workpiece leveling device of present embodiment;
Fig. 2 is the laser displacement sensor Workpiece leveling schematic diagram of present embodiment.
Specific implementation mode
A kind of Workpiece leveling device based on laser displacement sensor, please refers to Fig. 1 and Fig. 2, including lathe bed 1, X are to feeding Mechanism 2, Z-direction feed mechanism 3, dynamometer 4, pinboard 5, angle fine-adjustment mechanism 6, fixture 7, sample 8, tool 9, laser displacement pass Sensor 10, rotary disk 11, main shaft, motor 12 and control system.
The X be installed between lathe bed 1 and Z-direction feed mechanism 3 to feed mechanism 2 so that Z-direction feed mechanism 3 can along X into Give, the Z-direction feed mechanism 3 be installed in X between feed mechanism 2 and pinboard 5 so that pinboard 5 can be fed along Z-direction, the angle Micro-adjusting mechanism 6 be installed between pinboard 5 and fixture 7 so that fixture 7 can opposite Y-direction rotation, 7 clamping connection of the fixture sample 8;It should The rotation of rotary disk 11 is installed on lathe bed 1 and 12 drive connection rotary disk 11 of motor, the tool 9 are installed in 11 peripheral wall of rotary disk On, which is installed on 11 end face of rotary disk.Wherein:The X is to feed mechanism and Z-direction feed mechanism Feed accuracy is preferable over 0.1 μm, and repetitive positioning accuracy is preferable over 1 μm, preferred high accuracy linear motor;The X to feeding machine The straightness error of structure and Z-direction feed mechanism is preferable over 1 μm/m, preferred high accuracy linear motor;The X is to feed mechanism and Z Rigidity after being assembled to feed mechanism preferably meets the sample yielding amount under 200N stress and is less than 1 μm;The angle vernier device is most Has higher resolution ratio well, resolution ratio is preferable over 0.1 °;The laser displacement sensor measurement accuracy is preferable over 0.01 μ m;Angle vernier device preferably has lock function, locks the angle adjusted.
Sample 8 can be made in xyz move in plane to feed mechanism 2 and 3 co- controlling of Z-direction feed mechanism by X, pass through angle Degree micromatic setting 6 can adjust 8 measured surface of sample and be rotated around y-axis, and the angle of 8 measured surface of sample is made to adapt to test needs.
The dynamometer 4 is installed between Z-direction feed mechanism 3 and pinboard 5;The motor 12 is connected by spindle drive and is turned round Disk 11,11 axis of rotary disk are arranged along Z-direction and on motors 12;The control system connect X to feed mechanism 2, Z-direction into To mechanism 3, angle fine-adjustment mechanism 6, laser displacement sensor 10 and motor 12.The tool is fixed on rotary disk circumference by motor Drive rotation;The laser displacement sensor is fixed in revolution side surface, so that measurement point is beaten the measured surface in sample and formed Measured point.
A kind of Workpiece leveling method of above-mentioned Workpiece leveling device based on laser displacement sensor, including:
Step 1, by 8 clamping of sample on fixture 7, make 8 measured surface of sample and Z-direction by adjusting angle vernier device 6 It is parallel;
Step 2, laser displacement sensor 10 is fixed on rotary disk 11, drives the rotation of rotary disk 11 to make by motor 12 10 measurement direction of laser displacement sensor relocks rotary disk 11 towards 8 measured surface of sample, which for example passes through electromechanical locks Dead rotary disk;
Step 3, Z-direction feed mechanism 3 drives sample 8 to move to the measurement point position of laser displacement sensor 10, makes measurement Point is beaten in 8 measured surface top half of sample;
Step 4, pass through the distance of measured point on the measurement sample 8 of laser displacement sensor 10 to laser displacement sensor 10 L1, and record L1;Sample 8 is set to move up L3 distances by Z-direction feed mechanism 3;It is measured and is tried by laser displacement sensor 10 Measured point and records L2 to the distance L2 of laser displacement sensor 10 on sample 8;
Step 5, L1-L2 is calculated, if result is more than 0,8 measured surface up time of sample is adjusted using angle vernier device 6 Needle rotates;If result is less than 0,8 measured surface of sample is adjusted using angle vernier device 6 and is rotated counterclockwise;Calculate ︱ L1- The value of L2 ︱/L3 repeats this step 5 until ︱ L1-L2 ︱/L3<0.5μm;Wherein:L1-L2 values are closer to 0, angle vernier device 6 It adjusts the angle smaller;
Step 6, laser displacement sensor 10 is removed, drives the rotation of rotary disk 11 to make 9 vertical sample 8 of tool by motor 12 Measured surface relocks rotary disk 11;
Step 7, X drives sample 8 close to tool 9 to feed mechanism 2.
The step 7 includes:
Fast feed, feed speed 1-3mm/s, until the top limit of tool 9 is close to the scratching surface of sample 8;
Inching feed, 0.1-1.3 μm of feeding every time, until tool 9 is contacted with the scratching surface of sample 8, the contact Whether by dynamometer 4, whether powerful signal is judged, be judged as when powerful signal occurs to knife complete.
The above, only the utility model preferred embodiment, therefore the utility model implementation cannot be limited according to this It is new all should still to belong to this practicality that is, according to equivalent changes and modifications made by the utility model patent range and description for range In the range of type covers.

Claims (4)

1. a kind of Workpiece leveling device based on laser displacement sensor, it is characterised in that:Including lathe bed (1), X to feed mechanism (2), Z-direction feed mechanism (3), pinboard (5), angle fine-adjustment mechanism (6), fixture (7), sample (8), tool (9), laser displacement Sensor (10), rotary disk (11) and motor (12);The X is installed in lathe bed (1) and Z-direction feed mechanism (3) to feed mechanism (2) Between so that Z-direction feed mechanism (3) can along X to feeding, the Z-direction feed mechanism (3) be installed in X to feed mechanism (2) and switching So that pinboard (5) can be fed along Z-direction between plate (5), the angle fine-adjustment mechanism (6) be installed in pinboard (5) and fixture (7) it Between so that fixture (7) can opposite Y-direction rotation, fixture (7) clamping connection sample (8);The rotary disk (11) rotation is installed in lathe bed (1) on and motor (12) drive connection rotary disk (11), the tool (9) are installed on rotary disk (11) peripheral wall, the laser position Displacement sensor (10) is installed on rotary disk (11) end face.
2. a kind of Workpiece leveling device based on laser displacement sensor according to claim 1, it is characterised in that:Also wrap Dynamometer (4) is included, which is installed between Z-direction feed mechanism (3) and pinboard (5).
3. a kind of Workpiece leveling device based on laser displacement sensor according to claim 1, it is characterised in that:Also wrap Main shaft is included, which connects rotary disk (11) by spindle drive, which arranges along Z-direction and positioned at electricity On machine (12).
4. a kind of Workpiece leveling device based on laser displacement sensor according to claim 1, it is characterised in that:Also wrap Control system is included, which connects X to feed mechanism (2), Z-direction feed mechanism (3), angle fine-adjustment mechanism (6), laser position Displacement sensor (10) and motor (12).
CN201820203617.7U 2018-02-06 2018-02-06 A kind of Workpiece leveling device based on laser displacement sensor Active CN207937854U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820203617.7U CN207937854U (en) 2018-02-06 2018-02-06 A kind of Workpiece leveling device based on laser displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820203617.7U CN207937854U (en) 2018-02-06 2018-02-06 A kind of Workpiece leveling device based on laser displacement sensor

Publications (1)

Publication Number Publication Date
CN207937854U true CN207937854U (en) 2018-10-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820203617.7U Active CN207937854U (en) 2018-02-06 2018-02-06 A kind of Workpiece leveling device based on laser displacement sensor

Country Status (1)

Country Link
CN (1) CN207937854U (en)

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