CN207935768U - Water pipe head water leakage detection protector - Google Patents

Water pipe head water leakage detection protector Download PDF

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Publication number
CN207935768U
CN207935768U CN201820310205.3U CN201820310205U CN207935768U CN 207935768 U CN207935768 U CN 207935768U CN 201820310205 U CN201820310205 U CN 201820310205U CN 207935768 U CN207935768 U CN 207935768U
Authority
CN
China
Prior art keywords
water pipe
pipe head
water
leakage detection
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820310205.3U
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Chinese (zh)
Inventor
刘普然
黄志凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huaian Imaging Device Manufacturer Corp
Original Assignee
Huaian Imaging Device Manufacturer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huaian Imaging Device Manufacturer Corp filed Critical Huaian Imaging Device Manufacturer Corp
Priority to CN201820310205.3U priority Critical patent/CN207935768U/en
Application granted granted Critical
Publication of CN207935768U publication Critical patent/CN207935768U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

Water pipe head water leakage detection protector provided by the utility model includes the sensor positioned at internal layer and the insulated enclosure layer positioned at outer layer;The sensor, for being installed on the water pipe head outer surface, with detect the water pipe head whether leak;The insulated enclosure layer, for being coated on the water pipe head outer surface so that the sensor is located between the water pipe head and the insulated enclosure layer.The utility model is while realization is to the water pipe head leak water detdction, additionally it is possible to prevent leak from spreading and permeating, avoid the generation of extensive water leakage situation, provide safeguard for normal, the stable operation of board.

Description

Water pipe head water leakage detection protector
Technical field
The utility model is related to technical field of manufacturing semiconductors more particularly to a kind of water pipe head leak water detdction protection dresses It sets.
Background technology
In semiconductor fabrication, in order to ensure the progress that semiconductor fabrication process continues, stablizes, in semiconductor manufacturing Water cooling system is both provided in equipment.In general, water cooling system includes more water pipes being set to inside board, water pipe Between, between water pipe and board interface pass through water pipe head and realize and be connected with each other.Existing water pipe head is divided into parallel cartridges and connects Head and fixed pipe joint.So-called parallel cartridges connector refers to the connector used during pipe laying;So-called fixed pipeline Connector refers to the connector for connecting board end interface and water pipe.
Water pipe and water pipe head inside board are usually that can't see in the case where not opening board, some positions Even opening board is set also to can't see.This results in also being difficult to pinpoint the problems during regular booting checks, causes partly to lead The puzzlement of body equipment.It is all more serious when general considerations is found, at this time:Shutdown repairs, normal to producing line, Stable operation brings larger puzzlement;It is continuing with until water pipe head explosion, finally pays costliness for board maintenance Cost.
Water pipe head is that the position of water leakage most easily occurs.Currently, in order to detect water pipe head whether leak, be all in water Leakage inductive rope is set at pipe fitting, and alarm could be triggered by needing water to be completely soaked, and induction sensitivity is relatively low.In addition, partly leading The water pipe head used in body equipment is mostly clip, leakproofness metal joint or quick coupling, and due to board operational process In have many water pipe heads, in case of leak, can not quickly confirm it is which connector leak, thus also can not quickly be located Reason, easily causes large-scale leak, is equally unfavorable for the progress that manufacture of semiconductor continues, stablizes.
Therefore, how while realizing water pipe head leak water detdction, leak is effectively prevent to spread and permeate, so that it is guaranteed that The progress that manufacture of semiconductor continues, stablizes, is a technical problem to be solved urgently.
Utility model content
The utility model provides a kind of water pipe head water leakage detection protector, to realize water pipe head leak water detdction While, effectively prevent leak from spreading and permeating, so that it is guaranteed that the progress that manufacture of semiconductor continues, stablizes.
To solve the above-mentioned problems, the utility model provides a kind of water pipe head water leakage detection protector, including position Sensor in internal layer and the insulated enclosure layer positioned at outer layer;The sensor, for being installed on the water pipe head outer surface, With detect the water pipe head whether leak;The insulated enclosure layer, for being coated on the water pipe head outer surface so that institute Sensor is stated to be located between the water pipe head and the insulated enclosure layer.
Preferably, the sensor, including at least one set of detecting electrode group, the detecting electrode group includes with predetermined interval Two electrodes being arranged.
Preferably, the electrode is the strip shaped electric poles being axially arranged along the water pipe head.
Preferably, at least one set of detecting electrode group includes multigroup mutually independent detecting electrode group.
Preferably, further include the first alarm;First alarm, connects the sensor, for judging whether there is Short circuit occurs for detecting electrode group, if so, sending out alarm.
Preferably, further include multiple second alarms;Multiple second alarms, it is a pair of with multigroup detecting electrode group one It should connect;Every 1 second alarm is for judging whether corresponding detecting electrode group occurs short circuit, if so, sending out alarm.
Preferably, further include at least insulating support pad being set between the sensor and the insulated enclosure layer Circle.
Preferably, an at least insulating supporting washer includes multiple insulating supporting washers, and multiple insulating supporting washers are along institute State the axial distribution of water pipe head.
Preferably, the insulated enclosure layer is fabricated using flexible material.
Water pipe head water leakage detection protector provided by the utility model, including be made of sensor and insulated enclosure layer Inside and outside double-layer structure, real-time detection to the water pipe head leak is realized by the sensor, passes through insulated enclosure layer To having occurred and that the water pipe head of leak is protected, prevents leak from spreading and infiltration, avoids the generation of extensive water leakage situation, It provides safeguard for normal, the stable operation of board, has also reserved the time for subsequent maintenance.
Description of the drawings
Attached drawing 1 is the cross section structure signal of water pipe head water leakage detection protector in specific embodiment of the present invention Figure;
Attached drawing 2 is that water pipe structure water leakage detection protector is installed on water pipe head in specific embodiment of the present invention Cross section structure schematic diagram afterwards.
Specific implementation mode
Below in conjunction with the accompanying drawings to the specific implementation mode of water pipe head water leakage detection protector provided by the utility model It elaborates.
Present embodiment provides a kind of water pipe head water leakage detection protector, and attached drawing 1 is the utility model tool The cross section structure schematic diagram of water pipe head water leakage detection protector in body embodiment, attached drawing 2 are that the utility model is specifically real It applies water pipe structure water leakage detection protector in mode and is installed on the cross section structure schematic diagram after water pipe head.
As shown in Figure 1, 2, the water pipe head water leakage detection protector that present embodiment provides, including it is located at internal layer Sensor 11 and insulated enclosure layer 12 positioned at outer layer;The sensor 11, for being installed on 21 appearance of the water pipe head Face, with detect the water pipe head 21 whether leak;The insulated enclosure layer 12, for being coated on 21 appearance of the water pipe head Face so that the sensor 11 is located between the water pipe head 21 and the insulated enclosure layer 12.In this specific embodiment party In formula, the setting of sensor 11 may be implemented, to the real-time detection of 21 leak of water pipe head, to find seepy question in time, keep away Exempt to cause board larger loss.Meanwhile by coating one layer of insulated enclosure layer in the outer surface of the water pipe head 21 12 so that the sensor 11 is located between the outer surface of the water pipe head 21 and the insulated enclosure layer 12:On the one hand The sensor 11 can be effectively avoided to be interfered by outside environmental elements, the detection for improving the sensor 11 is sensitive Degree;On the other hand, when leak occurs for the water pipe head 21, such as because manufacturing process or other reasons cannot repair in time When, the insulated enclosure layer 12 for being coated on 21 outer surface of the water pipe head can also prevent leak sprawling, infiltration, to described Water pipe head 21 is protected, for board continue, safety operation provide guarantees, also for repair provide the time, keep away The generation of extensive water leakage situation is exempted from.
In order to improve the sensitivity to water pipe head leak water detdction, it is preferred that the sensor 11, including at least one set of inspection Electrode group is surveyed, the detecting electrode group includes two electrodes being arranged with predetermined interval.According to the conductive principle of water, When leak occurs for the water pipe head 21, water can cover two electrodes, lead to the generation of short circuit, cause inside the sensor 11 The change of electric signal, and then detect the generation of water leakage situation.It is furthermore preferred that the electrode is the axis along the water pipe head 21 To the strip shaped electric poles of setting.The setting of strip shaped electric poles can carry out monitored over time to the water leakage situation of the water pipe head 21.Its In, the material of the electrode, those skilled in the art can select according to actual needs, present embodiment to this not It is construed as limiting.In order to further increase the sensitivity of leak water detdction, it is preferred that at least one set of detecting electrode group includes multigroup mutually only Vertical detecting electrode group.By the way that multigroup mutually independent detecting electrode group is arranged, can increase to 21 surface of the water pipe head The area of leakage point detection, further improves the comprehensive and promptness of leak water detdction.
In order to allow, user is intuitive, quickly understands the water leakage situation of water pipe head, it is preferred that present embodiment provides Water pipe head water leakage detection protector further include the first alarm;First alarm connects the sensor 11, uses Short circuit occurs in judging whether there is detecting electrode group, if so, sending out alarm.Wherein, first alarm can be but not It is limited to buzzer or light emitting diode.
In order to allow user in time, accurately to know the specific location of leakage point, the efficiency of subsequent maintenance is improved, it is preferred that The water pipe head water-leakage protecting device that present embodiment provides further includes multiple second alarms;Multiple second alarms Device connects one to one with multigroup detecting electrode group;Every 1 second alarm is for judging whether corresponding detecting electrode group is sent out Raw short circuit, if so, sending out alarm.The position that user sends out according to alarm, it will be able to quick positioning leakage point position.Wherein, Second alarm can be but not limited to buzzer or light emitting diode.
Preferably, the water pipe head water-leakage protecting device that present embodiment provides further includes being set to the sensor An at least insulating supporting washer 13 between 11 and the insulated enclosure layer 12.It is furthermore preferred that an at least insulating supporting washer 13 Including multiple insulating supporting washers 13, and multiple insulating supporting washers 13 are along the axial direction distribution of the water pipe head 21.Using institute Stating insulating supporting washer 13 has the characteristics that flexibility, and the flow for effectively preventing 13 both sides of insulating supporting washer is logical so that is located at The leak of 13 side of insulating supporting washer has stronger electric conductivity, to further improve the sensor 11 for leak The sensitivity of detection.It is also possible to effectively avoid the water pipe head water-leakage protecting device with the water pipe head into When row installation, due to damage caused by bending or other factors.
Preferably, the insulated enclosure layer 12 is fabricated using flexible material.In this way, when the water pipe head 21 occurs When leak, the shrinkage of insulated enclosure layer 12 can be utilized to realize to the tightly package of the water pipe head, further improved The effect for preventing leak from spreading and permeating.It is more excellent in order to improve the service life of the water pipe head water leakage detection protector Choosing, the insulated enclosure layer 12 is fabricated using anticorrosive flexible material.
The water pipe head water leakage detection protector that present embodiment provides, including by sensor and insulated enclosure layer The inside and outside double-layer structure constituted realizes the real-time detection to the water pipe head leak by the sensor, close by insulating Sealing prevents leak from spreading and permeating, avoids extensive water leakage situation to having occurred and that the water pipe head of leak is protected Occur, provides safeguard for normal, the stable operation of board, also reserved the time for subsequent maintenance.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications Also it should be regarded as the scope of protection of the utility model.

Claims (9)

1. a kind of water pipe head water leakage detection protector, which is characterized in that include positioned at the sensor of internal layer and positioned at outer layer Insulated enclosure layer;The sensor, for being installed on the water pipe head outer surface, to detect whether the water pipe head leaks Water;The insulated enclosure layer, for being coated on the water pipe head outer surface so that the sensor is located in the water pipe and connects Between head and the insulated enclosure layer.
2. water pipe head water leakage detection protector according to claim 1, which is characterized in that the sensor, including At least one set of detecting electrode group, the detecting electrode group include two electrodes being arranged with predetermined interval.
3. water pipe head water leakage detection protector according to claim 2, which is characterized in that the electrode is along described The strip shaped electric poles of water pipe head being axially arranged.
4. water pipe head water leakage detection protector according to claim 3, which is characterized in that at least one set of detecting electrode Group includes multigroup mutually independent detecting electrode group.
5. water pipe head water leakage detection protector according to claim 4, which is characterized in that further include the first alarm Device;First alarm, connects the sensor, short circuit occurs for judging whether there is detecting electrode group, if so, sending out Alarm.
6. water pipe head water leakage detection protector according to claim 4, which is characterized in that further include multiple second reports Alert device;Multiple second alarms, connect one to one with multigroup detecting electrode group;Every 1 second alarm is for judgement pair Whether the detecting electrode group answered occurs short circuit, if so, sending out alarm.
7. water pipe head water leakage detection protector according to claim 4, which is characterized in that further include be set to it is described An at least insulating supporting washer between sensor and the insulated enclosure layer.
8. water pipe head water leakage detection protector according to claim 7, which is characterized in that an at least insulating support pad Circle includes multiple insulating supporting washers, and multiple insulating supporting washers are along the axial direction distribution of the water pipe head.
9. water pipe head water leakage detection protector according to claim 1, which is characterized in that the insulated enclosure layer is adopted It is fabricated with flexible material.
CN201820310205.3U 2018-03-06 2018-03-06 Water pipe head water leakage detection protector Expired - Fee Related CN207935768U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820310205.3U CN207935768U (en) 2018-03-06 2018-03-06 Water pipe head water leakage detection protector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820310205.3U CN207935768U (en) 2018-03-06 2018-03-06 Water pipe head water leakage detection protector

Publications (1)

Publication Number Publication Date
CN207935768U true CN207935768U (en) 2018-10-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820310205.3U Expired - Fee Related CN207935768U (en) 2018-03-06 2018-03-06 Water pipe head water leakage detection protector

Country Status (1)

Country Link
CN (1) CN207935768U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111415780A (en) * 2020-04-10 2020-07-14 中磁科技股份有限公司 Water-cooled cable water leakage protection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111415780A (en) * 2020-04-10 2020-07-14 中磁科技股份有限公司 Water-cooled cable water leakage protection device

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20181002