CN207929806U - A kind of school sired results dress of the mating focusing ring of target - Google Patents
A kind of school sired results dress of the mating focusing ring of target Download PDFInfo
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- CN207929806U CN207929806U CN201721873399.XU CN201721873399U CN207929806U CN 207929806 U CN207929806 U CN 207929806U CN 201721873399 U CN201721873399 U CN 201721873399U CN 207929806 U CN207929806 U CN 207929806U
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Abstract
The utility model discloses a kind of school sired results dress for the mating focusing ring of target for belonging to sputtering technology field, which takes punch-pin to coordinate the one mode that school is justified with cavity plate.The mating focusing ring of round target material processed is placed on the inside of cavity plate and is close to the interior die wall of cavity plate, and punch-pin moves downward under the action of Miniature oil press to be coordinated with cavity plate.It is the mating focusing ring of target in the gap of punch-pin and cavity plate, school circle is carried out to the mating focusing ring of target with uniform pressure when punch-pin coordinates with cavity plate.By the dwell time appropriate, achieve the purpose that school is justified.Female bottom is equipped with elastic device.When punch and matrix detaches after the completion of the circle of school, elastic device pushes ejector block to move upwards, and pushes the mating focusing ring of target to move upwards, reaches one and take the convenient purpose of target, the tooling is simple, convenient, can to avoid the mating focusing ring circularity of target it is poor caused by a series of problems.
Description
Technical field
The utility model is related to sputtering technology fields, and in particular to a kind of school sired results dress of the mating focusing ring of target.
Background technology
Since the 1990s, with the high speed development of electronic equipment market, the demand of high-purity sputtering target material is increasingly
Increase and target market scale is growing, the impetus of rapid growth is presented in the development of target industry.With domestic sputtering target
The technology maturation of material, especially domestic sputtering target material have higher superiority of effectiveness, and meet sputtering target material production domesticization
The market scale of policy guidance, China's sputtering target material further expands, and the approval of more clients, market are obtained in world market
Share further increases, and generally speaking, target industry has a extensive future.Therefore current position is arrived, the usage amount of target is very huge,
And the one kind of the mating focusing ring of target as target, dosage are also very huge.
And the mating focusing ring of target, during production and processing, the process being related to is various, and difficulty of processing is larger.It is rolling up
After sired results sequence is completed, because machining stress deformation is poor so as to cause the mating focusing ring circularity of target.The mating focusing ring of target
Shape and shape in use are inconsistent, if school is justified in advance not before installing and using, reach consistent with service condition
Under the premise of, then with regard to needing to be installed by external force during using installation, in the case where contacting external force, target
It will produce certain stress inside mating focusing ring.Therefore, can be caused if the mating focusing ring circularity of target is poor with
Lower Railway Project：
1. client installs and uses inconvenience：Since under the premise of non-school is justified, the shape of product and shape when installing and using
Cannot reach consistent, if client not by external force in the case of cannot smooth installation and debugging, install and use, make by external force
With being still inconvenient to dismantle when finishing, therefore numerous inconvenience is brought on installing and using to client.
2. in use, if circularity is poor, because causing inside target by external force, there are one in installation process
Fixed stress occurs stress release, target is caused to deform in use when temperature reaches 200-300 DEG C, to
The Pin of fixed product installation is caused to loosen, so that the installation of the mating focusing ring of target loosens, the mating focusing ring of target
Loosening may cause certain location contacts to lead to the problem of, and change to cause magnetic field, change the movement locus of titanium ion, from
And result in scrapping for product.
3. during the use of pure titanium sputtering as shown in Figure 1, cause to consume in use because circularity is poor
Part it is uneven, in titanium nitride sputtering process, lead to adsorb uneven being lost so as to cause the mating focusing ring of annular target
Balance.After disequilibrium, the magnetic field among annular target can change, and can influence the movement locus of titanium ion, can also make
The mating focusing ring internal stress of target is uneven, to the time of accelerated stress release, is loosened so as to cause installation, makes product report
It is useless.
Therefore, the circularity of the mating focusing ring of target plays very important effect during target use, and circularity is poor
Less serious case influences the service life of target, and severe one can directly result in scrapping for product.So one mating focusing ring of target of design
School sired results dress be very it is necessary to.
Utility model content
For the problems of the prior art, the utility model provides a kind of school sired results dress of the mating focusing ring of target, special
Sign is, including：The cavity plate of die shank, punch-pin, cavity plate and elastic device, wherein die shank, the punch-pin of nylon material and nylon material
The axis collinear of three；Die shank is installed on the top of punch-pin；Punch-pin plectane, the punch-pin school circle that punch-pin is overlapped by axis from top to down
Column and punch-pin centering column are integrally formed, and cavity plate is from outside to inside by the cavity plate outer hollow cylinder of axis collinear and cavity plate inner hollow cylinder
It is integrally formed, 4-6 elastic device mounting groove, and elasticity is provided with along the top surface circumferential direction homogeneous vertical of cavity plate inner hollow cylinder outer diameter
Device mounting groove does not penetrate the bottom surface of cavity plate inner hollow cylinder；
Elastic device is made of ejector block and brute spring, wherein the slot of the lower end of brute spring and elastic device mounting groove
Bottom is affixed, and the upper end of brute spring is equipped with the ejector block of nylon material；Ejector block is vertically arranged in elastic device mounting groove.
The punch-pin is located at the top of the cavity plate.
The bottom edge of the punch-pin centering column is rounded down, and the bottom edge of punch-pin school cylinder is rounded down.
The cavity plate outer hollow cylinder is higher by the equal length of the length and punch-pin school cylinder of cavity plate inner hollow cylinder；Punch-pin
The diameter of school cylinder is equal to the internal diameter of the mating focusing ring of target；The internal diameter of cavity plate outer hollow cylinder is equal to the mating focusing ring of target
Outer diameter；The internal diameter of cavity plate inner hollow cylinder is equal to the diameter of punch-pin centering column.
The shape of the ejector block is equal to elastic device mounting groove.
The ejector block height is 35-45mm, and in natural conditions, the top of ejector block is high for the elastic device after installation
Go out the top surface 10mm of cavity plate inner hollow cylinder.
The beneficial effects of the utility model are：
1, the quick school sired results sequence of the mating focusing ring of target is realized.
2, the tooling repeated multiple times can utilize, and after the completion of every target school circle, shape size, target state is consistent.
3, the tooling is easy to operate, efficiency is apparent, and the operation of worker's left-hand seat is easier, and it is mechanical school that process is justified more in school
Circle, avoids human error；
4, the tooling can produce special circumstances according to target, carry out a suitable adjustment to the dwell time, use
Flexibly, conveniently.
5, the tooling directly enhances the service life of the mating focusing ring of target, improves the matter of product with the shorter time
Amount.
Description of the drawings
Fig. 1 is the use environment schematic diagram of the mating focusing ring of target；
Fig. 2 is that the punch-pin in the mating focusing ring school sired results dress embodiment of the utility model target coordinates school bowlder with cavity plate
Schematic diagram, black solid portion is the mating focusing ring of target in figure；
Fig. 3 is after the completion of the utility model embodiment lieutenant colonel justifies, and punch-pin detaches the schematic diagram for being with cavity plate, and black is real in figure
Body portion is the mating focusing ring of target；
Fig. 4 is the diagrammatic cross-section of the utility model embodiment convex mould；
Fig. 5 is the diagrammatic cross-section of cavity plate in the utility model embodiment；
Fig. 6 is the schematic top plan view of cavity plate in the utility model embodiment；
Fig. 7 is the schematic side view of elastic device in the utility model embodiment.
In figure：1- die shanks, 2- punch-pin, the mating focusing ring of 3- targets, 4- cavity plates, 5- elastic devices, 201- punch-pin centering column,
202- punch-pin school cylinder, 203- punch-pin plectane, 401- cavity plates outer hollow cylinder, 402- cavity plates inner hollow cylinder, 403- elasticity dress
Set mounting groove, 501- ejector blocks, 502- brute springs.
Specific implementation mode
Specific embodiment of the utility model is described further below in conjunction with the accompanying drawings：
Punch-pin 2 as shown in Figures 2 to 4 is from top to down by punch-pin plectane 203, punch-pin school cylinder 202 and punch-pin centering column
201 are integrally formed, and the axis of punch-pin plectane 203, punch-pin school cylinder 202 and punch-pin centering column 201 overlaps；Justify in its convex mould school
The diameter of column 202 is equal to the internal diameter of the mating focusing ring of target 3；The bottom edge of punch-pin centering column 201 is rounded down, punch-pin school circle
The bottom edge of column 202 is rounded down.
If Fig. 2, Fig. 3, Fig. 5 and cavity plate shown in fig. 64 are from outside to inside by hollow in cavity plate outer hollow cylinder 401 and cavity plate
Cylinder 402 is integrally formed, and the axis collinear of cavity plate outer hollow cylinder 401 and cavity plate inner hollow cylinder 402, bottom surface are coplanar, recessed
Mould outer hollow cylinder 401 is higher by the equal length of the length and punch-pin school cylinder 202 of cavity plate inner hollow cylinder 402；Along cavity plate
The top surface circumferential direction homogeneous vertical of 402 outer diameter of hollow cylinder is provided with 4-6 elastic device mounting groove 403, and elastic device mounting groove
403 do not penetrate the bottom surface of cavity plate inner hollow cylinder 402, to install elastic device 5；The internal diameter of cavity plate outer hollow cylinder 401
Equal to the outer diameter of the mating focusing ring of target 3；The internal diameter of cavity plate inner hollow cylinder 402 is equal to the diameter of punch-pin centering column 201, cavity plate
Boring in inner hollow cylinder 402 can save material on the basis of ensureing the intensity of cavity plate, but the boring
Main function is to exclude air, and specifically when punch-pin cooperation moves downward, the boring is for excluding punch-pin 2 and cavity plate
Air between 4.
If Fig. 2, Fig. 3 and Fig. 7 elastic device 5 is made of ejector block 501 and brute spring 502, wherein and brute spring 502
Lower end and the slot bottom of elastic device mounting groove 403 it is affixed, the upper end of brute spring 502 is equipped with shape and is installed with elastic device
The ejector block 501 that slot 403 matches and height is 35-45mm；Ejector block 501 is vertically arranged in elastic device mounting groove 403, peace
In natural conditions, the top of ejector block 501 is higher by the top surface of cavity plate inner hollow cylinder 402 about to elastic device after dress
10mm, to take the mating focusing ring of target 3 in the course of work；The presence of ejector block 501 avoids spring and is in direct contact target
Mating focusing ring, therefore avoid the scuffing to the mating focusing ring of target.
A kind of school sired results dress of the mating focusing ring of target as shown in Figures 2 and 3, the tooling is by die shank 1, punch-pin 2, cavity plate
4 and elastic device 5 form, wherein die shank 1 is installed on the top of punch-pin 2, the axis three of the axis and punch-pin 2 and cavity plate 4 of die shank 1
Person is conllinear, and punch-pin 2 is located at the top of the cavity plate 4；Punch-pin 2, cavity plate 4 and the material of ejector block 501 are nylon material, are used
There are one nylon materials, and chief reason is：There is annular knurl processing on the surface of the mating focusing ring of the target 3, is splashed in titanium nitride class target
Penetrate during use, the mating focusing ring of the target 3 in addition to will titanium atom ionization is outer also acts as an effect adsorbed, and annular knurl
Processing can reinforce this adsorption effect, therefore in the course of work that this school sired results fills embodiment, can not damage surface detail；
School circle power is provided by hydraulic press.
This school sired results dress embodiment during the work time, first will height be 284.6 ± 0.1mm, thickness be 3.18 ±
0.25mm, outer diameter areThe mating focusing ring of non-school circle target 3 be put among cavity plate 4, then start oil pressure
Machine makes punch-pin 2 move downward, and is slowly coordinated with cavity plate 4, and under the action of hydraulic press, punch-pin 2 moves downward the elasticity of compression
Device 5 moves to top surface level of 501 upper surface of ejector block with cavity plate inner hollow cylinder 402, that is, elastic device 5 is in
When compressive state, the ejector block 501 in elastic device serves as the part in cavity plate 4, and the mating focusing ring of target 3 is located at this time
In the annulus that punch-pin 2 and cavity plate 4 are surrounded；Punch-pin 2, cavity plate 4 and 501 three parts of ejector block cooperate the dwell time
10min completes school circle；
When being detached after the completion of the circle of school, punch-pin 2 follows hydraulic press to move up together, and is gradually disengaged with cavity plate 4,
It detaches elastic device 5 simultaneously and springs back, push up the mating focusing ring of target 3；Until elastic device 5 restores to the original state, at this time
The mating focusing ring of target is popped up into certain altitude outward, directly takes out the mating focusing ring 3 of target by hand, completes primary complete school
Circular jet journey；
In the school sired results dress during the work time, the punch-pin plectane 203 in school boss mould 2 other than participating in school sired results and making,
Also play a part of positioning step, under the action of hydraulic press, punch-pin 2 moves downward, when being moved downwardly to certain distance
It waits, punch-pin 2 contacts each elastic device 5 and the compression downwards simultaneously by each elastic device 5, when the ejector block 501 in each elastic device 5
Upper surface be compressed to when reach level with the top of cavity plate inner hollow cylinder 402,203 bottom of punch-pin plectane contacts cavity plate
4 outer hollow cylinder, 401 top, completes positioning, punch-pin 2 no longer moves downward.
Claims (6)
1. a kind of school sired results dress of mating focusing ring of target, which is characterized in that including：Die shank (1), punch-pin (2), cavity plate (4) and
The axis collinear of cavity plate (4) three of elastic device (5), wherein die shank (1), the punch-pin (2) of nylon material and nylon material；Mould
Handle (1) is installed on the top of punch-pin (2)；Punch-pin plectane (203), the punch-pin school cylinder that punch-pin (2) is overlapped by axis from top to down
(202) it is integrally formed with punch-pin centering column (201), cavity plate (4) is from outside to inside by the cavity plate outer hollow cylinder (401) of axis collinear
It is integrally formed with cavity plate inner hollow cylinder (402), the top surface circumferential direction homogeneous vertical along cavity plate inner hollow cylinder (402) outer diameter is provided with
4-6 elastic device mounting groove (403), and elastic device mounting groove (403) does not penetrate the bottom of cavity plate inner hollow cylinder (402)
Face；
Elastic device (5) is made of ejector block (501) and brute spring (502), wherein the lower end of brute spring (502) and elasticity
The slot bottom of device mounting groove (403) is affixed, and the upper end of brute spring (502) is equipped with the ejector block (501) of nylon material；Push piece
Block (501) is vertically arranged in elastic device mounting groove (403).
2. a kind of school sired results dress of the mating focusing ring of target according to claim 1, which is characterized in that the punch-pin (2)
Top positioned at the cavity plate (4).
3. a kind of school sired results dress of the mating focusing ring of target according to claim 1, which is characterized in that the punch-pin centering
The bottom edge of column (201) is rounded down, and the bottom edge of punch-pin school cylinder (202) is rounded down.
4. a kind of school sired results dress of the mating focusing ring of target according to claim 1, which is characterized in that the cavity plate outer space
Heart cylinder (401) is higher by the equal length of the length and punch-pin school cylinder (202) of cavity plate inner hollow cylinder (402)；Justify in punch-pin school
The diameter of column (202) is equal to the internal diameter of the mating focusing ring of target (3)；The internal diameter of cavity plate outer hollow cylinder (401) is matched equal to target
Cover the outer diameter of focusing ring (3)；The internal diameter of cavity plate inner hollow cylinder (402) is equal to the diameter of punch-pin centering column (201).
5. a kind of school sired results dress of the mating focusing ring of target according to claim 1, which is characterized in that the ejector block
(501) shape is equal to elastic device mounting groove (403).
6. a kind of school sired results dress of the mating focusing ring of target according to claim 1, which is characterized in that the ejector block
(501) highly it is 35-45mm, in natural conditions, the top of ejector block (501) is higher by recessed the elastic device (5) after installation
The top surface 10mm of mould inner hollow cylinder (402).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721873399.XU CN207929806U (en) | 2017-12-28 | 2017-12-28 | A kind of school sired results dress of the mating focusing ring of target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721873399.XU CN207929806U (en) | 2017-12-28 | 2017-12-28 | A kind of school sired results dress of the mating focusing ring of target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207929806U true CN207929806U (en) | 2018-10-02 |
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ID=63647655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721873399.XU Active CN207929806U (en) | 2017-12-28 | 2017-12-28 | A kind of school sired results dress of the mating focusing ring of target |
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| CN (1) | CN207929806U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111843383A (en) * | 2020-07-16 | 2020-10-30 | 嘉善迈德机械有限公司 | Manufacturing process of self-lubricating bearing |
| CN113351811A (en) * | 2021-05-12 | 2021-09-07 | 苏州市东盛锻造有限公司 | Annular forging processing method based on numerical control automatic hydraulic ring rolling mill |
-
2017
- 2017-12-28 CN CN201721873399.XU patent/CN207929806U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111843383A (en) * | 2020-07-16 | 2020-10-30 | 嘉善迈德机械有限公司 | Manufacturing process of self-lubricating bearing |
| CN111843383B (en) * | 2020-07-16 | 2022-05-17 | 嘉善迈德机械有限公司 | Manufacturing process of self-lubricating bearing |
| CN113351811A (en) * | 2021-05-12 | 2021-09-07 | 苏州市东盛锻造有限公司 | Annular forging processing method based on numerical control automatic hydraulic ring rolling mill |
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