CN207910228U - The lens of excimer laser and excimer laser fix carrier - Google Patents

Abstract

The application discloses a kind of lens fixation carrier of excimer laser comprising internal member, package assembly, the first sealing ring and the second sealing ring；Wherein, the inner wall of the package assembly has positioning convex platform, the internal member is set within the package assembly, the space for accommodating lens is formed between the head end of the internal member and the positioning convex platform, first sealing ring is for being sealingly disposed between the one side of the lens and the head end of the internal member, second sealing ring is for being sealingly disposed between the another side of the lens and the positioning convex platform, the internal member is used to apply pressing force to first sealing ring, with the fixation lens on the positioning convex platform.A kind of excimer laser is also disclosed in the application.Said program can solve the problems, such as that current lens fix carrier and are easy to scratch lens during fastening lens.

Description

The lens of excimer laser and excimer laser fix carrier

Technical field

This application involves the saturating of laser equipment technical field more particularly to a kind of excimer laser and excimer laser Mirror fixes carrier.

Background technology

Excimer laser is pulsed gas laser of the wavelength in ultraviolet band.In recent years, unremitting brill in all respects It grinds under effort, excimer laser is rapidly developed.Currently, the power level for the excimer laser released in the market is not Disconnected to improve, this makes the scope of application of excimer laser also expand to the necks such as laser medicine, laser processing from laboratory field Domain.

Quasi-molecule laser annealing is LTPS (Low Temperature Poly-silicon, low-temperature polysilicon silicon technology) technique In an indispensable procedure, which is completed by excimer laser.In the process safeguarded to excimer laser In, user needs to maintain the lens of excimer laser.Maintenance operation needs to dismantle lens to realize.

The lens of excimer laser are fixed on lens and fix on carrier, and it includes that compression ring (is usually that lens, which fix carrier, Copper ring) and cylinder, compression ring and cylinder screw cooperation, during mounted lens, user is usually screwed by optical wrench Compression ring, and then lens are pressed on the inner wall boss of cylinder.During screwing compression ring, compression ring can be compressed gradually On the surface of lens, the rotation of compression ring can scratch lens, and then be easier to cause the damage of unrepairable.As it can be seen that current Lens fix carrier and are easier to lens damage in lens maintain operating process.

Utility model content

The application provides a kind of lens fixation carrier of excimer laser, and carrier is fixed tight to solve current lens Gu the problem of being easy to scratch lens during lens.

To solve the above-mentioned problems, the embodiment of the present application uses following technical proposals：

The lens of excimer laser fix carrier, including internal member, package assembly, the first sealing ring and the second sealing ring； Wherein, there is the inner wall of the package assembly positioning convex platform, the internal member to be set within the package assembly, the internal member The space for accommodating lens is formed between head end and the positioning convex platform, first sealing ring is for being sealingly disposed in the lens One side and the head end of the internal member between, second sealing ring is used to be sealingly disposed in the another sides of the lens Between the positioning convex platform, the internal member be used for first sealing ring apply pressing force, with the fixation lens in On the positioning convex platform.

Preferably, said lens are fixed in carrier, and the package assembly, the internal member are stretched in outside the tail end of the internal member Tail end for receiving driving force to compress the lens, the driving force is applied by the gripping element of the excimer laser Add.

Preferably, said lens are fixed in carrier, and the first positive stop lug boss, the package assembly is arranged in the tail end of the internal member Tail end be provided with the second positive stop lug boss, first positive stop lug boss can be limited with second positive stop lug boss to be coordinated.

Preferably, said lens are fixed in carrier, and the first positive stop lug boss is from the edge of the tail end of the internal member to separate The direction at the center of the internal member extends, and second positive stop lug boss is consistent with the extending direction of the first positive stop lug boss.

Preferably, said lens are fixed in carrier, and the head end of the internal member is provided with the first locating slot, and described first is close Seal is located in first locating slot.

Preferably, said lens are fixed in carrier, and the positioning convex platform is provided with the second locating slot, second sealing ring It is located in second locating slot.

Preferably, said lens are fixed in carrier, and the head end of the package assembly is provided with third sealing ring, and the third is close Seal is used to be tightly connected with the resonant cavity of the excimer laser.

Preferably, said lens are fixed in carrier, and the head end of the package assembly is provided with third locating slot, and the third is close Seal is located in the third locating slot.

Preferably, said lens are fixed in carrier, the circumferentially positioned cooperation of the internal member and the package assembly in the two.

Excimer laser, including resonant cavity, gripping element and lens fix carrier, wherein the lens fix carrier The end of the resonant cavity is fixed on by the gripping element.

Above-mentioned at least one technical solution that the application uses can reach following advantageous effect：

Lens disclosed in the present application fix carrier during fixed lens, operating personnel successively by the second sealing ring and Lens are placed on positioning convex platform, and then internal member is cooperated in the inner cavity of package assembly, so that internal member passes through first Sealing ring applies fastening force to the lens placed in the cavities, and lens are pressed on by the sealing of the second sealing ring on positioning convex platform. First sealing ring and the second sealing ring play the role of that lens seals is made to be installed to lens fixation carrier.Due to internal member and thoroughly The first sealing ring and the second sealing ring are respectively arranged between mirror and positioning convex platform and lens, the two sealing rings can also play isolation Effect, avoid internal member and positioning convex platform from being in direct contact lens, be also just avoided that secure component during lens are installed Damage to lens.It is being fastened thoroughly as it can be seen that lens fixation carrier disclosed in the present application can solve current lens fixation carrier The problem of being easy to scratch lens during mirror.

Description of the drawings

Attached drawing described herein is used for providing further understanding of the present application, constitutes part of this application, this Shen Illustrative embodiments and their description please do not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：

Fig. 1 is the structural schematic diagram that lens fix carrier disclosed in the embodiment of the present application；

Fig. 2 is the structural schematic diagram of package assembly；

Fig. 3 is the upward view of Fig. 2；

Fig. 4 is the structural schematic diagram of internal member；

Fig. 5 is the vertical view of Fig. 4；

Fig. 6 is the structural schematic diagram of excimer laser disclosed in the embodiment of the present application.

Reference sign：

100- internal members, the first positive stop lug boss of 110-, 200- package assemblies, 210- positioning convex platforms, the second positive stop lug boss of 220-, The first sealing rings of 300-, the second sealing rings of 400-, 500- lens, 600- resonant cavities, 700- thirds sealing ring, a- lens, which are fixed, to be carried Tool.

Specific implementation mode

To keep the purpose, technical scheme and advantage of the application clearer, below in conjunction with the application specific embodiment and Technical scheme is clearly and completely described in corresponding attached drawing.Obviously, described embodiment is only the application one Section Example, instead of all the embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not doing Go out the every other embodiment obtained under the premise of creative work, shall fall in the protection scope of this application.

Below in conjunction with attached drawing, the technical solution that each embodiment of the application provides is described in detail.

- 6 are please referred to Fig.1, the embodiment of the present application discloses a kind of lens fixation carrier of excimer laser, and disclosed is saturating It includes internal member 100, package assembly 200, the first sealing ring 300 and the second sealing ring 400 that mirror, which fixes carrier,.

Internal member 100 and 200 both ends of package assembly are open end, this wears convenient for the light of excimer laser from lens It crosses.Specifically, internal member 100 and package assembly 200 are usually cylinder-like structure.In the embodiment of the present application, internal member 100 is set in Within package assembly 200.

It is usually annular convex platform that the inner wall of package assembly 200, which has positioning convex platform 210, the positioning convex platform 210,.Annular convex platform can To be an integral molding structure with package assembly 200, such as package assembly 200 is by integrally casting shaping or excision forming, and then outside Positioning convex platform 210 is formed on the inner wall of external member 200.

During assembling, the head end of internal member 100 stretches into the inner cavity of package assembly 200, the head end of internal member 100 with The space for accommodating lens 500 is formed between positioning convex platform 210.

First sealing ring 300 is for being sealingly disposed between the one side of lens 500 and the head end of internal member 100.Second Sealing ring 400 is for being sealingly disposed between the another side of lens 500 and positioning convex platform 210.Internal member 100 is used for first Sealing ring 300 applies pressure, to fix lens 500 on positioning convex platform 210, that is, makes lens 500 pass through the second sealing ring 400 It is positioned on positioning convex platform 210.

It should be noted that in the embodiment of the present application, internal member 100 and package assembly 200 all have head end and tail end.Inner sleeve The head end of part 100 refers to that internal member 100 stretches into the inner cavity of package assembly 200, and the one end contacted with the first sealing ring 300, interior The tail end of external member 100 is with the head end of internal member 100 respectively as two ends of internal member 100.The head end of package assembly 200 with it is interior The head end of external member 100 is located at the two and is formed by whole the same end, the tail end of package assembly 200 and the head end of package assembly 200 point Not as two ends of package assembly 200.

Lens disclosed in the embodiment of the present application fix carrier during fixed lens 500, and operating personnel are successively by the Two sealing rings 400 and lens 500 are placed on positioning convex platform 210, then being cooperated to internal member 100 in package assembly 200 In chamber, so that internal member 100 applies fastening force, lens by the first sealing ring 300 to the lens 500 placed in the cavities 500 are pressed on by the sealing of the second sealing ring 400 on positioning convex platform 210.In the embodiment of the present application, the first sealing ring 300 and Two sealing rings 400 play the role of that lens 500 is made to be sealingly mounted to lens fixation carrier.Due to internal member 100 and lens 500 And the first sealing ring 300 and the second sealing ring 400 are respectively arranged between positioning convex platform 210 and lens 500, the two sealing ring energy Play the role of isolation, internal member 100 and positioning convex platform 210 is avoided to be in direct contact lens 500, is also just avoided that in lens 500 Damage of the secure component to lens 500 during installation.It can be solved as it can be seen that lens disclosed in the embodiment of the present application fix carrier Certainly current lens fix the problem of carrier is easy to scratch lens during fastening lens 500.

Lens fixation carrier disclosed in the embodiment of the present application can effectively prevent lens and be scratched, and maintenance is avoided to fail, moreover it is possible to Avoid the cost problem that lens damages are brought.

As described above, internal member 100 and the cooperation of package assembly 200 can realize the fixation to lens 500, specifically, By screw-thread fit between internal member 100 and package assembly 200, internal member 100 passes through the gradual precession package assembly of screw-thread fit 200 It is interior, and then lens 500 are compressed by the first sealing ring 300.

Thread fiting mode so that operating personnel need to implement by optical wrench during lens 500 assemble Fastening screws.Optical wrench is easier to disconnect with internal member 100, and then may bump to the surface of lens 500, finally still Lens 500 are likely to result in be scratched.Screw-thread fit is easier to affected by vibrations and unclamps simultaneously, and then causes lens solid Fixed failure, and then can cause the resonant cavity of excimer laser that ventilatory problem occurs, it eventually leads to a large amount of gas and is wasted.Separately Outside, it carries out screwing lens 500 easy to pollute by optical wrench, increases maintenance difficulty.

It is interior in preferred scheme in order to solve internal member 100 and package assembly 200 by the problems of screw-thread fit Package assembly 200 is stretched in outside the tail end of external member 100, the tail end of internal member 100 is used to receive driving force to compress lens 500, the drive Power is applied by the gripping element of excimer laser.During assembling, excimer laser is provided with gripping element, folder Holder part applies driving force by compressing internal member 100, and then to internal member 100, and the driving force applied can drive inner sleeve Lens 500 are fixed by part 100 by the first sealing ring 300.As shown in fig. 6, hollow arrow shown in Fig. 6 is to drive The direction of power, the reference numeral a in Fig. 6 are that lens fix carrier.Certainly, the tail end of internal member 100 can be located at package assembly 200 Inner cavity in, as long as can ensure gripping element can to internal member 100 apply driving force structure can reach above-mentioned mesh 's.

Under the action of gripping element, internal member 100 is directly inserted into package assembly 200, and then in the effect of driving force The first sealing ring 300 of lower compression.In order to improve the stability that internal member 100 is assembled with package assembly 200, it is preferred that internal member 100 It can be in the circumferentially positioned cooperation of the two with package assembly 200.For example, internal member 100 passes through spline fitted with package assembly 200.

Referring again to Fig. 5, in a kind of more preferably scheme, the tail end of internal member 100 can be provided with the first limit Boss 110, the first positive stop lug boss 110 can be limited with the tail end of package assembly 200 to be coordinated, and in such cases, driving force can be applied It is added on the first positive stop lug boss 110, internal member 100 can compress the first sealing ring 300, and at the same time, the first positive stop lug boss 110 passes through Limit matching relationship between package assembly 200 compresses package assembly 200, and then can be so that entire lens are fixed carrier and are compacted In the end of the resonant cavity 600 of excimer laser, to complete the assembling with resonant cavity.The preferred embodiment can by for Mounted lens fixes the gripping element of carrier and resonant cavity, to achieve the purpose that fix lens 500 by internal member 100.

In order to improve limit fiting effect, the tail end of package assembly 200 can be provided with the second positive stop lug boss 220, the first limit Position boss 110 can be limited with the second positive stop lug boss 220 to be coordinated.It should be noted that the first positive stop lug boss 110 and the second limit convex The fitting of platform 220 does not interfere with internal member 100 and is compressed to the sealing of the first sealing ring 300.

In order to avoid the first positive stop lug boss 110 and the second positive stop lug boss 220 influence the transmission area of lens 500, it is preferred that First positive stop lug boss 110 can extend from the edge of the tail end of internal member 100 to the direction at the center far from internal member 100.The Two positive stop lug boss 220 are consistent with the extending direction of the first positive stop lug boss 110.Under such structure, the first positive stop lug boss 110 and second Positive stop lug boss 220 extends outwardly, and can avoid blocking to lens 500.

In order to enable the assembly of the first sealing ring 300 is more stablized, the first positioning can be arranged in the head end of internal member 100 Slot, the first sealing ring 300 are located in the first locating slot.Specifically, the shape of the first locating slot can be with the first sealing ring 300 Shape be adapted.

Similarly, in order to enable the assembly of the second sealing ring 400 is more stablized, it is fixed that positioning convex platform 210 can be provided with second Position slot, the second sealing ring 400 are located in the second locating slot.Specifically, the shape of the second locating slot can be with the second sealing ring 400 shape is adapted.

Lens disclosed in the embodiment of the present application fix the end part seal of carrier needs and the resonant cavity 600 of excimer laser Cooperation.Based on this, lens disclosed in the embodiment of the present application are fixed in carrier, and it is close that the head end of package assembly 200 can be provided with third Seal 700.Third sealing ring 700 is used to be tightly connected with the resonant cavity 600 of excimer laser.A kind of specific embodiment In, the end of resonant cavity 600 is tubular structure, and the inner wall of tubular structure is provided with seal boss, and third sealing ring 700 is in lens It seals and coordinates with seal boss under the compression of fixed carrier, to realize the sealing of resonant cavity 600, gas is avoided to leak.

Similarly, in order to enable the assembly of third sealing ring 700 is more stablized, the head end of package assembly 200 can be provided with the Three locating slots, third sealing ring 700 are located in third locating slot.Specifically, the shape of third locating slot can be close with third The shape of seal 700 is adapted.

In the embodiment of the present application, the first sealing ring 300, the second sealing ring 400 and third sealing ring 700 can be rubber Circle.

Carrier is fixed based on lens disclosed in the embodiment of the present application, referring to FIG. 6, a kind of standard is also disclosed in the embodiment of the present application Molecular laser, disclosed excimer laser include that resonant cavity 600, gripping element and lens fix carrier a, and lens are fixed Carrier a is fixed on the end of resonant cavity 600 by gripping element.

Specifically, gripping element and lens fixation carrier a all can be two, two lens, which fix carrier a, can lead to It crosses gripping element and is fastened to the both ends of resonant cavity 600 respectively, and then achieve the purpose that assembling.

Herein, only emphasis describes the difference with other preferred embodiments, each preferred embodiment to each preferred embodiment It as long as not conflicting, can arbitrarily combine, embodiment is formed by after combination also within scope disclosed in this specification, is examined It is succinct to consider text, is individually described with regard to being no longer formed by embodiment to combination herein.

Above is only an example of the present application, it is not intended to limit this application.For those skilled in the art For, the application can have various modifications and variations.It is all within spirit herein and principle made by any modification, equivalent Replace, improve etc., it should be included within the scope of claims hereof.

Claims (10)

1. the lens of excimer laser fix carrier, which is characterized in that including internal member, package assembly, the first sealing ring and the Two sealing rings；Wherein, there is the inner wall of the package assembly positioning convex platform, the internal member to be set within the package assembly, institute The space for being formed between the head end of internal member and the positioning convex platform and accommodating lens is stated, first sealing ring is used for sealed set Between the one side and the head end of the internal member of the lens, second sealing ring is for being sealingly disposed in the lens Another side and the positioning convex platform between, the internal member be used for first sealing ring apply pressing force, with fixation The lens are on the positioning convex platform.

2. lens according to claim 1 fix carrier, which is characterized in that stretched in outside the tail end of the internal member described outer External member, the tail end of the internal member is for receiving driving force to compress the lens, and the driving force is by the excimer laser The gripping element of device applies.

3. lens according to claim 1 fix carrier, which is characterized in that the first limit of tail end setting of the internal member The tail end of boss, the package assembly is provided with the second positive stop lug boss, and first positive stop lug boss can be with second positive stop lug boss Limit cooperation.

4. lens according to claim 3 fix carrier, which is characterized in that tail of first positive stop lug boss from the internal member The edge at end extends to the direction at the center far from the internal member, second positive stop lug boss and first positive stop lug boss Extending direction is consistent.

5. lens according to claim 1 fix carrier, which is characterized in that it is fixed that the head end of the internal member is provided with first Position slot, first sealing ring are located in first locating slot.

6. lens according to claim 1 fix carrier, which is characterized in that the positioning convex platform is provided with the second positioning Slot, second sealing ring are located in second locating slot.

7. lens according to claim 1 fix carrier, which is characterized in that it is close that the head end of the package assembly is provided with third Seal, the third sealing ring are used to be tightly connected with the resonant cavity of the excimer laser.

8. lens according to claim 7 fix carrier, which is characterized in that it is fixed that the head end of the package assembly is provided with third Position slot, the third sealing ring are located in the third locating slot.

9. lens according to any one of claim 1-8 fix carrier, which is characterized in that the internal member with it is described outer Circumferentially positioned cooperation of the external member in the two.

10. excimer laser, which is characterized in that including resonant cavity, gripping element and as described in any one of claim 1-9 Lens fix carrier, wherein the lens fix the end that carrier is fixed on the resonant cavity by the gripping element.